EP2367044B8 - Optical filter, optical filter module, analytical instrument, and optical apparatus - Google Patents

Optical filter, optical filter module, analytical instrument, and optical apparatus Download PDF

Info

Publication number: EP2367044B8
Authority: EP; European Patent Office
Prior art keywords: optical filter; optical; analytical instrument; filter module; module
Prior art date: 2010-03-15
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Active

Application number

EP11157865.4A

Other languages

German (de)

French (fr)

Other versions

EP2367044A1 (en

EP2367044B1 (en

Inventor

Akira Sano

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Seiko Epson Corp

Original Assignee

Seiko Epson Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2010-03-15

Filing date

2011-03-11

Publication date

2014-09-24

2011-03-11 Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp

2011-09-21 Publication of EP2367044A1 publication Critical patent/EP2367044A1/en

2014-08-20 Application granted granted Critical

2014-08-20 Publication of EP2367044B1 publication Critical patent/EP2367044B1/en

2014-09-24 Publication of EP2367044B8 publication Critical patent/EP2367044B8/en

Status Active legal-status Critical Current

2031-03-11 Anticipated expiration legal-status Critical

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
- G02B6/29358—Multiple beam interferometer external to a light guide, e.g. Fabry-Pérot, etalon, VIPA plate, OTDL plate, continuous interferometer, parallel plate resonator

Landscapes

Physics & Mathematics (AREA)
Spectroscopy & Molecular Physics (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Mechanical Light Control Or Optical Switches (AREA)
Spectrometry And Color Measurement (AREA)
Optical Filters (AREA)
Investigating Or Analysing Materials By Optical Means (AREA)
Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

EP11157865.4A 2010-03-15 2011-03-11 Optical filter, optical filter module, analytical instrument, and optical apparatus Active EP2367044B8 (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2010057290A JP5589459B2 (en)	2010-03-15	2010-03-15	Optical filter, optical filter module, analytical instrument and optical instrument

Publications (3)

Publication Number	Publication Date
EP2367044A1 EP2367044A1 (en)	2011-09-21
EP2367044B1 EP2367044B1 (en)	2014-08-20
EP2367044B8 true EP2367044B8 (en)	2014-09-24

Family

ID=44146675

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP11157865.4A Active EP2367044B8 (en)	2010-03-15	2011-03-11	Optical filter, optical filter module, analytical instrument, and optical apparatus

Country Status (6)

Country	Link
US (3)	US9030743B2 (en)
EP (1)	EP2367044B8 (en)
JP (1)	JP5589459B2 (en)
KR (1)	KR20110103880A (en)
CN (2)	CN102193184B (en)
TW (1)	TWI510808B (en)

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JP6015090B2 (en)	2012-04-18	2016-10-26	セイコーエプソン株式会社	Wavelength variable interference filter, optical filter device, optical module, and electronic apparatus
JP2013238755A (en) *	2012-05-16	2013-11-28	Seiko Epson Corp	Optical module, electronic equipment, food analyzer, spectroscopic camera, and method for driving wavelength variable interference filter
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JP6543884B2 (en)	2014-01-27	2019-07-17	セイコーエプソン株式会社	Actuator control device, optical module, electronic device, and actuator control method
JP6413325B2 (en)	2014-05-01	2018-10-31	セイコーエプソン株式会社	Actuator device, electronic device, and control method
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CN107479185A (en) *	2017-09-30	2017-12-15	广东欧珀移动通信有限公司	Optical filter, display device and electronic device
CN107561685B (en) *	2017-09-30	2020-10-02	Oppo广东移动通信有限公司	Optical filter, lens module and imaging module
JP7006172B2 (en) *	2017-11-21	2022-01-24	セイコーエプソン株式会社	Tunable interference filters, optical devices, optical modules, and electronic devices
FR3076290B1 (en) *	2018-01-03	2020-02-07	Commissariat A L'energie Atomique Et Aux Energies Alternatives	DEVICE FOR MICRO OR NANOMECHANICAL DETECTION OF PARTICLES
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JP5589459B2 (en)	2010-03-15	2014-09-17	セイコーエプソン株式会社	Optical filter, optical filter module, analytical instrument and optical instrument
JP5673049B2 (en)	2010-12-08	2015-02-18	セイコーエプソン株式会社	Wavelength variable interference filter, optical module, and optical analyzer
JP5834418B2 (en) *	2011-02-04	2015-12-24	セイコーエプソン株式会社	Optical filter, optical filter module, analytical instrument and optical instrument

2010
- 2010-03-15 JP JP2010057290A patent/JP5589459B2/en active Active
2011
- 2011-03-02 US US13/038,583 patent/US9030743B2/en active Active
- 2011-03-11 CN CN201110061726.2A patent/CN102193184B/en active Active
- 2011-03-11 EP EP11157865.4A patent/EP2367044B8/en active Active
- 2011-03-11 TW TW100108368A patent/TWI510808B/en active
- 2011-03-11 CN CN201610380460.0A patent/CN106094197A/en active Pending
- 2011-03-14 KR KR1020110022468A patent/KR20110103880A/en not_active Ceased
2015
- 2015-04-13 US US14/684,725 patent/US9921403B2/en active Active
2018
- 2018-02-02 US US15/887,123 patent/US10578859B2/en active Active

Also Published As

Publication number	Publication date
CN102193184B (en)	2017-03-01
EP2367044A1 (en)	2011-09-21
US20180172976A1 (en)	2018-06-21
JP2011191492A (en)	2011-09-29
US9921403B2 (en)	2018-03-20
US20150219889A1 (en)	2015-08-06
TWI510808B (en)	2015-12-01
US10578859B2 (en)	2020-03-03
US9030743B2 (en)	2015-05-12
KR20110103880A (en)	2011-09-21
TW201144857A (en)	2011-12-16
US20110222157A1 (en)	2011-09-15
EP2367044B1 (en)	2014-08-20
CN102193184A (en)	2011-09-21
CN106094197A (en)	2016-11-09
JP5589459B2 (en)	2014-09-17

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2012-04-11	17P	Request for examination filed	Effective date: 20120223
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2014-04-09	RIC1	Information provided on ipc code assigned before grant	Ipc: G02B 26/00 20060101AFI20140305BHEP Ipc: G02B 6/293 20060101ALN20140305BHEP Ipc: G02B 5/28 20060101ALI20140305BHEP
2014-04-16	INTG	Intention to grant announced	Effective date: 20140321
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