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EP1471558A3 - Low voltage micro switch - Google Patents

Low voltage micro switch Download PDF

Info

Publication number
EP1471558A3
EP1471558A3 EP04009465A EP04009465A EP1471558A3 EP 1471558 A3 EP1471558 A3 EP 1471558A3 EP 04009465 A EP04009465 A EP 04009465A EP 04009465 A EP04009465 A EP 04009465A EP 1471558 A3 EP1471558 A3 EP 1471558A3
Authority
EP
European Patent Office
Prior art keywords
substrate
actuating
unit
low voltage
micro switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04009465A
Other languages
German (de)
French (fr)
Other versions
EP1471558A2 (en
Inventor
Jae Yeong Park
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LG Electronics Inc
Original Assignee
LG Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LG Electronics Inc filed Critical LG Electronics Inc
Publication of EP1471558A2 publication Critical patent/EP1471558A2/en
Publication of EP1471558A3 publication Critical patent/EP1471558A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H21/00—Switches operated by an operating part in the form of a pivotable member acted upon directly by a solid body, e.g. by a hand
    • H01H21/02—Details
    • H01H21/18—Movable parts; Contacts mounted thereon
    • H01H21/22—Operating parts, e.g. handle
    • H01H21/24—Operating parts, e.g. handle biased to return to normal position upon removal of operating force
    • H01H21/28—Operating parts, e.g. handle biased to return to normal position upon removal of operating force adapted for actuation at a limit or other predetermined position in the path of a body, the relative movement of switch and body being primarily for a purpose other than the actuation of the switch, e.g. door switch, limit switch, floor-levelling switch of a lift
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H01H2057/006—Micromechanical piezoelectric relay

Landscapes

  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

A low voltage micro switch includes a substrate having an actuating space therein; an actuating unit having a piezoelectric material extended in a cantilever beam shape from a portion of the substrate to the actuating space of the substrate and a bias electrode; a conductive signal line extendedly formed at a certain interval from one side of the substrate and having a disconnected portion ; a supporting unit connected to the actuating unit, positioned in the actuating space, and moving according to actuation of the actuating unit; a switching unit formed at the supporting unit and connecting or disconnecting the disconnected portion of the conductive signal line according to movement of the supporting unit; and one or more ground units formed at the substrate.
EP04009465A 2003-04-25 2004-04-22 Low voltage micro switch Withdrawn EP1471558A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020030026466A KR20040092228A (en) 2003-04-25 2003-04-25 Low voltage operated micro switch
KR2003026466 2003-04-25

Publications (2)

Publication Number Publication Date
EP1471558A2 EP1471558A2 (en) 2004-10-27
EP1471558A3 true EP1471558A3 (en) 2006-03-01

Family

ID=32960264

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04009465A Withdrawn EP1471558A3 (en) 2003-04-25 2004-04-22 Low voltage micro switch

Country Status (5)

Country Link
US (1) US7109641B2 (en)
EP (1) EP1471558A3 (en)
JP (1) JP2004327441A (en)
KR (1) KR20040092228A (en)
CN (1) CN1540700A (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100485787B1 (en) * 2002-08-20 2005-04-28 삼성전자주식회사 Micro Electro Mechanical Structure RF swicth
JP4740751B2 (en) * 2005-01-21 2011-08-03 パナソニック株式会社 Electromechanical switch
KR20070053515A (en) * 2005-11-21 2007-05-25 삼성전자주식회사 RF MEMS switch and manufacturing method
CN101313628B (en) * 2005-11-24 2012-06-20 株式会社村田制作所 Electroacoustic transducer
US7679186B2 (en) 2005-12-08 2010-03-16 Electronics And Telecommunications Research Institute Piezolectric micro electro-mechanical system switch, array of the switches, and method of fabricating the same
KR20070074728A (en) * 2006-01-10 2007-07-18 삼성전자주식회사 MEMS switch
KR101188438B1 (en) * 2006-02-20 2012-10-08 삼성전자주식회사 Mems switch of downward type and method for producing the same
KR100785084B1 (en) * 2006-03-30 2007-12-12 삼성전자주식회사 Piezoelectric MEMS Switch and Manufacturing Method Thereof
US8451077B2 (en) 2008-04-22 2013-05-28 International Business Machines Corporation MEMS switches with reduced switching voltage and methods of manufacture
US8222796B2 (en) * 2008-10-15 2012-07-17 International Business Machines Corporation Micro-electro-mechanical device with a piezoelectric actuator
US8093971B2 (en) * 2008-12-22 2012-01-10 General Electric Company Micro-electromechanical system switch
US8211728B2 (en) * 2009-03-27 2012-07-03 International Business Machines Corporation Horizontal micro-electro-mechanical-system switch
US20140202837A1 (en) * 2010-06-14 2014-07-24 Purdue Research Foundation Low-cost process-independent rf mems switch
CN102707504B (en) * 2011-11-21 2016-04-27 京东方科技集团股份有限公司 Liquid crystal panel and preparation method thereof, display device
WO2015112796A1 (en) * 2014-01-23 2015-07-30 The Florida State University Research Foundation, Inc. Ultrafast electromechanical disconnect switch
US10291283B2 (en) * 2016-04-01 2019-05-14 Intel Corporation Tunable radio frequency systems using piezoelectric package-integrated switching devices

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020109436A1 (en) * 2000-11-30 2002-08-15 Cheng-Jien Peng Piezoelectrically actuated tunable electronic device

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69714408T2 (en) * 1997-04-23 2003-04-24 Asulab S.A., Marin Magnetic microswitch and manufacturing process
US6115231A (en) * 1997-11-25 2000-09-05 Tdk Corporation Electrostatic relay
US6153839A (en) * 1998-10-22 2000-11-28 Northeastern University Micromechanical switching devices
WO2000046852A1 (en) * 1999-02-04 2000-08-10 Institute Of Microelectronics Micro-relay
US6373007B1 (en) * 2000-04-19 2002-04-16 The United States Of America As Represented By The Secretary Of The Air Force Series and shunt mems RF switch
US6377438B1 (en) * 2000-10-23 2002-04-23 Mcnc Hybrid microelectromechanical system tunable capacitor and associated fabrication methods
KR100485787B1 (en) * 2002-08-20 2005-04-28 삼성전자주식회사 Micro Electro Mechanical Structure RF swicth
WO2004040611A1 (en) * 2002-10-29 2004-05-13 Matsushita Electric Industrial Co., Ltd. Switching apparatus, electric field applying method and switching system
US6903493B2 (en) * 2003-04-14 2005-06-07 Agilent Technologies, Inc. Inserting-finger liquid metal relay
JP4496091B2 (en) * 2004-02-12 2010-07-07 株式会社東芝 Thin film piezoelectric actuator
JP4408266B2 (en) * 2004-04-22 2010-02-03 日本碍子株式会社 Microswitch and manufacturing method thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020109436A1 (en) * 2000-11-30 2002-08-15 Cheng-Jien Peng Piezoelectrically actuated tunable electronic device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
FOX C H J ET AL: "Development of micromachined RF switches with piezofilm actuation", PROCEEDINGS OF THE SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING SPIE-INT. SOC. OPT. ENG USA, vol. 4700, 2002, pages 40 - 49, XP008058086, ISSN: 0277-786X *

Also Published As

Publication number Publication date
CN1540700A (en) 2004-10-27
US7109641B2 (en) 2006-09-19
JP2004327441A (en) 2004-11-18
US20040211654A1 (en) 2004-10-28
EP1471558A2 (en) 2004-10-27
KR20040092228A (en) 2004-11-03

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