[go: up one dir, main page]

EP1403903A3 - Orbitron-Pumpe - Google Patents

Orbitron-Pumpe Download PDF

Info

Publication number
EP1403903A3
EP1403903A3 EP03015579A EP03015579A EP1403903A3 EP 1403903 A3 EP1403903 A3 EP 1403903A3 EP 03015579 A EP03015579 A EP 03015579A EP 03015579 A EP03015579 A EP 03015579A EP 1403903 A3 EP1403903 A3 EP 1403903A3
Authority
EP
European Patent Office
Prior art keywords
field
electron source
pump chamber
orbitron
evacuated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03015579A
Other languages
English (en)
French (fr)
Other versions
EP1403903A2 (de
Inventor
Hans Wilfried Peter Dr. Koops
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koops Hans Wp Dr
Original Assignee
Nawotec GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nawotec GmbH filed Critical Nawotec GmbH
Publication of EP1403903A2 publication Critical patent/EP1403903A2/de
Publication of EP1403903A3 publication Critical patent/EP1403903A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes

Landscapes

  • Particle Accelerators (AREA)
  • Electron Tubes For Measurement (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Die Erfindung betrifft eine Orbitron-Pumpe 10 zur Erzeugung von Vakuum in einem zu evakuierenden Raum-Pumpenraum 24 -, mit einer Elektronenquelle 18, mit Mitteln zum Erzeugen eines Feldes, das die Elektronen der Elektronenquelle 18 im Pumpenraum 24 auf eine Kreisbahn zwingt. Die Erfindung zeichnet sich dadurch aus, dass die Elektronenquelle als Feldelektronenquelle 18 ausgebildet ist, die einen kalten Feldelektronen-Emitter 22 und eine Beschleuniger-Elektrode 20 umfasst, welche die aus dem Feldelektronen-Emitter 22 austretenden Elektronen in Richtung auf das Feld beschleunigt, und dass der Abstand zwischen dem Feldelektronen-Emitter 22 und der Beschleuniger-Elektrode 20 kleiner als die mittlere freie Weglänge der Atome des zu evakuierenden Gases - Restgas - in dem Pumpenraum 24 ist.
EP03015579A 2002-09-05 2003-07-11 Orbitron-Pumpe Withdrawn EP1403903A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2002141549 DE10241549B4 (de) 2002-09-05 2002-09-05 Orbitron-Pumpe
DE10241549 2002-09-05

Publications (2)

Publication Number Publication Date
EP1403903A2 EP1403903A2 (de) 2004-03-31
EP1403903A3 true EP1403903A3 (de) 2005-05-11

Family

ID=31724503

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03015579A Withdrawn EP1403903A3 (de) 2002-09-05 2003-07-11 Orbitron-Pumpe

Country Status (2)

Country Link
EP (1) EP1403903A3 (de)
DE (1) DE10241549B4 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2829157C1 (ru) * 2024-03-22 2024-10-24 Евгений Андреевич Кунин Способ откачки газовой среды из вакуумной камеры и электронно-лучевая откачная система

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009042417B4 (de) 2009-07-16 2011-11-24 Vacom Steuerungsbau Und Service Gmbh Orbitron-Ionengetterpumpe
EP2413343B1 (de) 2010-07-26 2015-11-04 Hans W.P. Dr. Koops Vorrichtung zur Erzeugung von THz-Strahlung mit freien Elektronenstrahlen
US9388916B2 (en) 2011-11-30 2016-07-12 Massachusetts Institute Of Technology Single-use, permanently-sealable microvalve
CN102691640B (zh) * 2012-05-29 2015-12-02 储琦 一种抽气系统及工艺
CN104100492B (zh) * 2014-07-17 2017-07-25 储继国 高真空电弧泵及其抽气机组
DE102015001440A1 (de) 2015-02-09 2016-08-11 Hans Wilfried Peter Koops Miniaturisierte Röntgenröhre mit Kathode und Anode aus Koops-GranMat und mit Verzögerer

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3244969A (en) * 1963-02-26 1966-04-05 Wisconsin Alumni Res Found Electron orbiting tubes for ion measurement and gettering pumps
US3339106A (en) * 1965-05-28 1967-08-29 Canadian Patents Dev Ionization vacuum pump of the orbitron type having a porous annular grid electrode
DE4137527A1 (de) * 1991-11-14 1993-05-19 Siemens Ag Ionisationsdruckmesser
WO1996039582A1 (en) * 1995-06-06 1996-12-12 Color Planar Displays, Inc. Vacuum maintenance device for high vacuum chambers
US6107745A (en) * 1997-06-27 2000-08-22 Pixtech S.A. Ion pumping of a flat microtip screen

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3371853A (en) * 1966-06-17 1968-03-05 Wisconsin Alumni Res Found Orbitron vacuum pump with getter vaporization by resistance heating
US3449660A (en) * 1966-08-10 1969-06-10 Wisconsin Alumni Res Found Orbitron electronic vacuum gauge having second anode for collecting scattered electrons

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3244969A (en) * 1963-02-26 1966-04-05 Wisconsin Alumni Res Found Electron orbiting tubes for ion measurement and gettering pumps
US3339106A (en) * 1965-05-28 1967-08-29 Canadian Patents Dev Ionization vacuum pump of the orbitron type having a porous annular grid electrode
DE4137527A1 (de) * 1991-11-14 1993-05-19 Siemens Ag Ionisationsdruckmesser
WO1996039582A1 (en) * 1995-06-06 1996-12-12 Color Planar Displays, Inc. Vacuum maintenance device for high vacuum chambers
US6107745A (en) * 1997-06-27 2000-08-22 Pixtech S.A. Ion pumping of a flat microtip screen

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
D. TEMPLE: "recent progress in field emitter array development for high performance applications", MATERIALS SCIENCE AND ENGINEERING, vol. r24, 1999, pages 185 - 239, XP002320281 *
HELY H ET AL: "ENTWICKLUNG EINER KLEINEN DIFFERENTIELL GEPUMPTEN FELDEMISSIONS-ELEKTRONENQUELLE DEVELOPMENT OF A SMALL DIFFERENTIALLY PUMPED FIELD-EMISSION SOURCE", OPTIK, WISSENSCHAFTLICHE VERLAG GMBH.STUTTGART, DE, vol. 49, no. 1, 1977, pages 127 - 132, XP008042918, ISSN: 0030-4026 *
R.BAPTIST ET AL.: "bayard-alpert vacuum gauge with microtips", JOURNAL VACUUM SCIENCE TECHNOLOGY, vol. b14, no. 3, 1996, XP002320282 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2829157C1 (ru) * 2024-03-22 2024-10-24 Евгений Андреевич Кунин Способ откачки газовой среды из вакуумной камеры и электронно-лучевая откачная система

Also Published As

Publication number Publication date
EP1403903A2 (de) 2004-03-31
DE10241549A1 (de) 2004-03-18
DE10241549B4 (de) 2004-07-22

Similar Documents

Publication Publication Date Title
EP1403903A3 (de) Orbitron-Pumpe
DE19929519A1 (de) Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage
EP0846929A3 (de) Teilen oder Zubehören für einen Aufkohlungsofen
WO2004036627A3 (de) Plasmaanlage und verfahren zum anisotropen einätzen von strukturen in ein substrat
ATE532206T1 (de) Verfahren und vorrichtung zum dotieren, diffusion und oxidieren von siliziumscheiben unter vermindertem druck
DE3204764A1 (de) Vorrichtung zur physikalischen bedampfung von oberflaechen
EP0863366A3 (de) Gasbrenner
EP1076038A3 (de) Gerät zur elektrophysikalischen Wasserbehandlung
DE1452667A1 (de) Maschine zum plastischen Verformen mittels Detonationswellen
DD201461A1 (de) Verfahren zur erzeugung eines oertlich konstanten arbeitsgasdruckes
DE22438C (de) Verfahren zur Verhütung von Explosionen in Bergwerken
DE1267055B (de) ? mit extrem verschleissfester Oberflaeche
EP0373229A1 (de) Mechanische Vakuumpumpe mit einer federbelasteten Rückschlagklappe
WO2001006129A1 (de) Reibungsvakuumpumpe für den einsatz in einem system zur druckregelung sowie druckregelungssystem mit einer reibungsvakuumpumpe dieser art
DE1934939C3 (de) Verfahren zum Evakuieren eines Vakuumofens und Vakuumofenanlage zur Durchführung des Verfahrens
KANAYAMA et al. Plasma-carburizing of Ti-6Al-4V Alloy with a C3H8-H2 Mixed Gas
EP1094280A3 (de) Mobile Anordnung und Verfahren zur Verminderung der Konzentration von Luftschadstoffen
DE648068C (de) Verfahren zum Entgasen von mit Gluehelektroden versehenen elektrischen Leuchtroehren
DE19754272A1 (de) Abpumpstation eines Abscheiders für eine hüttentechnische Einrichtung
DE10005243C2 (de) Verfahren zur abgestuften beschleunigten in situ-Stabilisierung von Deponien und Altablagerungen
DE177103C (de)
SU1528802A1 (ru) Способ карбидизации поверхности металлов и сплавов
DE224573C (de)
DE246172C (de)
DE114859C (de)

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL LT LV MK

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL LT LV MK

17P Request for examination filed

Effective date: 20051012

AKX Designation fees paid

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: KOOPS, HANS W.P., DR.

17Q First examination report despatched

Effective date: 20111213

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20170201