ATE129569T1 - Heliumleckdetektor. - Google Patents
Heliumleckdetektor.Info
- Publication number
- ATE129569T1 ATE129569T1 AT92402551T AT92402551T ATE129569T1 AT E129569 T1 ATE129569 T1 AT E129569T1 AT 92402551 T AT92402551 T AT 92402551T AT 92402551 T AT92402551 T AT 92402551T AT E129569 T1 ATE129569 T1 AT E129569T1
- Authority
- AT
- Austria
- Prior art keywords
- pressure
- pump
- leak detector
- helium leak
- stages
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
- Rotary Pumps (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9111755A FR2681688B1 (fr) | 1991-09-24 | 1991-09-24 | Installation de detection de fuites de gaz utilisant la technique de reniflage. |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE129569T1 true ATE129569T1 (de) | 1995-11-15 |
Family
ID=9417244
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT92402551T ATE129569T1 (de) | 1991-09-24 | 1992-09-17 | Heliumleckdetektor. |
Country Status (8)
Country | Link |
---|---|
US (1) | US5341671A (de) |
EP (1) | EP0534825B1 (de) |
JP (1) | JP3124842B2 (de) |
AT (1) | ATE129569T1 (de) |
DE (1) | DE69205654T2 (de) |
DK (1) | DK0534825T3 (de) |
ES (1) | ES2078708T3 (de) |
FR (1) | FR2681688B1 (de) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4228313A1 (de) * | 1992-08-26 | 1994-03-03 | Leybold Ag | Gegenstrom-Lecksucher mit Hochvakuumpumpe |
US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
DE4343912A1 (de) * | 1993-12-22 | 1995-06-29 | Leybold Ag | Verfahren zum Betrieb eines mit einer Schnüffelleitung ausgerüsteten Testgaslecksuchers sowie für die Durchführung dieses Verfahrens geeigneter Testgaslecksucher |
GB9403184D0 (en) * | 1994-02-18 | 1994-04-06 | Boc Group Plc | Methods and apparatus for leak testing |
DE4442174A1 (de) * | 1994-11-26 | 1996-05-30 | Leybold Ag | Lecksuchgerät mit Vakuumpumpen und Betriebsverfahren dazu |
FR2728072B1 (fr) * | 1994-12-07 | 1997-01-10 | Cit Alcatel | Detecteur de fuite |
ES2192568T3 (es) * | 1994-12-23 | 2003-10-16 | Unaxis Balzers Ag | Procedimiento para el analisis de gases y analizador de gases. |
DE19504278A1 (de) * | 1995-02-09 | 1996-08-14 | Leybold Ag | Testgas-Lecksuchgerät |
FR2734633B1 (fr) * | 1995-05-24 | 1997-06-20 | Cit Alcatel | Installation pour detecter la presence d'helium dans un circuit de fluide |
FR2761776B1 (fr) * | 1997-04-03 | 1999-07-23 | Alsthom Cge Alcatel | Detecteur de fuite a gaz traceur |
FR2784184B1 (fr) | 1998-10-01 | 2000-12-15 | Cit Alcatel | Detecteur de fuite compact |
DE10055057A1 (de) * | 2000-11-07 | 2002-05-08 | Pfeiffer Vacuum Gmbh | Leckdetektorpumpe |
SE518522C2 (sv) * | 2001-03-21 | 2002-10-22 | Sensistor Ab | Metod och anordning vid täthetsprovning och läcksökning |
DE10156205A1 (de) * | 2001-11-15 | 2003-06-05 | Inficon Gmbh | Testgaslecksuchgerät |
US6679098B2 (en) * | 2002-02-25 | 2004-01-20 | Advanced Test Products, Inc. | High flow rate sample flow path assembly for electronic gas leak detectors |
DE102004029637A1 (de) * | 2004-06-18 | 2006-01-05 | Inficon Gmbh | Lecksuchgerät mit Schnüffelsonde |
GB0424198D0 (en) * | 2004-11-01 | 2004-12-01 | Boc Group Plc | Pumping arrangement |
DE102005021909A1 (de) * | 2005-05-12 | 2006-11-16 | Inficon Gmbh | Schnüffellecksucher mit Quarzfenstersensor |
DE102006056215A1 (de) * | 2006-11-29 | 2008-06-05 | Inficon Gmbh | Schnüffellecksuchgerät |
DE102007035932A1 (de) * | 2007-07-31 | 2009-02-05 | Inficon Gmbh | Lecksuchgerät |
DE102007043382A1 (de) | 2007-09-12 | 2009-03-19 | Inficon Gmbh | Schnüffellecksucher |
DE102009035332A1 (de) * | 2009-07-30 | 2011-02-03 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
US9038441B2 (en) * | 2012-01-20 | 2015-05-26 | TLI Enterprises, Inc. | High speed helium leak detection system and method |
DE102016114983A1 (de) * | 2016-08-12 | 2018-02-15 | Pfeiffer Vacuum Gmbh | Vakuumsystem |
FR3069639B1 (fr) * | 2017-07-26 | 2019-08-30 | Pfeiffer Vacuum | Sonde de reniflage, detecteur de fuites et procede de detection de fuites |
FR3070489B1 (fr) * | 2017-08-29 | 2020-10-23 | Pfeiffer Vacuum | Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2452699A1 (fr) * | 1979-03-28 | 1980-10-24 | Cit Alcatel | Dispositif de reniflage pour detecteur de fuites a helium a spectrometre de masse |
DE3172712D1 (en) * | 1981-07-22 | 1985-11-28 | Cit Alcatel | Helium leak detector |
FR2604522B1 (fr) * | 1986-09-26 | 1989-06-16 | Cit Alcatel | Installation de detection de fuite a gaz traceur et procede d'utilisation |
EP0283543B1 (de) * | 1987-03-27 | 1991-12-11 | Leybold Aktiengesellschaft | Lecksuchgerät und Betriebsverfahren dazu |
DE3865012D1 (de) * | 1988-06-01 | 1991-10-24 | Leybold Ag | Pumpsystem fuer ein lecksuchgeraet. |
US4893497A (en) * | 1988-09-12 | 1990-01-16 | Philip Danielson | Leak detection system |
FR2653558B1 (fr) * | 1989-10-23 | 1994-06-10 | Cit Alcatel | Systeme de detection de fuites a gaz traceur. |
ATE117410T1 (de) * | 1990-07-06 | 1995-02-15 | Cit Alcatel | Zweite stufe für mechanische vakuumpumpeinheit und lecküberwachungssystem zur anwendung dieser einheit. |
FR2666410B1 (fr) * | 1990-09-05 | 1993-10-08 | Alcatel Cit | Detecteur de fuite haut flux a trois filtres moleculaires. |
-
1991
- 1991-09-24 FR FR9111755A patent/FR2681688B1/fr not_active Expired - Fee Related
-
1992
- 1992-09-17 EP EP92402551A patent/EP0534825B1/de not_active Expired - Lifetime
- 1992-09-17 DE DE69205654T patent/DE69205654T2/de not_active Expired - Fee Related
- 1992-09-17 ES ES92402551T patent/ES2078708T3/es not_active Expired - Lifetime
- 1992-09-17 AT AT92402551T patent/ATE129569T1/de not_active IP Right Cessation
- 1992-09-17 DK DK92402551.3T patent/DK0534825T3/da active
- 1992-09-23 US US07/949,155 patent/US5341671A/en not_active Expired - Lifetime
- 1992-09-24 JP JP04254696A patent/JP3124842B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
ES2078708T3 (es) | 1995-12-16 |
DE69205654D1 (de) | 1995-11-30 |
US5341671A (en) | 1994-08-30 |
EP0534825A1 (de) | 1993-03-31 |
JP3124842B2 (ja) | 2001-01-15 |
DK0534825T3 (da) | 1995-12-04 |
DE69205654T2 (de) | 1996-03-21 |
JPH05223681A (ja) | 1993-08-31 |
FR2681688B1 (fr) | 1993-11-19 |
EP0534825B1 (de) | 1995-10-25 |
FR2681688A1 (fr) | 1993-03-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |