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FI20095903A0 - Mikromekaaninen kulmanopeusanturi - Google Patents

Mikromekaaninen kulmanopeusanturi

Info

Publication number
FI20095903A0
FI20095903A0 FI20095903A FI20095903A FI20095903A0 FI 20095903 A0 FI20095903 A0 FI 20095903A0 FI 20095903 A FI20095903 A FI 20095903A FI 20095903 A FI20095903 A FI 20095903A FI 20095903 A0 FI20095903 A0 FI 20095903A0
Authority
FI
Finland
Prior art keywords
angle sensor
micromechanical
micromechanical angle
sensor
angle
Prior art date
Application number
FI20095903A
Other languages
English (en)
Swedish (sv)
Other versions
FI122232B (fi
FI20095903L (fi
Inventor
Anssi Blomqvist
Original Assignee
Vti Technologies Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vti Technologies Oy filed Critical Vti Technologies Oy
Publication of FI20095903A0 publication Critical patent/FI20095903A0/fi
Priority to FI20095903A priority Critical patent/FI122232B/fi
Priority to JP2011552480A priority patent/JP5670356B2/ja
Priority to PCT/FI2010/050159 priority patent/WO2010100333A1/en
Priority to CN201080015565.7A priority patent/CN102369414B/zh
Priority to JP2011552481A priority patent/JP5670357B2/ja
Priority to KR1020117022831A priority patent/KR101676264B1/ko
Priority to KR1020117022849A priority patent/KR101673887B1/ko
Priority to EP10748387.7A priority patent/EP2404138B1/en
Priority to CN201080014785.8A priority patent/CN102365524B/zh
Priority to EP10748388.5A priority patent/EP2404139B1/en
Priority to PCT/FI2010/050160 priority patent/WO2010100334A1/en
Priority to US12/715,803 priority patent/US8997565B2/en
Priority to TW099106035A priority patent/TWI481872B/zh
Priority to TW099106031A priority patent/TWI481817B/zh
Priority to US12/715,767 priority patent/US8904865B2/en
Publication of FI20095903L publication Critical patent/FI20095903L/fi
Priority to IL214926A priority patent/IL214926A/en
Priority to IL214925A priority patent/IL214925A0/en
Application granted granted Critical
Publication of FI122232B publication Critical patent/FI122232B/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C21/00—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00
    • G01C21/10—Navigation; Navigational instruments not provided for in groups G01C1/00 - G01C19/00 by using measurements of speed or acceleration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/02—Devices characterised by the use of mechanical means
    • G01P3/14—Devices characterised by the use of mechanical means by exciting one or more mechanical resonance systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Automation & Control Theory (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Gyroscopes (AREA)
FI20095903A 2009-03-02 2009-09-02 Mikromekaaninen kulmanopeusanturi FI122232B (fi)

Priority Applications (17)

Application Number Priority Date Filing Date Title
FI20095903A FI122232B (fi) 2009-03-02 2009-09-02 Mikromekaaninen kulmanopeusanturi
CN201080014785.8A CN102365524B (zh) 2009-03-02 2010-03-01 微机械角速度传感器
PCT/FI2010/050160 WO2010100334A1 (en) 2009-03-02 2010-03-01 Vibrating micro-mechanical sensor of angular velocity
CN201080015565.7A CN102369414B (zh) 2009-03-02 2010-03-01 振动型微机械角速度传感器
JP2011552481A JP5670357B2 (ja) 2009-03-02 2010-03-01 角速度の振動微小機械センサ
KR1020117022831A KR101676264B1 (ko) 2009-03-02 2010-03-01 마이크로 기계 각속도 센서
KR1020117022849A KR101673887B1 (ko) 2009-03-02 2010-03-01 진동형 마이크로-기계식 각속도 센서
EP10748387.7A EP2404138B1 (en) 2009-03-02 2010-03-01 Micro-mechanical sensor of angular velocity
JP2011552480A JP5670356B2 (ja) 2009-03-02 2010-03-01 角速度の微小機械センサ
EP10748388.5A EP2404139B1 (en) 2009-03-02 2010-03-01 Vibrating micro-mechanical sensor of angular velocity
PCT/FI2010/050159 WO2010100333A1 (en) 2009-03-02 2010-03-01 Micro-mechanical sensor of angular velocity
US12/715,803 US8997565B2 (en) 2009-03-02 2010-03-02 Micro-mechanical sensor of angular velocity
TW099106035A TWI481872B (zh) 2009-03-02 2010-03-02 微機械振動式角速度感測器
TW099106031A TWI481817B (zh) 2009-03-02 2010-03-02 微機械角速度感測器
US12/715,767 US8904865B2 (en) 2009-03-02 2010-03-02 Vibrating micro-mechanical sensor of angular velocity
IL214926A IL214926A (en) 2009-03-02 2011-09-01 Micro mechanical vibration angular velocity sensor
IL214925A IL214925A0 (en) 2009-03-02 2011-09-01 Micro-mechanical resonator

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
FI20095201 2009-03-02
FI20095201A FI20095201A0 (fi) 2009-03-02 2009-03-02 Värähtelevä mikromekaaninen kulmanopeusanturi
FI20095903 2009-09-02
FI20095903A FI122232B (fi) 2009-03-02 2009-09-02 Mikromekaaninen kulmanopeusanturi

Publications (3)

Publication Number Publication Date
FI20095903A0 true FI20095903A0 (fi) 2009-09-02
FI20095903L FI20095903L (fi) 2010-09-03
FI122232B FI122232B (fi) 2011-10-31

Family

ID=40510201

Family Applications (2)

Application Number Title Priority Date Filing Date
FI20095201A FI20095201A0 (fi) 2009-03-02 2009-03-02 Värähtelevä mikromekaaninen kulmanopeusanturi
FI20095903A FI122232B (fi) 2009-03-02 2009-09-02 Mikromekaaninen kulmanopeusanturi

Family Applications Before (1)

Application Number Title Priority Date Filing Date
FI20095201A FI20095201A0 (fi) 2009-03-02 2009-03-02 Värähtelevä mikromekaaninen kulmanopeusanturi

Country Status (9)

Country Link
US (2) US8904865B2 (fi)
EP (2) EP2404138B1 (fi)
JP (2) JP5670356B2 (fi)
KR (2) KR101673887B1 (fi)
CN (2) CN102369414B (fi)
FI (2) FI20095201A0 (fi)
IL (2) IL214925A0 (fi)
TW (2) TWI481817B (fi)
WO (2) WO2010100334A1 (fi)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112485468A (zh) * 2019-08-22 2021-03-12 恩智浦美国有限公司 基于频率调制的多轴感测装置及其操作方法

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI119895B (fi) * 2007-10-05 2009-04-30 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
FI20095201A0 (fi) * 2009-03-02 2009-03-02 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
DE102010029630A1 (de) * 2010-06-02 2011-12-08 Robert Bosch Gmbh Drehratensensor
FI124020B (fi) * 2011-03-04 2014-02-14 Murata Electronics Oy Jousirakenne, resonaattori, resonaattorimatriisi ja anturi
US8833162B2 (en) 2011-09-16 2014-09-16 Invensense, Inc. Micromachined gyroscope including a guided mass system
US9714842B2 (en) 2011-09-16 2017-07-25 Invensense, Inc. Gyroscope self test by applying rotation on coriolis sense mass
US9863769B2 (en) 2011-09-16 2018-01-09 Invensense, Inc. MEMS sensor with decoupled drive system
US10914584B2 (en) 2011-09-16 2021-02-09 Invensense, Inc. Drive and sense balanced, semi-coupled 3-axis gyroscope
US9170107B2 (en) 2011-09-16 2015-10-27 Invensense, Inc. Micromachined gyroscope including a guided mass system
TWI416070B (zh) 2011-12-26 2013-11-21 Ind Tech Res Inst 陀螺儀的讀取電路
DE102012200132A1 (de) * 2012-01-05 2013-07-11 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
SG11201403697YA (en) 2012-01-12 2014-07-30 Murata Electronics Oy Accelerator sensor structure and use thereof
JP6143789B2 (ja) 2012-01-12 2017-06-07 ムラタ エレクトロニクス オサケユキチュア 耐振動性の加速度センサー構造体
US8991250B2 (en) * 2012-09-11 2015-03-31 The United States Of America As Represented By Secretary Of The Navy Tuning fork gyroscope time domain inertial sensor
DE102013206414A1 (de) 2013-04-11 2014-10-16 Robert Bosch Gmbh Drehratensensor
FR3013445B1 (fr) * 2013-11-20 2015-11-20 Sagem Defense Securite Capteur a element sensible mobile ayant un fonctionnement mixte vibrant et pendulaire, et procedes de commande d'un tel capteur
US9958271B2 (en) 2014-01-21 2018-05-01 Invensense, Inc. Configuration to reduce non-linear motion
FI126071B (fi) 2014-01-28 2016-06-15 Murata Manufacturing Co Parannettu gyroskooppirakenne ja gyroskooppi
TWI580632B (zh) 2014-03-14 2017-05-01 財團法人工業技術研究院 具用於旋轉元件之摺疊彈簧的微機電裝置
DE102015213447A1 (de) * 2015-07-17 2017-01-19 Robert Bosch Gmbh Drehratensensor mit minimierten Störbewegungen in der Antriebsmode
CN106871885A (zh) * 2015-12-10 2017-06-20 上海矽睿科技有限公司 用于mems传感器的折叠弹簧组以及mems传感器
KR101844595B1 (ko) 2016-12-09 2018-04-03 한국철도기술연구원 철도차량용 공기압축기의 진동 테스트 장치와 이를 이용하여 균형추를 설계하는 방법
TWI669267B (zh) 2017-04-04 2019-08-21 日商村田製作所股份有限公司 用於角速度的微機械感測器元件
US10466053B2 (en) * 2017-04-04 2019-11-05 Invensense, Inc. Out-of-plane sensing gyroscope robust to external acceleration and rotation
JP6696530B2 (ja) * 2017-05-24 2020-05-20 株式会社村田製作所 圧電ジャイロスコープにおける連結懸架
JP6610706B2 (ja) * 2017-05-24 2019-11-27 株式会社村田製作所 横駆動変換器を備える圧電ジャイロスコープ
CN108731659A (zh) * 2018-05-25 2018-11-02 中国电子科技集团公司第二十九研究所 一种多检测振动单元微惯性导航陀螺仪
JP6922961B2 (ja) * 2018-10-18 2021-08-18 株式会社村田製作所 回転運動検出用微小電気機械デバイス
DE102020202158A1 (de) * 2020-02-19 2021-08-19 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanische Drehraten-Sensoranordnung, Drehraten-Sensorarray und entsprechendes Herstellungsverfahren
WO2022046799A1 (en) * 2020-08-24 2022-03-03 Analog Devices, Inc. Isotropic attenuated motion gyroscope
US11624613B2 (en) 2020-12-03 2023-04-11 Murata Manufacturing Co., Ltd. Synchronized four mass gyroscope
CN114623814A (zh) * 2022-01-19 2022-06-14 瑞声开泰科技(武汉)有限公司 一种mems陀螺仪

Family Cites Families (64)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3015A (en) * 1843-03-21 Improvement in gilding, silvering
US8028A (en) * 1851-04-08 Hokse-poweb
US3016A (en) * 1843-03-21 Burning bricks
US10021A (en) * 1853-09-13 Screw-eastemtito- for boots and shoes
US5002A (en) * 1847-03-06 Godlove k
US4025A (en) * 1845-05-01 Feinting press
US5635638A (en) * 1995-06-06 1997-06-03 Analog Devices, Inc. Coupling for multiple masses in a micromachined device
DE19530007C2 (de) * 1995-08-16 1998-11-26 Bosch Gmbh Robert Drehratensensor
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
US6250156B1 (en) 1996-05-31 2001-06-26 The Regents Of The University Of California Dual-mass micromachined vibratory rate gyroscope
US6122961A (en) * 1997-09-02 2000-09-26 Analog Devices, Inc. Micromachined gyros
US5920012A (en) * 1998-06-16 1999-07-06 Boeing North American Micromechanical inertial sensor
JP3106395B2 (ja) * 1998-07-10 2000-11-06 株式会社村田製作所 角速度センサ
JP2000131071A (ja) * 1998-10-22 2000-05-12 Hitachi Ltd 回転角速度センサ
FR2798993B1 (fr) 1999-09-28 2001-12-07 Thomson Csf Sextant Gyrometre de type diapason
KR100374812B1 (ko) 1999-11-04 2003-03-03 삼성전자주식회사 두개의 공진판을 가진 마이크로 자이로스코프
KR100343211B1 (ko) * 1999-11-04 2002-07-10 윤종용 웨이퍼 레벨 진공 패키징이 가능한 ｍｅｍｓ의 구조물의제작방법
FR2809174B1 (fr) * 2000-05-16 2002-07-12 Commissariat Energie Atomique Structure vibrante a deux oscillateurs couples, notamment pour un gyrometre
JP3531918B2 (ja) * 2000-07-12 2004-05-31 キヤノン株式会社 光ジャイロ、及びその駆動方法並びに信号処理方法
DE10108197A1 (de) 2001-02-21 2002-09-12 Bosch Gmbh Robert Drehratensensor
DE10108196A1 (de) 2001-02-21 2002-10-24 Bosch Gmbh Robert Drehratensensor
FR2834055B1 (fr) * 2001-12-20 2004-02-13 Thales Sa Capteur inertiel micro-usine pour la mesure de mouvements de rotation
JP3870895B2 (ja) * 2002-01-10 2007-01-24 株式会社村田製作所 角速度センサ
US7316161B2 (en) * 2002-01-12 2008-01-08 Robert Bosch Gmbh Rotation rate sensor
AU2003259814A1 (en) * 2002-08-12 2004-02-25 The Boeing Company Isolated planar gyroscope with internal radial sensing and actuation
US6978673B2 (en) * 2003-02-07 2005-12-27 Honeywell International, Inc. Methods and systems for simultaneously fabricating multi-frequency MEMS devices
US6860151B2 (en) * 2003-02-07 2005-03-01 Honeywell International Inc. Methods and systems for controlling movement within MEMS structures
US6867543B2 (en) * 2003-03-31 2005-03-15 Motorola, Inc. Microdevice assembly having a fine grain getter layer for maintaining vacuum
US6843127B1 (en) * 2003-07-30 2005-01-18 Motorola, Inc. Flexible vibratory micro-electromechanical device
US7036372B2 (en) * 2003-09-25 2006-05-02 Kionix, Inc. Z-axis angular rate sensor
JP4433747B2 (ja) * 2003-09-29 2010-03-17 株式会社村田製作所 角速度検出装置
FR2860865B1 (fr) 2003-10-10 2006-01-20 Thales Sa Gyrometre micromecanique infertiel a diapason
US6892575B2 (en) * 2003-10-20 2005-05-17 Invensense Inc. X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
DE10350037A1 (de) * 2003-10-27 2005-05-25 Robert Bosch Gmbh Drehratensensor
DE10360963B4 (de) 2003-12-23 2007-05-16 Litef Gmbh Verfahren zur Messung von Drehraten/Beschleunigungen unter Verwendung eines Drehraten-Corioliskreisels sowie dafür geeigneter Corioliskreisel
US7043985B2 (en) * 2004-01-13 2006-05-16 Georgia Tech Research Corporation High-resolution in-plane tuning fork gyroscope and methods of fabrication
EP1735590B1 (en) 2004-04-14 2013-11-27 Analog Devices, Inc. Coupling apparatus for inertial sensors
KR100652952B1 (ko) * 2004-07-19 2006-12-06 삼성전자주식회사 커플링 스프링을 구비한 멤스 자이로스코프
FR2874257B1 (fr) * 2004-08-13 2006-10-13 Commissariat Energie Atomique Micro gyrometre a detection frenquentielle
JP2006105698A (ja) * 2004-10-01 2006-04-20 Star Micronics Co Ltd 加速度角速度複合センサ
FR2876180B1 (fr) * 2004-10-06 2006-12-08 Commissariat Energie Atomique Resonateur a masses oscillantes.
KR100616641B1 (ko) 2004-12-03 2006-08-28 삼성전기주식회사 튜닝포크형 진동식 ｍｅｍｓ 자이로스코프
FI116543B (fi) 2004-12-31 2005-12-15 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
CN101180516B (zh) * 2005-05-24 2011-09-14 独立行政法人宇宙航空研究开发机构 陀螺仪
US7228738B2 (en) * 2005-06-06 2007-06-12 Bei Technologies, Inc. Torsional rate sensor with momentum balance and mode decoupling
US7617728B2 (en) * 2006-05-17 2009-11-17 Donato Cardarelli Tuning fork gyroscope
FR2888318B1 (fr) 2005-07-05 2007-09-14 Thales Sa Capteur gyrometrique micro-usine realisant une mesure differentielle du mouvement des masses vibrantes
JP4887034B2 (ja) * 2005-12-05 2012-02-29 日立オートモティブシステムズ株式会社 慣性センサ
FR2894661B1 (fr) * 2005-12-13 2008-01-18 Thales Sa Gyrometre vibrant equilibre par un dispositif electrostatique
FR2895501B1 (fr) * 2005-12-23 2008-02-29 Commissariat Energie Atomique Microsysteme, plus particulierement microgyrometre, avec au moins deux massesm oscillantes couplees mecaniquement
CN101400969A (zh) * 2006-03-10 2009-04-01 康蒂特米克微电子有限公司 微机械的转速传感器
DE102007012163A1 (de) 2006-03-10 2007-10-25 Continental Teves Ag & Co. Ohg Drehratensensor mit Kopplungsbalken
US7444868B2 (en) * 2006-06-29 2008-11-04 Honeywell International Inc. Force rebalancing for MEMS inertial sensors using time-varying voltages
FR2905457B1 (fr) 2006-09-01 2008-10-17 Commissariat Energie Atomique Microsysteme, plus particulierement microgyrometre, avec element de detection a electrodes capacitives.
JP4859649B2 (ja) * 2006-12-12 2012-01-25 日立オートモティブシステムズ株式会社 角速度センサ
TWI317812B (en) * 2006-12-22 2009-12-01 Delta Electronics Inc Capacitance acceleration sensing structure
FI120921B (fi) * 2007-06-01 2010-04-30 Vti Technologies Oy Menetelmä kulmanopeuden mittaamiseksi ja värähtelevä mikromekaaninen kulmanopeusanturi
DE102007030120B4 (de) * 2007-06-29 2010-04-08 Litef Gmbh Drehratensensor
US8061201B2 (en) 2007-07-13 2011-11-22 Georgia Tech Research Corporation Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscope
WO2009119470A1 (ja) * 2008-03-24 2009-10-01 アルプス電気株式会社 角速度センサ
JP5228675B2 (ja) * 2008-07-29 2013-07-03 富士通株式会社 角速度センサおよび電子装置
US8146424B2 (en) * 2008-12-16 2012-04-03 Honeywell International Inc. Systems and methods for an inertial sensor suspension that minimizes proof mass rotation
FI20095201A0 (fi) * 2009-03-02 2009-03-02 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
DE102010029630A1 (de) * 2010-06-02 2011-12-08 Robert Bosch Gmbh Drehratensensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112485468A (zh) * 2019-08-22 2021-03-12 恩智浦美国有限公司 基于频率调制的多轴感测装置及其操作方法

Also Published As

Publication number Publication date
US20100222998A1 (en) 2010-09-02
KR101676264B1 (ko) 2016-11-15
WO2010100334A1 (en) 2010-09-10
EP2404139A1 (en) 2012-01-11
KR20110130452A (ko) 2011-12-05
JP2012519294A (ja) 2012-08-23
CN102365524A (zh) 2012-02-29
EP2404139A4 (en) 2016-05-11
TW201040534A (en) 2010-11-16
FI122232B (fi) 2011-10-31
IL214926A0 (en) 2011-11-30
CN102365524B (zh) 2015-01-21
EP2404138A4 (en) 2016-05-11
CN102369414A (zh) 2012-03-07
US8997565B2 (en) 2015-04-07
KR20110125661A (ko) 2011-11-21
CN102369414B (zh) 2014-12-31
US20100218605A1 (en) 2010-09-02
WO2010100333A1 (en) 2010-09-10
IL214926A (en) 2016-05-31
JP2012519295A (ja) 2012-08-23
US8904865B2 (en) 2014-12-09
FI20095201A0 (fi) 2009-03-02
FI20095903L (fi) 2010-09-03
TW201104216A (en) 2011-02-01
TWI481817B (zh) 2015-04-21
JP5670356B2 (ja) 2015-02-18
TWI481872B (zh) 2015-04-21
EP2404138A1 (en) 2012-01-11
JP5670357B2 (ja) 2015-02-18
KR101673887B1 (ko) 2016-11-08
EP2404138B1 (en) 2018-01-10
EP2404139B1 (en) 2018-01-10
IL214925A0 (en) 2011-11-30

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