[go: up one dir, main page]

DE69729941D1 - Beschleunigungsmesselement sowie verfahren zu seiner herstellung - Google Patents

Beschleunigungsmesselement sowie verfahren zu seiner herstellung

Info

Publication number
DE69729941D1
DE69729941D1 DE69729941T DE69729941T DE69729941D1 DE 69729941 D1 DE69729941 D1 DE 69729941D1 DE 69729941 T DE69729941 T DE 69729941T DE 69729941 T DE69729941 T DE 69729941T DE 69729941 D1 DE69729941 D1 DE 69729941D1
Authority
DE
Germany
Prior art keywords
production
measurement element
acceleration measurement
acceleration
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69729941T
Other languages
English (en)
Other versions
DE69729941T2 (de
Inventor
Hitoshi Yoshida
Shigeaki Tomonari
Naomasa Oka
Takuro Nakamura
Takuro Ishida
Masanao Kamakura
Fumihiro Kasano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP03727197A external-priority patent/JP3277839B2/ja
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Publication of DE69729941D1 publication Critical patent/DE69729941D1/de
Application granted granted Critical
Publication of DE69729941T2 publication Critical patent/DE69729941T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/24—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in magnetic properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/132—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electromagnetic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Pressure Sensors (AREA)
DE69729941T 1997-02-21 1997-10-22 Beschleunigungsmesselement sowie verfahren zu seiner herstellung Expired - Lifetime DE69729941T2 (de)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
JP03727197A JP3277839B2 (ja) 1997-02-21 1997-02-21 加速度センサ及びその製造方法
JP3727197 1997-02-21
JP20426997 1997-07-30
JP20426997 1997-07-30
JP23411497 1997-08-29
JP23411697 1997-08-29
JP23411697 1997-08-29
JP23411497 1997-08-29
PCT/JP1997/003811 WO1998037425A1 (fr) 1997-02-21 1997-10-22 Element detecteur d'acceleration et son procede de production

Publications (2)

Publication Number Publication Date
DE69729941D1 true DE69729941D1 (de) 2004-08-26
DE69729941T2 DE69729941T2 (de) 2005-08-25

Family

ID=27460389

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69729941T Expired - Lifetime DE69729941T2 (de) 1997-02-21 1997-10-22 Beschleunigungsmesselement sowie verfahren zu seiner herstellung

Country Status (7)

Country Link
US (1) US6293149B1 (de)
EP (1) EP0899574B1 (de)
KR (1) KR100301097B1 (de)
AU (1) AU4722097A (de)
CA (1) CA2251957C (de)
DE (1) DE69729941T2 (de)
WO (1) WO1998037425A1 (de)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001075455A2 (en) * 2000-04-04 2001-10-11 Rosemount Aerospace Inc. Three axis accelerometer
US6528340B2 (en) * 2001-01-03 2003-03-04 Honeywell International Inc. Pressure transducer with composite diaphragm
DE10111149B4 (de) * 2001-03-08 2011-01-05 Eads Deutschland Gmbh Mikromechanischer kapazitiver Beschleunigungssensor
EP1245528A1 (de) * 2001-03-27 2002-10-02 Delta Danish Electronics, Light & Acoustics Ein einstückiges flexibles Mikrosystem und Verfahren zu dessen Herstellung
JP4890689B2 (ja) * 2001-07-24 2012-03-07 オリンパス株式会社 三次元構造体の製造方法及び揺動体の製造方法
JP2003172745A (ja) * 2001-09-26 2003-06-20 Hitachi Metals Ltd 半導体加速度センサ
US6763719B2 (en) * 2002-03-25 2004-07-20 Hitachi Metals, Ltd. Acceleration sensor
JP4216525B2 (ja) * 2002-05-13 2009-01-28 株式会社ワコー 加速度センサおよびその製造方法
US20040016981A1 (en) * 2002-07-26 2004-01-29 Matsushita Electric Works, Ltd. Semiconductor acceleration sensor using doped semiconductor layer as wiring
JP2004198280A (ja) * 2002-12-19 2004-07-15 Hitachi Metals Ltd 加速度センサ
TW589752B (en) * 2003-05-28 2004-06-01 Au Optronics Corp Semiconductor acceleration sensor
EP1491901A1 (de) 2003-06-25 2004-12-29 Matsushita Electric Works, Ltd. Halbleiter-Beschleunigungsaufnehmer und Verfahren zu seiner Herstellung
JP2005049130A (ja) * 2003-07-30 2005-02-24 Oki Electric Ind Co Ltd 加速度センサ及び加速度センサの製造方法
JP4416460B2 (ja) * 2003-09-16 2010-02-17 トレックス・セミコンダクター株式会社 加速度センサー
JP2005283402A (ja) * 2004-03-30 2005-10-13 Fujitsu Media Device Kk 慣性センサ
JP4683897B2 (ja) * 2004-10-14 2011-05-18 Ｏｋｉセミコンダクタ株式会社 加速度センサチップパッケージ及びその製造方法
JP2006125887A (ja) * 2004-10-26 2006-05-18 Fujitsu Media Device Kk 加速度センサ
JP2006275896A (ja) * 2005-03-30 2006-10-12 Yokohama Rubber Co Ltd:The 半導体加速度センサ
US7371601B2 (en) 2005-05-12 2008-05-13 Delphi Technologies, Inc. Piezoresistive sensing structure
US7180019B1 (en) * 2006-06-26 2007-02-20 Temic Automotive Of North America, Inc. Capacitive accelerometer or acceleration switch
JP2008224254A (ja) * 2007-03-08 2008-09-25 Oki Electric Ind Co Ltd センサ装置、センサ装置の製造方法
US20090133908A1 (en) * 2007-11-28 2009-05-28 Goodner Michael D Interconnect structure for a microelectronic device, method of manfacturing same, and microelectronic structure containing same
JP5108617B2 (ja) * 2008-05-13 2012-12-26 大日本印刷株式会社 加速度センサ
CN102124352B (zh) * 2008-11-25 2013-04-17 松下电器产业株式会社 加速度传感器及其构造体
US20100162823A1 (en) * 2008-12-26 2010-07-01 Yamaha Corporation Mems sensor and mems sensor manufacture method
JP5724342B2 (ja) 2009-12-10 2015-05-27 大日本印刷株式会社 パターン配置方法並びにシリコンウェハ及び半導体デバイスの製造方法
JPWO2011161917A1 (ja) * 2010-06-25 2013-08-19 パナソニック株式会社 加速度センサ
DE102010037397A1 (de) 2010-09-08 2012-03-08 Miele & Cie. Kg Haushaltgerät, insbesondere grifflose Geschirrspülmaschine
KR20120131789A (ko) * 2011-05-26 2012-12-05 삼성전기주식회사 관성센서
US8558330B2 (en) * 2011-10-31 2013-10-15 Taiwan Semiconductor Manufacturing Co., Ltd. Deep well process for MEMS pressure sensor
DE102012200929B4 (de) * 2012-01-23 2020-10-01 Robert Bosch Gmbh Mikromechanische Struktur und Verfahren zur Herstellung einer mikromechanischen Struktur
KR101299730B1 (ko) * 2012-05-31 2013-08-22 삼성전기주식회사 센서
KR101985936B1 (ko) * 2012-08-29 2019-06-05 에스케이하이닉스 주식회사 불휘발성 메모리 소자와 그 제조방법
KR101454123B1 (ko) * 2013-08-29 2014-10-22 삼성전기주식회사 가속도 센서
JP6212000B2 (ja) * 2014-07-02 2017-10-11 株式会社東芝 圧力センサ、並びに圧力センサを用いたマイクロフォン、血圧センサ、及びタッチパネル
JP2018179575A (ja) * 2017-04-05 2018-11-15 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
JP6420442B1 (ja) * 2017-10-16 2018-11-07 株式会社ワコー 発電素子
KR102505956B1 (ko) 2021-10-14 2023-03-03 국방과학연구소 가속도 센서
JP2024033901A (ja) * 2022-08-31 2024-03-13 セイコーエプソン株式会社 構造体、物理量センサー、慣性センサー及び構造体の製造方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4882933A (en) 1988-06-03 1989-11-28 Novasensor Accelerometer with integral bidirectional shock protection and controllable viscous damping
JPH0797644B2 (ja) 1988-09-19 1995-10-18 日産自動車株式会社 半導体加速度センサ及びその製造方法
DE69019343T2 (de) 1989-12-28 1996-02-15 Wako Kk Beschleunigungssensoren.
JP3043477B2 (ja) 1991-07-17 2000-05-22 和廣 岡田 静電容量の変化を利用したセンサ
JP3157030B2 (ja) 1992-01-31 2001-04-16 キヤノン株式会社 半導体基体とその作製方法
EP0553856B1 (de) 1992-01-31 2002-04-17 Canon Kabushiki Kaisha Verfahren zur Herstellung eines Halbleitersubstrats
JP2940293B2 (ja) 1992-03-31 1999-08-25 日産自動車株式会社 半導体加速度センサの製造方法
JPH05340957A (ja) 1992-06-08 1993-12-24 Fujikura Ltd 半導体センサの製造方法および半導体センサ
JP3265641B2 (ja) 1992-09-25 2002-03-11 松下電工株式会社 半導体加速度センサ
JP3391841B2 (ja) 1993-05-26 2003-03-31 松下電工株式会社 半導体加速度センサ
JPH0714382A (ja) 1993-06-15 1995-01-17 Mitsubishi Electric Corp マイクロコンピュータ
JPH0714382U (ja) * 1993-08-06 1995-03-10 住友精密工業株式会社 静電容量型加速度センサ
JP3427462B2 (ja) 1994-02-23 2003-07-14 松下電工株式会社 半導体加速度センサの製造方法
JP3424371B2 (ja) 1995-01-31 2003-07-07 松下電工株式会社 加速度センサの製造方法
JPH08236784A (ja) 1995-02-23 1996-09-13 Tokai Rika Co Ltd 加速度センサ及びその製造方法
JPH0945937A (ja) 1995-07-26 1997-02-14 Matsushita Electric Works Ltd ３軸加速度センサの製造方法
JPH09153626A (ja) 1995-11-30 1997-06-10 Matsushita Electric Works Ltd ３軸半導体加速度センサの製造方法

Also Published As

Publication number Publication date
US6293149B1 (en) 2001-09-25
CA2251957A1 (en) 1998-08-27
EP0899574A4 (de) 1999-06-16
EP0899574B1 (de) 2004-07-21
KR20000064964A (ko) 2000-11-06
KR100301097B1 (ko) 2001-09-22
WO1998037425A1 (fr) 1998-08-27
EP0899574A1 (de) 1999-03-03
AU4722097A (en) 1998-09-09
CA2251957C (en) 2003-07-01
DE69729941T2 (de) 2005-08-25

Similar Documents

Publication Publication Date Title
DE69729941D1 (de) Beschleunigungsmesselement sowie verfahren zu seiner herstellung
ATA75394A (de) Optochemischer sensor sowie verfahren zu seiner herstellung
DE69942382D1 (de) Sensor und verfahren zu dessen herstellung
DE69929311D1 (de) Oximanderivate und verfahren zu ihrer herstellung
DE69930254D1 (de) Mikroströmungstechnischer gebenstand und verfahren zu seiner herstellung
DE59914732D1 (de) Festelektrolyt-gassensor und verfahren zu dessen herstellung
DE69636166D1 (de) Klebstoffzusammensetzung und verfahren zu ihrer herstellung
DE69629283D1 (de) Ferroelektrischer dünnlagiger monomorpher verbundsensor und verfahren zu seiner herstellung
DE59701088D1 (de) Wand- oder bauelement und verfahren zu seiner herstellung
DE69611599D1 (de) Halbaromatische polyamidzusamensetzung und verfahren zu ihrer herstellung
DE69509312D1 (de) Beschleunigungsmesser sowie Verfahren zu seiner Herstellung
DE69938533D1 (de) Trägheitssensor und Verfahren zu seiner Herstellung
DE59800305D1 (de) Formteil und verfahren zu seiner herstellung
DE69632388D1 (de) Elektronisches gerät und verfahren zu seiner herstellung
DE59603734D1 (de) Integrales plattenförmiges bauteil und verfahren zu seiner herstellung
ATA155098A (de) Opto-chemischer sensor sowie verfahren zu seiner herstellung
DE69721749D1 (de) Eprosartandihydrat und ein verfahren zu seiner herstellung und formulierung
DE69941258D1 (de) Polyisocyanat und verfahren zu seiner herstellung
DE59814132D1 (de) Alpha 1-antitrypsin-präparation sowie verfahren zu deren herstellung
DE69805624D1 (de) Elastomeres copolymer und verfahren zu seiner herstellung
DE59803518D1 (de) Miniaturisiertes optisches bauelement sowie verfahren zu seiner herstellung
DE69824417D1 (de) Aerosol-ventil und verfahren zu seiner herstellung
DE69625492D1 (de) Anorganisch-organischer verbundschaumstoff und verfahren zu seiner herstellung
DE69833756D1 (de) Elektronisches bauelement und verfahren zu seiner herstellung
EP1054607A4 (de) Mikrohaftverschluss und verfahren zu dessen herstellung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition