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EP0735320A3 - Process and device for purification of noxious exhaust gases by chemical conversion - Google Patents

Process and device for purification of noxious exhaust gases by chemical conversion Download PDF

Info

Publication number
EP0735320A3
EP0735320A3 EP96102121A EP96102121A EP0735320A3 EP 0735320 A3 EP0735320 A3 EP 0735320A3 EP 96102121 A EP96102121 A EP 96102121A EP 96102121 A EP96102121 A EP 96102121A EP 0735320 A3 EP0735320 A3 EP 0735320A3
Authority
EP
European Patent Office
Prior art keywords
purification
exhaust gases
chemical conversion
noxious exhaust
noxious
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP96102121A
Other languages
German (de)
French (fr)
Other versions
EP0735320A2 (en
EP0735320B1 (en
Inventor
Horst Dr Reichardt
Lothar Dipl-Ing Ritter
Guenter Dipl-Ing Firkert
Lutz Dipl-Phys Labs
Konrad Dipl-Phys Gehmlich
Gerold Hofmann
Michael Dipl-Ing Hentrich
Wido Wiesenberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Das Duennschicht Anlagen Systeme GmbH
Original Assignee
Das Duennschicht Anlagen Systeme GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Das Duennschicht Anlagen Systeme GmbH filed Critical Das Duennschicht Anlagen Systeme GmbH
Publication of EP0735320A2 publication Critical patent/EP0735320A2/en
Publication of EP0735320A3 publication Critical patent/EP0735320A3/en
Application granted granted Critical
Publication of EP0735320B1 publication Critical patent/EP0735320B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
    • F23M9/00—Baffles or deflectors for air or combustion products; Flame shields
    • F23M9/06—Baffles or deflectors for air or combustion products; Flame shields in fire-boxes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/02—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
    • F23J15/04—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material using washing fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
    • F23M5/00—Casings; Linings; Walls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes
    • F23G2209/142—Halogen gases, e.g. silane
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2215/00—Preventing emissions
    • F23J2215/30—Halogen; Compounds thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2219/00—Treatment devices
    • F23J2219/40—Sorption with wet devices, e.g. scrubbers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Treating Waste Gases (AREA)
  • Incineration Of Waste (AREA)
EP96102121A 1995-03-30 1996-02-14 Process and device for purification of noxious exhaust gases by chemical conversion Expired - Lifetime EP0735320B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19511643A DE19511643A1 (en) 1995-03-30 1995-03-30 Process and device for cleaning pollutant-containing exhaust gases by chemical conversion
DE19511643 1995-03-30

Publications (3)

Publication Number Publication Date
EP0735320A2 EP0735320A2 (en) 1996-10-02
EP0735320A3 true EP0735320A3 (en) 1997-03-26
EP0735320B1 EP0735320B1 (en) 2000-10-11

Family

ID=7758135

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96102121A Expired - Lifetime EP0735320B1 (en) 1995-03-30 1996-02-14 Process and device for purification of noxious exhaust gases by chemical conversion

Country Status (2)

Country Link
EP (1) EP0735320B1 (en)
DE (2) DE19511643A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19600873A1 (en) * 1996-01-12 1997-10-02 Das Duennschicht Anlagen Sys Process and device for cleaning pollutant-containing exhaust gases by burning and chemical conversion using a flame in a combustion chamber
GB2323312B (en) * 1997-03-21 2001-08-08 Korea M A T Co Ltd Gas scrubber and methods of disposing a gas using the same
DE29712026U1 (en) * 1997-07-09 1998-11-12 EBARA Germany GmbH, 63452 Hanau Burner for the combustion of exhaust gases with at least one condensable component
TW506852B (en) * 2000-08-28 2002-10-21 Promos Technologies Inc Device and method for processing exhaust from process chamber
DE102006052586B4 (en) * 2006-11-08 2008-07-03 Schott Solar Gmbh Method and device for cleaning the exhaust gases of a silicon thin-film production plant

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0054530A1 (en) * 1980-12-12 1982-06-23 Gösta Lennart Flemmert Process and apparatus for preparing finely-divided silicon dioxide having high thickening capacity and good thixotropic properties
EP0079594A1 (en) * 1981-11-11 1983-05-25 LAFARGE REFRACTAIRES Société Anonyme Boiler for central heating
DD221088A1 (en) * 1983-09-12 1985-04-17 Univ Schiller Jena METHOD AND ARRANGEMENT FOR DETOXIFYING F-CARBON CONTAINING EXHAUST GASES
EP0212410A2 (en) * 1985-08-16 1987-03-04 Hoechst Aktiengesellschaft Device for burning fluorohydrocarbons
DE4107595A1 (en) * 1991-03-09 1992-09-10 Forschungszentrum Juelich Gmbh METHOD FOR PRODUCING A CATALYST LAYER ON A SUPPORT MATERIAL AND CATALYST WITH CATALYST LAYER FOR THE REMOVAL OF HYDROGEN FROM A HYDROGEN AND OXYGEN-CONTAINING GAS MIXTURE
DE4413734A1 (en) * 1993-04-29 1994-11-03 Univ Karlsruhe Catalyst for the catalytic afterburning of chlorinated hydrocarbons
DE4319118A1 (en) * 1993-06-09 1994-12-15 Breitbarth Friedrich Wilhelm D Process and apparatus for disposing of fluorocarbons and other fluorine-containing compounds

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD273008A1 (en) * 1988-06-15 1989-11-01 Elektromat Veb DEVICE FOR CLEANING EXHAUST GASES FROM LOW PRESSURE PROCESSES
US4957717A (en) * 1989-01-09 1990-09-18 Nippon Shokubai Kagaku Kogyo Co., Ltd. Method of disposal of organic chlorine compounds by combustion

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0054530A1 (en) * 1980-12-12 1982-06-23 Gösta Lennart Flemmert Process and apparatus for preparing finely-divided silicon dioxide having high thickening capacity and good thixotropic properties
EP0079594A1 (en) * 1981-11-11 1983-05-25 LAFARGE REFRACTAIRES Société Anonyme Boiler for central heating
DD221088A1 (en) * 1983-09-12 1985-04-17 Univ Schiller Jena METHOD AND ARRANGEMENT FOR DETOXIFYING F-CARBON CONTAINING EXHAUST GASES
EP0212410A2 (en) * 1985-08-16 1987-03-04 Hoechst Aktiengesellschaft Device for burning fluorohydrocarbons
DE4107595A1 (en) * 1991-03-09 1992-09-10 Forschungszentrum Juelich Gmbh METHOD FOR PRODUCING A CATALYST LAYER ON A SUPPORT MATERIAL AND CATALYST WITH CATALYST LAYER FOR THE REMOVAL OF HYDROGEN FROM A HYDROGEN AND OXYGEN-CONTAINING GAS MIXTURE
DE4413734A1 (en) * 1993-04-29 1994-11-03 Univ Karlsruhe Catalyst for the catalytic afterburning of chlorinated hydrocarbons
DE4319118A1 (en) * 1993-06-09 1994-12-15 Breitbarth Friedrich Wilhelm D Process and apparatus for disposing of fluorocarbons and other fluorine-containing compounds

Also Published As

Publication number Publication date
EP0735320A2 (en) 1996-10-02
DE59605974D1 (en) 2000-11-16
DE19511643A1 (en) 1996-10-02
EP0735320B1 (en) 2000-10-11

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