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WO2003015128A3 - An electromechanical switch and method of fabrication - Google Patents

An electromechanical switch and method of fabrication Download PDF

Info

Publication number
WO2003015128A3
WO2003015128A3 PCT/US2002/024927 US0224927W WO03015128A3 WO 2003015128 A3 WO2003015128 A3 WO 2003015128A3 US 0224927 W US0224927 W US 0224927W WO 03015128 A3 WO03015128 A3 WO 03015128A3
Authority
WO
WIPO (PCT)
Prior art keywords
cantilever arm
switch
air gap
substrate
cantilever
Prior art date
Application number
PCT/US2002/024927
Other languages
French (fr)
Other versions
WO2003015128A2 (en
Inventor
Michael Pedersen
Mehmet Ozgur
Original Assignee
Corp For Nat Res Initiatives
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corp For Nat Res Initiatives filed Critical Corp For Nat Res Initiatives
Priority to AU2002355553A priority Critical patent/AU2002355553A1/en
Publication of WO2003015128A2 publication Critical patent/WO2003015128A2/en
Publication of WO2003015128A3 publication Critical patent/WO2003015128A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H01G5/18—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/40—Structural combinations of variable capacitors with other electric elements not covered by this subclass, the structure mainly consisting of a capacitor, e.g. RC combinations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0018—Special provisions for avoiding charge trapping, e.g. insulation layer between actuating electrodes being permanently polarised by charge trapping so that actuating or release voltage is altered
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0072—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stoppers or protrusions for maintaining a gap, reducing the contact area or for preventing stiction between the movable and the fixed electrode in the attracted position

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)

Abstract

A micro-electro-mechanical (MEM) switch (100) formed on a substrate (120) allows switching of various types of electrical conductor structures. The switch (100) contains a tilting cantilever arm (116), which tilts around central points of attachment (117A, 117B). At least two conducting electrodes (123A, 123B) on the cantilever arm (116) and the substrate (120) air gap capacitors, which when electrically charged provide electrostatic attraction forces that cause the cantilever arm (116) to deflect and tilt until conducting electrodes (123A, 123B) near the tips of the cantilever arm (116) make electrical contact with fixed electrodes (111A, 111B) on the underlying substrate (120). The air gap capacitors on either side of the cantilever (116) points allow the switch (100) to be driven into both ON and OFF states. Holes (121) in the cantilever arm near the air gap capacitors allow air within the gap to escape, thereby reducing damping and increasing the mechanical bandwidth of the switch.
PCT/US2002/024927 2001-08-07 2002-08-07 An electromechanical switch and method of fabrication WO2003015128A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002355553A AU2002355553A1 (en) 2001-08-07 2002-08-07 An electromechanical switch and method of fabrication

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US31022301P 2001-08-07 2001-08-07
US60/310,223 2001-08-07
US20819302A 2002-07-31 2002-07-31
US10/208,193 2002-07-31

Publications (2)

Publication Number Publication Date
WO2003015128A2 WO2003015128A2 (en) 2003-02-20
WO2003015128A3 true WO2003015128A3 (en) 2003-09-25

Family

ID=26902982

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/024927 WO2003015128A2 (en) 2001-08-07 2002-08-07 An electromechanical switch and method of fabrication

Country Status (2)

Country Link
AU (1) AU2002355553A1 (en)
WO (1) WO2003015128A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107424875A (en) * 2017-07-24 2017-12-01 中北大学 A kind of cross SP3T switch

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5094121B2 (en) 2003-10-31 2012-12-12 エプコス アーゲー Electronic device and manufacturing method thereof
JP5031573B2 (en) * 2004-10-27 2012-09-19 エプコス アクチエンゲゼルシャフト Reduction of air braking in MEMS devices
CA2737056C (en) * 2008-09-12 2018-10-30 Xbiotech Inc. Targeting pathogenic monocytes
WO2011088362A2 (en) 2010-01-15 2011-07-21 Wispry, Inc. Mems sprung cantilever tunable capacitors and methods
DE102010013611A1 (en) * 2010-03-22 2011-09-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Hybrid actuator element e.g. electrostatic actuator, for actuating high temperature prevail or aggressive fluid in fluid system, has deflection element and housing part that comprise sintering layers, and arms made of ceramic layers
US8916996B2 (en) * 2011-07-29 2014-12-23 General Electric Company Electrical distribution system
CN103943420B (en) * 2014-04-15 2017-06-23 清华大学 MEMS relay, cantilever switch and forming method thereof
CN104064407B (en) * 2014-06-12 2016-04-20 清华大学 MEMS switch
CN107437482A (en) * 2017-07-24 2017-12-05 中北大学 A kind of practical RF MEMS Switches of board-type
CN108648964B (en) * 2018-06-15 2020-06-09 中北大学 A radio frequency MEMS switch based on electrode structure without release holes
DE102023209781A1 (en) * 2023-10-06 2025-04-10 Robert Bosch Gesellschaft mit beschränkter Haftung Micromechanical switch

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4570139A (en) * 1984-12-14 1986-02-11 Eaton Corporation Thin-film magnetically operated micromechanical electric switching device
US5051643A (en) * 1990-08-30 1991-09-24 Motorola, Inc. Electrostatically switched integrated relay and capacitor
US6127744A (en) * 1998-11-23 2000-10-03 Raytheon Company Method and apparatus for an improved micro-electrical mechanical switch

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4570139A (en) * 1984-12-14 1986-02-11 Eaton Corporation Thin-film magnetically operated micromechanical electric switching device
US5051643A (en) * 1990-08-30 1991-09-24 Motorola, Inc. Electrostatically switched integrated relay and capacitor
US6127744A (en) * 1998-11-23 2000-10-03 Raytheon Company Method and apparatus for an improved micro-electrical mechanical switch

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107424875A (en) * 2017-07-24 2017-12-01 中北大学 A kind of cross SP3T switch

Also Published As

Publication number Publication date
WO2003015128A2 (en) 2003-02-20
AU2002355553A1 (en) 2003-02-24

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