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EP2194275A3 - Wälzkolbenvakuumpumpe - Google Patents

Wälzkolbenvakuumpumpe Download PDF

Info

Publication number
EP2194275A3
EP2194275A3 EP09014528.5A EP09014528A EP2194275A3 EP 2194275 A3 EP2194275 A3 EP 2194275A3 EP 09014528 A EP09014528 A EP 09014528A EP 2194275 A3 EP2194275 A3 EP 2194275A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
type vacuum
lobe type
shaft
lobe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP09014528.5A
Other languages
English (en)
French (fr)
Other versions
EP2194275B1 (de
EP2194275A2 (de
Inventor
Frank Hotopp
Siamak Dr. Rafii
Ronald Dr. Sachs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2194275A2 publication Critical patent/EP2194275A2/de
Publication of EP2194275A3 publication Critical patent/EP2194275A3/de
Application granted granted Critical
Publication of EP2194275B1 publication Critical patent/EP2194275B1/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/60—Shafts

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Die Erfindung betrifft eine Wälzkolbenvakuumpumpe mit einer Welle (10, 14), einem mit dieser verbundenen Kolben (12, 16), einem die Welle in Drehung versetzenden Antrieb (54, 56) und einer Wellenlagerung (22, 24, 26, 28). Um einen kostengünstig herstellbaren und stabilen Kolben zu schaffen, schlägt die Erfindung vor, dass in der Welle wenigstens ein Hohlraum (80) vorgesehen ist.
EP09014528.5A 2008-12-04 2009-11-20 Wälzkolbenvakuumpumpe Not-in-force EP2194275B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008060540A DE102008060540A1 (de) 2008-12-04 2008-12-04 Wälzkolbenvakuumpumpe

Publications (3)

Publication Number Publication Date
EP2194275A2 EP2194275A2 (de) 2010-06-09
EP2194275A3 true EP2194275A3 (de) 2014-09-03
EP2194275B1 EP2194275B1 (de) 2018-08-22

Family

ID=41796160

Family Applications (1)

Application Number Title Priority Date Filing Date
EP09014528.5A Not-in-force EP2194275B1 (de) 2008-12-04 2009-11-20 Wälzkolbenvakuumpumpe

Country Status (2)

Country Link
EP (1) EP2194275B1 (de)
DE (1) DE102008060540A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2490517B (en) 2011-05-04 2017-12-13 Edwards Ltd Rotor for pump
DE102014104161A1 (de) * 2014-03-26 2015-10-01 Pfeiffer Vacuum Gmbh Wälzkolbenvakuumpumpe
DE102014107536A1 (de) 2014-05-28 2015-12-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3064775B1 (de) 2015-03-02 2022-01-26 Pfeiffer Vacuum GmbH Vakuumpumpe sowie Verfahren zur Detektion eines Kontaktes zwischen wenigstens einem Rotor und einem Stator einer Vakuumpumpe
GB2571792B (en) * 2018-03-09 2020-12-16 Edwards Ltd A vacuum pump with a pressure relief valve
US11815095B2 (en) * 2019-01-10 2023-11-14 Elival Co., Ltd Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE882746C (de) * 1941-04-11 1953-07-13 Auto Union A G Roots-Geblaese mit aus Leichtmetall bestehenden, mit Stahlwellen versehenen Laeufern
GB809445A (en) * 1954-02-27 1959-02-25 Heraeus Gmbh W C Improvements in or relating to rotary high vacuum pumps
GB891524A (en) * 1957-04-08 1962-03-14 Expl Du Generatuer A Piston Li Improved pumps, motors and driving units of the rotor type
US3302868A (en) * 1964-04-02 1967-02-07 Leybolds Nachfolger E Fluid handling apparatus for use as vacuum pump
US6164945A (en) * 1998-02-13 2000-12-26 Ebara Corporation Vacuum pump rotor and method of manufacturing the same
WO2004053296A1 (en) * 2002-12-06 2004-06-24 Adams Ricardo Ltd Rotor for a rotary machine

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2048249A (en) * 1933-08-22 1936-07-21 Adolf Schnurle Rotary piston machine

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE882746C (de) * 1941-04-11 1953-07-13 Auto Union A G Roots-Geblaese mit aus Leichtmetall bestehenden, mit Stahlwellen versehenen Laeufern
GB809445A (en) * 1954-02-27 1959-02-25 Heraeus Gmbh W C Improvements in or relating to rotary high vacuum pumps
GB891524A (en) * 1957-04-08 1962-03-14 Expl Du Generatuer A Piston Li Improved pumps, motors and driving units of the rotor type
US3302868A (en) * 1964-04-02 1967-02-07 Leybolds Nachfolger E Fluid handling apparatus for use as vacuum pump
US6164945A (en) * 1998-02-13 2000-12-26 Ebara Corporation Vacuum pump rotor and method of manufacturing the same
WO2004053296A1 (en) * 2002-12-06 2004-06-24 Adams Ricardo Ltd Rotor for a rotary machine

Also Published As

Publication number Publication date
DE102008060540A1 (de) 2010-06-10
EP2194275B1 (de) 2018-08-22
EP2194275A2 (de) 2010-06-09

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