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ES2152033T3 - Aparato y metodo de suministro de fluido. - Google Patents

Aparato y metodo de suministro de fluido.

Info

Publication number
ES2152033T3
ES2152033T3 ES96924389T ES96924389T ES2152033T3 ES 2152033 T3 ES2152033 T3 ES 2152033T3 ES 96924389 T ES96924389 T ES 96924389T ES 96924389 T ES96924389 T ES 96924389T ES 2152033 T3 ES2152033 T3 ES 2152033T3
Authority
ES
Spain
Prior art keywords
fluid
liquid
openings
gas
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES96924389T
Other languages
English (en)
Inventor
Ricky A Himes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Atotech USA LLC
Original Assignee
Atotech USA LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atotech USA LLC filed Critical Atotech USA LLC
Application granted granted Critical
Publication of ES2152033T3 publication Critical patent/ES2152033T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0085—Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor
    • H05K3/0088—Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor for treatment of holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B08B3/022—Cleaning travelling work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • B08B5/023—Cleaning travelling work
    • B08B5/026—Cleaning moving webs
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/08—Apparatus, e.g. for photomechanical printing surfaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/004—Nozzle assemblies; Air knives; Air distributors; Blow boxes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0085—Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/08—Electroplating with moving electrolyte e.g. jet electroplating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/227—Drying of printed circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Nozzles (AREA)
  • Coating Apparatus (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

SE PROPORCIONA UN APARATO Y PROCEDIMIENTO PARA LA DISTRIBUCION DE FLUIDO EN EL QUE SE SUMINISTRA UN FLUIDO LIQUIDO O GASEOSO DESDE LOS COLECTORES (35) DE UN DISTRIBUIDOR DE FLUIDO, VIA UNAS PLACAS (40) DE TOBERA ASOCIADAS CON LOS MISMOS, A CADA LADO DE UN RECORRIDO DE DESPLAZAMIENTO (22) DE ARTICULOS (11) QUE SE VAN A TRATAR CON EL FLUIDO, Y EN EL QUE LAS ABERTURAS (41, 42, 43) DE LAS TOBERAS EN LAS PLACAS (40) DE LAS TOBERAS COOPERAN CON UN SURCO (67) O SURCOS TRANSVERSALES PARA SUMINISTRAR UNA CORTINA DE FLUIDO EXTENDIDA TRANSVERSALMENTE AL RECORRIDO DE DESPLAZAMIENTO (22) DE LOS ARTICULOS (11). EN EL CASO DE QUE EL FLUIDO SEA UN LIQUIDO, LAS ABERTURAS (41, 42, 43) DE LAS TOBERAS SUMINISTRAN UNAS COLUMNAS DE LIQUIDO SIMILARES A FILAMENTOS QUE SON CONVERTIDAS POR LOS SURCOS (67) ASOCIADOS EN UNA CORTINA DE LIQUIDO PULVERIZADO, GENERALMENTE PLANA Y DISPUESTA TRANSVERSALMENTE. EN EL CASO DE QUE EL FLUIDO SEA UN GAS, LAS ABERTURAS (41, 42, 43) DE LAS TOBERAS Y LOS SURCOS (67) TRANSVERSALES COOPERAN PARA SUMINISTRAR EL GAS EN ZONAS DE GAS PLANAS, TRANSVERSALES Y SEPARADAS DE FORMA TRANSVERSAL DIRIGIDAS HACIA EL RECORRIDOS DEL DESPLAZAMIENTO (22) DEL ARTICULO. EN EL CASO DE FLUJO LIQUIDO, LAS ABERTURAS (41, 42, 43) SON GENERICAMENTE CILINDRICAS, Y EN EL CASO DE FLUJO DE GAS, LAS ABERTURAS (41, 42, 43) SON GENERICAMENTE UNOS TALADROS RANURADOS SEPARADOS. EN EL CASO DE QUE AMBOS FLUIDOS SEAN LIQUIDO Y GAS, UNO DE LOS SURCOS (67) Y/O LAS TOBERAS (41, 42, 43) SON DIRIGIDAS CORRIENTE ARRIBA CON RELACION AL RECORRIDO DEL FLUJO (22) DEL ARTICULO. ESTAN PROVISTOS DIVERSOS ELEMENTOS DE AJUSTE PARA AJUSTAR LAS POSICIONES DE LAS PLACAS (40) DE LAS TOBERAS CON RELACION AL RECORRIDO DEL FLUJO.
ES96924389T 1995-08-11 1996-07-08 Aparato y metodo de suministro de fluido. Expired - Lifetime ES2152033T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/514,313 US5614264A (en) 1995-08-11 1995-08-11 Fluid delivery apparatus and method

Publications (1)

Publication Number Publication Date
ES2152033T3 true ES2152033T3 (es) 2001-01-16

Family

ID=24046664

Family Applications (1)

Application Number Title Priority Date Filing Date
ES96924389T Expired - Lifetime ES2152033T3 (es) 1995-08-11 1996-07-08 Aparato y metodo de suministro de fluido.

Country Status (7)

Country Link
US (1) US5614264A (es)
EP (1) EP0820351B1 (es)
JP (1) JPH11510734A (es)
CA (1) CA2218883A1 (es)
DE (1) DE69610763T2 (es)
ES (1) ES2152033T3 (es)
WO (1) WO1997006895A1 (es)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5876499A (en) * 1991-05-08 1999-03-02 Lymn; Peter P. Solder spray leveller
US5720813A (en) 1995-06-07 1998-02-24 Eamon P. McDonald Thin sheet handling system
US5904773A (en) * 1995-08-11 1999-05-18 Atotech Usa, Inc. Fluid delivery apparatus
US5824157A (en) * 1995-09-06 1998-10-20 International Business Machines Corporation Fluid jet impregnation
JP3317477B2 (ja) * 1996-09-27 2002-08-26 本田技研工業株式会社 ブランク材洗浄ブース及びブランク材洗浄装置
AU7519998A (en) * 1997-05-28 1998-12-30 Rockwool International A/S Plant and process for coating a multi-sided mineral fibre element
BR9904904A (pt) * 1998-03-11 2000-10-03 Mitsubishi Heavy Ind Ltd Dispositivo de decapagem por ácido
TW391895B (en) * 1998-10-02 2000-06-01 Ultra Clean Technology Asia Pt Method and apparatus for washing and drying semi-conductor devices
FI108993B (fi) * 1999-06-30 2002-05-15 Metso Paper Inc Menetelmä ja sovitelma käsittelyaineen levittämiseksi liikkuvalle pinnalle
US6539963B1 (en) * 1999-07-14 2003-04-01 Micron Technology, Inc. Pressurized liquid diffuser
DE19934487B4 (de) * 1999-07-22 2004-04-29 Systronic Systemlösungen für die Elektronikindustrie GmbH Durchlauftrockner für Platten oder Bahnen
US6265020B1 (en) * 1999-09-01 2001-07-24 Shipley Company, L.L.C. Fluid delivery systems for electronic device manufacture
DE10039558B4 (de) * 2000-08-12 2005-09-08 Pill E.K. Vorrichtung zur Sprühbehandlung von Leiterplatten
JP2002075947A (ja) * 2000-08-30 2002-03-15 Alps Electric Co Ltd ウェット処理装置
EP1414594A1 (en) * 2001-08-06 2004-05-06 Amersham Biosciences Corp. Instrument treatment station
US20050015050A1 (en) * 2003-07-15 2005-01-20 Kimberly-Clark Worldwide, Inc. Apparatus for depositing fluid material onto a substrate
DE10358147C5 (de) * 2003-12-10 2007-11-22 Höllmüller Maschinenbau GmbH Verfahren und Vorrichtung zum Behandeln von ebenem Gut in Durchlaufanlagen
DE10358149B3 (de) * 2003-12-10 2005-05-12 Höllmüller Maschinenbau GmbH Verfahren und Vorrichtung zum berührungslosen Behandeln von ebenem Gut in Durchlaufanlagen
DE102006003141A1 (de) * 2006-01-24 2007-07-26 Airmatic Gmbh Vorrichtung zur Bandreinigung mit Hochdruck-Vakuum-Technik und Bandniederhaltung
WO2008084224A2 (en) * 2007-01-11 2008-07-17 Peter Philip Andrew Lymn Liquid treatment apparatus
MY161195A (en) 2009-12-22 2017-04-14 3M Innovative Properties Co Apparatus and methods for impinging fluids on substrates
US9126224B2 (en) * 2011-02-17 2015-09-08 3M Innovative Properties Company Apparatus and methods for impinging fluids on substrates
TWI831852B (zh) * 2019-10-24 2024-02-11 香港商亞洲電鍍器材有限公司 流體輸送系統及電鍍工件的方法
JP7347809B2 (ja) * 2020-03-10 2023-09-20 ヒューグル開発株式会社 除塵装置及び除塵方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3734109A (en) * 1971-03-08 1973-05-22 P Hebner Spray cleaning system
US3871914A (en) * 1971-10-18 1975-03-18 Chemcut Corp Etchant rinse apparatus
US3935041A (en) * 1971-10-18 1976-01-27 Chemcut Corporation Method for treatment fluid application and removal
US3905827A (en) * 1971-10-18 1975-09-16 Chemcut Corp Etchant rinse method
US4015706A (en) 1971-11-15 1977-04-05 Chemcut Corporation Connecting modules for an etching system
US3776800A (en) * 1971-12-06 1973-12-04 Chemut Corp Etching apparatus
US4046248A (en) 1974-01-15 1977-09-06 Chemcut Corporation Connecting and alignment means for modular chemical treatment system
US4017982A (en) * 1975-07-28 1977-04-19 Chemcut Corporation Drying apparatus
FR2355697A1 (fr) * 1976-06-25 1978-01-20 Bertin & Cie Procede pour etancher l'intervalle entre une paroi et une surface en regard, dispositifs de mise en oeuvre du procede et applications
US4174261A (en) * 1976-07-16 1979-11-13 Pellegrino Peter P Apparatus for electroplating, deplating or etching
US4202073A (en) * 1978-07-25 1980-05-13 Research Technology Inc. Moisture stripping device for film cleaning apparatus
US4270317A (en) * 1978-10-10 1981-06-02 Midland-Ross Corporation Apparatus used in the treatment of a continuous strip of metal and method of use thereof
US4425869A (en) * 1982-09-07 1984-01-17 Advanced Systems Incorporated Fluid flow control mechanism for circuit board processing apparatus
JPS609129A (ja) * 1983-06-29 1985-01-18 Fujitsu Ltd ウエツト処理装置
US4576685A (en) * 1985-04-23 1986-03-18 Schering Ag Process and apparatus for plating onto articles
DE3528575A1 (de) * 1985-08-06 1987-02-19 Schering Ag Verfahren und einrichtung zur reinigung, aktivierung und/oder metallisierung von bohrloechern in horizontal gefuehrten leiterplatten
US4938257A (en) * 1986-11-21 1990-07-03 Teledyne Industries, Inc. Printed circuit cleaning apparatus
US4854004A (en) * 1987-12-28 1989-08-08 Orc Manufacturing Co., Ltd. Device for clearing the hole blockage of a liquid resist substrate
US5063951A (en) * 1990-07-19 1991-11-12 International Business Machines Corporation Fluid treatment device
US5289639A (en) * 1992-07-10 1994-03-01 International Business Machines Corp. Fluid treatment apparatus and method

Also Published As

Publication number Publication date
JPH11510734A (ja) 1999-09-21
EP0820351B1 (en) 2000-10-25
WO1997006895A1 (en) 1997-02-27
DE69610763D1 (de) 2000-11-30
CA2218883A1 (en) 1997-02-27
EP0820351A4 (en) 1999-06-16
DE69610763T2 (de) 2001-05-31
EP0820351A1 (en) 1998-01-28
US5614264A (en) 1997-03-25

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