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ES2078708T3 - Detector de fuga de helio. - Google Patents

Detector de fuga de helio.

Info

Publication number
ES2078708T3
ES2078708T3 ES92402551T ES92402551T ES2078708T3 ES 2078708 T3 ES2078708 T3 ES 2078708T3 ES 92402551 T ES92402551 T ES 92402551T ES 92402551 T ES92402551 T ES 92402551T ES 2078708 T3 ES2078708 T3 ES 2078708T3
Authority
ES
Spain
Prior art keywords
pressure
pump
leak detector
stages
helio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES92402551T
Other languages
English (en)
Inventor
Gilles Baret
Roland Gevaud
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Nokia Inc
Original Assignee
Alcatel CIT SA
Nokia Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA, Nokia Inc filed Critical Alcatel CIT SA
Application granted granted Critical
Publication of ES2078708T3 publication Critical patent/ES2078708T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Rotary Pumps (AREA)

Abstract

DETECTOR DE FUGA DE HELIO QUE COMPRENDE UN ANALIZADOR DE GAS (1), UNA BOMBA SECUNDARIA (2) QUE COMPRENDE AL MENOS DEL LADO DE SU DESCARGA UNA ETAPA (2B) DEL TIPO HOLWECK, SIENDO DICHA BOMBA (2) DE UN TIPO QUE PERMITE DESCENDER LA PRESION DE ASPIRACION A UN VALOR AL MENOS IGUAL A 10-4 MBAR Y SIENDO SU PRESION EN LA DESCARGA SUFICIENTEMENTE ELEVADA PARA SER COMPATIBLE CON LA PRESION DE ASPIRACION DE UN GRUPO DE BOMBEO PRIMARIO (3) DEL TIPO SECO COMPUESTO POR AL MENOS DIOS ETAPAS (3A, 3B) CARACTERIZADO EN QUE DICHA BOMBA SECUNDARIA (2) ESTA CONECTADA A LA SALIDA DE BAJA PRESION (8B) DE UN ORGANO DE TOMA (8) EN UN PUNTO (21) DE DICHA BOMBA DONDE SU REGIMEN DE CIRCULACION ES MOLECULAR, ESTANDO UNA SONDA DE DETECCION DE FUGAS (6) CONECTADA DEL LADO DE ALTA PRESION (8C) DE DICHO ORGANO DE TOMA (8), ESTANDO ESTE LADO DE ALTA PRESION ADEMAS CONECTADO A DICHO GRUPO DE BOMBEO PRIMARIO ENTRE SUS DOS ETAPAS (3A, 3B).
ES92402551T 1991-09-24 1992-09-17 Detector de fuga de helio. Expired - Lifetime ES2078708T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9111755A FR2681688B1 (fr) 1991-09-24 1991-09-24 Installation de detection de fuites de gaz utilisant la technique de reniflage.

Publications (1)

Publication Number Publication Date
ES2078708T3 true ES2078708T3 (es) 1995-12-16

Family

ID=9417244

Family Applications (1)

Application Number Title Priority Date Filing Date
ES92402551T Expired - Lifetime ES2078708T3 (es) 1991-09-24 1992-09-17 Detector de fuga de helio.

Country Status (8)

Country Link
US (1) US5341671A (es)
EP (1) EP0534825B1 (es)
JP (1) JP3124842B2 (es)
AT (1) ATE129569T1 (es)
DE (1) DE69205654T2 (es)
DK (1) DK0534825T3 (es)
ES (1) ES2078708T3 (es)
FR (1) FR2681688B1 (es)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4228313A1 (de) * 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE4343912A1 (de) * 1993-12-22 1995-06-29 Leybold Ag Verfahren zum Betrieb eines mit einer Schnüffelleitung ausgerüsteten Testgaslecksuchers sowie für die Durchführung dieses Verfahrens geeigneter Testgaslecksucher
GB9403184D0 (en) * 1994-02-18 1994-04-06 Boc Group Plc Methods and apparatus for leak testing
DE4442174A1 (de) * 1994-11-26 1996-05-30 Leybold Ag Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu
FR2728072B1 (fr) * 1994-12-07 1997-01-10 Cit Alcatel Detecteur de fuite
ES2192568T3 (es) * 1994-12-23 2003-10-16 Unaxis Balzers Ag Procedimiento para el analisis de gases y analizador de gases.
DE19504278A1 (de) * 1995-02-09 1996-08-14 Leybold Ag Testgas-Lecksuchgerät
FR2734633B1 (fr) * 1995-05-24 1997-06-20 Cit Alcatel Installation pour detecter la presence d'helium dans un circuit de fluide
FR2761776B1 (fr) * 1997-04-03 1999-07-23 Alsthom Cge Alcatel Detecteur de fuite a gaz traceur
FR2784184B1 (fr) 1998-10-01 2000-12-15 Cit Alcatel Detecteur de fuite compact
DE10055057A1 (de) * 2000-11-07 2002-05-08 Pfeiffer Vacuum Gmbh Leckdetektorpumpe
SE518522C2 (sv) * 2001-03-21 2002-10-22 Sensistor Ab Metod och anordning vid täthetsprovning och läcksökning
DE10156205A1 (de) * 2001-11-15 2003-06-05 Inficon Gmbh Testgaslecksuchgerät
US6679098B2 (en) * 2002-02-25 2004-01-20 Advanced Test Products, Inc. High flow rate sample flow path assembly for electronic gas leak detectors
DE102004029637A1 (de) * 2004-06-18 2006-01-05 Inficon Gmbh Lecksuchgerät mit Schnüffelsonde
GB0424198D0 (en) * 2004-11-01 2004-12-01 Boc Group Plc Pumping arrangement
DE102005021909A1 (de) * 2005-05-12 2006-11-16 Inficon Gmbh Schnüffellecksucher mit Quarzfenstersensor
DE102006056215A1 (de) * 2006-11-29 2008-06-05 Inficon Gmbh Schnüffellecksuchgerät
DE102007035932A1 (de) * 2007-07-31 2009-02-05 Inficon Gmbh Lecksuchgerät
DE102007043382A1 (de) 2007-09-12 2009-03-19 Inficon Gmbh Schnüffellecksucher
DE102009035332A1 (de) * 2009-07-30 2011-02-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
US9038441B2 (en) * 2012-01-20 2015-05-26 TLI Enterprises, Inc. High speed helium leak detection system and method
DE102016114983A1 (de) * 2016-08-12 2018-02-15 Pfeiffer Vacuum Gmbh Vakuumsystem
FR3069639B1 (fr) * 2017-07-26 2019-08-30 Pfeiffer Vacuum Sonde de reniflage, detecteur de fuites et procede de detection de fuites
FR3070489B1 (fr) * 2017-08-29 2020-10-23 Pfeiffer Vacuum Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2452699A1 (fr) * 1979-03-28 1980-10-24 Cit Alcatel Dispositif de reniflage pour detecteur de fuites a helium a spectrometre de masse
DE3172712D1 (en) * 1981-07-22 1985-11-28 Cit Alcatel Helium leak detector
FR2604522B1 (fr) * 1986-09-26 1989-06-16 Cit Alcatel Installation de detection de fuite a gaz traceur et procede d'utilisation
EP0283543B1 (de) * 1987-03-27 1991-12-11 Leybold Aktiengesellschaft Lecksuchgerät und Betriebsverfahren dazu
DE3865012D1 (de) * 1988-06-01 1991-10-24 Leybold Ag Pumpsystem fuer ein lecksuchgeraet.
US4893497A (en) * 1988-09-12 1990-01-16 Philip Danielson Leak detection system
FR2653558B1 (fr) * 1989-10-23 1994-06-10 Cit Alcatel Systeme de detection de fuites a gaz traceur.
ATE117410T1 (de) * 1990-07-06 1995-02-15 Cit Alcatel Zweite stufe für mechanische vakuumpumpeinheit und lecküberwachungssystem zur anwendung dieser einheit.
FR2666410B1 (fr) * 1990-09-05 1993-10-08 Alcatel Cit Detecteur de fuite haut flux a trois filtres moleculaires.

Also Published As

Publication number Publication date
DE69205654D1 (de) 1995-11-30
US5341671A (en) 1994-08-30
EP0534825A1 (fr) 1993-03-31
JP3124842B2 (ja) 2001-01-15
DK0534825T3 (da) 1995-12-04
DE69205654T2 (de) 1996-03-21
JPH05223681A (ja) 1993-08-31
FR2681688B1 (fr) 1993-11-19
EP0534825B1 (fr) 1995-10-25
FR2681688A1 (fr) 1993-03-26
ATE129569T1 (de) 1995-11-15

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