DK3124947T3 - Tryksensor - Google Patents
Tryksensor Download PDFInfo
- Publication number
- DK3124947T3 DK3124947T3 DK16178290.9T DK16178290T DK3124947T3 DK 3124947 T3 DK3124947 T3 DK 3124947T3 DK 16178290 T DK16178290 T DK 16178290T DK 3124947 T3 DK3124947 T3 DK 3124947T3
- Authority
- DK
- Denmark
- Prior art keywords
- circuit board
- sensor
- electrical
- pressure sensor
- electrical circuit
- Prior art date
Links
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/22—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
- G01L23/221—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines
- G01L23/222—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines using piezoelectric devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02D—CONTROLLING COMBUSTION ENGINES
- F02D35/00—Controlling engines, dependent on conditions exterior or interior to engines, not otherwise provided for
- F02D35/02—Controlling engines, dependent on conditions exterior or interior to engines, not otherwise provided for on interior conditions
- F02D35/023—Controlling engines, dependent on conditions exterior or interior to engines, not otherwise provided for on interior conditions by determining the cylinder pressure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
- G01D11/24—Housings ; Casings for instruments
- G01D11/245—Housings for sensors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/145—Housings with stress relieving means
- G01L19/146—Housings with stress relieving means using flexible element between the transducer and the support
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/08—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
- G01L23/10—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by pressure-sensitive members of the piezoelectric type
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/22—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
- G01L23/221—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines
- G01L23/225—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines circuit arrangements therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L23/00—Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
- G01L23/26—Details or accessories
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Health & Medical Sciences (AREA)
- Child & Adolescent Psychology (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Measuring Fluid Pressure (AREA)
Claims (15)
1 Tryksensor (1) med en sensoranordning (2) og en evalueringsenhed (5); hvilken sensoranordning (2) har en føler (22) og en elektrodeanordning (23); hvilken føler (22) er udformet til generere signaler under indvirkning af et trykforløb, og hvilken elektrodeanordning (23) er udformet til at sende signalerne til evalueringsenheden (5); kendetegnet ved, at evalueringsenheden (5) har en elektrisk printplade (51); ved, at et bæremateriale af den elektriske printplade (51) er elektrisk isolerende med en specifik kontaktmodstand på mere end/svarende til 1015 Ocm ved stuetemperatur; ved, at den elektriske printplade (51) har et højtemperaturområde (51.1), der vender ind mod sensoranordningen (2), og har en langsigtet driftstemperatur på mindre end/svarende til 280 °C, og et normaltemperaturområde (51.2), der vender væk fra sensoranordningen (2) og har en langsigtet driftstemperatur på mindre end/svarende til 120 °C; og ved, at den elektriske printplades (51) elektroniske komponenter kun er monteret i den elektriske printplades (51) normaltemperaturområde (51.2).
2. Tryksensor (1) ifølge krav 1, kendetegnet ved, at tryksensoren (1) er en piezoelektrisk tryksensor (1); ved, at føleren (22) er en piezoelektrisk føler (22); ved, at den piezoelektriske føler (22) genererer piezoelektriske ladninger under indvirkning af et trykforløb; og ved, at elektrodeanordningen (23) modtager de piezoelektriske ladninger fra den piezoelektriske føler (22) og sender de modtagne piezoelektriske ladninger som signaler til evalueringsenheden (5).
3. Tryksensor (1) ifølge et af kravene 1 eller 2, kendetegnet ved, at højtemperaturområdet (51.1) strækker sig over 80 % af den elektriske printplade (51) langs en længdeakse (CC’) deraf, fortrinsvis over 50 % af den elektriske printplade (51) langs en længdeakse (CC’) deraf, fortrinsvis over 30 % af den elektriske printplade (51) langs en længdeakse (CC’) deraf, fortrinsvis over 20 % af den elektriske printplade (51) langs en længdeakse (CC’) deraf.
4. Tryksensor (1) ifølge et af kravene 1 til 3, kendetegnet ved, at elektriske signalledere er anbragt på den elektriske printplades (51) bæremateriale for signaltransmission; ved, at de elektriske signalledere er i flere lag med et første lag af en palladium-nikkellegering og et andet lag af guld, ved, at det første lag er pletteret direkte på printpladens (51) bæremateriale; og ved, at det andet lag er dampaflejret på det første lag.
5. Tryksensor (1) ifølge et af kravene 1 til 4, kendetegnet ved, at der ikke er anbragt elektriske signalledere til signaltransmission i den elektriske printplades (51) højtemperaturområde (51.1), eller at ingen andre elektriske signalledere undtagen de elektriske signalledere til signaltransmission er anbragt i den elektriske printplades (51) højtemperaturområdet (51.1).
6. Tryksensor (1) ifølge et af kravene 1 til 5, kendetegnet ved, at der ikke er påført loddestoplag i den elektriske printplades (51) højtemperaturområde (51.1).
7. Tryksensor (1) ifølge et af kravene 1 til 6, kendetegnet ved, at den elektriske printplade (51) har et elektrisk forbindelseselement (53); ved, at det elektriske forbindelseselement (53) er anbragt i den elektriske printplades (51) højtemperaturområde (51.1) ; ved, at elektrodeanordningen (23) er samlet med det elektriske forbindelseselement (53) i nogle områder; ved, at det elektriske forbindelseselement (53) har en hunstiksadapter (53.0); og ved, at hunstiksadapteren (53.0) i den elektriske printplades (51) højtemperaturområde (51.1) er forbundet med den elektriske printplades (51) elektriske signalleder via stofforbindelse.
8. Tryksensor (1) ifølge et af kravene 2 til 6, kendetegnet ved, at den elektriske printplade (51) har et elektrisk forbindelseselement (53); ved, at det elektriske forbindelseselement (53) er anbragt i den elektriske printplades (51) højtemperaturområde (51.1) ; ved, at elektrodeanordningen (23) er samlet med det elektriske forbindelseselement (53) i nogle områder; og ved, at det elektriske forbindelseselement (53) har en ringformet adapter (53.1) og et kompensationselement (53.2) udformet til at kompensere for forskellige koefficienter af termisk ekspansion af den piezoelektriske tryksensors (1) komponenter; ved, at den ringformede adapter (53.1) og kompensationselementet (53.2) er dannet i ét stykke; og/eller ved, at den ringformede adapter (53.1) er anbragt ved en forenede af det elektriske forbindelseselement (53).
9. Tryksensor (1) ifølge krav 8, kendetegnet ved, at kompensationselementet (53.2) har mindst én bøjning; ved, at bøjningen er udformet til at kompensere for forskelle i de lineære termiske ekspansionskoefficienter for tryksensorens (1) signaltransmissionskomponenter; og/eller ved, at bøjningen er udformet til at kompensere for fremstillingstolerancer for sensoranordningens (2) og evalueringsenhedens (5) komponenter langs en længdeakse (CC’) deraf.
10. Tryksensor (1) ifølge et af kravene 8 eller 9, kendetegnet ved, at kompensationselementet (53.2) i alt væsentligt strækker sig over hele højtemperaturområdet (51.1) af den elektriske printplade (51); og ved, at kompensationselementet (53.2) har mindst ét ben; ved, at benet kan indføres i et tilsvarende hul i den elektriske printplades (51) højtemperaturområde (51.1); ved, at benet kan elastisk eller plastisk deformeres, når det indføres i hullet; og ved, at kompensationselementet (53.2) fastgøres mekanisk ved hjælp af benet indført i hullet i den elektriske printplades (51) højtemperaturområde (51.1).
11. Tryksensor (1) ifølge et af kravene 8 til 10, kendetegnet ved, at kompensationselementet (53.2) i lavtemperaturområdet (51.1) af den elektriske printplade (51) er forbundet via en stofforbindelse til en elektrisk signalleder af den elektriske printplade (51).
12. Tryksensor (1) ifølge et af kravene 1 til 11, kendetegnet ved, at transmission af signalerne fra elektrodeanordningen (23) til den elektriske printplade (51) kun sker via stofforbindelser.
13. Tryksensor (1) ifølge et af kravene 1 til 12, kendetegnet ved, at føleren (22) genererer returlednings signaler under indvirkning af et trykforløb; ved, at en sensorflange (20.2) af sensoranordningen (2) modtager returledningssignaleme; ved, at sensorflangen (20.2) har en sensorhusramme (20.3); ved, at sensorhusrammen (20.3) er mekanisk forbundet med den elektriske printplade (51); og ved, at returlednings signalerne transmitteres over sensorhusrammen (20.3) til en elektrisk signalleder af den elektriske printplade (51).
14. Tryksensor (1) ifølge krav 13, kendetegnet ved, at transmissionen af returlednings signalerne over sensorhusrammen (20.3) til en elektrisk signalleder af den elektriske printplade (51) sker redundant.
15. Tryksensor (1) ifølge et af kravene 13 eller 14, kendetegnet ved, at transmissionen af returlednings signalerne fra sensorflangen (20.2) til den elektriske printplade (51) kun sker over stof- eller friktionsforbindelser.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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EP15179379 | 2015-07-31 | ||
EP16151554 | 2016-01-15 |
Publications (1)
Publication Number | Publication Date |
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DK3124947T3 true DK3124947T3 (da) | 2019-04-01 |
Family
ID=56292636
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK16178290.9T DK3124947T3 (da) | 2015-07-31 | 2016-07-07 | Tryksensor |
Country Status (6)
Country | Link |
---|---|
US (1) | US10458873B2 (da) |
EP (1) | EP3124947B1 (da) |
JP (1) | JP6980368B2 (da) |
KR (1) | KR102507131B1 (da) |
CN (1) | CN106404267B (da) |
DK (1) | DK3124947T3 (da) |
Families Citing this family (6)
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JP6196960B2 (ja) * | 2014-11-20 | 2017-09-13 | 長野計器株式会社 | 圧力センサ |
JP6527193B2 (ja) * | 2017-04-07 | 2019-06-05 | 株式会社鷺宮製作所 | 圧力センサ |
US11153985B2 (en) * | 2017-06-29 | 2021-10-19 | Rosemount Inc. | Modular hybrid circuit packaging |
CN108896229B (zh) * | 2018-08-09 | 2023-06-13 | 重庆师范大学 | 脱弹力自动测试装置及其控制方法 |
JP7515528B2 (ja) * | 2021-03-22 | 2024-07-12 | キストラー ホールディング アクチエンゲゼルシャフト | 圧電トランスデューサ |
US12200888B2 (en) | 2022-02-01 | 2025-01-14 | Rosemount Inc. | Customization of process variable transmitter with hermetically sealed electronics |
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JP5975793B2 (ja) | 2012-08-29 | 2016-08-23 | シチズンファインデバイス株式会社 | 燃焼圧センサ |
WO2013147260A1 (ja) | 2012-03-29 | 2013-10-03 | シチズンファインテックミヨタ株式会社 | 圧力検出装置、圧力検出装置付き内燃機関 |
JP5820759B2 (ja) * | 2012-03-29 | 2015-11-24 | シチズンファインデバイス株式会社 | 圧力検出装置の製造方法、圧力検出装置付き内燃機関の製造方法 |
ES2784778T3 (es) * | 2012-08-31 | 2020-09-30 | Meggitt Sa | Sensor de fuerza y método para probar su fiabilidad |
JP6318605B2 (ja) * | 2013-12-20 | 2018-05-09 | 株式会社デンソー | 溶接部を有する継手構造の組付構造 |
JP6615565B2 (ja) * | 2014-10-24 | 2019-12-04 | 株式会社半導体エネルギー研究所 | 半導体装置 |
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2016
- 2016-07-07 DK DK16178290.9T patent/DK3124947T3/da active
- 2016-07-07 EP EP16178290.9A patent/EP3124947B1/de active Active
- 2016-07-28 US US15/221,762 patent/US10458873B2/en active Active
- 2016-07-29 JP JP2016149763A patent/JP6980368B2/ja active Active
- 2016-07-30 KR KR1020160097633A patent/KR102507131B1/ko active Active
- 2016-08-01 CN CN201610620984.2A patent/CN106404267B/zh active Active
Also Published As
Publication number | Publication date |
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KR102507131B1 (ko) | 2023-03-06 |
EP3124947A2 (de) | 2017-02-01 |
JP6980368B2 (ja) | 2021-12-15 |
US20170030790A1 (en) | 2017-02-02 |
US10458873B2 (en) | 2019-10-29 |
KR20170015256A (ko) | 2017-02-08 |
JP2017032561A (ja) | 2017-02-09 |
EP3124947B1 (de) | 2018-12-05 |
EP3124947A3 (de) | 2017-05-10 |
CN106404267A (zh) | 2017-02-15 |
CN106404267B (zh) | 2020-08-07 |
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