EP2715138A4 - Vacuum pump - Google Patents

Vacuum pump

Info

Publication number: EP2715138A4
Authority: EP; European Patent Office
Prior art keywords: vacuum pump; vacuum; pump
Prior art date: 2011-06-02
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP12791988.4A

Other languages

German (de)

French (fr)

Other versions

EP2715138B1 (en

EP2715138A1 (en

Inventor

Soichi Kudara

Masami Nagayama

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Ebara Corp

Original Assignee

Ebara Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2011-06-02

Filing date

2012-05-29

Publication date

2014-12-17

2012-05-29 Application filed by Ebara Corp filed Critical Ebara Corp

2014-04-09 Publication of EP2715138A1 publication Critical patent/EP2715138A1/en

2014-12-17 Publication of EP2715138A4 publication Critical patent/EP2715138A4/en

2018-01-10 Application granted granted Critical

2018-01-10 Publication of EP2715138B1 publication Critical patent/EP2715138B1/en

Status Active legal-status Critical Current

2032-05-29 Anticipated expiration legal-status Critical

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/18—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with similar tooth forms
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/30—Casings or housings
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2280/00—Arrangements for preventing or removing deposits or corrosion
- F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Applications Or Details Of Rotary Compressors (AREA)

EP12791988.4A 2011-06-02 2012-05-29 Vacuum pump Active EP2715138B1 (en)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP2011123979A JP5793004B2 (en)	2011-06-02	2011-06-02	Vacuum pump
PCT/JP2012/064347 WO2012165646A1 (en)	2011-06-02	2012-05-29	Vacuum pump

Publications (3)

Publication Number	Publication Date
EP2715138A1 EP2715138A1 (en)	2014-04-09
EP2715138A4 true EP2715138A4 (en)	2014-12-17
EP2715138B1 EP2715138B1 (en)	2018-01-10

Family

ID=47259491

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP12791988.4A Active EP2715138B1 (en)	2011-06-02	2012-05-29	Vacuum pump

Country Status (7)

Country	Link
US (1)	US20140112814A1 (en)
EP (1)	EP2715138B1 (en)
JP (1)	JP5793004B2 (en)
KR (1)	KR101760549B1 (en)
CN (1)	CN103502648A (en)
TW (1)	TWI558917B (en)
WO (1)	WO2012165646A1 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP2615307B1 (en) *	2012-01-12	2019-08-21	Vacuubrand Gmbh + Co Kg	Screw vacuum pump
JP6472653B2 (en) *	2014-03-17	2019-02-20	株式会社荏原製作所	Vacuum pump with abatement function
DE202016001950U1 (en) *	2016-03-30	2017-07-03	Leybold Gmbh	vacuum pump
EP3382203B1 (en)	2017-03-30	2024-05-15	Roper Pump Company LLC	Progressive cavity pump with integrated heating jacket
CN109026707B (en) *	2018-08-22	2024-05-14	中北大学	Composite pump combining claw pump and slide valve pump
PL3921515T3 (en) *	2019-02-06	2023-10-09	Ateliers Busch S.A.	Multistage pump housing and multistage gas pump
JP7261139B2 (en)	2019-10-15	2023-04-19	株式会社荏原製作所	vacuum pump equipment
JP2021063503A (en)	2019-10-15	2021-04-22	株式会社荏原製作所	Vacuum pump device
TWI845776B (en) *	2019-10-15	2024-06-21	日商荏原製作所股份有限公司	Vacuum pump apparatus
JP7348132B2 (en) *	2020-04-30	2023-09-20	株式会社豊田自動織機	roots pump
FR3112175B1 (en) *	2020-07-01	2022-07-08	Pfeiffer Vacuum	Dry Type Vacuum Pump
JP7555870B2 (en)	2021-03-29	2024-09-25	株式会社荏原製作所	Vacuum Pump Equipment
GB2630629A (en) *	2023-06-01	2024-12-04	Edwards Ltd	Vacuum pump

Citations (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0879964A1 (en) *	1997-05-22	1998-11-25	T.D. Engineering Co., Ltd.	Positive displacement pump
US20030077182A1 (en) *	2001-10-24	2003-04-24	Aisin Seiki Kabushiki Kaisha	Multi-stage vacuum pump
JP2004293377A (en) *	2003-03-26	2004-10-21	Aisin Seiki Co Ltd	Multi-stage dry pump
JP2004300964A (en) *	2003-03-28	2004-10-28	Aisin Seiki Co Ltd	Vacuum pump
GB2418958A (en) *	2004-10-06	2006-04-12	Boc Group Plc	Vacuum pump with enhanced exhaust heat transfer to stator
WO2010134427A1 (en) *	2009-05-20	2010-11-25	三菱重工業株式会社	Dry vacuum pump
WO2011019048A1 (en) *	2009-08-14	2011-02-17	株式会社アルバック	Dry pump

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH01230060A (en)	1988-03-10	1989-09-13	Konica Corp	Photosensitive body
JP4007130B2 (en)	2002-09-10	2007-11-14	株式会社豊田自動織機	Vacuum pump
JP2004293434A (en) *	2003-03-27	2004-10-21	Aisin Seiki Co Ltd	Dry pump
JP2005105829A (en)	2003-09-26	2005-04-21	Aisin Seiki Co Ltd	Dry pump
JP2005036814A (en) *	2004-11-01	2005-02-10	Nabtesco Corp	Positive displacement pump
GB0515905D0 (en) *	2005-08-02	2005-09-07	Boc Group Plc	Vacuum pump
JP5330896B2 (en) *	2009-05-20	2013-10-30	三菱重工業株式会社	Dry vacuum pump

2011
- 2011-06-02 JP JP2011123979A patent/JP5793004B2/en active Active
2012
- 2012-05-25 TW TW101118675A patent/TWI558917B/en active
- 2012-05-29 WO PCT/JP2012/064347 patent/WO2012165646A1/en active Application Filing
- 2012-05-29 KR KR1020137028884A patent/KR101760549B1/en active IP Right Grant
- 2012-05-29 CN CN201280018841.4A patent/CN103502648A/en active Pending
- 2012-05-29 US US14/119,851 patent/US20140112814A1/en not_active Abandoned
- 2012-05-29 EP EP12791988.4A patent/EP2715138B1/en active Active

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP0879964A1 (en) *	1997-05-22	1998-11-25	T.D. Engineering Co., Ltd.	Positive displacement pump
US20030077182A1 (en) *	2001-10-24	2003-04-24	Aisin Seiki Kabushiki Kaisha	Multi-stage vacuum pump
JP2004293377A (en) *	2003-03-26	2004-10-21	Aisin Seiki Co Ltd	Multi-stage dry pump
JP2004300964A (en) *	2003-03-28	2004-10-28	Aisin Seiki Co Ltd	Vacuum pump
GB2418958A (en) *	2004-10-06	2006-04-12	Boc Group Plc	Vacuum pump with enhanced exhaust heat transfer to stator
WO2010134427A1 (en) *	2009-05-20	2010-11-25	三菱重工業株式会社	Dry vacuum pump
WO2011019048A1 (en) *	2009-08-14	2011-02-17	株式会社アルバック	Dry pump

Also Published As

Publication number	Publication date
TWI558917B (en)	2016-11-21
KR101760549B1 (en)	2017-07-21
JP5793004B2 (en)	2015-10-14
JP2012251470A (en)	2012-12-20
TW201307686A (en)	2013-02-16
KR20140017635A (en)	2014-02-11
EP2715138B1 (en)	2018-01-10
EP2715138A1 (en)	2014-04-09
CN103502648A (en)	2014-01-08
WO2012165646A1 (en)	2012-12-06
US20140112814A1 (en)	2014-04-24

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