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EP3295468B1 - Anode à rayons x - Google Patents

Anode à rayons x Download PDF

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Publication number
EP3295468B1
EP3295468B1 EP16728823.2A EP16728823A EP3295468B1 EP 3295468 B1 EP3295468 B1 EP 3295468B1 EP 16728823 A EP16728823 A EP 16728823A EP 3295468 B1 EP3295468 B1 EP 3295468B1
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EP
European Patent Office
Prior art keywords
anode
emission layer
ray
ray anode
emission
Prior art date
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EP16728823.2A
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German (de)
English (en)
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EP3295468A1 (fr
EP3295468C0 (fr
Inventor
Nico Eberhardt
Wolfram Knabl
Stefan SCHÖNAUER
Andreas WUCHERPFENNIG
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Plansee SE
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Plansee SE
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/083—Bonding or fixing with the support or substrate
    • H01J2235/084—Target-substrate interlayers or structures, e.g. to control or prevent diffusion or improve adhesion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/088—Laminated targets, e.g. plurality of emitting layers of unique or differing materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes

Definitions

  • the present invention relates to an X-ray anode according to the preamble of claim 1.
  • X-ray anodes are required in X-ray devices such as computer tomographs in medical diagnostics or luggage X-ray machines.
  • X-ray anodes When an X-ray device is in operation, electrons emitted by a cathode are accelerated to the X-ray anode by a high voltage and penetrate the anode material, creating X-rays. A large part of the energy of the electron beam is dissipated as heat in the X-ray anode, which results in very high thermal loads in the focal area of the X-ray anode.
  • X-ray anodes are typically designed as a fixed component in the form of a standing anode with a focal spot or as a rotating component in the form of a rotating anode with an annular focal path.
  • Linear extensions for X-ray anodes also known as linear anodes, with an elongated focal path are also known.
  • Linear anodes do not rotate and are usually designed as static anodes, but can be moved, for example, for successive X-ray images during a computer tomography image.
  • X-ray anodes are constructed as a composite of at least one carrier body, which provides mechanical stability and is preferably made of a high-melting material with high thermal conductivity, and at least one emission layer, also referred to as a focal coating or focal track coating, in which X-rays are generated when high-energy electrons hit them.
  • this carrier body usually has a bevelled, cylinder-like basic shape, on whose usually bevelled front side a comparatively thin, disc-shaped burning coating made of an X-ray generating material, for example tungsten or a tungsten alloy, is arranged.
  • an X-ray generating material for example tungsten or a tungsten alloy
  • Rotating anodes usually have a ring-shaped burning coating made of a
  • the burning coating is scanned by the electron beam at specific points along a ring-shaped path, which allows the thermal load to be better distributed in the rotating anode.
  • Linear anodes have an elongated orientation, for example a bar-shaped basic shape, an example of which is shown in WO 2013/020151 A1 described.
  • an elongated burning coating is typically arranged on a side surface, not the front side, of the elongated carrier body.
  • the service life of X-ray anodes is very limited due to the interaction with the high-energy electron beam and the high thermo-mechanical loads, which occur cyclically in particular with rotating anodes.
  • the burning coating becomes fatigued and microcracks can form in the burning coating, which can spread into the body of the X-ray anode in a network-like manner with further load. Damage to the burning coating has adverse consequences for the X-ray dose yield and has a negative effect on the image quality of the X-ray images. If the X-ray dose yield falls below a critical threshold value, either the entire X-ray anode must be replaced or at least the damaged burning coating must be reworked or renewed.
  • the used burning coating can be removed until a crack-free surface is reached, which is not possible indefinitely due to the limited thickness of the burning track coating.
  • the service life of the X-ray anode can also be extended by applying a new coating to the previously removed, used coating.
  • JP 2003 142000 A JP 2003 142000 A
  • this process for preparing the combustion deposit is extremely complex and expensive. Industry therefore needs X-ray anodes with a long service life.
  • DE 10 2005 049 519 A1 shows an X-ray anode with an X-ray active layer, which has a high thermomechanical load capacity by introducing at least one intermediate layer and a cover layer in order to achieve a comparatively long service life of the X-ray anode.
  • the object of the present invention is to provide an X-ray anode with an extended service life. This object is achieved by an X-ray anode according to claim 1. Advantageous further developments of the invention are specified in the subclaims.
  • an X-ray anode for generating X-rays which has a carrier body and a first and at least one second emission layer made of X-ray-emitting material, wherein the emission layers are separated on one side of the carrier body by an intermediate layer and arranged at a distance in a central direction of the X-ray anode.
  • the intermediate layer between the emission layers is made of the same material as the carrier body.
  • the first and at least one second emission layer are arranged on the side of the X-ray anode, hereinafter also referred to as the focal path side, which faces the electron beam generating X-rays when the X-ray anode is in operation.
  • the central direction generally refers to a direction that is oriented perpendicular to a plane that is essentially spanned by the extent of the first emission layer.
  • the central direction corresponds in any case to the axis of rotation of the rotating anode.
  • the central direction refers to the axial direction of the standing anode.
  • the plane defining the central direction corresponds to the focal path side of the linear anode, i.e. the usually flat side surface with the elongated emission layer which, in the installed position of the X-ray anode, faces the electron beam generating the X-ray radiation.
  • the X-ray anode has, in addition to a first, active emission layer, which is arranged on an outer surface of the X-ray anode, at least one further, second emission layer, which is initially hidden inside the carrier body and protected by an intermediate layer.
  • a first emission layer which is used to generate X-rays by interacting with high-energy electrons
  • the at least a second emission layer is protected from the impact of electrons by an appropriately dimensioned intermediate layer and is therefore inactive.
  • the intermediate layer can be removed down to the surface of the previously inactive second emission layer.
  • the exposed second emission layer now becomes the active emission layer, onto which the electrons impinge during further operation of the X-ray tube and in which X-rays are generated by interaction with the X-ray anode material.
  • the X-ray anode according to the invention therefore only needs to be replaced when all emission layers are worn out.
  • the service life of the X-ray anode according to the invention can be significantly extended, approximately doubled compared to a conventionally constructed X-ray anode.
  • the fact that the intermediate layer between the emission layers is made of the same material as the carrier body achieves manufacturing advantages, among other things.
  • further second emission layers can be provided in the X-ray anode, each of which is arranged at a distance in the central direction by an intermediate layer and can be activated successively, i.e. they are gradually exposed after the emission layer above them has worn out and used to generate X-rays.
  • the average service life of such an X-ray anode can be many times longer than that of a conventional X-ray anode with only one emission layer.
  • the emission layers, the intermediate layer and the carrier body of the X-ray anode are each bonded together in a material-locking manner for the purpose of improved heat dissipation.
  • the distance of the inactive second emission layer from the surface of the X-ray anode in the central direction should be greater than the average penetration depth of the electrons into the X-ray anode.
  • the thickness of the intermediate layer i.e. the distance in the central direction between two adjacent emission layers, is at least 0.5 mm, preferably at least 2 mm. This ensures that the interaction of the electron beam with the initially inactive second emission layer and thus the risk of premature damage is as low as possible.
  • the thickness is advantageously less than 10 mm, in particular less than 5 mm.
  • the first and at least one second emission layer are arranged in such a way that the geometry and position of the active emission layer in each case does not change significantly when the active emission layer is changed.
  • the first and second emission layers are congruent in the central direction in an impact area of the electrons when viewed from the focal path side.
  • the impact area of the electrons refers to the area on the surface of the X-ray anode that is swept over by the electron beam when the X-ray anode is in operation.
  • the distance between the first and second emission layers is essentially constant in the impact area of the electrons.
  • the congruent or parallel arrangement of the first and second emission layers ensures that the geometry of the active emission layer and thus the functionality of the X-ray anode remains unchanged when an unused emission layer is exposed and becomes the active emission layer.
  • a change in the operating parameters such as complex repositioning of the X-ray anode or changing the electron beam path is therefore not necessary.
  • the X-ray device may be provided with a displaceability of the X-ray anode in the central direction.
  • Materials known for generating X-rays such as tungsten or tungsten alloys, in particular tungsten-rhenium alloys, can be used as materials for the emission layers.
  • the same material is preferably selected for the first and at least one second emission layer.
  • the thickness of the emission layer is usually in the range of 0.2 to 2 mm.
  • Suitable materials for the carrier body are in particular molybdenum and molybdenum-based alloys (e.g. TZM, MHC), tungsten or tungsten-based alloys as well as an alloy based on copper.
  • a molybdenum-based, tungsten-based or copper-based alloy refers to an alloy which contains at least 50 at.% molybdenum, tungsten or copper, in particular at least 90 at.% molybdenum, tungsten or copper.
  • TZM refers to a molybdenum alloy with a titanium content of 0.5 wt.%, an irkonium content of 0.08 wt.%, a carbon content of 0.01-0.04 wt.% and the remaining content (apart from impurities) molybdenum.
  • MHC in this context is understood to mean a molybdenum alloy which has a hafnium content of 1.0 to 1.3 wt.%, a carbon content of 0.05 to 0.12 wt.%, an oxygen content of less than 0.06 wt.% and the remaining content (apart from impurities) molybdenum.
  • the carrier body may also comprise a tungsten-copper composite, a copper composite, a particle-reinforced copper alloy, a particle-reinforced aluminum alloy, or graphite.
  • the intermediate layer that separates the individual emission layers from one another is made from the same material as the carrier body. This brings with it, among other things, manufacturing advantages.
  • the thermal expansion coefficient of the material of the intermediate layer does not differ by more than 35% from the thermal expansion coefficient of the first or second emission layer.
  • the active emission layer and the areas immediately adjacent to it are the areas of the X-ray anode that are most thermally stressed. Excessive differences in the thermal expansion coefficient would cause high mechanical stresses during operation, which could impair the service life of the X-ray anode.
  • the intermediate layer can be constructed homogeneously in a simple variant, but it can also be structured into different functional intermediate layers, in variants that are not part of the claimed invention.
  • the intermediate layer can, for example, have at least one barrier layer.
  • a barrier layer can be designed as a diffusion barrier layer to suppress diffusion, for example unwanted carbon diffusion into the emission layer, and for this purpose can be made of rhenium, molybdenum, tantalum, niobium, zirconium, titanium or compounds or alloys of these metals or combinations of these metals.
  • the barrier layer can be designed as a barrier against the propagation of cracks that occur in the active emission layer during operation of the X-ray anode due to the interaction with high-energy electrons.
  • a barrier layer helps prevent the propagation of these cracks or the formation of a crack network in the as yet unused second emission layer.
  • a barrier layer designed to suppress cracks can consist of tantalum, niobium or rhenium, for example. In general, when choosing the material for the intermediate layer or individual intermediate layers immediately adjacent to the emission layer, care should be taken to ensure that no disruptive diffusion of the material of the intermediate layer itself into the first or second emission layer takes place.
  • the intermediate layer can have at least one binding layer which improves the bonding of the emission layer.
  • a binding layer can preferably be enriched with the components of the emission layer, such as tungsten or rhenium or a compound thereof.
  • the idea of providing the X-ray anode with additional emission layers that are initially inactive and can be activated step by step can be transferred to X-ray anodes of various designs.
  • the X-ray anode according to the invention can be designed as a standing anode or as a linear anode.
  • the X-ray anode can particularly preferably be designed as a rotating anode.
  • the first and second emission layers can advantageously be ring-shaped and arranged one above the other in the central direction.
  • Rotating anodes have a relatively high basic price and therefore it is economically worthwhile, particularly in the case of rotating anodes, to repair the emission layer when it is worn out instead of replacing the entire rotating anode.
  • the rotating anode according to the invention has the advantage over a repaired rotating anode that the second emission layer is still untouched when it is finally used.
  • the emission layers and intermediate layer can be manufactured as a layered composite using powder metallurgy processes by pressing, sintering and forging appropriately layered powders or powder mixtures.
  • the emission layers and the intermediate layer are preferably produced together with the carrier body.
  • a pressed part is produced from appropriately layered powder or powder mixture by placing the powder or powder mixture for the carrier body in a fitting shape and pressing it, then the powder or powder mixture for the second emission layer is applied and pressed, in a next step the powder or powder mixture for the intermediate layer is applied and pressed and finally the powder or powder mixture for the first emission layer is applied and pressed.
  • the pressed part obtained in this way is then sintered, forged and mechanically reworked in a known manner.
  • the material has a melting point such as copper
  • a layer composite made up of emission layers and an intermediate layer produced using powder metallurgy can be back-cast with a melt made up of the carrier body material.
  • graphite is used as the material for the carrier body, it is difficult to reliably connect the carrier body to an independently powder metallurgically produced layer composite with the emission layers.
  • the emission layers and the intermediate layer can be applied to the carrier body using known coating processes such as chemical vapor deposition, physical vapor deposition or thermal coating processes such as plasma spraying.
  • Fig. 1 shows a schematic sectional view of a standing anode 10, the basic structure of which is known in the prior art.
  • a first emission layer 14 is arranged in a known manner on the beveled end face of an essentially cylindrical carrier body 13, which faces the electron beam during operation, onto which high-energy electrons are accelerated during operation, whereby X-rays are generated in interaction with the material of the emission layer.
  • the standing anode according to the invention differs from the prior art in that it has a second emission layer 15, which is located inside the standing anode and is arranged at a distance from the first emission layer in the central direction 17.
  • the central direction 17 corresponds to the axial direction of the standing anode 10.
  • the intermediate layer 16 separates the two emission layers 14, 15 and protects the initially inactive second emission layer 15 from the electrons striking the first emission layer. If the first emission layer 14 is no longer suitable for further operation, the second emission layer 15 is exposed and is used to generate X-rays.
  • the standing anode according to the invention can therefore be used again after the first emission layer has worn out and only needs to be reworked or replaced when both emission layers are unusable.
  • the standing anode 10 according to the invention therefore has a service life that is approximately twice as long as that of a standing anode of the prior art.
  • the geometry and position of the second emission layer 15 is preferably adapted to that of the first emission layer 14, so that when the emission layer is changed, the standing anode does not have to be laboriously readjusted, apart from a shift in the central direction.
  • the first and second emission layers 14, 15 are parallel to one another and congruent when viewed along the central direction 17.
  • Fig. 2 and Fig. 3 show the application of the inventive idea to a linear anode 11.
  • An example of a linear anode of the prior art is shown in WO 2013/020151 A1 described.
  • Linear anodes have an elongated extension along an extension direction, in the present embodiment a bar-shaped basic shape, wherein the main extension direction of the anode does not necessarily have to run along a straight line, but can also be along a curved line.
  • a cuboid that has a curvature over at least part of its course is also to be understood as a linear anode within the scope of the present invention.
  • the first and second emission layers 14, 15 are arranged on the side surface of the cuboid-shaped carrier body that faces the electron beam during operation.
  • the first emission layer 14 is elongated and spans a plane that is perpendicular to the central direction 17.
  • the first and second emission layers 14, 15 are separated by an intermediate layer 16 and arranged at a distance in the central direction 17.
  • the distance between the two emission layers 14, 15 is constant over the planar extent of the emission layer.
  • the first and second emission layers 14, 15 are congruent when viewed along the central direction 17. Analogous to the standing anode, the second emission layer 15 is only used when the necessary X-ray dose yield can no longer be achieved with the first emission layer 14 and the first emission layer 14 and the intermediate layer 16 have been ground off for further use of the linear anode.
  • a rotary anode 12 according to the invention is shown schematically with a plate-shaped, rotationally symmetrical carrier body 13.
  • a first emission layer 14 is arranged in an annular region on the bevelled shoulders of the carrier body on the side that faces the electron beam during operation. This region corresponds to the Impact area 50 of the electrons during operation of the rotating anode.
  • the rotating anode 12 according to the invention has a first emission layer 14 and a second emission layer 15, which is arranged at a distance in the central direction 17, separated by an intermediate layer 16.
  • the central direction 17 is given by the direction of the axis of rotation of the rotating anode.
  • the second emission layer 15 extends beyond the impact area 50 of the electrons into an inner region. As explained below, this has manufacturing reasons in powder metallurgical production, but is clearly not absolutely necessary. If the first emission layer 14 is no longer suitable for further use, it and the intermediate layer 16 are removed.
  • the second emission layer 15 when grinding or turning the rotary anode, that part of the second emission layer 15 is also removed which is located in the inner region, i.e. outside the region over which the first emission layer extends.
  • the second emission layer 15 then has the same extent as the first emission layer 14 as the active emission layer.
  • the first and second emission layers 14, 15 are arranged parallel to one another and in the area of impact 50 of the electrons, in the present rotary anode the two emission layers 14, 15 are congruent in a viewing direction along the central direction 17.
  • the geometry of the two emission layers 14, 15 is thus coordinated with one another so that when the active emission layer is changed, no further adjustments to the rotary anode are necessary apart from a shift in the central direction.
  • the material of the first and second emission layers 14, 15 is also coordinated with one another and the same material is used for the two emission layers 14, 15 so that the emitted radiation spectrum of the X-ray anode does not change when the active emission layer is changed.
  • the intermediate layer 16 protects the initially inactive second emission layer 15 from the incoming electrons during operation of the rotating anode and should be dimensioned with sufficient thickness to prevent premature damage from interaction with incoming electrons.
  • a distance (in the central direction) between the two emission layers of between 2 and 5 mm has proven to be advantageous, as this on the one hand ensures sufficient protection under the usual loads, and on the other hand reduces the moment of inertia of the Rotating anode is not significantly increased by the additional mass.
  • the first emission layer is firmly bonded to the intermediate layer, and the second emission layer is firmly bonded to the intermediate layer and to the carrier body. It is also advantageous if the intermediate layer forms a barrier against the further spread of cracks such as those that occur in the active emission layer.
  • the intermediate layer 16 can also form a barrier against the diffusion of harmful substances into the emission layers (for example carbon from the common carrier body material TZM or MHC). It is also advantageous if the intermediate layer 16 improves the bond between the emission layer and the carrier body.
  • the intermediate layer 16 can be constructed from several different layers with different functionality, in particular from a barrier layer and/or binding layer. Such an intermediate layer is not part of the claimed invention.
  • Fig. 7 The left shows the flow chart for a powder metallurgical manufacturing process for an X-ray anode according to the invention, in particular a rotating anode.
  • the manufacturing process according to the invention is primarily suitable for the production of a metallic carrier body from a
  • FIG. 7 On the right, the intermediate products created in individual process steps and the final product are shown schematically using the example of a rotating anode.
  • the pressed part is designated with 18, 18', 18", 18′′′, the sintered molded body with 19, the forged blank with 20 and the finished rotating anode with 12.
  • Fig. 8a, Fig. 8b , Fig. 9a and Fig. 9b show some of these intermediate products using a specific embodiment in which a TZM powder is used as the starting powder for the carrier body and a W95Re5 powder for the two emission layers.
  • the powders were layered according to the process steps described above, pressed at pressures of up to 50 kN/cm 2 and then sintered at a temperature of approx. 2000°C to 2400°C.
  • the sintered component 19 thus obtained is in Fig. 8a in a side view and in Fig. 8b shown in a sectional side view.
  • the sintered component was then forged in a screw press at temperatures above 1300°C to form a component with hanging shoulders.
  • the forging blank 20 is in Fig.
  • the emission layers 14,15 extend over the entire extent of the component for manufacturing reasons.
  • the powder for the emission layers is only applied to the hanging shoulders in the area ultimately required.
  • the forged blank is then mechanically reworked, including the first Emission layer is ground off in the inner area that is not required.
  • a radiation body can be arranged (in a known manner) on the side of the rotating anode opposite the focal path side.

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  • X-Ray Techniques (AREA)

Claims (9)

  1. Anode à rayons X (10, 11, 12) destinée à produire un rayonnement X, présentant un corps de support (13) et une première et au moins une deuxième couche d'émission (14, 15), qui produisent un rayonnement X sous l'impact d'électrons, dans laquelle l'anode à rayons X (10, 11, 12) présente une direction centrale (17), qui est orientée de manière perpendiculaire sur un plan, qui est formé sensiblement par l'extension de la première couche d'émission (14) ou qui, lorsque l'anode à rayons X est une anode rotative, correspond à l'axe de rotation de l'anode rotative, et dans laquelle la première couche d'émission (14) est disposée sur une surface extérieure de l'anode à rayons X (10, 11, 12) et peut être utilisée en tant que couche d'émission active (14) pour produire le rayonnement X par interaction avec les électrons de haute énergie et la distance entre les au moins deux couches d'émission (14, 15), lesquelles sont séparées par une couche intermédiaire (16), dans la direction centrale (17) de l'anode à rayons X (10, 11, 12) est d'au moins 0,5 mm si bien que l'au moins une deuxième couche d'émission (15) est protégée de l'impact d'électrons et est par voie de conséquence inactive,
    caractérisée en ce que
    les couches d'émission (14, 15) sont disposées sur un côté du corps de support (13) si bien que la première couche d'émission (14) et la couche intermédiaire (16) peuvent être retirées jusqu'à la surface de la deuxième couche d'émission (15) à ce moment-là inactive et la deuxième couche d'émission (15) exposée devient la couche d'émission active, dans laquelle la couche intermédiaire (16) est formée entre les couches d'émission (14, 15) composées du même matériau que le corps de support (13).
  2. Anode à rayons X selon la revendication 1, caractérisée en ce que la première et la deuxième couche d'émission (14, 15) se superposent le long de la direction centrale (17) dans une direction d'observation dans une zone d'impact des électrons (50).
  3. Anode à rayons X selon l'une quelconque des revendications précédentes, caractérisée en ce que la distance entre la première et la deuxième couche d'émission (14, 15) est au moins par endroits sensiblement constante.
  4. Anode à rayons X selon l'une quelconque des revendications précédentes, caractérisée en ce que la première et/ou la deuxième couche d'émission (14, 15) sont fabriquées à partir de tungstène, de rhénium ou d'un alliage comme en particulier un alliage de tungstène-rhénium.
  5. Anode à rayons X selon l'une quelconque des revendications précédentes, caractérisée en ce que la première et l'au moins deuxième couche d'émission (14, 15) sont fabriquées à partir du même matériau.
  6. Anode à rayons X selon l'une quelconque des revendications précédentes, caractérisée en ce que le corps de support (13) présente au moins un matériau du groupe molybdène, tungstène, cuivre, un alliage à base de tungstène, de molybdène ou de cuivre, un matériau composite à base de tungstène-cuivre, un matériau composite à base de cuivre, un alliage de cuivre renforcé par des particules, un alliage d'aluminium renforcé par des particules ou du graphite.
  7. Anode à rayons X selon l'une quelconque des revendications précédentes, caractérisée en ce que l'anode à rayons X est exécutée en tant qu'anode verticale (10) ou anode linéaire (11).
  8. Anode à rayons X selon l'une quelconque des revendications 1 à 6, caractérisée en ce que l'anode à rayons X est exécutée en tant qu'anode rotative (12).
  9. Anode à rayons X selon la revendication 8, caractérisée en ce que la première et la deuxième couche d'émission (14, 15) sont réalisées avec une forme annulaire et sont disposées l'une au-dessus de l'autre dans une direction centrale (17).
EP16728823.2A 2015-05-08 2016-05-02 Anode à rayons x Active EP3295468B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ATGM113/2015U AT14991U1 (de) 2015-05-08 2015-05-08 Röntgenanode
PCT/AT2016/000050 WO2016179615A1 (fr) 2015-05-08 2016-05-02 Anode à rayons x

Publications (3)

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EP3295468A1 EP3295468A1 (fr) 2018-03-21
EP3295468C0 EP3295468C0 (fr) 2025-01-08
EP3295468B1 true EP3295468B1 (fr) 2025-01-08

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US (1) US10622182B2 (fr)
EP (1) EP3295468B1 (fr)
JP (1) JP6564881B2 (fr)
KR (1) KR101991610B1 (fr)
CN (1) CN107592940B (fr)
AT (1) AT14991U1 (fr)
WO (1) WO2016179615A1 (fr)

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US10624195B2 (en) * 2017-10-26 2020-04-14 Moxtek, Inc. Tri-axis x-ray tube
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US20180130631A1 (en) 2018-05-10
US10622182B2 (en) 2020-04-14
KR20180003557A (ko) 2018-01-09
JP6564881B2 (ja) 2019-08-21
AT14991U1 (de) 2016-10-15
CN107592940B (zh) 2019-12-13
KR101991610B1 (ko) 2019-06-20
JP2018514925A (ja) 2018-06-07
WO2016179615A1 (fr) 2016-11-17
CN107592940A (zh) 2018-01-16
EP3295468A1 (fr) 2018-03-21
EP3295468C0 (fr) 2025-01-08

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