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EP1220285A3 - Ion source in which a UV/VUV light source is used for ionization - Google Patents

Ion source in which a UV/VUV light source is used for ionization Download PDF

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Publication number
EP1220285A3
EP1220285A3 EP01120299A EP01120299A EP1220285A3 EP 1220285 A3 EP1220285 A3 EP 1220285A3 EP 01120299 A EP01120299 A EP 01120299A EP 01120299 A EP01120299 A EP 01120299A EP 1220285 A3 EP1220285 A3 EP 1220285A3
Authority
EP
European Patent Office
Prior art keywords
lamp
space
gas
light
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01120299A
Other languages
German (de)
French (fr)
Other versions
EP1220285A2 (en
EP1220285B1 (en
Inventor
Andreas Ulrich
Fabian Mühlberger
Ralf Dr. Zimmermann
Antonius Prof. Dr. Kettrup
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Helmholtz Zentrum Muenchen Deutsches F
Original Assignee
Helmholtz Zentrum Muenchen Deutsches Forschungszentrum fuer Gesundheit und Umwelt GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helmholtz Zentrum Muenchen Deutsches Forschungszentrum fuer Gesundheit und Umwelt GmbH filed Critical Helmholtz Zentrum Muenchen Deutsches Forschungszentrum fuer Gesundheit und Umwelt GmbH
Publication of EP1220285A2 publication Critical patent/EP1220285A2/en
Publication of EP1220285A3 publication Critical patent/EP1220285A3/en
Application granted granted Critical
Publication of EP1220285B1 publication Critical patent/EP1220285B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/161—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
    • H01J49/162—Direct photo-ionisation, e.g. single photon or multi-photon ionisation

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

Die Erfindung betrifft eine Ionenquelle, bei der die Ionen durch UV/VUV-Licht ionisiert wurden und deren Verwendung.The invention relates to an ion source in which the ions were ionized by UV / VUV light and their use.

Aufgabe der Erfindung ist es, eine Ionenquelle mit einer Lichtquelle hoher Nutzphotonendichte zur Verfügung zu stellen sowie eine vorteilhafte Verwendung anzugeben.The object of the invention is an ion source with a light source provide high useful photon density as well to indicate a beneficial use.

Gelöst wird diese Aufgabe dadurch, daß die Lichtquelle entweder aus einer Deuteriumlape, einer Mikrohohlkathodenlampe, einer Mikrospitzenlampe, einer Gleichstromentladungslampe, einer Barriereentladungslampe oder einer elektronenstrahlbetriebenen UV/VUV Lampe mit folgenden Bauteilen, einer Elektronenkanone, einer Membran, welche den Raum der Elektronenkanone gegen einen Gasraum abschießt und durch den der Elektronenstrahl durchtritt, einem Edelgas bzw. einer edelgashaltigen Gasmischung in dem Gasraum, wobei der durch die Membran tretende Elektronenstrahl im Gasraum Licht erzeugt und optischen Bauelementen zum Abbilden des Licht-Emissionsvolumens in den Ionisationsraum besteht.This object is achieved in that the light source either from a deuterium sheet, a hollow microchannel lamp, a Micro-tip lamp, a DC discharge lamp, a barrier discharge lamp or an electron beam powered UV / VUV lamp with following components, an electron gun, a membrane, which the space of the electron gun against a Gas space shoots and through which the electron beam passes, a noble gas or a noble gas-containing gas mixture in the gas space, wherein the passing through the membrane electron beam in the gas space generates light and optical components for Mapping the light emission volume into the ionization space.

EP01120299.1A 2000-09-09 2001-08-24 Ion source in which a UV/VUV light source is used for ionization Expired - Lifetime EP1220285B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2000144655 DE10044655A1 (en) 2000-09-09 2000-09-09 Ion source using UV/VUV light for ionisation has light source provided with electron gun separated by membrane from gas space in which light is generated by electron beam
DE10044655 2000-09-09

Publications (3)

Publication Number Publication Date
EP1220285A2 EP1220285A2 (en) 2002-07-03
EP1220285A3 true EP1220285A3 (en) 2005-03-16
EP1220285B1 EP1220285B1 (en) 2014-08-20

Family

ID=7655651

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01120299.1A Expired - Lifetime EP1220285B1 (en) 2000-09-09 2001-08-24 Ion source in which a UV/VUV light source is used for ionization

Country Status (2)

Country Link
EP (1) EP1220285B1 (en)
DE (1) DE10044655A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107014892A (en) * 2017-05-15 2017-08-04 清华大学 A kind of micron order spatial discrimination mass spectrum imaging system based on VUV LASER

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10236344B4 (en) 2002-08-08 2007-03-29 Bruker Daltonik Gmbh Ionize to atmospheric pressure for mass spectrometric analysis
DE102005039269B4 (en) 2005-08-19 2011-04-14 Helmholtz Zentrum München Deutsches Forschungszentrum Für Gesundheit Und Umwelt (Gmbh) Method and apparatus for the mass spectrometric detection of compounds
US8721836B2 (en) 2008-04-22 2014-05-13 Micron Technology, Inc. Plasma processing with preionized and predissociated tuning gases and associated systems and methods
CN102103971B (en) * 2009-12-18 2012-11-07 中国科学院大连化学物理研究所 Hollow cathode discharge vacuum ultraviolet light ionization source inside minitype mass spectrograph
DE102012209324A1 (en) * 2012-06-01 2013-12-05 Helmholtz Zentrum München Optical fiber device for an ionization device and method for ionizing atoms and / or molecules
CZ306584B6 (en) 2015-11-16 2017-03-15 Univerzita Tomáše Bati ve Zlíně A device for generating UV radiation and the method of generating this radiation
CN111929354B (en) * 2020-07-02 2021-09-17 东华理工大学 Rare earth ore sample ionization analytical instrument in order

Citations (3)

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Publication number Priority date Publication date Assignee Title
EP0585487A1 (en) * 1990-05-11 1994-03-09 Mine Safety Appliances Company Apparatus and process for photoionization and detection
EP0921393A2 (en) * 1997-12-06 1999-06-09 GSF-Forschungszentrum für Umwelt und Gesundheit GmbH Method for detecting substances or classes of substances using REMPI-TOFMS
US6052401A (en) * 1996-06-12 2000-04-18 Rutgers, The State University Electron beam irradiation of gases and light source using the same

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DE4222130C2 (en) * 1992-07-06 1995-12-14 Heraeus Noblelight Gmbh High-power radiation
DE19820626C2 (en) * 1998-05-08 2000-09-07 Deutsch Zentr Luft & Raumfahrt Method and device for the detection of sample molecules

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0585487A1 (en) * 1990-05-11 1994-03-09 Mine Safety Appliances Company Apparatus and process for photoionization and detection
US6052401A (en) * 1996-06-12 2000-04-18 Rutgers, The State University Electron beam irradiation of gases and light source using the same
EP0921393A2 (en) * 1997-12-06 1999-06-09 GSF-Forschungszentrum für Umwelt und Gesundheit GmbH Method for detecting substances or classes of substances using REMPI-TOFMS

Non-Patent Citations (7)

* Cited by examiner, † Cited by third party
Title
BOBELDIJK M ET AL: "TESTING THE PERFORMANCE OF A VUV PHOTOIONIZATION SOURCE ON A DOUBLE FOCUSSING MASS SPECTROMETER USING ALKANES AND THIOPHENES", INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, ELSEVIER SCIENTIFIC PUBLISHING CO. AMSTERDAM, NL, vol. 110, no. 3, 2 December 1991 (1991-12-02), pages 179 - 194, XP000247041, ISSN: 0168-1176 *
EL-HABACHI AHMED ET AL: "Emission of excimer radiation from direct current, high-pressure hollow cathode discharges", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 72, no. 1, 5 January 1998 (1998-01-05), pages 22 - 24, XP012019726, ISSN: 0003-6951 *
GELLERT B ET AL: "GENERATION OF EXCIMER EMISSION IN DIELECTRIC BARRIER DISCHARGES", APPLIED PHYSICS B. PHOTOPHYSICS AND CHEMISTRY, SPRINGER VERLAG. HEIDELBERG, DE, vol. B52, no. 1, January 1991 (1991-01-01), pages 14 - 21, XP000209199 *
GENUIT W. ET AL.: "SELECTIVE ION SOURCE FOR TRACE GAS ANALSIS", INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PHYSICS, vol. 51, 1983, AMSTERDAM, pages 207 - 213, XP009042676 *
GONTHIEZ T ET AL: "VUV laser photoionization of laser-stimulated desorbed species", APPLIED PHYSICS A: MATERIALS SCIENCE AND PROCESSING, SPRINGER VERLAG, BERLIN, DE, vol. A69, suppl, 19 July 1999 (1999-07-19), pages 171 - 173, XP002175581, ISSN: 0947-8396 *
SALVERMOSER M ET AL: "Energy flow and excimer yields in continuous wave rare gas–halogen systems", JOURNAL OF APPLIED PHYSICS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 88, no. 1, 1 July 2000 (2000-07-01), pages 453 - 459, XP012050818, ISSN: 0021-8979 *
WIESER J ET AL: "VACUUM ULTRAVIOLET RARE GAS EXCIMER LIGHT SOURCE", REVIEW OF SCIENTIFIC INSTRUMENTS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 68, no. 3, March 1997 (1997-03-01), pages 1360 - 1364, XP000685060, ISSN: 0034-6748 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107014892A (en) * 2017-05-15 2017-08-04 清华大学 A kind of micron order spatial discrimination mass spectrum imaging system based on VUV LASER
CN107014892B (en) * 2017-05-15 2019-06-18 清华大学 A Micron-Scale Spatially Resolved Mass Spectrometry Imaging System Based on Vacuum Ultraviolet Laser

Also Published As

Publication number Publication date
EP1220285A2 (en) 2002-07-03
DE10044655A1 (en) 2002-04-04
EP1220285B1 (en) 2014-08-20

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