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EP2274770A4 - Mosfet mit integriertem feldeffektgleichrichter - Google Patents

Mosfet mit integriertem feldeffektgleichrichter

Info

Publication number
EP2274770A4
EP2274770A4 EP09739614A EP09739614A EP2274770A4 EP 2274770 A4 EP2274770 A4 EP 2274770A4 EP 09739614 A EP09739614 A EP 09739614A EP 09739614 A EP09739614 A EP 09739614A EP 2274770 A4 EP2274770 A4 EP 2274770A4
Authority
EP
European Patent Office
Prior art keywords
field effect
integrated field
rectifier mosfet
effect rectifier
mosfet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP09739614A
Other languages
English (en)
French (fr)
Other versions
EP2274770A1 (de
Inventor
Alexei Ankoudinov
Vladimir Rodov
Richard Cordell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics NV
Original Assignee
STMicroelectronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics NV filed Critical STMicroelectronics NV
Publication of EP2274770A1 publication Critical patent/EP2274770A1/de
Publication of EP2274770A4 publication Critical patent/EP2274770A4/de
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/64Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H10D30/66Vertical DMOS [VDMOS] FETs
    • H10D30/668Vertical DMOS [VDMOS] FETs having trench gate electrodes, e.g. UMOS transistors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/101Integrated devices comprising main components and built-in components, e.g. IGBT having built-in freewheel diode
    • H10D84/141VDMOS having built-in components
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/101Integrated devices comprising main components and built-in components, e.g. IGBT having built-in freewheel diode
    • H10D84/141VDMOS having built-in components
    • H10D84/143VDMOS having built-in components the built-in components being PN junction diodes
    • H10D84/144VDMOS having built-in components the built-in components being PN junction diodes in antiparallel diode configurations
EP09739614A 2008-04-28 2009-04-28 Mosfet mit integriertem feldeffektgleichrichter Withdrawn EP2274770A4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US4833608P 2008-04-28 2008-04-28
PCT/US2009/041996 WO2009134812A1 (en) 2008-04-28 2009-04-28 Mosfet with integrated field effect rectifier

Publications (2)

Publication Number Publication Date
EP2274770A1 EP2274770A1 (de) 2011-01-19
EP2274770A4 true EP2274770A4 (de) 2012-12-26

Family

ID=41255381

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09739614A Withdrawn EP2274770A4 (de) 2008-04-28 2009-04-28 Mosfet mit integriertem feldeffektgleichrichter

Country Status (3)

Country Link
EP (1) EP2274770A4 (de)
CN (1) CN102037548B (de)
WO (1) WO2009134812A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9018048B2 (en) * 2012-09-27 2015-04-28 Stmicroelectronics S.R.L. Process for manufactuirng super-barrier rectifiers
FR3012699A1 (fr) * 2013-10-31 2015-05-01 St Microelectronics Tours Sas Circuit de commande pour diodes en demi-pont

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0807979A2 (de) * 1996-05-15 1997-11-19 SILICONIX Incorporated Diode
US6281547B1 (en) * 1997-05-08 2001-08-28 Megamos Corporation Power transistor cells provided with reliable trenched source contacts connected to narrower source manufactured without a source mask
US20020177324A1 (en) * 2001-05-23 2002-11-28 Metzler Richard A. Vertical metal oxide silicon field effect semiconductor diodes
US20080073707A1 (en) * 2006-09-27 2008-03-27 Darwish Mohamed N Power MOSFET with recessed field plate

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3156300B2 (ja) * 1991-10-07 2001-04-16 株式会社デンソー 縦型半導体装置
US5559355A (en) * 1994-03-04 1996-09-24 Fuji Electric Co., Ltd. Vertical MOS semiconductor device
US5744994A (en) * 1996-05-15 1998-04-28 Siliconix Incorporated Three-terminal power mosfet switch for use as synchronous rectifier or voltage clamp
DE19743342C2 (de) * 1997-09-30 2002-02-28 Infineon Technologies Ag Feldeffekttransistor hoher Packungsdichte und Verfahren zu seiner Herstellung
US6100145A (en) * 1998-11-05 2000-08-08 Advanced Micro Devices, Inc. Silicidation with silicon buffer layer and silicon spacers
US6593620B1 (en) * 2000-10-06 2003-07-15 General Semiconductor, Inc. Trench DMOS transistor with embedded trench schottky rectifier
US6621107B2 (en) * 2001-08-23 2003-09-16 General Semiconductor, Inc. Trench DMOS transistor with embedded trench schottky rectifier
US7719054B2 (en) * 2006-05-31 2010-05-18 Advanced Analogic Technologies, Inc. High-voltage lateral DMOS device
JP2005079339A (ja) * 2003-08-29 2005-03-24 National Institute Of Advanced Industrial & Technology 半導体装置、およびその半導体装置を用いた電力変換器、駆動用インバータ、汎用インバータ、大電力高周波通信機器
CN100364093C (zh) * 2004-04-06 2008-01-23 世界先进积体电路股份有限公司 具有间隙结构的高压静电放电保护装置
JP4832731B2 (ja) * 2004-07-07 2011-12-07 株式会社東芝 電力用半導体装置
US7135740B2 (en) * 2004-09-27 2006-11-14 Teledyne Licensing, Llc High voltage FET switch with conductivity modulation

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0807979A2 (de) * 1996-05-15 1997-11-19 SILICONIX Incorporated Diode
US6281547B1 (en) * 1997-05-08 2001-08-28 Megamos Corporation Power transistor cells provided with reliable trenched source contacts connected to narrower source manufactured without a source mask
US20020177324A1 (en) * 2001-05-23 2002-11-28 Metzler Richard A. Vertical metal oxide silicon field effect semiconductor diodes
US20080073707A1 (en) * 2006-09-27 2008-03-27 Darwish Mohamed N Power MOSFET with recessed field plate

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2009134812A1 *

Also Published As

Publication number Publication date
CN102037548A (zh) 2011-04-27
EP2274770A1 (de) 2011-01-19
WO2009134812A1 (en) 2009-11-05
CN102037548B (zh) 2014-04-23

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Legal Events

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Ipc: H01L 29/78 20060101AFI20121120BHEP

RIN1 Information on inventor provided before grant (corrected)

Inventor name: ANKOUDINOV, ALEXEI

Inventor name: CORDELL, RICHARD

Inventor name: RODOV, VLADIMIR

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Effective date: 20140131

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