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ES553394A0 - Un metodo para fabricar una aleacion semiconductora - Google Patents

Un metodo para fabricar una aleacion semiconductora

Info

Publication number
ES553394A0
ES553394A0 ES553394A ES553394A ES553394A0 ES 553394 A0 ES553394 A0 ES 553394A0 ES 553394 A ES553394 A ES 553394A ES 553394 A ES553394 A ES 553394A ES 553394 A0 ES553394 A0 ES 553394A0
Authority
ES
Spain
Prior art keywords
manufacture
semiconductive alloy
semiconductive
alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
ES553394A
Other languages
English (en)
Other versions
ES8705929A1 (es
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sovonics Solar Systems
Original Assignee
Sovonics Solar Systems
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sovonics Solar Systems filed Critical Sovonics Solar Systems
Publication of ES8705929A1 publication Critical patent/ES8705929A1/es
Publication of ES553394A0 publication Critical patent/ES553394A0/es
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02422—Non-crystalline insulating materials, e.g. glass, polymers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02425—Conductive materials, e.g. metallic silicides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02436—Intermediate layers between substrates and deposited layers
    • H01L21/02439—Materials
    • H01L21/02441—Group 14 semiconducting materials
    • H01L21/0245—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02436—Intermediate layers between substrates and deposited layers
    • H01L21/02494—Structure
    • H01L21/02496—Layer structure
    • H01L21/02505—Layer structure consisting of more than two layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02532—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/0257—Doping during depositing
    • H01L21/02573—Conductivity type
    • H01L21/02576—N-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/0257—Doping during depositing
    • H01L21/02573—Conductivity type
    • H01L21/02579—P-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Photovoltaic Devices (AREA)
ES553394A 1985-04-01 1986-03-25 Un metodo para fabricar una aleacion semiconductora Expired ES8705929A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/718,661 US4637895A (en) 1985-04-01 1985-04-01 Gas mixtures for the vapor deposition of semiconductor material

Publications (2)

Publication Number Publication Date
ES8705929A1 ES8705929A1 (es) 1987-05-16
ES553394A0 true ES553394A0 (es) 1987-05-16

Family

ID=24886972

Family Applications (1)

Application Number Title Priority Date Filing Date
ES553394A Expired ES8705929A1 (es) 1985-04-01 1986-03-25 Un metodo para fabricar una aleacion semiconductora

Country Status (9)

Country Link
US (3) US4637895A (es)
EP (1) EP0204396B1 (es)
JP (1) JPH07123113B2 (es)
AU (1) AU576147B2 (es)
BR (1) BR8601421A (es)
DE (1) DE3681074D1 (es)
ES (1) ES8705929A1 (es)
MX (1) MX166176B (es)
ZA (1) ZA862255B (es)

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US4868014A (en) * 1986-01-14 1989-09-19 Canon Kabushiki Kaisha Method for forming thin film multi-layer structure member
JPH084072B2 (ja) * 1986-01-14 1996-01-17 キヤノン株式会社 堆積膜形成法
US4801474A (en) * 1986-01-14 1989-01-31 Canon Kabushiki Kaisha Method for forming thin film multi-layer structure member
DE3784537T2 (de) * 1986-04-11 1993-09-30 Canon Kk Herstellungsverfahren einer niedergeschlagenen Schicht.
JPH0637703B2 (ja) * 1986-12-22 1994-05-18 三井東圧化学株式会社 半導体薄膜の製法
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US5101247A (en) * 1990-04-27 1992-03-31 North Carolina State University Germanium silicon dioxide gate MOSFET
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US6149982A (en) * 1994-02-16 2000-11-21 The Coca-Cola Company Method of forming a coating on an inner surface
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Also Published As

Publication number Publication date
JPS61231718A (ja) 1986-10-16
US4637895A (en) 1987-01-20
US4696758A (en) 1987-09-29
JPH07123113B2 (ja) 1995-12-25
DE3681074D1 (de) 1991-10-02
US4698234A (en) 1987-10-06
MX166176B (es) 1992-12-23
EP0204396B1 (en) 1991-08-28
AU576147B2 (en) 1988-08-11
ES8705929A1 (es) 1987-05-16
EP0204396A1 (en) 1986-12-10
ZA862255B (en) 1986-11-26
BR8601421A (pt) 1986-12-09
AU5553186A (en) 1986-10-09

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