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EP3032107A3 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe Download PDF

Info

Publication number
EP3032107A3
EP3032107A3 EP15191438.9A EP15191438A EP3032107A3 EP 3032107 A3 EP3032107 A3 EP 3032107A3 EP 15191438 A EP15191438 A EP 15191438A EP 3032107 A3 EP3032107 A3 EP 3032107A3
Authority
EP
European Patent Office
Prior art keywords
turbomolecular
blade rotor
pump
turbomolecular pump
pumping stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15191438.9A
Other languages
English (en)
French (fr)
Other versions
EP3032107A2 (de
EP3032107B1 (de
Inventor
Florian Bader
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP3032107A2 publication Critical patent/EP3032107A2/de
Publication of EP3032107A3 publication Critical patent/EP3032107A3/de
Application granted granted Critical
Publication of EP3032107B1 publication Critical patent/EP3032107B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F04D29/526—Details of the casing section radially opposing blade tips
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/68—Combating cavitation, whirls, noise, vibration or the like; Balancing by influencing boundary layers
    • F04D29/681—Combating cavitation, whirls, noise, vibration or the like; Balancing by influencing boundary layers especially adapted for elastic fluid pumps
    • F04D29/685—Inducing localised fluid recirculation in the stator-rotor interface

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Die Erfindung betrifft eine Turbomolekularpumpe mit wenigstens einer Turbomolekularpumpstufe, die zumindest einen um eine Achse (34) drehbar gelagerten Schaufelrotor (12) umfasst, wobei eine den Schaufelrotor (12) zumindest teilweise umgebende Wand (16) auf wenigstens einem pumpwirksamen Teilbereich ihrer dem Schaufelrotor (12) zugewandten Seite mit zumindest einer Vertiefung versehen ist. Ferner betrifft die Erfindung eine Turbomolekularpumpemit wenigstens einer Turbomolekularpumpstufe, die zumindest in einem Teilaxialbereich von einem Holweckstator umgeben ist, dessen pumpwirksame Seite dem Schaufelrotor (12) der Turbomolekularpumpstufe zugewandt ist.
EP15191438.9A 2014-12-08 2015-10-26 Turbomolekularpumpe Active EP3032107B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014118083.6A DE102014118083A1 (de) 2014-12-08 2014-12-08 Turbomolekularpumpe

Publications (3)

Publication Number Publication Date
EP3032107A2 EP3032107A2 (de) 2016-06-15
EP3032107A3 true EP3032107A3 (de) 2016-08-31
EP3032107B1 EP3032107B1 (de) 2020-04-15

Family

ID=53673823

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15191438.9A Active EP3032107B1 (de) 2014-12-08 2015-10-26 Turbomolekularpumpe

Country Status (2)

Country Link
EP (1) EP3032107B1 (de)
DE (1) DE102014118083A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2579028A (en) * 2018-11-14 2020-06-10 Edwards Ltd Molecular drag stage
JP7555227B2 (ja) * 2020-10-09 2024-09-24 エドワーズ株式会社 真空ポンプとこれを用いた真空排気システム
CN114352553B (zh) * 2021-12-31 2024-01-09 北京中科科仪股份有限公司 一种旋涡机构及复合分子泵

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0568069A2 (de) * 1992-04-29 1993-11-03 Varian Associates, Inc. Turbomolekularvakuumpumpen
DE29717764U1 (de) * 1997-10-06 1997-11-20 Leybold Vakuum GmbH, 50968 Köln Stator für eine Turbomolekularvakuumpumpe
EP1130269A2 (de) * 2000-03-02 2001-09-05 Pfeiffer Vacuum GmbH Turbomolekularpumpe
DE10111546A1 (de) * 2000-05-15 2002-01-03 Pfeiffer Vacuum Gmbh Gasreibungspumpe

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013213815A1 (de) * 2013-07-15 2015-01-15 Pfeiffer Vacuum Gmbh Vakuumpumpe

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0568069A2 (de) * 1992-04-29 1993-11-03 Varian Associates, Inc. Turbomolekularvakuumpumpen
DE29717764U1 (de) * 1997-10-06 1997-11-20 Leybold Vakuum GmbH, 50968 Köln Stator für eine Turbomolekularvakuumpumpe
EP1130269A2 (de) * 2000-03-02 2001-09-05 Pfeiffer Vacuum GmbH Turbomolekularpumpe
DE10111546A1 (de) * 2000-05-15 2002-01-03 Pfeiffer Vacuum Gmbh Gasreibungspumpe

Also Published As

Publication number Publication date
EP3032107A2 (de) 2016-06-15
EP3032107B1 (de) 2020-04-15
DE102014118083A1 (de) 2016-06-09

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