EP0829649A3 - Structure de clapet de soupape precontrainte pour une microsoupape - Google Patents
Structure de clapet de soupape precontrainte pour une microsoupape Download PDFInfo
- Publication number
- EP0829649A3 EP0829649A3 EP97113980A EP97113980A EP0829649A3 EP 0829649 A3 EP0829649 A3 EP 0829649A3 EP 97113980 A EP97113980 A EP 97113980A EP 97113980 A EP97113980 A EP 97113980A EP 0829649 A3 EP0829649 A3 EP 0829649A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- support structure
- valve
- valve flap
- passage opening
- flap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C3/00—Circuit elements having moving parts
- F15C3/08—Circuit elements having moving parts using reeds
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electrically Driven Valve-Operating Means (AREA)
- Electrostatic Spraying Apparatus (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19637878A DE19637878C2 (de) | 1996-09-17 | 1996-09-17 | Mikroventil mit vorgespannter Ventilklappenstruktur |
DE19637878 | 1996-09-17 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0829649A2 EP0829649A2 (fr) | 1998-03-18 |
EP0829649A3 true EP0829649A3 (fr) | 1998-11-04 |
EP0829649B1 EP0829649B1 (fr) | 2002-10-09 |
Family
ID=7805898
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP97113980A Expired - Lifetime EP0829649B1 (fr) | 1996-09-17 | 1997-08-13 | Structure de clapet de soupape precontrainte pour une microsoupape |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0829649B1 (fr) |
DE (2) | DE19637878C2 (fr) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001009521A1 (fr) * | 1999-07-30 | 2001-02-08 | The Procter & Gamble Company | Microvalve de regulation de debit |
US6962170B1 (en) | 1999-07-30 | 2005-11-08 | The Procter & Gamble Company | Microvalve for controlling fluid flow |
US6887615B1 (en) | 1999-07-30 | 2005-05-03 | The Procter & Gamble Company | Microvalve for controlling fluid flow |
US6590267B1 (en) * | 2000-09-14 | 2003-07-08 | Mcnc | Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods |
DE20116898U1 (de) | 2001-10-15 | 2002-01-17 | FESTO AG & Co., 73734 Esslingen | Mikroventil |
FR2834324B1 (fr) * | 2001-12-31 | 2007-04-13 | Bosch Gmbh Robert | Valve a commande electrique, membrane comportant de telles valves et servomoteur d'assistance de freinage comportant une telle membrane |
DE10243997B4 (de) * | 2002-09-21 | 2005-05-25 | Festo Ag & Co. | Mikroventil in Mehrschichtaufbau |
US7195026B2 (en) * | 2002-12-27 | 2007-03-27 | American Air Liquide, Inc. | Micro electromechanical systems for delivering high purity fluids in a chemical delivery system |
DE502004006313D1 (de) * | 2004-03-10 | 2008-04-10 | Festo Ag & Co | Pneumatisches Mikroventil |
JP2008507673A (ja) | 2004-07-23 | 2008-03-13 | エイエフエイ・コントロールズ,リミテッド・ライアビリティ・カンパニー | マイクロバルブアセンブリの動作方法および関連構造および関連デバイス |
FR2892485B1 (fr) * | 2005-10-21 | 2008-01-04 | Aldes Aeraulique Sa | Dispositif pour regulation et etancheite sur un orifice qui est soit obture, soit ouvert selon les besoins |
DE102007034117B4 (de) * | 2007-07-21 | 2011-03-10 | Ab Skf | Schmiervorrichtung |
DE102007034116B4 (de) * | 2007-07-21 | 2009-10-22 | Ab Skf | Vorrichtung |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4231287A (en) * | 1978-05-01 | 1980-11-04 | Physics International Company | Spring diaphragm |
WO1992022763A1 (fr) * | 1991-06-18 | 1992-12-23 | Danfoss A/S | Dispositif d'actionnement miniature |
US5176358A (en) * | 1991-08-08 | 1993-01-05 | Honeywell Inc. | Microstructure gas valve control |
CH684209A5 (fr) * | 1990-11-20 | 1994-07-29 | Westonbridge Int Ltd | Clapet intégré et micropompe comprenant un tel clapet. |
DE29603364U1 (de) * | 1996-02-27 | 1996-04-18 | Forschungszentrum Karlsruhe GmbH, 76133 Karlsruhe | Mikroventil |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4585209A (en) * | 1983-10-27 | 1986-04-29 | Harry E. Aine | Miniature valve and method of making same |
US5050838A (en) * | 1990-07-31 | 1991-09-24 | Hewlett-Packard Company | Control valve utilizing mechanical beam buckling |
-
1996
- 1996-09-17 DE DE19637878A patent/DE19637878C2/de not_active Expired - Fee Related
-
1997
- 1997-08-13 DE DE59708427T patent/DE59708427D1/de not_active Expired - Lifetime
- 1997-08-13 EP EP97113980A patent/EP0829649B1/fr not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4231287A (en) * | 1978-05-01 | 1980-11-04 | Physics International Company | Spring diaphragm |
CH684209A5 (fr) * | 1990-11-20 | 1994-07-29 | Westonbridge Int Ltd | Clapet intégré et micropompe comprenant un tel clapet. |
WO1992022763A1 (fr) * | 1991-06-18 | 1992-12-23 | Danfoss A/S | Dispositif d'actionnement miniature |
US5176358A (en) * | 1991-08-08 | 1993-01-05 | Honeywell Inc. | Microstructure gas valve control |
DE29603364U1 (de) * | 1996-02-27 | 1996-04-18 | Forschungszentrum Karlsruhe GmbH, 76133 Karlsruhe | Mikroventil |
Also Published As
Publication number | Publication date |
---|---|
DE59708427D1 (de) | 2002-11-14 |
EP0829649A2 (fr) | 1998-03-18 |
DE19637878A1 (de) | 1998-04-02 |
EP0829649B1 (fr) | 2002-10-09 |
DE19637878C2 (de) | 1998-08-06 |
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