EP2715139A4 - Vacuum pump - Google Patents

Vacuum pump

Info

Publication number: EP2715139A4
Authority: EP; European Patent Office
Prior art keywords: vacuum pump; vacuum; pump
Prior art date: 2011-06-02
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP12793624.3A

Other languages

German (de)

French (fr)

Other versions

EP2715139A1 (en

EP2715139B1 (en

Inventor

Soichi Kudara

Yasuhiro Niimura

Masami Nagayama

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Ebara Corp

Original Assignee

Ebara Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2011-06-02

Filing date

2012-05-29

Publication date

2014-12-17

2012-05-29 Application filed by Ebara Corp filed Critical Ebara Corp

2014-04-09 Publication of EP2715139A1 publication Critical patent/EP2715139A1/en

2014-12-17 Publication of EP2715139A4 publication Critical patent/EP2715139A4/en

2018-01-10 Application granted granted Critical

2018-01-10 Publication of EP2715139B1 publication Critical patent/EP2715139B1/en

Status Active legal-status Critical Current

2032-05-29 Anticipated expiration legal-status Critical

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C13/00—Adaptations of machines or pumps for special use, e.g. for extremely high pressures
- F04C13/007—Venting; Gas and vapour separation during pumping
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/18—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with similar tooth forms
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
- F04C27/009—Shaft sealings specially adapted for pumps
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/40—Pumps with means for venting areas other than the working chamber, e.g. bearings, gear chambers, shaft seals
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/30—Casings or housings
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2280/00—Arrangements for preventing or removing deposits or corrosion
- F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Applications Or Details Of Rotary Compressors (AREA)

EP12793624.3A 2011-06-02 2012-05-29 Vacuum pump Active EP2715139B1 (en)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP2011123980A JP5677202B2 (en)	2011-06-02	2011-06-02	Vacuum pump
PCT/JP2012/064346 WO2012165645A1 (en)	2011-06-02	2012-05-29	Vacuum pump

Publications (3)

Publication Number	Publication Date
EP2715139A1 EP2715139A1 (en)	2014-04-09
EP2715139A4 true EP2715139A4 (en)	2014-12-17
EP2715139B1 EP2715139B1 (en)	2018-01-10

Family

ID=47259490

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP12793624.3A Active EP2715139B1 (en)	2011-06-02	2012-05-29	Vacuum pump

Country Status (7)

Country	Link
US (1)	US20140112815A1 (en)
EP (1)	EP2715139B1 (en)
JP (1)	JP5677202B2 (en)
KR (1)	KR101760550B1 (en)
CN (1)	CN103477080A (en)
TW (1)	TWI554684B (en)
WO (1)	WO2012165645A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US9752571B2 (en) *	2012-07-03	2017-09-05	Brian J. O'Connor	Multiple segment lobe pump
WO2015197138A1 (en) *	2014-06-27	2015-12-30	Ateliers Busch Sa	Method of pumping in a system of vacuum pumps and system of vacuum pumps
WO2017031807A1 (en) *	2015-08-27	2017-03-02	上海伊莱茨真空技术有限公司	Non-coaxial vacuum pump with multiple driving chambers
FR3065040B1 (en) *	2017-04-07	2019-06-21	Pfeiffer Vacuum	PUMPING GROUP AND USE
DE202017003212U1 (en) *	2017-06-17	2018-09-18	Leybold Gmbh	Multi-stage Roots pump
CN107084135A (en) *	2017-06-29	2017-08-22	德耐尔节能科技（上海）股份有限公司	A kind of dry-type spiral vacuum pump
WO2020255300A1 (en) *	2019-06-19	2020-12-24	樫山工業株式会社	Vacuum pump
FR3119209B1 (en) *	2021-01-25	2023-03-31	Pfeiffer Vacuum	Dry type vacuum pump and pump unit

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2010134427A1 (en) *	2009-05-20	2010-11-25	三菱重工業株式会社	Dry vacuum pump
WO2011019048A1 (en) *	2009-08-14	2011-02-17	株式会社アルバック	Dry pump

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH0733834B2 (en) *	1986-12-18	1995-04-12	株式会社宇野澤組鐵工所	Inner partial-flow reverse-flow cooling multistage three-leaf vacuum pump in which the outer peripheral temperature of the housing with built-in rotor is stabilized
JPH05296171A (en) *	1992-04-13	1993-11-09	Ulvac Japan Ltd	Shaft seal mechanism for positive displacement vacuum pump without using sealing fluid
GB9708397D0 (en) *	1997-04-25	1997-06-18	Boc Group Plc	Improvements in vacuum pumps
JP4007130B2 (en)	2002-09-10	2007-11-14	株式会社豊田自動織機	Vacuum pump
JP4232505B2 (en) *	2003-03-27	2009-03-04	アイシン精機株式会社	Vacuum pump
JP3991918B2 (en) *	2003-05-19	2007-10-17	株式会社豊田自動織機	Roots pump
JP2005105829A (en)	2003-09-26	2005-04-21	Aisin Seiki Co Ltd	Dry pump
JP4767625B2 (en) *	2005-08-24	2011-09-07	樫山工業株式会社	Multi-stage Roots type pump
EP2345813A4 (en) *	2008-10-10	2016-02-17	Ulvac Inc	Dry pump
CN201396281Y (en) *	2009-03-19	2010-02-03	孙成忠	Multistage three-blade Roots vacuum pump
JP5330896B2 (en) *	2009-05-20	2013-10-30	三菱重工業株式会社	Dry vacuum pump
JP5473400B2 (en) *	2009-05-20	2014-04-16	三菱重工業株式会社	Dry vacuum pump and sealing method thereof

2011
- 2011-06-02 JP JP2011123980A patent/JP5677202B2/en active Active
2012
- 2012-05-25 TW TW101118674A patent/TWI554684B/en active
- 2012-05-29 KR KR1020137028886A patent/KR101760550B1/en active IP Right Grant
- 2012-05-29 WO PCT/JP2012/064346 patent/WO2012165645A1/en active Application Filing
- 2012-05-29 EP EP12793624.3A patent/EP2715139B1/en active Active
- 2012-05-29 US US14/119,858 patent/US20140112815A1/en not_active Abandoned
- 2012-05-29 CN CN2012800187110A patent/CN103477080A/en active Pending

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2010134427A1 (en) *	2009-05-20	2010-11-25	三菱重工業株式会社	Dry vacuum pump
WO2011019048A1 (en) *	2009-08-14	2011-02-17	株式会社アルバック	Dry pump

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2012165645A1 *

Also Published As

Publication number	Publication date
TW201307685A (en)	2013-02-16
WO2012165645A1 (en)	2012-12-06
JP5677202B2 (en)	2015-02-25
EP2715139A1 (en)	2014-04-09
CN103477080A (en)	2013-12-25
TWI554684B (en)	2016-10-21
KR101760550B1 (en)	2017-07-21
US20140112815A1 (en)	2014-04-24
KR20140023958A (en)	2014-02-27
JP2012251471A (en)	2012-12-20
EP2715139B1 (en)	2018-01-10

Publication	Publication Date	Title
IL215426A0 (en)	2011-11-30	Insert vacuum pump
GB201101870D0 (en)	2011-03-23	Pump
EP2554848A4 (en)	2015-06-17	Vacuum pump
EP2631486A4 (en)	2014-04-30	Vacuum pump
EP3462032C0 (en)	2023-06-07	Pump unit
EP2762725A4 (en)	2015-06-10	Microdiaphragm pump
IL231966A0 (en)	2014-05-28	Pumps
IL231665A (en)	2017-08-31	Vacuum pump
EP2738387A4 (en)	2015-12-09	Diaphragm pump
EP2715138A4 (en)	2014-12-17	Vacuum pump
EP2693053A4 (en)	2014-11-19	Bellows pump
EP2775143A4 (en)	2015-08-12	Diaphragm pump
PL2782619T3 (en)	2017-06-30	Breast pump
EP2685107A4 (en)	2015-07-01	Quick-release vacuum pump
EP2802776A4 (en)	2015-12-09	Pump
GB201102772D0 (en)	2011-03-30	Pumping arrangement
EP2631487A4 (en)	2014-06-18	Vacuum pump
GB2507501B (en)	2015-07-15	Vacuum pump
EP2853748A4 (en)	2016-06-15	Vacuum pump
EP2589814A4 (en)	2015-04-29	Vacuum pump
SG11201503262SA (en)	2015-06-29	Vacuum pump
EP2715139A4 (en)	2014-12-17	Vacuum pump
EP2878824A4 (en)	2016-07-20	Vacuum pump
EP2765312A4 (en)	2015-07-01	Claw pump
HK1200518A1 (en)	2015-08-07	Peristaltic pump

Legal Events

Date	Code	Title	Description
2014-03-07	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
2014-04-09	17P	Request for examination filed	Effective date: 20131017
2014-04-09	AK	Designated contracting states	Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
2014-09-10	DAX	Request for extension of the european patent (deleted)
2014-12-17	A4	Supplementary search report drawn up and despatched	Effective date: 20141118
2014-12-17	RIC1	Information provided on ipc code assigned before grant	Ipc: F04C 18/18 20060101ALI20141112BHEP Ipc: F04C 23/00 20060101ALI20141112BHEP Ipc: F04C 18/12 20060101ALI20141112BHEP Ipc: F04C 13/00 20060101ALI20141112BHEP Ipc: F04C 25/02 20060101AFI20141112BHEP Ipc: F04C 27/00 20060101ALI20141112BHEP
2017-08-21	GRAP	Despatch of communication of intention to grant a patent	Free format text: ORIGINAL CODE: EPIDOSNIGR1
2017-08-21	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: GRANT OF PATENT IS INTENDED
2017-08-23	RIC1	Information provided on ipc code assigned before grant	Ipc: F04C 25/02 20060101AFI20170718BHEP Ipc: F04C 18/18 20060101ALI20170718BHEP Ipc: F04C 23/00 20060101ALI20170718BHEP Ipc: F04C 27/00 20060101ALI20170718BHEP Ipc: F04C 18/12 20060101ALI20170718BHEP Ipc: F04C 13/00 20060101ALI20170718BHEP
2017-09-20	INTG	Intention to grant announced	Effective date: 20170822
2017-12-04	GRAS	Grant fee paid	Free format text: ORIGINAL CODE: EPIDOSNIGR3
2017-12-08	GRAA	(expected) grant	Free format text: ORIGINAL CODE: 0009210
2017-12-08	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: THE PATENT HAS BEEN GRANTED
2018-01-10	AK	Designated contracting states	Kind code of ref document: B1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
2018-01-15	REG	Reference to a national code	Ref country code: CH Ref legal event code: EP Ref country code: AT Ref legal event code: REF Ref document number: 962721 Country of ref document: AT Kind code of ref document: T Effective date: 20180115
2018-02-07	REG	Reference to a national code	Ref country code: IE Ref legal event code: FG4D
2018-02-08	REG	Reference to a national code	Ref country code: DE Ref legal event code: R096 Ref document number: 602012041986 Country of ref document: DE
2018-05-14	REG	Reference to a national code	Ref country code: FR Ref legal event code: PLFP Year of fee payment: 7
2018-05-16	REG	Reference to a national code	Ref country code: NL Ref legal event code: MP Effective date: 20180110
2018-06-15	REG	Reference to a national code	Ref country code: AT Ref legal event code: MK05 Ref document number: 962721 Country of ref document: AT Kind code of ref document: T Effective date: 20180110
2018-06-29	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: NL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180110
2018-07-31	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: NO Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180410 Ref country code: FI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180110 Ref country code: HR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180110 Ref country code: ES Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180110 Ref country code: LT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180110 Ref country code: CY Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180110
2018-08-31	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: GR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180411 Ref country code: BG Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180410 Ref country code: PL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180110 Ref country code: SE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180110 Ref country code: LV Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180110 Ref country code: IS Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180510 Ref country code: RS Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180110 Ref country code: AT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180110
2018-10-11	REG	Reference to a national code	Ref country code: DE Ref legal event code: R097 Ref document number: 602012041986 Country of ref document: DE
2018-10-31	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: EE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180110 Ref country code: IT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180110 Ref country code: RO Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180110 Ref country code: AL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180110
2018-11-16	PLBE	No opposition filed within time limit	Free format text: ORIGINAL CODE: 0009261
2018-11-16	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT
2018-11-30	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: SK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180110 Ref country code: DK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180110 Ref country code: SM Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180110
2018-12-14	REG	Reference to a national code	Ref country code: CH Ref legal event code: PL
2018-12-19	26N	No opposition filed	Effective date: 20181011
2019-01-30	REG	Reference to a national code	Ref country code: BE Ref legal event code: MM Effective date: 20180531
2019-01-31	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: MC Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180110
2019-02-20	REG	Reference to a national code	Ref country code: IE Ref legal event code: MM4A
2019-02-28	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: SI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180110 Ref country code: CH Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20180531 Ref country code: LI Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20180531
2019-03-29	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: LU Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20180529
2019-04-30	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: IE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20180529
2019-05-31	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: BE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20180531
2020-01-31	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: MT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20180529
2020-03-31	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: TR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180110
2020-05-29	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: PT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20180110 Ref country code: HU Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO Effective date: 20120529
2020-06-30	PG25	Lapsed in a contracting state [announced via postgrant information from national office to epo]	Ref country code: MK Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20180110
2023-04-11	REG	Reference to a national code	Ref country code: FR Ref legal event code: PLFP Year of fee payment: 12
2023-06-14	P01	Opt-out of the competence of the unified patent court (upc) registered	Effective date: 20230428
2024-05-31	PGFP	Annual fee paid to national office [announced via postgrant information from national office to epo]	Ref country code: FR Payment date: 20240328 Year of fee payment: 13
2024-07-08	PGFP	Annual fee paid to national office [announced via postgrant information from national office to epo]	Ref country code: GB Payment date: 20240402 Year of fee payment: 13
2024-07-10	PGFP	Annual fee paid to national office [announced via postgrant information from national office to epo]	Ref country code: DE Payment date: 20240328 Year of fee payment: 13
2024-07-23	PGFP	Annual fee paid to national office [announced via postgrant information from national office to epo]	Ref country code: CZ Payment date: 20240515 Year of fee payment: 13