[go: up one dir, main page]

DE69922727D1 - Kapazitiver Druckwandler - Google Patents

Kapazitiver Druckwandler

Info

Publication number
DE69922727D1
DE69922727D1 DE69922727T DE69922727T DE69922727D1 DE 69922727 D1 DE69922727 D1 DE 69922727D1 DE 69922727 T DE69922727 T DE 69922727T DE 69922727 T DE69922727 T DE 69922727T DE 69922727 D1 DE69922727 D1 DE 69922727D1
Authority
DE
Germany
Prior art keywords
pressure transducer
capacitive pressure
capacitive
transducer
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69922727T
Other languages
English (en)
Other versions
DE69922727T2 (de
Inventor
Junichi Horie
Yasuo Onose
Norio Ichikawa
Seiji Kuryu
Satoshi Shimada
Akihiko Saito
Keiji Hanzawa
Masahiro Matsumoto
Hiroshi Moriya
Akio Yasukawa
Atsushi Miyazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Astemo Ltd
Original Assignee
Hitachi Ltd
Hitachi Car Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP08564198A external-priority patent/JP3310216B2/ja
Priority claimed from JP08544498A external-priority patent/JP3441961B2/ja
Priority claimed from JP26642698A external-priority patent/JP3359871B2/ja
Application filed by Hitachi Ltd, Hitachi Car Engineering Co Ltd filed Critical Hitachi Ltd
Application granted granted Critical
Publication of DE69922727D1 publication Critical patent/DE69922727D1/de
Publication of DE69922727T2 publication Critical patent/DE69922727T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
DE69922727T 1998-03-31 1999-03-30 Kapazitiver Druckwandler Expired - Lifetime DE69922727T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP8544498 1998-03-31
JP8564198 1998-03-31
JP08564198A JP3310216B2 (ja) 1998-03-31 1998-03-31 半導体圧力センサ
JP08544498A JP3441961B2 (ja) 1998-03-31 1998-03-31 半導体圧力センサ
JP26642698A JP3359871B2 (ja) 1998-06-24 1998-09-21 容量型圧力センサ及びその製造方法
JP26642698 1998-09-21

Publications (2)

Publication Number Publication Date
DE69922727D1 true DE69922727D1 (de) 2005-01-27
DE69922727T2 DE69922727T2 (de) 2005-12-15

Family

ID=33556075

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69922727T Expired - Lifetime DE69922727T2 (de) 1998-03-31 1999-03-30 Kapazitiver Druckwandler

Country Status (2)

Country Link
US (1) US6877383B2 (de)
DE (1) DE69922727T2 (de)

Families Citing this family (82)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7420659B1 (en) * 2000-06-02 2008-09-02 Honeywell Interantional Inc. Flow control system of a cartridge
US7047814B2 (en) * 2001-07-17 2006-05-23 Redwood Microsystems, Inc. Micro-electromechanical sensor
WO2003083425A1 (fr) * 2002-03-28 2003-10-09 Sanyo Electric Co., Ltd. Capteur de pression et procede de fabrication de celui-ci
US20060149168A1 (en) * 2002-08-19 2006-07-06 Robert Czarnek Capacitive uterine contraction sensor
US6693336B1 (en) * 2003-01-06 2004-02-17 James Seng-Ju Ni Intergrated circuit chip package with reduced parameter offsets
JP2004245622A (ja) * 2003-02-12 2004-09-02 Pacific Ind Co Ltd 圧力センサ、送信機、及びタイヤ状態監視装置
US7570065B2 (en) * 2006-03-01 2009-08-04 Loadstar Sensors Inc Cylindrical capacitive force sensing device and method
JP2005181066A (ja) * 2003-12-18 2005-07-07 Denso Corp 圧力センサ
KR20050075659A (ko) * 2004-01-17 2005-07-21 삼성전자주식회사 디지털 출력을 갖는 압력센서, 그 제조방법 및 그 센싱방법
US7402425B2 (en) * 2004-03-02 2008-07-22 The Charles Stark Draper Laboratory, Inc. Stress-based electrostatic monitoring of chemical reactions and binding
JP4052263B2 (ja) * 2004-03-04 2008-02-27 株式会社デンソー 圧力センサ
US7222639B2 (en) * 2004-12-29 2007-05-29 Honeywell International Inc. Electrostatically actuated gas valve
US7328882B2 (en) * 2005-01-06 2008-02-12 Honeywell International Inc. Microfluidic modulating valve
US7445017B2 (en) * 2005-01-28 2008-11-04 Honeywell International Inc. Mesovalve modulator
JP4421511B2 (ja) * 2005-05-30 2010-02-24 三菱電機株式会社 半導体圧力センサ
US7517201B2 (en) * 2005-07-14 2009-04-14 Honeywell International Inc. Asymmetric dual diaphragm pump
US7622782B2 (en) * 2005-08-24 2009-11-24 General Electric Company Pressure sensors and methods of making the same
US20070051415A1 (en) * 2005-09-07 2007-03-08 Honeywell International Inc. Microvalve switching array
JP4535046B2 (ja) * 2006-08-22 2010-09-01 ヤマハ株式会社 静電容量センサ及びその製造方法
US7624755B2 (en) 2005-12-09 2009-12-01 Honeywell International Inc. Gas valve with overtravel
US20070163355A1 (en) * 2006-01-13 2007-07-19 Kavlico Corporation Preformed sensor housing and methods to produce thin metal diaphragms
US7395719B2 (en) * 2006-01-13 2008-07-08 Custom Sensors & Technologies, Inc. Preformed sensor housings and methods to produce thin metal diaphragms
US7523762B2 (en) 2006-03-22 2009-04-28 Honeywell International Inc. Modulating gas valves and systems
JP5092462B2 (ja) * 2006-06-13 2012-12-05 株式会社デンソー 力学量センサ
US7543604B2 (en) * 2006-09-11 2009-06-09 Honeywell International Inc. Control valve
JP2008101918A (ja) * 2006-10-17 2008-05-01 Alps Electric Co Ltd 圧力センサのパッケージ
US7644731B2 (en) 2006-11-30 2010-01-12 Honeywell International Inc. Gas valve with resilient seat
US20090014340A1 (en) * 2007-06-15 2009-01-15 Williams John R Devices, systems, and methods for measuring glucose
WO2009041673A1 (en) * 2007-09-25 2009-04-02 Canon Kabushiki Kaisha Electrostatic transducer and manufacturing method thereof
JP5408935B2 (ja) * 2007-09-25 2014-02-05 キヤノン株式会社 電気機械変換素子及びその製造方法
US8240217B2 (en) * 2007-10-15 2012-08-14 Kavlico Corporation Diaphragm isolation forming through subtractive etching
MY143881A (en) * 2007-11-07 2011-07-15 Mimos Berhad Fabrication method of a micromechanical device
JP2009258088A (ja) * 2008-03-18 2009-11-05 Canon Anelva Technix Corp 静電容量型隔膜真空計及び真空処理装置
JP4557034B2 (ja) * 2008-04-01 2010-10-06 株式会社デンソー 半導体力学量センサおよびその製造方法
JP2010004199A (ja) * 2008-06-19 2010-01-07 Hitachi Ltd 超音波トランスデューサおよびその製造方法
US8181531B2 (en) * 2008-06-27 2012-05-22 Edwin Carlen Accessible stress-based electrostatic monitoring of chemical reactions and binding
US9011670B2 (en) * 2008-08-14 2015-04-21 The Charles Stark Draper Laboratory, Inc. Three-dimensional metal ion sensor arrays on printed circuit boards
JP2012047725A (ja) * 2010-07-30 2012-03-08 Canon Anelva Corp 静電容量圧力センサ
KR101215919B1 (ko) * 2010-08-13 2012-12-27 전자부품연구원 정전용량형 압력센서 및 그의 제조방법
JP5649474B2 (ja) * 2011-01-26 2015-01-07 ローム株式会社 静電容量型圧力センサおよび静電容量型圧力センサの製造方法
US8752435B2 (en) 2011-03-09 2014-06-17 Claude Belleville Miniature high sensitivity pressure sensor
JP5576331B2 (ja) * 2011-03-31 2014-08-20 アズビル株式会社 圧力センサ装置
JP5813471B2 (ja) * 2011-11-11 2015-11-17 株式会社東芝 Ｍｅｍｓ素子
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
US8947242B2 (en) 2011-12-15 2015-02-03 Honeywell International Inc. Gas valve with valve leakage test
US8839815B2 (en) 2011-12-15 2014-09-23 Honeywell International Inc. Gas valve with electronic cycle counter
US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
US8899264B2 (en) 2011-12-15 2014-12-02 Honeywell International Inc. Gas valve with electronic proof of closure system
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
US9074770B2 (en) 2011-12-15 2015-07-07 Honeywell International Inc. Gas valve with electronic valve proving system
US9846440B2 (en) 2011-12-15 2017-12-19 Honeywell International Inc. Valve controller configured to estimate fuel comsumption
US10422531B2 (en) 2012-09-15 2019-09-24 Honeywell International Inc. System and approach for controlling a combustion chamber
US9234661B2 (en) 2012-09-15 2016-01-12 Honeywell International Inc. Burner control system
US9733142B2 (en) * 2012-10-17 2017-08-15 Kabushiki Kaisha Saginomiya Seisakusho Pressure sensor, and sensor unit provided with same
EP2943765A1 (de) * 2012-11-30 2015-11-18 Robert Bosch GmbH Mems-drucksensoranordnung mit elektromagnetischer abschirmung
FI125447B (en) * 2013-06-04 2015-10-15 Murata Manufacturing Co Improved pressure sensor
CN104280161B (zh) * 2013-07-03 2016-08-31 中芯国际集成电路制造(上海)有限公司 压力传感器及其形成方法
EP2868970B1 (de) 2013-10-29 2020-04-22 Honeywell Technologies Sarl Regelungsvorrichtung
EP2871456B1 (de) * 2013-11-06 2018-10-10 Invensense, Inc. Drucksensor und Herstellungsmethode für einen Drucksensor
US10024439B2 (en) 2013-12-16 2018-07-17 Honeywell International Inc. Valve over-travel mechanism
DE102014200500A1 (de) * 2014-01-14 2015-07-16 Robert Bosch Gmbh Mikromechanische Drucksensorvorrichtung und entsprechendes Herstellungsverfahren
US9841122B2 (en) 2014-09-09 2017-12-12 Honeywell International Inc. Gas valve with electronic valve proving system
US9645584B2 (en) 2014-09-17 2017-05-09 Honeywell International Inc. Gas valve with electronic health monitoring
US10503181B2 (en) 2016-01-13 2019-12-10 Honeywell International Inc. Pressure regulator
JP2019512084A (ja) 2016-02-03 2019-05-09 ハッチンソン テクノロジー インコーポレイテッドＨｕｔｃｈｉｎｓｏｎ Ｔｅｃｈｎｏｌｏｇｙ Ｉｎｃｏｒｐｏｒａｔｅｄ 一体型リードを備えた小型圧力・力センサ
US10564062B2 (en) 2016-10-19 2020-02-18 Honeywell International Inc. Human-machine interface for gas valve
JP6804284B2 (ja) * 2016-12-14 2020-12-23 株式会社堀場エステック 静電容量型センサ
JP6546368B2 (ja) * 2017-03-25 2019-07-17 アルプスアルパイン株式会社 力覚センサ
US10468385B2 (en) * 2017-11-29 2019-11-05 Taiwan Semiconductor Manufacturing Company Ltd. Semiconductor structure including plurality of chips along with air gap and manufacturing method thereof
US11073281B2 (en) 2017-12-29 2021-07-27 Honeywell International Inc. Closed-loop programming and control of a combustion appliance
US10697815B2 (en) 2018-06-09 2020-06-30 Honeywell International Inc. System and methods for mitigating condensation in a sensor module
US11225409B2 (en) 2018-09-17 2022-01-18 Invensense, Inc. Sensor with integrated heater
US11262262B2 (en) * 2019-01-28 2022-03-01 Taiwan Semiconductor Manufacturing Company Ltd. Pressure sensor and manufacturing method thereof
CN113785178B (zh) 2019-05-17 2024-12-17 应美盛股份有限公司 气密性改进的压力传感器
DE102020125681A1 (de) 2020-10-01 2022-04-07 Vega Grieshaber Kg Druckmesszelle
US12140489B2 (en) * 2021-09-21 2024-11-12 Invensense, Inc. Pressure sensor with high stability
US12139398B2 (en) * 2021-09-21 2024-11-12 Invensense, Inc. Pressure sensor with high stability
CN114251616B (zh) * 2021-12-27 2023-11-24 北京印刷学院 一种焦点自跟踪的舞台追光灯装置及其使用方法
CN115031878A (zh) * 2022-07-08 2022-09-09 北京智芯传感科技有限公司 一种带有硬心结构的电容压力传感器及其制备方法
CN115493744B (zh) * 2022-11-21 2023-03-07 季华实验室 一种宽量程的电容薄膜真空计及真空度检测方法

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2659944B2 (ja) 1985-04-26 1997-09-30 ウィスコンシン アラムニ リサーチ ファンデーション シール型空胴トランスジューサを製造する方法及びシール型空胴トランスジューサ構造体
US4771638A (en) * 1985-09-30 1988-09-20 Kabushiki Kaisha Toyota Chuo Kenkyusho Semiconductor pressure sensor
US4766666A (en) * 1985-09-30 1988-08-30 Kabushiki Kaisha Toyota Chuo Kenkyusho Semiconductor pressure sensor and method of manufacturing the same
JPS62232171A (ja) 1986-04-02 1987-10-12 Nissan Motor Co Ltd 半導体加速度センサ
IL82960A0 (en) * 1986-06-30 1987-12-20 Rosemount Inc Differential pressure sensor
JPH0750789B2 (ja) 1986-07-18 1995-05-31 日産自動車株式会社 半導体圧力変換装置の製造方法
GB2198611B (en) 1986-12-13 1990-04-04 Spectrol Reliance Ltd Method of forming a sealed diaphragm on a substrate
JPH0797643B2 (ja) 1987-07-08 1995-10-18 日産自動車株式会社 圧力変換装置の製造方法
EP0380661A4 (en) * 1987-10-07 1991-08-14 Kabushiki Kaisha Komatsu Seisakusho Semiconducteur thin-film pressure sensor and method of producing the same
JPH01147331A (ja) * 1987-12-03 1989-06-09 Ngk Insulators Ltd 圧力検出器
US4998179A (en) 1989-02-28 1991-03-05 United Technologies Corporation Capacitive semiconductive sensor with hinged diaphragm for planar movement
CN1018844B (zh) * 1990-06-02 1992-10-28 中国科学院兰州化学物理研究所 防锈干膜润滑剂
JP2773460B2 (ja) 1991-03-05 1998-07-09 日本電気株式会社 半導体加速度センサ
JP2729005B2 (ja) * 1992-04-01 1998-03-18 三菱電機株式会社 半導体圧力センサ及びその製造方法
US5323656A (en) * 1992-05-12 1994-06-28 The Foxboro Company Overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same
US5241864A (en) 1992-06-17 1993-09-07 Motorola, Inc. Double pinned sensor utilizing a tensile film
JP2769661B2 (ja) * 1992-09-29 1998-06-25 三菱電機株式会社 半導体装置およびその製造方法
US5316619A (en) 1993-02-05 1994-05-31 Ford Motor Company Capacitive surface micromachine absolute pressure sensor and method for processing
JP3613838B2 (ja) * 1995-05-18 2005-01-26 株式会社デンソー 半導体装置の製造方法
JP3114570B2 (ja) * 1995-05-26 2000-12-04 オムロン株式会社 静電容量型圧力センサ
DE69706213T2 (de) * 1996-04-04 2002-05-16 Ssi Technologies, Inc. Druckmessgerät und Verfahren zu seiner Herstellung
US6109113A (en) * 1998-06-11 2000-08-29 Delco Electronics Corp. Silicon micromachined capacitive pressure sensor and method of manufacture
JP4710147B2 (ja) * 2000-06-13 2011-06-29 株式会社デンソー 半導体圧力センサ

Also Published As

Publication number Publication date
US6877383B2 (en) 2005-04-12
DE69922727T2 (de) 2005-12-15
US20030019299A1 (en) 2003-01-30

Similar Documents

Publication Publication Date Title
DE69922727D1 (de) Kapazitiver Druckwandler
DE69815801D1 (de) Druckwandler
DE69707386D1 (de) Druckwandler
DE59508560D1 (de) Kapazitiver Drucksensor
DE69906903D1 (de) Blutdruck-Messgerät
DE69907105D1 (de) Kapazitiver Druckwandler
JP2002504674A5 (ja) 圧力センサ
DE69616198D1 (de) Druckwandler
DK0973012T3 (da) Transducer
DE60144214D1 (de) Kapazitiver Drucksensor
DE60012645D1 (de) Kapazitiver Drucksensor
NO994500D0 (no) Transducer
DE60139435D1 (de) Druckwandlermontage
DE60004454D1 (de) Drucksensoreinheit
DE69803519D1 (de) Drucksensor
DE60117458D1 (de) Integrierter Druckwandler
DE59809098D1 (de) Druckaufnehmer
DE59803182D1 (de) Drucksensor
DE69809379D1 (de) Druckwandler
DE69806403D1 (de) Druckeinheit
DE59914223D1 (de) Relativdrucksensor
DE50014915D1 (de) Drucksensor
NO973038D0 (no) Trykksensor
DE69906447T2 (de) Entwurfsdruck
DE69941245D1 (de) Kapazitiver sensor

Legal Events

Date Code Title Description
8364 No opposition during term of opposition