DK1979512T3 - Digel til behandling af smeltet silicium og fremgangsmåde til fremstilling heraf - Google Patents
Digel til behandling af smeltet silicium og fremgangsmåde til fremstilling herafInfo
- Publication number
- DK1979512T3 DK1979512T3 DK07702727.4T DK07702727T DK1979512T3 DK 1979512 T3 DK1979512 T3 DK 1979512T3 DK 07702727 T DK07702727 T DK 07702727T DK 1979512 T3 DK1979512 T3 DK 1979512T3
- Authority
- DK
- Denmark
- Prior art keywords
- crucible
- processing
- molten silicon
- basic body
- inner volume
- Prior art date
Links
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract 2
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 abstract 1
- 229910010271 silicon carbide Inorganic materials 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/002—Crucibles or containers for supporting the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Silicon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Ceramic Products (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
- Mold Materials And Core Materials (AREA)
- Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
- Press Drives And Press Lines (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP06447007A EP1811064A1 (fr) | 2006-01-12 | 2006-01-12 | Creuset pour le traitement de silicium à l'état fondu |
PCT/EP2007/000254 WO2007080120A1 (en) | 2006-01-12 | 2007-01-12 | Crucible for the treatment of molten silicon |
Publications (1)
Publication Number | Publication Date |
---|---|
DK1979512T3 true DK1979512T3 (da) | 2011-01-17 |
Family
ID=36507605
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK07702727.4T DK1979512T3 (da) | 2006-01-12 | 2007-01-12 | Digel til behandling af smeltet silicium og fremgangsmåde til fremstilling heraf |
Country Status (20)
Country | Link |
---|---|
US (1) | US7833490B2 (da) |
EP (2) | EP1811064A1 (da) |
JP (1) | JP5400392B2 (da) |
KR (1) | KR101212916B1 (da) |
CN (1) | CN101370968A (da) |
AT (1) | ATE480650T1 (da) |
AU (1) | AU2007204406B2 (da) |
BR (1) | BRPI0706222A2 (da) |
CA (1) | CA2634199C (da) |
DE (1) | DE602007009043D1 (da) |
DK (1) | DK1979512T3 (da) |
ES (1) | ES2349158T3 (da) |
NO (1) | NO20083468L (da) |
PT (1) | PT1979512E (da) |
RU (1) | RU2423558C2 (da) |
SI (1) | SI1979512T1 (da) |
TW (1) | TWI395841B (da) |
UA (1) | UA89717C2 (da) |
WO (1) | WO2007080120A1 (da) |
ZA (1) | ZA200805509B (da) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI400369B (zh) * | 2005-10-06 | 2013-07-01 | Vesuvius Crucible Co | 用於矽結晶的坩堝及其製造方法 |
TWI401343B (zh) * | 2009-06-25 | 2013-07-11 | Wafer Works Corp | 具有保護層之石英玻璃坩堝及其製造方法 |
CN102549201A (zh) * | 2009-07-16 | 2012-07-04 | Memc新加坡私人有限公司 | 涂覆坩埚及其制备方法和用途 |
NO20092797A1 (no) * | 2009-07-31 | 2011-02-01 | Nordic Ceramics As | Digel |
DE102010000687B4 (de) * | 2010-01-05 | 2012-10-18 | Solarworld Innovations Gmbh | Tiegel und Verfahren zur Herstellung von Silizium-Blöcken |
US20110180229A1 (en) * | 2010-01-28 | 2011-07-28 | Memc Singapore Pte. Ltd. (Uen200614794D) | Crucible For Use In A Directional Solidification Furnace |
JP2011219286A (ja) * | 2010-04-06 | 2011-11-04 | Koji Tomita | シリコン及び炭化珪素の製造方法及び製造装置 |
DK2655705T3 (da) * | 2010-12-22 | 2015-04-27 | Steuler Solar Gmbh | Digler |
WO2012092369A2 (en) * | 2010-12-30 | 2012-07-05 | Saint-Gobain Ceramics & Plastics, Inc. | Crucible body and method of forming same |
US20120248286A1 (en) | 2011-03-31 | 2012-10-04 | Memc Singapore Pte. Ltd. (Uen200614794D) | Systems For Insulating Directional Solidification Furnaces |
CN102862986A (zh) * | 2012-04-19 | 2013-01-09 | 北京民海艳科技有限公司 | 冶金法生产太阳能多晶硅用定向凝固器及多晶硅生产方法 |
CN103774209B (zh) * | 2012-10-26 | 2016-06-15 | 阿特斯(中国)投资有限公司 | 硅铸锭用坩埚及其涂层制备方法 |
CN103060908A (zh) * | 2013-01-06 | 2013-04-24 | 奥特斯维能源(太仓)有限公司 | 双层陶瓷坩埚 |
TWI663126B (zh) * | 2014-07-09 | 2019-06-21 | 法商維蘇威法國公司 | 包含可磨塗層之輥、其製造方法及其用途 |
JP5935021B2 (ja) * | 2015-02-20 | 2016-06-15 | 蒲池 豊 | シリコン結晶の製造方法 |
CN111848201B (zh) * | 2020-07-24 | 2022-09-02 | 西安超码科技有限公司 | 一种具有碳化硅/硅涂层的炭/炭坩埚及其制备方法 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE962868C (de) * | 1953-04-09 | 1957-04-25 | Standard Elektrik Ag | Tiegel zum Herstellen reinsten Halbleitermaterials, insbesondere von Silizium und dessen Verwendung |
GB1450825A (en) * | 1974-05-02 | 1976-09-29 | Smiths Industries Ltd | Methods of manufacturing semiconductor bodies and to the products of such methods |
US4141726A (en) * | 1977-04-04 | 1979-02-27 | The Research Institute For Iron, Steel And Other Metals Of The Tohoku University | Method for producing composite materials consisting of continuous silicon carbide fibers and beryllium |
GB2029817A (en) * | 1978-09-06 | 1980-03-26 | Thorn Electrical Ind Ltd | Sealing of ceramic and cermet partds |
JPS5953209B2 (ja) * | 1981-08-06 | 1984-12-24 | 工業技術院長 | 多結晶シリコンインゴットの鋳造法 |
US4590043A (en) | 1982-12-27 | 1986-05-20 | Sri International | Apparatus for obtaining silicon from fluosilicic acid |
JPS62241872A (ja) * | 1986-04-10 | 1987-10-22 | 黒崎窯業株式会社 | 反応焼結Si↓3N↓4−SiC複合体の製造方法 |
DE3629231A1 (de) * | 1986-08-28 | 1988-03-03 | Heliotronic Gmbh | Verfahren zum aufschmelzen von in einen schmelztiegel chargiertem siliciumpulver und schmelztiegel zur durchfuehrung des verfahrens |
DE3639335A1 (de) * | 1986-11-18 | 1988-05-26 | Bayer Ag | Gegenueber metall- und salzschmelzen resistente werkstoffe, ihre herstellung und deren verwendung |
FR2614321A1 (fr) * | 1987-04-27 | 1988-10-28 | Europ Propulsion | Cartouche en materiaux composites pour dispositif d'elaboration de monocristaux. |
US5037503A (en) * | 1988-05-31 | 1991-08-06 | Osaka Titanium Co., Ltd. | Method for growing silicon single crystal |
US6165425A (en) * | 1997-02-06 | 2000-12-26 | Bayer Aktiengesellschaft | Melting pot with silicon protective layers, method for applying said layer and the use thereof |
US6048813A (en) * | 1998-10-09 | 2000-04-11 | Cree, Inc. | Simulated diamond gemstones formed of aluminum nitride and aluminum nitride: silicon carbide alloys |
JP4343482B2 (ja) * | 2001-02-02 | 2009-10-14 | キヤノン株式会社 | シリコン系膜の形成方法、シリコン系膜及び光起電力素子 |
JP5388398B2 (ja) * | 2001-05-31 | 2014-01-15 | フアン,シャオディ | マイクロ波による直接金属製造方法 |
JP2003128411A (ja) * | 2001-10-18 | 2003-05-08 | Sharp Corp | 板状シリコン、板状シリコンの製造方法および太陽電池 |
DE10217946A1 (de) | 2002-04-22 | 2003-11-13 | Heraeus Quarzglas | Quarzglastiegel und Verfahren zur Herstellung desselben |
NO317080B1 (no) | 2002-08-15 | 2004-08-02 | Crusin As | Silisiumnitriddigler som er bestandige mot silisiumsmelter og fremgangsmate for fremstilling av slike digler |
EP1550636A4 (en) * | 2002-09-12 | 2012-03-07 | Asahi Glass Co Ltd | PROCESS FOR PRODUCING HIGH PURITY SILICON AND APPARATUS THEREFOR |
AU2003284253A1 (en) * | 2002-10-18 | 2004-05-04 | Evergreen Solar, Inc. | Method and apparatus for crystal growth |
UA81278C2 (en) | 2002-12-06 | 2007-12-25 | Vessel for holding a silicon and method for its making | |
US20050022743A1 (en) * | 2003-07-31 | 2005-02-03 | Semiconductor Energy Laboratory Co., Ltd. | Evaporation container and vapor deposition apparatus |
CN1946881B (zh) | 2004-04-29 | 2010-06-09 | 维苏维尤斯·克鲁斯布公司 | 用于硅结晶的坩埚 |
KR100573473B1 (ko) * | 2004-05-10 | 2006-04-24 | 주식회사 실트론 | 실리콘 웨이퍼 및 그 제조방법 |
US7540919B2 (en) * | 2005-04-01 | 2009-06-02 | Gt Solar Incorporated | Solidification of crystalline silicon from reusable crucible molds |
EP1739209A1 (en) | 2005-07-01 | 2007-01-03 | Vesuvius Crucible Company | Crucible for the crystallization of silicon |
TWI400369B (zh) | 2005-10-06 | 2013-07-01 | Vesuvius Crucible Co | 用於矽結晶的坩堝及其製造方法 |
-
2006
- 2006-01-12 EP EP06447007A patent/EP1811064A1/fr not_active Withdrawn
-
2007
- 2007-01-11 TW TW096101077A patent/TWI395841B/zh not_active IP Right Cessation
- 2007-01-12 KR KR1020087016906A patent/KR101212916B1/ko not_active IP Right Cessation
- 2007-01-12 CN CNA2007800030630A patent/CN101370968A/zh active Pending
- 2007-01-12 DE DE602007009043T patent/DE602007009043D1/de active Active
- 2007-01-12 EP EP07702727A patent/EP1979512B1/en not_active Not-in-force
- 2007-01-12 US US12/159,865 patent/US7833490B2/en not_active Expired - Fee Related
- 2007-01-12 UA UAA200809060A patent/UA89717C2/ru unknown
- 2007-01-12 ES ES07702727T patent/ES2349158T3/es active Active
- 2007-01-12 RU RU2008132975/05A patent/RU2423558C2/ru not_active IP Right Cessation
- 2007-01-12 DK DK07702727.4T patent/DK1979512T3/da active
- 2007-01-12 SI SI200730372T patent/SI1979512T1/sl unknown
- 2007-01-12 ZA ZA200805509A patent/ZA200805509B/xx unknown
- 2007-01-12 PT PT07702727T patent/PT1979512E/pt unknown
- 2007-01-12 WO PCT/EP2007/000254 patent/WO2007080120A1/en active Application Filing
- 2007-01-12 JP JP2008549835A patent/JP5400392B2/ja not_active Expired - Fee Related
- 2007-01-12 BR BRPI0706222-2A patent/BRPI0706222A2/pt not_active Application Discontinuation
- 2007-01-12 AU AU2007204406A patent/AU2007204406B2/en not_active Ceased
- 2007-01-12 AT AT07702727T patent/ATE480650T1/de active
- 2007-01-12 CA CA2634199A patent/CA2634199C/en not_active Expired - Fee Related
-
2008
- 2008-08-11 NO NO20083468A patent/NO20083468L/no not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
DE602007009043D1 (de) | 2010-10-21 |
ES2349158T3 (es) | 2010-12-28 |
ATE480650T1 (de) | 2010-09-15 |
NO20083468L (no) | 2008-08-11 |
BRPI0706222A2 (pt) | 2011-03-22 |
JP5400392B2 (ja) | 2014-01-29 |
US7833490B2 (en) | 2010-11-16 |
ZA200805509B (en) | 2009-12-30 |
PT1979512E (pt) | 2010-11-09 |
CN101370968A (zh) | 2009-02-18 |
CA2634199A1 (en) | 2007-07-19 |
KR20080082978A (ko) | 2008-09-12 |
EP1811064A1 (fr) | 2007-07-25 |
RU2008132975A (ru) | 2010-02-20 |
TW200738919A (en) | 2007-10-16 |
TWI395841B (zh) | 2013-05-11 |
KR101212916B1 (ko) | 2012-12-14 |
US20080292524A1 (en) | 2008-11-27 |
CA2634199C (en) | 2013-09-24 |
SI1979512T1 (sl) | 2010-11-30 |
EP1979512B1 (en) | 2010-09-08 |
RU2423558C2 (ru) | 2011-07-10 |
UA89717C2 (ru) | 2010-02-25 |
EP1979512A1 (en) | 2008-10-15 |
WO2007080120A1 (en) | 2007-07-19 |
JP2009523115A (ja) | 2009-06-18 |
AU2007204406B2 (en) | 2012-02-16 |
AU2007204406A1 (en) | 2007-07-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DK1979512T3 (da) | Digel til behandling af smeltet silicium og fremgangsmåde til fremstilling heraf | |
BRPI0615029A2 (pt) | processos e intermediários | |
ATE398196T1 (de) | Tiegel für die kristallisation von silicium | |
TW200734437A (en) | Polishing liquid for barrier layer | |
TW200733291A (en) | Decoupled chamber body | |
SG179158A1 (en) | Composition and method for polishing bulk silicon | |
EA200701742A1 (ru) | Способы получения сиропа | |
MX2007009397A (es) | Componente con un recubrimiento para reducir la capacidad de humectacion de la superficie y procedimiento para su fabricacion. | |
TW200730652A (en) | Silicon body formation method and device thereof | |
MXPA03000438A (es) | Deposicion de vapor. | |
WO2012092369A3 (en) | Crucible body and method of forming same | |
ATE410486T1 (de) | Beschichtetes metall-substrat | |
TW200730596A (en) | Composition for polishing semiconductor layers | |
WO2008102357A3 (en) | Method for the preparation of ceramic materials | |
SG140530A1 (en) | Alkaline etching solution for semiconductor wafer and alkaline etching method | |
FR2889087B1 (fr) | Support de cuisson pour ceramiques et procede d'obtention | |
WO2008058270A3 (en) | A susceptor and method of forming a led device using such susceptor | |
ATE457297T1 (de) | Verbinden von siliciumcarbid | |
TW200531837A (en) | Slotted substrates and methods of forming | |
TW200603215A (en) | Apparatus for manufacturing substrate | |
DE502005006247D1 (de) | Brennofen | |
ITRM20040496A1 (it) | Procedimento per la produzione di un componente in ceramica al carburo di silicio. | |
TW200621659A (en) | Ceramics for a glass mold | |
FR2899574B1 (fr) | Fabrication de materiaux denses, en carbures de metaux de transition. | |
TW200719955A (en) | Process for the production of a structured sol-gel layer |