DK142062C - Fremgangsmaade og apparat til digelfri zonesmeltning af halvlederstave ved hjaelp af en varmespole - Google Patents

Fremgangsmaade og apparat til digelfri zonesmeltning af halvlederstave ved hjaelp af en varmespole

Info

Publication number: DK142062C
Authority: DK; Denmark
Prior art keywords: digel; semiconductor; free zone; zone melting; heat coil
Prior art date: 1972-04-26

Application number

DK212573A

Other languages

Danish (da)

English (en)

Other versions

DK142062B (da

Inventor

W Keller

Original Assignee

Siemens Ag

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1972-04-26

Filing date

1973-04-17

Publication date

1981-01-12

1973-04-17 Application filed by Siemens Ag filed Critical Siemens Ag

1980-08-18 Publication of DK142062B publication Critical patent/DK142062B/da

1981-01-12 Application granted granted Critical

1981-01-12 Publication of DK142062C publication Critical patent/DK142062C/da

Classifications

- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/28—Controlling or regulating
- C30B13/30—Stabilisation or shape controlling of the molten zone, e.g. by concentrators, by electromagnetic fields; Controlling the section of the crystal
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1004—Apparatus with means for measuring, testing, or sensing
- Y10T117/1008—Apparatus with means for measuring, testing, or sensing with responsive control means

Landscapes

Chemical & Material Sciences (AREA)
Physics & Mathematics (AREA)
Electromagnetism (AREA)
Engineering & Computer Science (AREA)
Crystallography & Structural Chemistry (AREA)
Materials Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
General Induction Heating (AREA)
Crystals, And After-Treatments Of Crystals (AREA)
Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

DK212573A 1972-04-26 1973-04-17 Fremgangsmaade og apparat til digelfri zonesmeltning af halvlederstave ved hjaelp af en varmespole DK142062C (da)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
DE2220519		1972-04-26
DE2220519A DE2220519C3 (de)	1972-04-26	1972-04-26	Verfahren zum tiegelfreien Zonenschmelzen von Halbleiterstäben

Publications (2)

Publication Number	Publication Date
DK142062B DK142062B (da)	1980-08-18
DK142062C true DK142062C (da)	1981-01-12

Family

ID=5843357

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DK212573A DK142062C (da)	1972-04-26	1973-04-17	Fremgangsmaade og apparat til digelfri zonesmeltning af halvlederstave ved hjaelp af en varmespole

Country Status (6)

Country	Link
US (1)	US3880599A (it)
JP (1)	JPS5910959B2 (it)
BE (1)	BE798760A (it)
DE (1)	DE2220519C3 (it)
DK (1)	DK142062C (it)
NL (1)	NL7216255A (it)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4176002A (en) *	1974-08-21	1979-11-27	Agence Nationale De Valorisation De La Recherche (Anvar)	Controlling the melt temperature during zone refining and Czochralski crystal growth by sensing the viscous torque of the melt zone during operation
DK142586B (da) *	1977-07-07	1980-11-24	Topsil As	Apparat til zonesmeltning af en halvlederstav.
JPS58831B2 (ja) *	1978-09-27	1983-01-08	東洋製罐株式会社	高周波誘導加熱回路

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
NL135666C (it) *	1959-08-17
GB904100A (en) *	1959-09-11	1962-08-22	Siemens Ag	A process for zone-by-zone melting of a rod of semi-conductor material using an induction coil as the heating means and an automatic arrangement for controlling the current through the coil
DE1209551B (de) *	1961-12-07	1966-01-27	Siemens Ag	Verfahren zum tiegelfreien Zonenschmelzen eines stabfoermigen Halbleiterkoerpers miteiner Steuerung seines Durchmessers- bzw. Querschnittsverlaufs und Vorrichtung zur Durchfuehrung dieses Verfahrens
US3284172A (en) *	1964-10-13	1966-11-08	Monsanto Co	Apparatus and process for preparing semiconductor rods
US3321299A (en) *	1964-10-13	1967-05-23	Monsanto Co	Apparatus and process for preparing semiconductor rods
US3617392A (en) *	1968-10-29	1971-11-02	Semimetals Inc	Power control for crystal growing
DE1913881A1 (de) *	1969-03-19	1970-10-22	Siemens Ag	Vorrichtung zum tiegelfreien Zonenschmelzen

1972
- 1972-04-26 DE DE2220519A patent/DE2220519C3/de not_active Expired
- 1972-11-30 NL NL7216255A patent/NL7216255A/xx unknown
1973
- 1973-03-19 US US342457A patent/US3880599A/en not_active Expired - Lifetime
- 1973-03-26 JP JP48034435A patent/JPS5910959B2/ja not_active Expired
- 1973-04-17 DK DK212573A patent/DK142062C/da not_active IP Right Cessation
- 1973-04-26 BE BE130450A patent/BE798760A/xx not_active IP Right Cessation

Also Published As

Publication number	Publication date
JPS4922384A (it)	1974-02-27
DE2220519C3 (de)	1982-03-11
BE798760A (fr)	1973-10-26
DK142062B (da)	1980-08-18
DE2220519A1 (de)	1973-11-15
NL7216255A (it)	1973-10-30
JPS5910959B2 (ja)	1984-03-12
DE2220519B2 (de)	1981-02-26
US3880599A (en)	1975-04-29

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Legal Events

Date	Code	Title	Description
1988-03-07	PBP	Patent lapsed