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EP0495393A1 - Gasadsorber für Abgase - Google Patents

Gasadsorber für Abgase Download PDF

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Publication number
EP0495393A1
EP0495393A1 EP92100265A EP92100265A EP0495393A1 EP 0495393 A1 EP0495393 A1 EP 0495393A1 EP 92100265 A EP92100265 A EP 92100265A EP 92100265 A EP92100265 A EP 92100265A EP 0495393 A1 EP0495393 A1 EP 0495393A1
Authority
EP
European Patent Office
Prior art keywords
gas
section
treating
main
treating section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP92100265A
Other languages
English (en)
French (fr)
Other versions
EP0495393B1 (de
Inventor
Yoichi Mori
Akira Fukunaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
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Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of EP0495393A1 publication Critical patent/EP0495393A1/de
Application granted granted Critical
Publication of EP0495393B1 publication Critical patent/EP0495393B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0454Controlling adsorption
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D53/00Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/30Controlling by gas-analysis apparatus

Definitions

  • the present invention relates to a gas adsorber and, more particularly, to an adsorber which is suitable for use in processing systems that pretreat adsorptively waste gases containing mainly harmful gases, including those discharged from processes in the semiconductor industry, the ceramic industry, etc. to remove harmful components therefrom before the waste gases are released from the systems.
  • a treating apparatus As an apparatus that satisfies these requirements to a certain extent, a treating apparatus has been proposed (Japanese Utility Model Public Disclosure (KOKAI) No. 62-123234) which comprises a main treating section including a main treating chamber having a large capacity and packed with a treating agent and an indicator that indicates the treating capacity of the main treating chamber, and a sub-treating chamber having a capacity which is about one tenth of that of the main treating chamber, the sub-treating chamber being connected in series to the main treating section at the downstream side thereof, so that waste gas flowing out from the main treating section is treated in the sub-treating chamber in supplementary manner.
  • KOKAI Japanese Utility Model Public Disclosure
  • the prior art cannot completely satisfy the above-described requirements in regard to the following points: Although the change in color of the indicator is adopted as a means for detecting the breakthrough point of the adsorbent, which is the first requirement, the breakthrough of the adsorbent cannot be known before it occurs unless the indicator is constantly monitored, and it is impossible to know how long a harmful gas has flowed into the sub-treating chamber from the main treating chamber at the time when the operator becomes aware of a change in the color of the indicator and also impossible to know the concentration of the harmful gas. In consequence, the level of load on the post-stage sub-treating chamber cannot exactly be known, and there may be cases where the harmful gas leaks out from the sub-treating chamber, resulting in a failure to satisfy the second requirement.
  • the detection method that utilizes a change in color of the indicator involves the problem that a coexisting component may cause the indicator to fade or shade after it has changed color, thus making it difficult to detect the breakthrough point. In such a case, the sub-treating chamber cannot serve to attain the original object.
  • the main treating section and the sub-treating chamber which are provided separately from each other, are connected together through a valve so that waste gas can be supplied directly to the subtreating chamber through a bypass while the adsorbent in the main treating chamber is being replaced.
  • gas is constantly flowing into the sub-treating chamber, so that the adsorbent in the sub-treating chamber can be replaced only after the suspension of the operation of the factory.
  • the proces may invite such a situation that the treating agent in the sub-treating chamber which should be replaced is used until the operation of the factory is suspended, resulting in an incomplete treatment.
  • the sub-treating chamber when the waste gas that bypasses the main treating section is treated in the sub-treating chamber only, the sub-treating chamber must treat a harmful gas of high concentration for a time longer than a predetermined period, although it is usually only required to treat a relatively small amount of harmful gas leaking out from the main treating section. Therefore, if the flow rate of waste gas or the content of harmful components is excessively high, the sub-treating chamber, which has a treating capacity that is about one tenth of that of the main treating chamber, may fail to treat the waste gas completely.
  • the prior art lacks reliability in the means for detecting a breakthrough in the main treating section and cannot control the concentration of the waste gas leaking out from the main treating section after the detection of the breakthrough. Accordingly, the sub-treating chamber, which is additionally installed, cannot serve to attain the original object, and moreover, no consideration has been given to the method of controlling the sub-treating chamber, which is essential. In consequence, there is a probability of harmful components leaking out to the downstream side of the adsorber.
  • an object of the present invention to provide an adsorber which is designed so that the treating conditions in a main treating section can be detected reliably, and no harmful gas is allowed to leak out from an auxiliary treating section in excess of a permissible level, and yet the whole system can be controlled even more safely and economically.
  • the present invention provides a gas adsorber for exhaust gas which has an integral structure comprising a main treating section having an exhaust gas inlet port and packed with an adsorbent, an auxiliary treating section having a treated gas outlet port and packed with an adsorbent, and a space section provided in between the main and auxiliary treating sections, the space section having a gas takeout port and a gas return port, which provide communication between the space section and a gas sensor.
  • the gas passing through the main treating section is taken out from the gas takeout port of the space section by a suction pump so as to be supplied to the gas sensor, and the gas that has been supplied to the gas sensor for the purpose of detection is returned to the adsorber through the gas return port of the space section, thereby enabling detection of a breakthrough of the adsorbent in the main treating section.
  • the main treating section, the space section and the auxiliary treating section are arranged in an integral structure to pretreat a harmful waste gas, and the space section is provided with a gas takeout port and a gas return port, thereby making it possible to collect the treated gas in the main treating section and also possible to replace the adsorbents in the main and auxiliary treating sections simultaneously.
  • the treated gas in the main treating section is taken out from the gas takeout port by a suction pump so as to be supplied to a gas sensor, thereby enabling the concentration of the treated gas in the main treating section to be monitored at all times, and thus permitting control of the treating conditions in the main and auxiliary treating sections.
  • the gas that has been supplied to the gas sensor for the purpose of detection is returned to the gas return port of the space section so as to pass through the auxiliary treating section, thereby enabling substances which may disturb the surroundings to be reduced in amount to a level below a maximum allowable concentration throughout the whole system including treatment and detection at all times.
  • an adsorber 1 has an integral structure comprising a main treating section 2, a space section 3, and an auxiliary treating section 4.
  • the main treating section 2 has an exhaust gas inlet port 5, while the auxiliary treating section 4 has a treated gas outlet port 6, and the space section 3 has a gas takeout port 7 and a gas return port 8 so that the treated gas in the main treating section 2 is taken out from the gas takeout port 7 by a suction pump 9 so as to be supplied to a gas sensor 10 where the concentration of the gas is detected, and thereafter the gas is returned to the adsorber 1 through the gas return port 8.
  • Exhaust gas is first introduced into the main treating section 2 where harmful components are adsorbed on an adsorbent with which the main treating section 2 is packed.
  • a suitable one may be selected from among physical adsorbents and chemical adsorbents according to the kind of harmful component contained in the exhaust gas.
  • the amount of adsorbent used is determined by the flow rate of gas discharged from the relevant process and the treating period of time required.
  • the treated gas in the main treating section 2 can be properly collected from the gas takeout port 7 for analysis made to check the treating conditions in the main treating section 2. If part of the treated gas in the main treating section 2 is continuously taken out from the gas takeout port 7 through the suction pump 9 so as to be supplied to the gas sensor 10 to thereby monitor the gas concentration at all times, as shown in this embodiment, the treating conditions in the main treating section 2 can be controlled accurately, so that a pretreatment of waste gas can be effected with high reliability.
  • a sensor which effectively detects a harmful component which leaks out from the main treating section 2 first is selected, as a general rule, according to the composition of the waste gas and the characteristics of the adsorbent from among gas sensors such as electrochemical sensors, semiconductor sensors, heat conductivity sensors, etc., sensors using test paper and so forth. It should be noted that these sensors can output an electric signal in accordance with the gas concentration, so that if an alarm is given when a breakthrough occurs, the operator can notice it without fail, and it is also possible to obtain the load of gas flowing into the auxiliary treating section 4 by recording the gas concentration after the occurrence of the breakthrough. It should be noted that the gas that has been subjected to the detection is returned to the adsorber 1 through the gas return port 8 of the space section 3 because harmful components may remain in the gas after the detection in the case of using the gas sensor 10.
  • Harmful components leaking into the space section 3 from the main treating section 2 after the detection of the end point of the main treating section 2 are adsorbed on the adsorbent with which the auxiliary treating section 4 is packed. There is therefore no danger of harmful components leaking out of the system immediately.
  • the adsorbent used in the auxiliary treating section 4 any kind of adsorbent which can effectively treat a harmful component which leaks out from the main treating section 2 first, as a general rule. It does not necessarily need to be the same as that used in the main treating section 2.
  • the amount of adsorbent used is determined by taking into consideration the time elapsed from the moment the gas sensor 10 detects a leakage from the main treating section 2 until the use of gas in the relevant process stops to allow replacement of the adsorbent and the amount of harmful gas flowing into the auxiliary treating section 4 during this period because the adsorbents in the main and auxiliary treating sections are replaced simultaneously.
  • a batch type low-pressure CVD system for example, if each operation takes 3 hours, the time that the gas actually flows is about 1 hour of the total operating time, and the remaining 2 hours is consumed for raising temperature and other operation.
  • the auxiliary treating section 4 it is only necessary for the auxiliary treating section 4 to be capable of treating the gas leaking out from the main treating section 2 for at least one hour after the leakage is detected by the gas sensor 10. Since in actual practice the leakage from the main treating section 2 increases gradually, the absolute quantity of harmful gas to be treated in the auxiliary treating section 4 is very small in comparison to the quantity of gas treated in the main treating section 2. Therefore, the amount of adsorbent actually required in the auxiliary treating section 4 is about 1/50 to 1/25 of that in the main treating section 2.
  • auxiliary treating section 4 Since the auxiliary treating section 4 is formed together with the main treating section 2 in an integral structure, the adsorbents in these sections are replaced simultaneously, so that it becomes unnecessary to control them separately and hence possible to prevent a mistake in management.
  • Fig. 2 is a schematic view illustrating another embodiment of the gas adsorber according to the present invention.
  • the members shown in Fig. 2 are the same as those in Fig. 1.
  • the space section 3 and the auxiliary treating section 4 are reduced in size in comparison to the main treating section 2.
  • These three sections may be arranged in an integral structure in this way.
  • all the inlet and outlet ports are provided with respective valves.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treating Waste Gases (AREA)
  • Separation Of Gases By Adsorption (AREA)
EP92100265A 1991-01-18 1992-01-09 Gasadsorber für Abgase Expired - Lifetime EP0495393B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP16746/91 1991-01-18
JP3016746A JP2526178B2 (ja) 1991-01-18 1991-01-18 排ガス用気体吸着装置

Publications (2)

Publication Number Publication Date
EP0495393A1 true EP0495393A1 (de) 1992-07-22
EP0495393B1 EP0495393B1 (de) 1996-11-20

Family

ID=11924839

Family Applications (1)

Application Number Title Priority Date Filing Date
EP92100265A Expired - Lifetime EP0495393B1 (de) 1991-01-18 1992-01-09 Gasadsorber für Abgase

Country Status (5)

Country Link
US (1) US5169419A (de)
EP (1) EP0495393B1 (de)
JP (1) JP2526178B2 (de)
KR (1) KR100191673B1 (de)
DE (1) DE69215243T2 (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2735381A1 (fr) * 1995-06-15 1996-12-20 Air Liquide Installation de fourniture d'un gaz incorporant un dispositif de detection d'impuretes
US5685895A (en) * 1994-08-10 1997-11-11 Nikon Corporation Air cleaning apparatus used for an exposure apparatus
US5735919A (en) * 1995-12-14 1998-04-07 Suntec System Co., Ltd. Exhaust gas processing system
WO2008145988A1 (en) * 2007-05-30 2008-12-04 Bioquell Uk Limited Filters

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GB2286135A (en) * 1994-01-26 1995-08-09 Boc Group Plc Pressure swing adsorption apparatus
DE69832905T2 (de) * 1997-04-16 2006-09-07 Ebara Corp. Verfahren zur entfernung von stickoxiden aus abgasen
WO1998050159A1 (en) * 1997-05-02 1998-11-12 Mag Patent, Inc. Apparatus and method for handling mercury containing lamps
US6165067A (en) * 1998-05-04 2000-12-26 Mag Patent, Inc. Method for handling mercury containing lamps
US6273935B1 (en) * 1999-06-01 2001-08-14 Taiwan Semiconductor Manufacturing Company, Ltd. Apparatus and method for trapping a toxic gas
US6391385B1 (en) * 1999-10-18 2002-05-21 Advanced Technology Materials, Inc. Method of abating of effluents from chemical vapor deposition processes using organometallic source reagents
DE10030831B4 (de) * 2000-06-23 2009-05-28 Air Liquide Deutschland Gmbh Indikatorpatrone für die Gasreinigung
WO2004023998A1 (en) * 2002-09-16 2004-03-25 Aerocrine Ab Scrubber
US7180363B2 (en) * 2004-07-28 2007-02-20 United Memories, Inc. Powergating method and apparatus
JP2009028643A (ja) * 2007-07-26 2009-02-12 Central Res Inst Of Electric Power Ind 固定床反応容器及び吸収剤の充填方法
JP5088796B2 (ja) * 2008-06-06 2012-12-05 一般財団法人電力中央研究所 固定床反応容器
JP5661249B2 (ja) * 2009-03-04 2015-01-28 株式会社荏原製作所 排ガス処理システム及びその運転方法
KR101298723B1 (ko) * 2011-06-28 2013-08-21 현대제철 주식회사 배가스 처리 장치 및 방법
JP2012086215A (ja) * 2011-11-15 2012-05-10 Central Res Inst Of Electric Power Ind 固定床反応容器及び吸収剤の充填方法
DE102013006544B4 (de) * 2013-04-16 2017-04-27 Dräger Safety AG & Co. KGaA Messvorrichtung, Reaktionsträger und Messverfahren
JP2017154094A (ja) * 2016-03-03 2017-09-07 パナソニックIpマネジメント株式会社 脱硫システムと、それを備えた水素生成装置と、それを備えた燃料電池システムと、それらの運転方法
EP3442866B1 (de) * 2016-04-13 2023-07-05 Cobham Mission Systems Davenport LSS Inc. Prognostische zustandsüberwachung eines bordeigenen inertgaserzeugungssystems
KR101727526B1 (ko) * 2016-05-30 2017-04-17 주식회사 한국가스기술공사 모듈화된 착탈식 가스 정제 장치
CN114062617B (zh) * 2021-12-21 2025-06-03 应急管理部沈阳消防研究所 一种面向危险化学品事故的气体检测装置
CN115382342A (zh) * 2022-08-25 2022-11-25 广东电网有限责任公司 吸附装置

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FR1073174A (fr) * 1952-03-21 1954-09-20 British Oxygen Co Ltd Perfectionnements à la purification de gaz ou de mélanges de gaz
US3897226A (en) * 1972-04-19 1975-07-29 Petrocarbon Dev Ltd Controlling the concentration of impurities in a gas stream
US4516988A (en) * 1983-08-25 1985-05-14 Rekuperator Kg Dr.-Ing. Schack & Co. Method and apparatus for purifying a gas stream in a sorption filter
EP0261950A2 (de) * 1986-09-25 1988-03-30 Osaka Sanso Kogyo KK Mittel zur Behandlung von Abgasen
WO1991006362A1 (en) * 1989-10-27 1991-05-16 Pall Corporation Apparatus and method for sorbing components from a gas

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JPH0753851Y2 (ja) * 1988-08-10 1995-12-13 富士精工株式会社 コンビネーションホルダ
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Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1073174A (fr) * 1952-03-21 1954-09-20 British Oxygen Co Ltd Perfectionnements à la purification de gaz ou de mélanges de gaz
US3897226A (en) * 1972-04-19 1975-07-29 Petrocarbon Dev Ltd Controlling the concentration of impurities in a gas stream
US4516988A (en) * 1983-08-25 1985-05-14 Rekuperator Kg Dr.-Ing. Schack & Co. Method and apparatus for purifying a gas stream in a sorption filter
EP0261950A2 (de) * 1986-09-25 1988-03-30 Osaka Sanso Kogyo KK Mittel zur Behandlung von Abgasen
WO1991006362A1 (en) * 1989-10-27 1991-05-16 Pall Corporation Apparatus and method for sorbing components from a gas

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5685895A (en) * 1994-08-10 1997-11-11 Nikon Corporation Air cleaning apparatus used for an exposure apparatus
FR2735381A1 (fr) * 1995-06-15 1996-12-20 Air Liquide Installation de fourniture d'un gaz incorporant un dispositif de detection d'impuretes
US5735919A (en) * 1995-12-14 1998-04-07 Suntec System Co., Ltd. Exhaust gas processing system
WO2008145988A1 (en) * 2007-05-30 2008-12-04 Bioquell Uk Limited Filters

Also Published As

Publication number Publication date
JPH04330914A (ja) 1992-11-18
US5169419A (en) 1992-12-08
EP0495393B1 (de) 1996-11-20
KR100191673B1 (ko) 1999-06-15
JP2526178B2 (ja) 1996-08-21
KR920014505A (ko) 1992-08-25
DE69215243D1 (de) 1997-01-02
DE69215243T2 (de) 1997-04-17

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