EP1306592A3 - Differentialdruck Dichtungseinrichtung mit gepumptem Fluid - Google Patents

Differentialdruck Dichtungseinrichtung mit gepumptem Fluid Download PDF

Info

Publication number: EP1306592A3
Authority: EP; European Patent Office
Prior art keywords: differential pressure; pressure seal; seal apparatus; pumped fluid; space
Prior art date: 2001-10-24
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

EP02023879A

Other languages

English (en)

French (fr)

Other versions

EP1306592B1 (de

EP1306592A2 (de

Inventor

Hiroyuki Shinozaki

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Ebara Corp

Original Assignee

Ebara Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2001-10-24

Filing date

2002-10-24

Publication date

2004-12-01

2001-10-24 Priority claimed from JP2001326738A external-priority patent/JP3883836B2/ja

2002-08-22 Priority claimed from JP2002241878A external-priority patent/JP4205913B2/ja

2002-10-24 Application filed by Ebara Corp filed Critical Ebara Corp

2003-05-02 Publication of EP1306592A2 publication Critical patent/EP1306592A2/de

2004-12-01 Publication of EP1306592A3 publication Critical patent/EP1306592A3/de

2007-03-21 Application granted granted Critical

2007-03-21 Publication of EP1306592B1 publication Critical patent/EP1306592B1/de

2022-10-24 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Classifications

- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70841—Constructional issues related to vacuum environment, e.g. load-lock chamber
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/08—Arrangements for covering or protecting the ways
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/72—Sealings
- F16C33/74—Sealings of sliding-contact bearings
- F16C33/741—Sealings of sliding-contact bearings by means of a fluid
- F16C33/748—Sealings of sliding-contact bearings by means of a fluid flowing to or from the sealing gap, e.g. vacuum seals with differential exhaust
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/40—Sealings between relatively-moving surfaces by means of fluid
- F16J15/406—Sealings between relatively-moving surfaces by means of fluid by at least one pump
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70816—Bearings
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2300/00—Application independent of particular apparatuses
- F16C2300/40—Application independent of particular apparatuses related to environment, i.e. operating conditions
- F16C2300/62—Application independent of particular apparatuses related to environment, i.e. operating conditions low pressure, e.g. elements operating under vacuum conditions
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S277/00—Seal for a joint or juncture
- Y10S277/914—Backup seal for failure of primary seal

Landscapes

Engineering & Computer Science (AREA)
General Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Public Health (AREA)
Environmental & Geological Engineering (AREA)
Epidemiology (AREA)
Health & Medical Sciences (AREA)
Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
Magnetic Bearings And Hydrostatic Bearings (AREA)
Sealing Devices (AREA)
Structures Of Non-Positive Displacement Pumps (AREA)

EP02023879A 2001-10-24 2002-10-24 Differentialdruck Dichtungseinrichtung mit gepumptem Fluid Expired - Lifetime EP1306592B1 (de)

Applications Claiming Priority (4)

Application Number	Priority Date	Filing Date	Title
JP2001326738A JP3883836B2 (ja)	2001-10-24	2001-10-24	差動排気シール装置
JP2001326738		2001-10-24
JP2002241878A JP4205913B2 (ja)	2002-08-22	2002-08-22	差動排気シール装置
JP2002241878		2002-08-22

Publications (3)

Publication Number	Publication Date
EP1306592A2 EP1306592A2 (de)	2003-05-02
EP1306592A3 true EP1306592A3 (de)	2004-12-01
EP1306592B1 EP1306592B1 (de)	2007-03-21

Family

ID=26624076

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP02023879A Expired - Lifetime EP1306592B1 (de)	2001-10-24	2002-10-24	Differentialdruck Dichtungseinrichtung mit gepumptem Fluid

Country Status (3)

Country	Link
US (1)	US7134668B2 (de)
EP (1)	EP1306592B1 (de)
DE (1)	DE60218955T2 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP4031252B2 (ja) *	2002-01-31	2008-01-09	キヤノン株式会社	排気装置及びその制御方法並びに真空内静圧軸受
SG139736A1 (en)	2003-04-11	2008-02-29	Nikon Corp	Apparatus having an immersion fluid system configured to maintain immersion fluid in a gap adjacent an optical assembly
DE602004024782D1 (de)	2003-06-19	2010-02-04	Nippon Kogaku Kk	Belichtungseinrichtung und bauelementeherstellungsverfahren
EP1491954A1 (de)	2003-06-27	2004-12-29	ASML Netherlands B.V.	Dichtungsanordnung, lithographischer Projektionsapparat, und Verfahren zur Herstellung einer Vorrichtung
WO2005047979A2 (en) *	2003-11-06	2005-05-26	Carl Zeiss Smt Ag	Optical system
US7589822B2 (en) *	2004-02-02	2009-09-15	Nikon Corporation	Stage drive method and stage unit, exposure apparatus, and device manufacturing method
JP2006038067A (ja) *	2004-07-26	2006-02-09	Fanuc Ltd	軸受構造及び直線駆動装置
USRE43576E1 (en)	2005-04-08	2012-08-14	Asml Netherlands B.V.	Dual stage lithographic apparatus and device manufacturing method
DE102007016896A1 (de) *	2007-04-10	2008-10-16	Jost-Werke Gmbh	Kugelkupplung mit relativbeweglich aufgenommener Dichtung
US8465024B2 (en) *	2007-09-07	2013-06-18	Heerema Marine Contractors Nederland B.V.	Sealing device configured to form an air seal around a pipe
JP5475693B2 (ja) *	2008-02-28	2014-04-16	コーニンクレッカフィリップスエヌヴェ	回転フォイルトラップ及び駆動装置を持つデブリ低減装置
JP5097166B2 (ja)	2008-05-28	2012-12-12	エーエスエムエルネザーランズビー．ブイ．	リソグラフィ装置及び装置の動作方法
DE102009019773B4 (de) *	2009-04-30	2022-03-03	Friedrich-Schiller-Universität Jena	Verfahren zur Verbesserung der Positioniergenauigkeit von mittels Gaslagerelementen geführten Tischen und Verwendung von Luftlagerelementen mit Dichtsystemen für in Umgebungsatmosphäre geführte Tischsysteme
GB0922564D0 (en) *	2009-12-24	2010-02-10	Edwards Ltd	Pump
US8939451B2 (en) *	2013-03-11	2015-01-27	Varian Semiconductor Equipment Associates, Inc.	Floating high vacuum seal cartridge
CN105537970B (zh) *	2014-10-28	2018-07-27	东芝机械株式会社	机床的引导机构以及机床
JP6559937B2 (ja) *	2014-10-28	2019-08-14	東芝機械株式会社	油静圧案内機構および工作機械
WO2019096644A1 (en) *	2017-11-14	2019-05-23	Asml Netherlands B.V.	Object stage bearing for lithographic apparatus
CN114791016B (zh) *	2022-03-02	2024-03-19	湖南华园莱客科技有限公司	一种多环套接的空气轴承

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Publication number	Priority date	Publication date	Assignee	Title
GB938820A (en) *	1960-04-07	1963-10-09	Alsacienne Constr Meca	Rotary sealing mechanism
US4118042A (en) *	1977-09-27	1978-10-03	The United States Of America As Represented By The United States Department Of Energy	Air bearing vacuum seal assembly
US4191385A (en) *	1979-05-15	1980-03-04	Fox Wayne L	Vacuum-sealed gas-bearing assembly
EP0067239A1 (de) *	1981-06-13	1982-12-22	Carl Schenck Ag	Dichtungsanordnung bei Spaltdichtungen an hydrostatisch gelagerten Kolbenstangen von hydraulischen Belastungszylindern
US4425508A (en) *	1982-05-07	1984-01-10	Gca Corporation	Electron beam lithographic apparatus

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US3635532A (en) *	1969-02-08	1972-01-18	Riv Officine Di Villar Perosa	Hydrostatically supported machine tool slide
US3610365A (en) *	1970-06-17	1971-10-05	Nasa	Air bearing
US3947044A (en) *	1975-07-07	1976-03-30	Bralorne Resources Limited	Secondary sealing device
US4627362A (en) *	1983-06-28	1986-12-09	Kabushiki Kaisha Myotoku	Air sliding device for work pallets or the like
US5218896A (en) *	1986-11-06	1993-06-15	Canon Kabushiki Kaisha	Driving mechanism with gas bearing
US5133561A (en) *	1990-02-26	1992-07-28	Tokyo Electron Limited	Sealing device
DE4028048C2 (de) *	1990-09-05	1994-12-08	Blohm Voss Ag	Abdichtungsvorrichtung für rotierende Wellen, insbesondere Stevenrohrabdichtung für Schiffspropellerwellen
US6126169A (en) *	1998-01-23	2000-10-03	Nikon Corporation	Air bearing operable in a vacuum region
US6086255A (en) *	1998-07-28	2000-07-11	Thompson Industries, Inc.	Hydrostatic bearing and fluid collection system
US6287004B1 (en) *	1999-11-22	2001-09-11	Nikon Corporation	Fluid bearing operable in a vacuum region
US6443618B1 (en) *	2000-07-24	2002-09-03	Moore Epitaxial, Inc.	Particulate free air bearing and seal
US6789804B2 (en) *	2001-07-23	2004-09-14	Kaydon Corporation	Dry gas shutdown seal
GB0202468D0 (en) *	2002-02-02	2002-03-20	Crane John Uk Ltd	Seals

2002
- 2002-10-23 US US10/278,020 patent/US7134668B2/en not_active Expired - Fee Related
- 2002-10-24 EP EP02023879A patent/EP1306592B1/de not_active Expired - Lifetime
- 2002-10-24 DE DE60218955T patent/DE60218955T2/de not_active Expired - Fee Related

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB938820A (en) *	1960-04-07	1963-10-09	Alsacienne Constr Meca	Rotary sealing mechanism
US4118042A (en) *	1977-09-27	1978-10-03	The United States Of America As Represented By The United States Department Of Energy	Air bearing vacuum seal assembly
US4191385A (en) *	1979-05-15	1980-03-04	Fox Wayne L	Vacuum-sealed gas-bearing assembly
EP0067239A1 (de) *	1981-06-13	1982-12-22	Carl Schenck Ag	Dichtungsanordnung bei Spaltdichtungen an hydrostatisch gelagerten Kolbenstangen von hydraulischen Belastungszylindern
US4425508A (en) *	1982-05-07	1984-01-10	Gca Corporation	Electron beam lithographic apparatus

Also Published As

Publication number	Publication date
DE60218955D1 (de)	2007-05-03
EP1306592B1 (de)	2007-03-21
DE60218955T2 (de)	2007-11-29
EP1306592A2 (de)	2003-05-02
US20030075871A1 (en)	2003-04-24
US7134668B2 (en)	2006-11-14

Publication	Publication Date	Title
EP1306592A3 (de)	2004-12-01	Differentialdruck Dichtungseinrichtung mit gepumptem Fluid
EP1253359A3 (de)	2004-02-25	Berührungslose Gasverdichterdichtung mit Druckumsteuerungsmöglichkeit
AU7067800A (en)	2001-04-10	Uninterrupted flow pump apparatus and method
EP1188927A3 (de)	2003-01-15	Spiralverdichter
EP1096146A3 (de)	2002-06-19	Membranpumpe
EP1251276A3 (de)	2002-12-18	Volumetrische Infusionspumpe
EP2290268A3 (de)	2011-07-06	Dichtungsvorrichtung
NZ337222A (en)	2000-10-27	Linear peristaltic pump
CA2347626A1 (en)	2001-03-15	Fluid pressure actuated blood pumping systems and methods with continuous inflow and pulsatile outflow conditions
EP1498610A3 (de)	2008-06-11	Verdrängungsregelbarer Spiralverdichter
EP1338294A3 (de)	2003-11-19	Verfahren und Vorrichtung zur Versorgung eines beschränkten Rückflusses in einer Blutpumpe
EP0974753A3 (de)	2000-10-04	Axialkolbenpumpe
EP1128101A3 (de)	2003-07-02	Dichtungsanordnungen
EP2025875A3 (de)	2011-05-25	Turbinendichtung und Sicherungsdichtung von einem Gasturbinentriebwerk und entsprechende Turbinenanordnung
EP1355059A3 (de)	2005-06-15	Kraftstoffpumpe
EP1152177A3 (de)	2003-11-12	Wellendichtung
EP0870901A3 (de)	2000-06-07	Tiefbohrwerkzeug
EP1096183A3 (de)	2003-01-15	Dichtungsanordnungen
EP1329632A3 (de)	2003-12-03	Axialpumpe variabler Verdrängung
EP0939257A3 (de)	2000-05-31	Radialwellendichtung
AU2003277352A1 (en)	2004-05-04	Integrated speed reducer and pump assembly
SE0203660D0 (sv)	2002-12-11	Back-up rings for high pressure seals, packing assembly, and pumps incorporating same
EP1273835A3 (de)	2006-02-08	Dichtungseinrichtung und damit versehene Kraftstoffpumpe
EP1296086A3 (de)	2004-02-18	Radialwellendichtring
EP1236896A3 (de)	2003-07-16	Verdichterkolben

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2004-12-01	RIC1	Information provided on ipc code assigned before grant	Ipc: 7F 16C 29/02 B Ipc: 7F 16J 15/40 A Ipc: 7F 16C 32/06 B
2005-07-27	17P	Request for examination filed	Effective date: 20050531
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