EP4202227A4 - Pompe à vide, pale fixe, et élément d'espacement - Google Patents

Pompe à vide, pale fixe, et élément d'espacement Download PDF

Info

Publication number: EP4202227A4
Authority: EP; European Patent Office
Prior art keywords: spacer; vacuum pump; fixed blade; blade; fixed
Prior art date: 2020-08-21
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

EP21858144.5A

Other languages

German (de)

English (en)

Other versions

EP4202227A1 (fr

Inventor

Tooru Miwata

Yongwei Shi

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Edwards Japan Ltd

Original Assignee

Edwards Japan Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2020-08-21

Filing date

2021-07-30

Publication date

2024-09-11

2021-07-30 Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd

2023-06-28 Publication of EP4202227A1 publication Critical patent/EP4202227A1/fr

2024-09-11 Publication of EP4202227A4 publication Critical patent/EP4202227A4/fr

Status Pending legal-status Critical Current

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/545—Ducts
- F04D29/547—Ducts having a special shape in order to influence fluid flow

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Fluid Mechanics (AREA)
Non-Positive Displacement Air Blowers (AREA)

EP21858144.5A 2020-08-21 2021-07-30 Pompe à vide, pale fixe, et élément d'espacement Pending EP4202227A4 (fr)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP2020140495A JP7546412B2 (ja)	2020-08-21	2020-08-21	真空ポンプ、固定翼、およびスペーサ
PCT/JP2021/028253 WO2022038996A1 (fr)	2020-08-21	2021-07-30	Pompe à vide, pale fixe, et élément d'espacement

Publications (2)

Publication Number	Publication Date
EP4202227A1 EP4202227A1 (fr)	2023-06-28
EP4202227A4 true EP4202227A4 (fr)	2024-09-11

Family

ID=80322644

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP21858144.5A Pending EP4202227A4 (fr)	2020-08-21	2021-07-30	Pompe à vide, pale fixe, et élément d'espacement

Country Status (7)

Country	Link
US (1)	US20230323890A1 (fr)
EP (1)	EP4202227A4 (fr)
JP (1)	JP7546412B2 (fr)
KR (1)	KR20230050310A (fr)
CN (1)	CN115803530A (fr)
IL (1)	IL300054A (fr)
WO (1)	WO2022038996A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP4325061A1 (fr) *	2023-12-20	2024-02-21	Pfeiffer Vacuum Technology AG	Pompe à vide turbomoléculaire

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2001011240A1 (fr) *	1999-08-07	2001-02-15	Leybold Vakuum Gmbh	Pompe a vide a friction avec elements actifs de pompage
JP2019060241A (ja) *	2017-09-25	2019-04-18	株式会社島津製作所	ターボ分子ポンプ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE10338222A1 (de) *	2003-08-20	2005-03-10	Leybold Vakuum Gmbh	Kombinierter Antrieb mit Lagerung
JP4749054B2 (ja)	2005-06-22	2011-08-17	エドワーズ株式会社	ターボ分子ポンプ、およびターボ分子ポンプの組み立て方法
WO2010007975A1 (fr) *	2008-07-14	2010-01-21	エドワーズ株式会社	Pompe à vide
JP7015106B2 (ja)	2016-08-30	2022-02-02	エドワーズ株式会社	真空ポンプ、および真空ポンプに備わる回転円筒体
JP6782141B2 (ja)	2016-10-06	2020-11-11	エドワーズ株式会社	真空ポンプ、ならびに真空ポンプに備わるらせん状板、スペーサおよび回転円筒体

2020
- 2020-08-21 JP JP2020140495A patent/JP7546412B2/ja active Active
2021
- 2021-07-30 IL IL300054A patent/IL300054A/en unknown
- 2021-07-30 WO PCT/JP2021/028253 patent/WO2022038996A1/fr unknown
- 2021-07-30 CN CN202180049707.XA patent/CN115803530A/zh active Pending
- 2021-07-30 EP EP21858144.5A patent/EP4202227A4/fr active Pending
- 2021-07-30 KR KR1020237000181A patent/KR20230050310A/ko active Search and Examination
- 2021-07-30 US US18/006,290 patent/US20230323890A1/en active Pending

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2001011240A1 (fr) *	1999-08-07	2001-02-15	Leybold Vakuum Gmbh	Pompe a vide a friction avec elements actifs de pompage
JP2019060241A (ja) *	2017-09-25	2019-04-18	株式会社島津製作所	ターボ分子ポンプ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2022038996A1 *

Also Published As

Publication number	Publication date
CN115803530A (zh)	2023-03-14
JP2022035881A (ja)	2022-03-04
IL300054A (en)	2023-03-01
US20230323890A1 (en)	2023-10-12
KR20230050310A (ko)	2023-04-14
EP4202227A1 (fr)	2023-06-28
WO2022038996A1 (fr)	2022-02-24
JP7546412B2 (ja)	2024-09-06

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EP4265539A4 (fr)	2024-08-07	Élément tête de pompe et tête de pompe comprenant celui-ci, et contenant
KR102431914B9 (ko)	2023-03-23	임펠러 및 이를 포함하는 펌프
ITTO20010523A0 (it)	2001-06-01	Cuscinetto fluido idrostatico con alveoli, e procedimento per la sua fabbricazione.
JP2023130812A5 (fr)	2024-05-29
EP4179851C0 (fr)	2024-07-03	Agencement d'électrode
EP3899279C0 (fr)	2024-04-24	Pompe péristaltique à doigts de pompage améliorés
EP4077944C0 (fr)	2024-04-24	Pompe à piston axial avec plaque inclinée
EP4303446A4 (fr)	2025-01-08	Pompe à vide
EP4212729A4 (fr)	2024-08-14	Pompe à vide
EP4118336A4 (fr)	2024-01-24	Pompe péristaltique
UA46873S (uk)	2024-10-03	1.-2. прикраса новорічна - ялинка
UA45722S (uk)	2023-08-10	1.-6. труси-підгузки
UA47125S (uk)	2025-01-16	1. етикетка «хрустишка»
UA47006S (uk)	2024-12-05	1.-2. кондитерський виріб - вафля «choco-knops»
UA46893S (uk)	2024-10-10	1. етикетка «taylor»
EP4030058C0 (fr)	2023-08-09	Pompe à roue à aubes flexible
UA46276S (uk)	2024-02-08	1.-2. етикетка «fratelli maracuja»
UA45536S (uk)	2023-05-11	1. джгут-турнікет кровоспинний
UA47176S (uk)	2025-01-30	1. етикетка
UA46816S (uk)	2024-09-12	1. етикетка

Legal Events

Date	Code	Title	Description
2022-02-25	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE
2023-05-26	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
2023-05-26	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE
2023-06-28	17P	Request for examination filed	Effective date: 20230119
2023-06-28	AK	Designated contracting states	Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
2023-11-29	DAV	Request for validation of the european patent (deleted)
2023-11-29	DAX	Request for extension of the european patent (deleted)
2024-09-11	A4	Supplementary search report drawn up and despatched	Effective date: 20240814
2024-09-11	RIC1	Information provided on ipc code assigned before grant	Ipc: F04D 19/04 20060101AFI20240808BHEP