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DK3124947T3 - Tryksensor - Google Patents

Tryksensor Download PDF

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Publication number
DK3124947T3
DK3124947T3 DK16178290.9T DK16178290T DK3124947T3 DK 3124947 T3 DK3124947 T3 DK 3124947T3 DK 16178290 T DK16178290 T DK 16178290T DK 3124947 T3 DK3124947 T3 DK 3124947T3
Authority
DK
Denmark
Prior art keywords
circuit board
sensor
electrical
pressure sensor
electrical circuit
Prior art date
Application number
DK16178290.9T
Other languages
English (en)
Inventor
Reinhold Buck
Martin Giger
Philip Graf
Urs Niedermann
Original Assignee
Kistler Holding Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kistler Holding Ag filed Critical Kistler Holding Ag
Application granted granted Critical
Publication of DK3124947T3 publication Critical patent/DK3124947T3/da

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/08Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/22Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
    • G01L23/221Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines
    • G01L23/222Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines using piezoelectric devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02DCONTROLLING COMBUSTION ENGINES
    • F02D35/00Controlling engines, dependent on conditions exterior or interior to engines, not otherwise provided for
    • F02D35/02Controlling engines, dependent on conditions exterior or interior to engines, not otherwise provided for on interior conditions
    • F02D35/023Controlling engines, dependent on conditions exterior or interior to engines, not otherwise provided for on interior conditions by determining the cylinder pressure
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/24Housings ; Casings for instruments
    • G01D11/245Housings for sensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/18Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061Electrical connection means
    • G01L19/0084Electrical connection means to the outside of the housing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • G01L19/145Housings with stress relieving means
    • G01L19/146Housings with stress relieving means using flexible element between the transducer and the support
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • G01L19/148Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/08Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically
    • G01L23/10Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid operated electrically by pressure-sensitive members of the piezoelectric type
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/22Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines
    • G01L23/221Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines
    • G01L23/225Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid for detecting or indicating knocks in internal-combustion engines; Units comprising pressure-sensitive members combined with ignitors for firing internal-combustion engines for detecting or indicating knocks in internal combustion engines circuit arrangements therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L23/00Devices or apparatus for measuring or indicating or recording rapid changes, such as oscillations, in the pressure of steam, gas, or liquid; Indicators for determining work or energy of steam, internal-combustion, or other fluid-pressure engines from the condition of the working fluid
    • G01L23/26Details or accessories
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Health & Medical Sciences (AREA)
  • Child & Adolescent Psychology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Fluid Pressure (AREA)

Claims (15)

1 Tryksensor (1) med en sensoranordning (2) og en evalueringsenhed (5); hvilken sensoranordning (2) har en føler (22) og en elektrodeanordning (23); hvilken føler (22) er udformet til generere signaler under indvirkning af et trykforløb, og hvilken elektrodeanordning (23) er udformet til at sende signalerne til evalueringsenheden (5); kendetegnet ved, at evalueringsenheden (5) har en elektrisk printplade (51); ved, at et bæremateriale af den elektriske printplade (51) er elektrisk isolerende med en specifik kontaktmodstand på mere end/svarende til 1015 Ocm ved stuetemperatur; ved, at den elektriske printplade (51) har et højtemperaturområde (51.1), der vender ind mod sensoranordningen (2), og har en langsigtet driftstemperatur på mindre end/svarende til 280 °C, og et normaltemperaturområde (51.2), der vender væk fra sensoranordningen (2) og har en langsigtet driftstemperatur på mindre end/svarende til 120 °C; og ved, at den elektriske printplades (51) elektroniske komponenter kun er monteret i den elektriske printplades (51) normaltemperaturområde (51.2).
2. Tryksensor (1) ifølge krav 1, kendetegnet ved, at tryksensoren (1) er en piezoelektrisk tryksensor (1); ved, at føleren (22) er en piezoelektrisk føler (22); ved, at den piezoelektriske føler (22) genererer piezoelektriske ladninger under indvirkning af et trykforløb; og ved, at elektrodeanordningen (23) modtager de piezoelektriske ladninger fra den piezoelektriske føler (22) og sender de modtagne piezoelektriske ladninger som signaler til evalueringsenheden (5).
3. Tryksensor (1) ifølge et af kravene 1 eller 2, kendetegnet ved, at højtemperaturområdet (51.1) strækker sig over 80 % af den elektriske printplade (51) langs en længdeakse (CC’) deraf, fortrinsvis over 50 % af den elektriske printplade (51) langs en længdeakse (CC’) deraf, fortrinsvis over 30 % af den elektriske printplade (51) langs en længdeakse (CC’) deraf, fortrinsvis over 20 % af den elektriske printplade (51) langs en længdeakse (CC’) deraf.
4. Tryksensor (1) ifølge et af kravene 1 til 3, kendetegnet ved, at elektriske signalledere er anbragt på den elektriske printplades (51) bæremateriale for signaltransmission; ved, at de elektriske signalledere er i flere lag med et første lag af en palladium-nikkellegering og et andet lag af guld, ved, at det første lag er pletteret direkte på printpladens (51) bæremateriale; og ved, at det andet lag er dampaflejret på det første lag.
5. Tryksensor (1) ifølge et af kravene 1 til 4, kendetegnet ved, at der ikke er anbragt elektriske signalledere til signaltransmission i den elektriske printplades (51) højtemperaturområde (51.1), eller at ingen andre elektriske signalledere undtagen de elektriske signalledere til signaltransmission er anbragt i den elektriske printplades (51) højtemperaturområdet (51.1).
6. Tryksensor (1) ifølge et af kravene 1 til 5, kendetegnet ved, at der ikke er påført loddestoplag i den elektriske printplades (51) højtemperaturområde (51.1).
7. Tryksensor (1) ifølge et af kravene 1 til 6, kendetegnet ved, at den elektriske printplade (51) har et elektrisk forbindelseselement (53); ved, at det elektriske forbindelseselement (53) er anbragt i den elektriske printplades (51) højtemperaturområde (51.1) ; ved, at elektrodeanordningen (23) er samlet med det elektriske forbindelseselement (53) i nogle områder; ved, at det elektriske forbindelseselement (53) har en hunstiksadapter (53.0); og ved, at hunstiksadapteren (53.0) i den elektriske printplades (51) højtemperaturområde (51.1) er forbundet med den elektriske printplades (51) elektriske signalleder via stofforbindelse.
8. Tryksensor (1) ifølge et af kravene 2 til 6, kendetegnet ved, at den elektriske printplade (51) har et elektrisk forbindelseselement (53); ved, at det elektriske forbindelseselement (53) er anbragt i den elektriske printplades (51) højtemperaturområde (51.1) ; ved, at elektrodeanordningen (23) er samlet med det elektriske forbindelseselement (53) i nogle områder; og ved, at det elektriske forbindelseselement (53) har en ringformet adapter (53.1) og et kompensationselement (53.2) udformet til at kompensere for forskellige koefficienter af termisk ekspansion af den piezoelektriske tryksensors (1) komponenter; ved, at den ringformede adapter (53.1) og kompensationselementet (53.2) er dannet i ét stykke; og/eller ved, at den ringformede adapter (53.1) er anbragt ved en forenede af det elektriske forbindelseselement (53).
9. Tryksensor (1) ifølge krav 8, kendetegnet ved, at kompensationselementet (53.2) har mindst én bøjning; ved, at bøjningen er udformet til at kompensere for forskelle i de lineære termiske ekspansionskoefficienter for tryksensorens (1) signaltransmissionskomponenter; og/eller ved, at bøjningen er udformet til at kompensere for fremstillingstolerancer for sensoranordningens (2) og evalueringsenhedens (5) komponenter langs en længdeakse (CC’) deraf.
10. Tryksensor (1) ifølge et af kravene 8 eller 9, kendetegnet ved, at kompensationselementet (53.2) i alt væsentligt strækker sig over hele højtemperaturområdet (51.1) af den elektriske printplade (51); og ved, at kompensationselementet (53.2) har mindst ét ben; ved, at benet kan indføres i et tilsvarende hul i den elektriske printplades (51) højtemperaturområde (51.1); ved, at benet kan elastisk eller plastisk deformeres, når det indføres i hullet; og ved, at kompensationselementet (53.2) fastgøres mekanisk ved hjælp af benet indført i hullet i den elektriske printplades (51) højtemperaturområde (51.1).
11. Tryksensor (1) ifølge et af kravene 8 til 10, kendetegnet ved, at kompensationselementet (53.2) i lavtemperaturområdet (51.1) af den elektriske printplade (51) er forbundet via en stofforbindelse til en elektrisk signalleder af den elektriske printplade (51).
12. Tryksensor (1) ifølge et af kravene 1 til 11, kendetegnet ved, at transmission af signalerne fra elektrodeanordningen (23) til den elektriske printplade (51) kun sker via stofforbindelser.
13. Tryksensor (1) ifølge et af kravene 1 til 12, kendetegnet ved, at føleren (22) genererer returlednings signaler under indvirkning af et trykforløb; ved, at en sensorflange (20.2) af sensoranordningen (2) modtager returledningssignaleme; ved, at sensorflangen (20.2) har en sensorhusramme (20.3); ved, at sensorhusrammen (20.3) er mekanisk forbundet med den elektriske printplade (51); og ved, at returlednings signalerne transmitteres over sensorhusrammen (20.3) til en elektrisk signalleder af den elektriske printplade (51).
14. Tryksensor (1) ifølge krav 13, kendetegnet ved, at transmissionen af returlednings signalerne over sensorhusrammen (20.3) til en elektrisk signalleder af den elektriske printplade (51) sker redundant.
15. Tryksensor (1) ifølge et af kravene 13 eller 14, kendetegnet ved, at transmissionen af returlednings signalerne fra sensorflangen (20.2) til den elektriske printplade (51) kun sker over stof- eller friktionsforbindelser.
DK16178290.9T 2015-07-31 2016-07-07 Tryksensor DK3124947T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP15179379 2015-07-31
EP16151554 2016-01-15

Publications (1)

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DK3124947T3 true DK3124947T3 (da) 2019-04-01

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Country Status (6)

Country Link
US (1) US10458873B2 (da)
EP (1) EP3124947B1 (da)
JP (1) JP6980368B2 (da)
KR (1) KR102507131B1 (da)
CN (1) CN106404267B (da)
DK (1) DK3124947T3 (da)

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WO2013147260A1 (ja) 2012-03-29 2013-10-03 シチズンファインテックミヨタ株式会社 圧力検出装置、圧力検出装置付き内燃機関
JP5820759B2 (ja) * 2012-03-29 2015-11-24 シチズンファインデバイス株式会社 圧力検出装置の製造方法、圧力検出装置付き内燃機関の製造方法
ES2784778T3 (es) * 2012-08-31 2020-09-30 Meggitt Sa Sensor de fuerza y método para probar su fiabilidad
JP6318605B2 (ja) * 2013-12-20 2018-05-09 株式会社デンソー 溶接部を有する継手構造の組付構造
JP6615565B2 (ja) * 2014-10-24 2019-12-04 株式会社半導体エネルギー研究所 半導体装置

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EP3124947A2 (de) 2017-02-01
JP6980368B2 (ja) 2021-12-15
US20170030790A1 (en) 2017-02-02
US10458873B2 (en) 2019-10-29
KR20170015256A (ko) 2017-02-08
JP2017032561A (ja) 2017-02-09
EP3124947B1 (de) 2018-12-05
EP3124947A3 (de) 2017-05-10
CN106404267A (zh) 2017-02-15
CN106404267B (zh) 2020-08-07

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