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ES384612A1 - Un metodo y un aparato para escribir o registrar modelos, disenos o patrones de mascaras sobre un material fotograficopor medio de luz. - Google Patents

Un metodo y un aparato para escribir o registrar modelos, disenos o patrones de mascaras sobre un material fotograficopor medio de luz.

Info

Publication number
ES384612A1
ES384612A1 ES384612A ES384612A ES384612A1 ES 384612 A1 ES384612 A1 ES 384612A1 ES 384612 A ES384612 A ES 384612A ES 384612 A ES384612 A ES 384612A ES 384612 A1 ES384612 A1 ES 384612A1
Authority
ES
Spain
Prior art keywords
light
photographic material
mask patterns
writing mask
writing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES384612A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of ES384612A1 publication Critical patent/ES384612A1/es
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Projection-Type Copiers In General (AREA)
ES384612A 1969-10-18 1970-10-16 Un metodo y un aparato para escribir o registrar modelos, disenos o patrones de mascaras sobre un material fotograficopor medio de luz. Expired ES384612A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6915794A NL6915794A (es) 1969-10-18 1969-10-18

Publications (1)

Publication Number Publication Date
ES384612A1 true ES384612A1 (es) 1973-01-16

Family

ID=19808166

Family Applications (1)

Application Number Title Priority Date Filing Date
ES384612A Expired ES384612A1 (es) 1969-10-18 1970-10-16 Un metodo y un aparato para escribir o registrar modelos, disenos o patrones de mascaras sobre un material fotograficopor medio de luz.

Country Status (10)

Country Link
US (1) US3688655A (es)
JP (1) JPS5128189B1 (es)
AT (1) AT307068B (es)
BE (1) BE757658A (es)
CH (1) CH515529A (es)
ES (1) ES384612A1 (es)
FR (1) FR2066104A5 (es)
GB (1) GB1330343A (es)
NL (1) NL6915794A (es)
SE (1) SE354526B (es)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3710702A (en) * 1971-06-01 1973-01-16 Ibm Optical exposure head
US3848520A (en) * 1972-07-24 1974-11-19 Gerber Scientific Instr Co Line drawing photoexposure device with image rotating means
US3836916A (en) * 1973-02-26 1974-09-17 Ibm Apparatus for exposing lines on a photosensitive surface
US3975705A (en) * 1974-02-11 1976-08-17 Seiscom Delta Inc. Color display of geophysical and other data
US4070187A (en) * 1974-02-11 1978-01-24 Seiscom Delta Inc. Color display of data
US4573779A (en) * 1983-12-30 1986-03-04 International Business Machines Corporation Variable size circular aperture camera
WO2009124595A1 (en) * 2008-04-11 2009-10-15 Carl Zeiss Smt Ag Optical aperture device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1107981A (en) * 1963-06-06 1968-03-27 Barr & Stroud Ltd Apparatus for automatically drawing lines
US3330182A (en) * 1965-10-01 1967-07-11 Gerber Scientific Instr Co Device for exposing discrete portions of a photosensitive surface to a variable intensity light beam

Also Published As

Publication number Publication date
DE2050422B2 (de) 1976-04-22
AT307068B (de) 1973-05-10
US3688655A (en) 1972-09-05
NL6915794A (es) 1971-04-20
BE757658A (fr) 1971-04-16
CH515529A (de) 1971-11-15
DE2050422A1 (de) 1971-04-29
GB1330343A (en) 1973-09-19
FR2066104A5 (es) 1971-08-06
JPS5128189B1 (es) 1976-08-17
SE354526B (es) 1973-03-12

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