EP2416874B1 - Strahlpumpe zum herstellen einer unter druck stehenden mischung aus einer flüssigkeit und einem gas, und deren verwendung - Google Patents
Strahlpumpe zum herstellen einer unter druck stehenden mischung aus einer flüssigkeit und einem gas, und deren verwendung Download PDFInfo
- Publication number
- EP2416874B1 EP2416874B1 EP10723191.2A EP10723191A EP2416874B1 EP 2416874 B1 EP2416874 B1 EP 2416874B1 EP 10723191 A EP10723191 A EP 10723191A EP 2416874 B1 EP2416874 B1 EP 2416874B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- liquid
- ejector device
- gas
- diffuser
- longitudinal direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Not-in-force
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/30—Injector mixers
- B01F25/31—Injector mixers in conduits or tubes through which the main component flows
- B01F25/312—Injector mixers in conduits or tubes through which the main component flows with Venturi elements; Details thereof
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/29—Mixing systems, i.e. flow charts or diagrams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/30—Injector mixers
- B01F25/31—Injector mixers in conduits or tubes through which the main component flows
- B01F25/312—Injector mixers in conduits or tubes through which the main component flows with Venturi elements; Details thereof
- B01F25/3124—Injector mixers in conduits or tubes through which the main component flows with Venturi elements; Details thereof characterised by the place of introduction of the main flow
- B01F25/31243—Eductor or eductor-type venturi, i.e. the main flow being injected through the venturi with high speed in the form of a jet
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
- F04F5/44—Component parts, details, or accessories not provided for in, or of interest apart from, groups F04F5/02 - F04F5/42
- F04F5/46—Arrangements of nozzles
- F04F5/463—Arrangements of nozzles with provisions for mixing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
- B01F25/30—Injector mixers
- B01F25/31—Injector mixers in conduits or tubes through which the main component flows
- B01F25/312—Injector mixers in conduits or tubes through which the main component flows with Venturi elements; Details thereof
- B01F25/3125—Injector mixers in conduits or tubes through which the main component flows with Venturi elements; Details thereof characteristics of the Venturi parts
- B01F25/31253—Discharge
- B01F25/312533—Constructional characteristics of the diverging discharge conduit or barrel, e.g. with zones of changing conicity
Definitions
- the present invention relates to an ejector device for forming a pressurized mixture of liquid and gas.
- the document WO-01/34285 describes such an ejector device comprising a suction chamber, a cylindrical tube and a diffuser of conical shape and flaring in a longitudinal direction.
- a nozzle injects a high velocity liquid into the suction chamber, which then sucks gas through an inlet.
- the cylindrical tube is located between the suction chamber and the diffuser, so that the liquid and the gas are mixed in this cylindrical tube before entering the diffuser.
- Such an ejector device makes it possible to obtain compression ratios (see definition below) of the order of 4 to 8.
- a gas having at the inlet a pressure of 2 atm can be compressed to a pressure 16 atm. It is very difficult to go beyond.
- the document DE 1068223 B1 also describes such a device.
- the present invention aims to improve an ejector device of this type, in particular to optimize its energy efficiency and increase the compression ratio.
- the mixture of liquid and gas can be made at different axial positions inside the diffuser, and the ejector device then allows operation over a wide range of compression ratio.
- the energy performance of the ejector device is optimized.
- the longitudinal direction referred to in this description is understood to be the direction indicated by a dashed line X on the figure 1 , and corresponds to the direction of flow in the ejector device 1 between the upstream side located to the left and the downstream side located to the right in this figure.
- the outlet opening 4 therefore forms at the outlet of the suction chamber 2 a narrowing also called neck.
- a first upstream pipe 3a supplies gas to the inlet opening 3 of the suction chamber 2, at a suction pressure p 1 with volume flow Q 1 .
- a second upstream pipe 5a feeds the injection nozzle 5 with liquid at a supply pressure p 2 with a volume flow rate Q 2 .
- This end 5b is placed at a withdrawal distance x 2 from the outlet opening 4 of the suction chamber 2.
- the internal diameter D 2 of the end 5b is optionally smaller than an internal diameter of the nozzle 5, so that said nozzle has at its end 5b a contracted section.
- the injection nozzle 5 optionally comprises liquid channeling means adapted to obtain in the nozzle after said channeling means, a liquid flow little turbulent, without rotation and whose axial velocity distribution is substantially homogeneous, that is, that is, whose axial velocity distribution in a cross-section of the nozzle is substantially constant.
- the jet of liquid produced by the nozzle 5 in the suction chamber 2 then remains substantially cylindrical to the outlet opening 4 of said chamber.
- the liquid jet diverges little in this chamber and does not begin to mix with the gas before the diffuser 6.
- having a jet of liquid diverges helps to form a mixture of liquid and water. gas.
- this arrangement makes it possible to obtain a better mixture of liquid and gas in the diffuser 6 and a better compression ratio of this mixture.
- the means for channeling the liquid in the nozzle 5 may for example be a device having walls extending in the longitudinal direction X, or a device having walls extending in the direction longitudinal X and said walls having a honeycomb shape, or a device comprising a wall in a direction substantially perpendicular to the longitudinal direction X and comprising holes for distributing the liquid flow substantially uniformly in the cross section of the nozzle, or a combination of these devices in the nozzle 5 and arranged one after the other along the longitudinal direction X.
- the channeling means can then be placed in the nozzle at a short distance from its end 5b, for example at a distance of between 10 and 30 times the internal diameter D 2 of the nozzle 5, and preferably equal to 20 times this diameter. .
- the diffuser 6 is mounted in the extension of the outlet opening 4 of the suction chamber.
- This diffuser 6 has along the longitudinal direction X an increasing cross section from said outlet opening 4.
- This diffuser 6 is for example conically shaped, flaring in the direction of the flow, and is also substantially coaxial to the longitudinal axis X. It therefore has an upstream diameter substantially equal to the diameter D c of the outlet opening 4 of the suction chamber 2, and a downstream diameter D 3 greater than the upstream diameter D c .
- the diffuser 6 forms a cone having an angle ⁇ d .
- the angle ⁇ d is defined as the total aperture angle of the cone, and has a low value, at least in a first part of the diffuser 6.
- a downstream pipe 6a outputs the mixture of liquid and gas at the discharge pressure p 3 .
- the ejector device 1 of the invention has a diffuser 6 located immediately at the outlet of the suction chamber 2, that is to say without interposition of a cylindrical tube for mixing liquid and gas, so that the mixture occurs directly in the diffuser 6.
- the inventors have found that such an arrangement allowed the ejector device 1 to operate over a wide range of compression ratio ⁇ c .
- the ejector device 1 operates as follows.
- the suction chamber 2 optionally comprises from said distance from the longitudinal axis X radially and longitudinally extending walls, so that the liquid jet does not come into contact with said walls and that the gas contained in this suction chamber 2 is driven with a low turbulent flow, without rotation and whose axial velocity distribution is substantially homogeneous towards the outlet opening 4 of the suction chamber 2.
- the flow comprises along the X axis, a first, a second and a third zone.
- the first zone of the flow the two coaxial phases flow relatively independently.
- the mixing zone the flow changes its structure rather suddenly and becomes a mixture of the liquid and the gas, which is more and more homogeneous. This change in the structure of the flow is accompanied by a fairly sudden slowing down of the liquid phase and an increase in pressure.
- the third flow zone the two phases flow in the form of a finely mixed emulsion. In this third zone, the flow gradually slows under the effect of the section increase of the diffuser. The kinetic energy of the mixture is then converted into pressure energy.
- first, second and third zones of the flow are not separated by clear and sharp transitions, the phenomena being continuous.
- these zones of the flow can move longitudinally in the diffuser 6, in particular by the effect of variations in the discharge pressure p 3 downstream of the diffuser 6.
- the operation of the ejector device is undisturbed, which shows that such a device is stable and tolerant of variations in operating parameters.
- the amount of movement of the liquid jet at the inlet of the diffuser 6 is converted into pressure forces applied on either side of the mixing zone. If one makes an analogy with the compressible flows, this conversion can be seen as a shock. If one makes an analogy with the free surface flows, this conversion can be seen as a hydraulic jump.
- the diffuser 6 of conical shape has a low angle ⁇ d , but not zero.
- a conical diffuser 6 with an angle ⁇ d higher, for example greater than 10 degrees, does not cause a hydraulic shock as effective and does not achieve such high compression rates.
- angle ⁇ d, opt for which the compression ratio is maximum, for a given injection speed U 2 .
- This optimum angle is within a range of values of angle ⁇ d of between 0.1 and 7 degrees, and preferably between 1.5 and 4 degrees.
- the value of the optimum angle ⁇ d, opt is difficult to determine by calculation a priori.
- the diffuser 6 comprises along the axis X a first conical portion with a first angle ⁇ d , then a second conical portion with a second angle.
- the second portion is continuously in the extension of the first portion.
- the second angle is greater than the first angle.
- the second angle may be between 5 and 15 degrees, and preferably of the order of 7 degrees.
- the first portion is intended to accommodate the mixing zone, which must operate under a small angle of divergence to maximize the compression ratio.
- the second portion provides the final pressure recovery by conversion of the kinetic energy of the mixture. This energy conversion can take place at a higher angle of divergence, for example of the order of 10 °, without generating a significant loss of load.
- a high compression ratio ⁇ c is obtained at the same time by the first portion with a small divergence angle and a total length of the shortened diffuser 6.
- the diffuser 6 has a flared shape with a first portion of conical shape with a small first angle, then in continuity a shape having a convex profile.
- the second convex portion has a gradually increasing angle along the longitudinal direction X from the first angle to an angle, for example less than 15 degrees, and preferably of the order of 10 degrees. The overall length of the diffuser 6 can thus be further shortened without affecting the compression ratio.
- the diffuser 6 has a flared shape with a shape having a convex profile, said convex profile having a gradually increasing angle along the longitudinal direction X from a first angle ⁇ d to a angle, for example less than 15 degrees, and preferably of the order of 10 degrees.
- the overall length of the diffuser 6 can thus be further shortened.
- the first angle ⁇ d of the preceding variants advantageously has a value in the range of 0.1 ° to 7 °, as indicated above.
- the efficiency ⁇ of the ejector device 1 is the ratio between the compression power P c in the ejector device 1 and the hydraulic power P h provided.
- the efficiency ⁇ of an ejector device 1 can therefore be measured on experimental devices, or be calculated by a mathematical model of hydraulic flow.
- the efficiency ⁇ is related to this geometric ratio R of the ejector device 1.
- the efficiency ⁇ is maximum for a geometric ratio R of between 0.5 and 0.9, or more precisely between 0, 6 and 0.8. This trend has been confirmed by experimental results.
- a first advantage of this compression parameter ⁇ is that it can be calculated only with the pressure values, measurable on an experimental ejector device.
- the efficiency ⁇ is related to the value of this compression parameter ⁇ of the ejector device 1.
- the curves of FIG. figure 4 show this dependence for several values of the driving pressure parameter ⁇ .
- the efficiency ⁇ is then maximum for a compression parameter ⁇ in the range of 0.4 to 0.6, or preferably equal to approximately 0.5.
- a second advantage of this compression parameter ⁇ is that, conversely, it can make it possible to determine the liquid supply pressure p 2 adapted to obtain the optimum efficiency ⁇ opt of the ejector device 1.
- the ejector device 1 can then be used in a gas compressor 10 as presented in FIG. figure 5 .
- the supply circuit 17 then supplies the ejector device 1 of the gas compressor 10 with liquid.
- the separator device 13 is either a gravity separator or a cyclonic separator.
- a bypass circuit 14a bypasses the heat exchanger 15 of the return circuit 14 and includes a valve 14b.
- This branch circuit 14a is adapted to adjust the temperature of the hydraulic circuit.
- the heat exchanger 15 is also fed with a cold fluid, for example water, by a cooling circuit 15a and a pump 15b.
- a cold fluid for example water
- the gas compressor 10 operates as follows.
- the ejector device 1 mixes the gas with a liquid injected at high speed, and compresses this mixture of gas and liquid at a high pressure.
- the mixture is separated in the separator device 13, which then supplies at the gas outlet 12 a high pressure gas, and the return circuit 14 also a high pressure liquid.
- the heat exchanger 15 makes it possible to extract heat from the liquid.
- the pump 16 increases the pressure of the liquid before supplying the supply circuit 17 and the ejector device 1.
- the ejector device 1 comprises an injection nozzle adapted to inject at high speed said liquid into its suction chamber.
- the injection nozzle of the ejector device 1 performs a relaxation of the liquid (transformation of the pressure energy of the liquid into kinetic energy).
- the diffuser of the ejection device 1 performs mixing and compression of the mixture.
- the pump 16 completes the compression of the liquid to reach the inlet supply pressure of the nozzle of the ejector device.
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Jet Pumps And Other Pumps (AREA)
- Nozzles (AREA)
Claims (14)
- Strahlpumpe zum Herstellen eines unter Druck stehenden Gemisches aus Flüssigkeit und Gas, wobei die Strahlpumpe eine Saugkammer (2) und einen Diffusor (6) aufweist, wobei die Saugkammer (2) aufweist:- eine Injektionsdüse (5) zum Erzeugen eines in eine Längsrichtung (X) strömenden Flüssigkeitsstrahls;- einen Gaseinlass (3), um ein von dem Flüssigkeitsstrahl mitzunehmendes Gas in die Saugkammer (2) einströmen zu lassen; und- eine Auslassöffnung (4), um den Flüssigkeitsstrahl und das mitgenommene Gas aus der Saugkammer (2) ausströmen zu lassen;
wobei der Diffusor (6) an der Auslassöffnung (4) der Saugkammer (2) angeschlossen ist und entlang der Längsrichtung (X) einen transversalen Querschnitt aufweist, der sich von der Auslassöffnung (4) aus vergrößert, wobei der sich im Querschnitt vergrößernde Diffusor (6) unmittelbar nach der Auslassöffnung (4) der Saugkammer (2) angeordnet ist, und wobei der Diffusor (6) mindestens einen ersten konischen Abschnitt mit einem ersten Winkel zwischen 0,1 und 7 Grad aufweist. - Strahlpumpe nach Anspruch 1, wobei der erste Winkel zwischen 1,5 und 4 Grad beträgt.
- Strahlpumpe nach Anspruch 1, wobei der Diffusor (6) ferner einen zweiten konischen Abschnitt aufweist, der sich in kontinuierlicher Verlängerung des ersten Abschnitts in die Längsrichtung (X) erstreckt, wobei der zweite Abschnitt einen zweiten Winkel, der größer als der erste Winkel ist, aufweist.
- Strahlpumpe nach Anspruch 3, wobei der zweite Winkel zwischen 5 und 15 Grad und bevorzugt ungefähr 7 Grad beträgt.
- Strahlpumpe nach Anspruch 1, wobei der Diffusor (6) ferner einen zweiten Abschnitt aufweist, der sich in kontinuierlicher Verlängerung des ersten Abschnitts in die Längsrichtung (X) erstreckt, wobei der zweite Abschnitt eine konvexe Profilform hat.
- Strahlpumpe nach Anspruch 5, wobei der zweite konvexe Abschnitt einen Winkel hat, der sich entlang der Längsrichtung (X) von dem ersten Winkel aus allmählich vergrößert bis zu einem Winkel, der kleiner als 15 Grad und bevorzugt ungefähr 10 Grad ist.
- Strahlpumpe nach einem der vorstehenden Ansprüche, wobei der Diffusor (6) im Wesentlichen koaxial zur Injektionsdüse (5) und zur Auslassöffnung (4) der Saugkammer ist.
- Strahlpumpe nach einem der vorstehenden Ansprüche, wobei- die Auslassöffnung (4) eine zur Längsrichtung (X) senkrechte Halsquerschnittfläche Sc hat;- die Injektionsdüse (5) eine zur Längsrichtung (X) senkrechte Düsenquerschnittfläche S2 im Innern der Düse hat; und- ein geometrisches Verhältnis R, das das Verhältnis zwischen der Düsenquerschnittfläche S2 und der Halsquerschnittfläche Sc ist, zwischen 0,5 und 0,9 beträgt.
- Strahlpumpe nach einem der vorstehenden Ansprüche, wobei- die Injektionsdüse (5) ein Ende (5b) in der Längsrichtung (X) aufweist;- die Auslassöffnung (4) einen kreisförmigen Querschnitt mit einem Halsdurchmesser Dc hat; und- das Ende (5b) in einem zurückgesetzten Abstand x2 von der Auslassöffnung (4) angeordnet ist, wobei der zurückgesetzte Abstand x2 zwischen dem ein- und fünffachen des Halsdurchmessers Dc beträgt.
- Strahlpumpe nach einem der vorstehenden Ansprüche, wobei die Saugkammer (2) Wände in der Längsrichtung (X) aufweist, die sich radial in der Saugkammer (2) erstrecken, so dass das Gas in der Saugkammer mit einer Strömung strömt, die ohne Wirbel wenig turbulent ist und deren Verteilung der axialen Geschwindigkeiten im Wesentlichen homogen ist.
- Strahlpumpe nach einem der vorstehenden Ansprüche, wobei die Injektionsdüse (5) Kanalisationseinrichtungen zum Kanalisieren der Flüssigkeit aufweist, die geeignet sind, um in der Düse nach den Kanalisationseinrichtungen eine Strömung der Flüssigkeit zu erzielen, die ohne Wirbel wenig turbulent ist und deren Verteilung der axialen Geschwindigkeiten im Wesentlichen homogen ist.
- Strahlpumpe nach Anspruch 11, wobei die Kanalisationseinrichtungen zum Kanalisieren der Flüssigkeit in der Düse (5) ausgewählt sind aus:- einer Vorrichtung mit Wänden, die sich in die Längsrichtung (X) erstrecken, und- einer Vorrichtung mit Wänden, die sich in die Längsrichtung (X) erstrecken, wobei die Wände eine Wabenform haben, und- einer Vorrichtung, die eine Wand aufweist, die sich in eine zur Längsrichtung (X) im Wesentlichen senkrechte Richtung erstreckt und Löcher aufweist, um den Flüssigkeitsdurchfluss auf im Wesentlichen gleichmäßige Weise in dem transversalen Querschnitt der Düse zu verteilen.
- Verwendung einer Strahlpumpe nach einem der Ansprüche 1 bis 12, mit- Messen des Saugdrucks p1 des Gases am Gaseinlass (3), des Flüssigkeitsspeisedrucks p2 der die Injektionsdüse (5) speisenden Flüssigkeit, des Förderdrucks p3 des Gas/Flüssigkeit-Gemisches stromabwärts des Diffusors (6); und- Regeln mindestens eines dieser Drücke, so dass ein Kompressionsparameter Ψ, der durch die Formel Ψ = (p3-p1)/(p2-p1) definiert ist, zwischen 0,4 und 0,6 beträgt.
- Verwendung einer Strahlpumpe nach einem der Ansprüche 1 bis 12, mit- Messen des Saugdrucks p1 des Gases am Gaseinlass (3), des Flüssigkeitsspeisedrucks p2 der die Injektionsdüse (5) speisenden Flüssigkeit, des Förderdrucks p3 des Gas/Flüssigkeit-Gemisches stromabwärts des Diffusors (6); und- Regeln des Flüssigkeitsspeisedrucks p2 auf mehr oder weniger 20 Prozent eines optimalen Drucks p2opt, wie p2opt= 2*p3-p1.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0952369A FR2944218B1 (fr) | 2009-04-09 | 2009-04-09 | Dipositif ejecteur pour former un melange sous pression de liquide et de gaz, et compresseur de gaz comprenant un tel dispositif ejecteur |
PCT/FR2010/050637 WO2010116076A1 (fr) | 2009-04-09 | 2010-04-02 | Dispositif ejecteur pour former un melange sous pression de liquide et de gaz, et son utilisation |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2416874A1 EP2416874A1 (de) | 2012-02-15 |
EP2416874B1 true EP2416874B1 (de) | 2014-02-26 |
Family
ID=41343301
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP10723191.2A Not-in-force EP2416874B1 (de) | 2009-04-09 | 2010-04-02 | Strahlpumpe zum herstellen einer unter druck stehenden mischung aus einer flüssigkeit und einem gas, und deren verwendung |
Country Status (5)
Country | Link |
---|---|
US (1) | US20120034106A1 (de) |
EP (1) | EP2416874B1 (de) |
AR (1) | AR076244A1 (de) |
FR (1) | FR2944218B1 (de) |
WO (1) | WO2010116076A1 (de) |
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FR2972365B1 (fr) | 2011-03-07 | 2015-04-24 | Total Sa | Separateur a ecoulement cyclonique. |
DK2691706T3 (en) * | 2011-06-27 | 2018-03-19 | Carrier Corp | Ejector mixer. |
US9618263B2 (en) * | 2012-12-14 | 2017-04-11 | Flash Rockwell Technologies, Llc | Non-thermal drying systems with vacuum throttle flash generators and processing vessels |
JP6330426B2 (ja) | 2014-03-31 | 2018-05-30 | ブラザー工業株式会社 | 画像読取装置 |
CN104712591B (zh) * | 2015-01-28 | 2017-02-22 | 中海油研究总院 | 一种可调式射流泵 |
FR3054618B1 (fr) * | 2016-07-27 | 2020-02-14 | Valeo Systemes Thermiques | Ejecteur gaz-gaz |
US20190168175A1 (en) * | 2017-12-06 | 2019-06-06 | Larry Baxter | Solids-Producing Siphoning Exchanger |
FR3085281B1 (fr) * | 2018-09-04 | 2023-01-20 | Alfano Calogero | Procede et installation d'epuration d'un gaz brut par un solvant liquide |
CN112915759B (zh) * | 2021-01-21 | 2022-07-08 | 绍兴越信环保科技有限公司 | 一种固废热解烟气协同治理工艺 |
IT202200007652A1 (it) * | 2022-04-19 | 2023-10-19 | Micheletti Eng & Consulting Sagl | Sistema ed impianto per lo spruzzagio di acqua ozonizzata ad alta pressione |
CN114743900A (zh) * | 2022-04-25 | 2022-07-12 | 北京北方华创微电子装备有限公司 | 汽化系统以及半导体工艺设备 |
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JP4206676B2 (ja) * | 2002-03-07 | 2009-01-14 | 株式会社ササクラ | オゾン混合装置及びオゾン混合方法 |
US6877960B1 (en) * | 2002-06-05 | 2005-04-12 | Flodesign, Inc. | Lobed convergent/divergent supersonic nozzle ejector system |
US20060070675A1 (en) * | 2004-10-06 | 2006-04-06 | Maxwell Hsu | Pressurized gas-water mixer |
EP1647325A1 (de) * | 2004-10-12 | 2006-04-19 | Biotek Technology Corp. | Druckgas-wasser Mischer |
PL1902775T3 (pl) * | 2006-09-19 | 2009-05-29 | Exel Ind | Mieszacz do komory takiej jak zbiornik opryskiwacza, zbiornik wyposażony w taki mieszacz i opryskiwacz wyposażony w taki zbiornik |
-
2009
- 2009-04-09 FR FR0952369A patent/FR2944218B1/fr not_active Expired - Fee Related
-
2010
- 2010-04-02 US US13/263,681 patent/US20120034106A1/en not_active Abandoned
- 2010-04-02 EP EP10723191.2A patent/EP2416874B1/de not_active Not-in-force
- 2010-04-02 WO PCT/FR2010/050637 patent/WO2010116076A1/fr active Application Filing
- 2010-04-08 AR ARP100101192A patent/AR076244A1/es active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
FR2944218B1 (fr) | 2012-06-15 |
FR2944218A1 (fr) | 2010-10-15 |
AR076244A1 (es) | 2011-05-26 |
US20120034106A1 (en) | 2012-02-09 |
WO2010116076A1 (fr) | 2010-10-14 |
EP2416874A1 (de) | 2012-02-15 |
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