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EP0735321A3 - Process and device for purification of noxious exhaust gases by chemical purification - Google Patents

Process and device for purification of noxious exhaust gases by chemical purification Download PDF

Info

Publication number
EP0735321A3
EP0735321A3 EP96102122A EP96102122A EP0735321A3 EP 0735321 A3 EP0735321 A3 EP 0735321A3 EP 96102122 A EP96102122 A EP 96102122A EP 96102122 A EP96102122 A EP 96102122A EP 0735321 A3 EP0735321 A3 EP 0735321A3
Authority
EP
European Patent Office
Prior art keywords
purification
exhaust gases
chemical
noxious exhaust
noxious
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP96102122A
Other languages
German (de)
French (fr)
Other versions
EP0735321A2 (en
EP0735321B1 (en
Inventor
Horst Dr Reichardt
Lothar Dipl-Ing Ritter
Guenter Dipl-Ing Firkert
Lutz Dipl-Phys Labs
Konrad Dipl-Phys Gehmlich
Gerold Hofmann
Michael Dipl-Ing Hentrich
Wido Wiesenberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Das Duennschicht Anlagen Systeme GmbH
Original Assignee
Das Duennschicht Anlagen Systeme GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=7758136&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0735321(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Das Duennschicht Anlagen Systeme GmbH filed Critical Das Duennschicht Anlagen Systeme GmbH
Publication of EP0735321A2 publication Critical patent/EP0735321A2/en
Publication of EP0735321A3 publication Critical patent/EP0735321A3/en
Application granted granted Critical
Publication of EP0735321B1 publication Critical patent/EP0735321B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Incineration Of Waste (AREA)
  • Treating Waste Gases (AREA)
EP96102122A 1995-03-30 1996-02-14 Process for purification of noxious exhaust gases by chemical conversion Expired - Lifetime EP0735321B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19511644 1995-03-30
DE19511644A DE19511644A1 (en) 1995-03-30 1995-03-30 Process and device for cleaning pollutant-containing exhaust gases by chemical conversion

Publications (3)

Publication Number Publication Date
EP0735321A2 EP0735321A2 (en) 1996-10-02
EP0735321A3 true EP0735321A3 (en) 1997-03-26
EP0735321B1 EP0735321B1 (en) 2000-04-12

Family

ID=7758136

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96102122A Expired - Lifetime EP0735321B1 (en) 1995-03-30 1996-02-14 Process for purification of noxious exhaust gases by chemical conversion

Country Status (2)

Country Link
EP (1) EP0735321B1 (en)
DE (2) DE19511644A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3486022B2 (en) * 1995-10-16 2004-01-13 ジャパン・エア・ガシズ株式会社 Exhaust gas treatment equipment
JP3490843B2 (en) * 1996-06-19 2004-01-26 日本エドワーズ株式会社 Exhaust gas combustion method and apparatus
DE29712026U1 (en) * 1997-07-09 1998-11-12 EBARA Germany GmbH, 63452 Hanau Burner for the combustion of exhaust gases with at least one condensable component
DE50105033D1 (en) * 2001-08-30 2005-02-10 Das Duennschicht Anlagen Sys Method and device for cleaning in particular fluorine-containing exhaust gases in a burner with spatial separation of the feed of gases
DE10304489B4 (en) * 2002-04-11 2014-07-31 Das Environmental Expert Gmbh Device for purifying exhaust gases containing fluorine-containing compounds in a low-nitrogen-oxide combustion reactor
CN106642161A (en) * 2016-12-29 2017-05-10 江门市崖门新财富环保工业有限公司 Oxygen-enriched combustion device
CN107191933A (en) * 2017-06-13 2017-09-22 武汉理工大学 A kind of Plasma Assisted Combustion formula multi-hole medium combustion system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0262561A2 (en) * 1986-09-29 1988-04-06 Mitsubishi Jushi Engineering Co., Ltd. Method of burning waste gases from semiconductor-manufacturing processes and an apparatus for burning the waste gases
EP0285485A1 (en) * 1987-03-18 1988-10-05 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Method and device for destroying toxic gaseous effluents
EP0311317A2 (en) * 1987-10-06 1989-04-12 Toyo Sanso Co., Ltd. Combustion method for specific exhaust gases containing deleterious substances

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4642047A (en) * 1984-08-17 1987-02-10 American Combustion, Inc. Method and apparatus for flame generation and utilization of the combustion products for heating, melting and refining
DE3529309A1 (en) * 1985-08-16 1987-03-19 Hoechst Ag DEVICE FOR THE COMBUSTION OF HYDROCARBONS
DE3802504A1 (en) * 1988-01-28 1989-08-10 Wistra Thermoprozesstech Burner
DD273008A1 (en) * 1988-06-15 1989-11-01 Elektromat Veb DEVICE FOR CLEANING EXHAUST GASES FROM LOW PRESSURE PROCESSES
US5267850A (en) * 1992-06-04 1993-12-07 Praxair Technology, Inc. Fuel jet burner

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0262561A2 (en) * 1986-09-29 1988-04-06 Mitsubishi Jushi Engineering Co., Ltd. Method of burning waste gases from semiconductor-manufacturing processes and an apparatus for burning the waste gases
EP0285485A1 (en) * 1987-03-18 1988-10-05 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Method and device for destroying toxic gaseous effluents
EP0311317A2 (en) * 1987-10-06 1989-04-12 Toyo Sanso Co., Ltd. Combustion method for specific exhaust gases containing deleterious substances

Also Published As

Publication number Publication date
EP0735321A2 (en) 1996-10-02
DE19511644A1 (en) 1996-10-02
DE59604931D1 (en) 2000-05-18
EP0735321B1 (en) 2000-04-12

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