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EP4202227A4 - VACUUM PUMP, FIXED BLADE, AND SPACER - Google Patents

VACUUM PUMP, FIXED BLADE, AND SPACER Download PDF

Info

Publication number
EP4202227A4
EP4202227A4 EP21858144.5A EP21858144A EP4202227A4 EP 4202227 A4 EP4202227 A4 EP 4202227A4 EP 21858144 A EP21858144 A EP 21858144A EP 4202227 A4 EP4202227 A4 EP 4202227A4
Authority
EP
European Patent Office
Prior art keywords
spacer
vacuum pump
fixed blade
blade
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP21858144.5A
Other languages
German (de)
French (fr)
Other versions
EP4202227A1 (en
Inventor
Tooru Miwata
Yongwei Shi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Publication of EP4202227A1 publication Critical patent/EP4202227A1/en
Publication of EP4202227A4 publication Critical patent/EP4202227A4/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/545—Ducts
    • F04D29/547—Ducts having a special shape in order to influence fluid flow

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP21858144.5A 2020-08-21 2021-07-30 VACUUM PUMP, FIXED BLADE, AND SPACER Pending EP4202227A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020140495A JP7546412B2 (en) 2020-08-21 2020-08-21 Vacuum pumps, stators and spacers
PCT/JP2021/028253 WO2022038996A1 (en) 2020-08-21 2021-07-30 Vacuum pump, fixed blade, and spacer

Publications (2)

Publication Number Publication Date
EP4202227A1 EP4202227A1 (en) 2023-06-28
EP4202227A4 true EP4202227A4 (en) 2024-09-11

Family

ID=80322644

Family Applications (1)

Application Number Title Priority Date Filing Date
EP21858144.5A Pending EP4202227A4 (en) 2020-08-21 2021-07-30 VACUUM PUMP, FIXED BLADE, AND SPACER

Country Status (7)

Country Link
US (1) US20230323890A1 (en)
EP (1) EP4202227A4 (en)
JP (1) JP7546412B2 (en)
KR (1) KR20230050310A (en)
CN (1) CN115803530A (en)
IL (1) IL300054A (en)
WO (1) WO2022038996A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4325061A1 (en) * 2023-12-20 2024-02-21 Pfeiffer Vacuum Technology AG Turbomolecular vacuum pump

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001011240A1 (en) * 1999-08-07 2001-02-15 Leybold Vakuum Gmbh Friction vacuum pump with active pumping elements
JP2019060241A (en) * 2017-09-25 2019-04-18 株式会社島津製作所 Turbo molecular pump

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10338222A1 (en) * 2003-08-20 2005-03-10 Leybold Vakuum Gmbh Combined drive with storage
JP4749054B2 (en) 2005-06-22 2011-08-17 エドワーズ株式会社 Turbomolecular pump and method of assembling turbomolecular pump
US8690525B2 (en) * 2008-07-14 2014-04-08 Edwards Japan Limited Vacuum pump
JP7015106B2 (en) 2016-08-30 2022-02-02 エドワーズ株式会社 Vacuum pumps and rotating cylinders included in vacuum pumps
JP6782141B2 (en) 2016-10-06 2020-11-11 エドワーズ株式会社 Vacuum pumps, as well as spiral plates, spacers and rotating cylinders on vacuum pumps

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001011240A1 (en) * 1999-08-07 2001-02-15 Leybold Vakuum Gmbh Friction vacuum pump with active pumping elements
JP2019060241A (en) * 2017-09-25 2019-04-18 株式会社島津製作所 Turbo molecular pump

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2022038996A1 *

Also Published As

Publication number Publication date
KR20230050310A (en) 2023-04-14
EP4202227A1 (en) 2023-06-28
CN115803530A (en) 2023-03-14
JP2022035881A (en) 2022-03-04
US20230323890A1 (en) 2023-10-12
JP7546412B2 (en) 2024-09-06
WO2022038996A1 (en) 2022-02-24
IL300054A (en) 2023-03-01

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A4 Supplementary search report drawn up and despatched

Effective date: 20240814

RIC1 Information provided on ipc code assigned before grant

Ipc: F04D 19/04 20060101AFI20240808BHEP