DE69623700D1 - Turbomolekularpumpe - Google Patents

Turbomolekularpumpe

Info

Publication number: DE69623700D1
Authority: DE; Germany
Prior art keywords: molecular pump; turbo molecular; turbo; pump; molecular
Prior art date: 1995-06-30
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE69623700T

Other languages

English (en)

Other versions

DE69623700T2 (de

Inventor

Jean-Claude Broisin

Olivier Dauvillier

Denis Perrillat-Amede

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Alcatel Lucent SAS

Original Assignee

Alcatel SA

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1995-06-30

Filing date

1996-06-24

Publication date

2002-10-24

1996-06-24 Application filed by Alcatel SA filed Critical Alcatel SA

2002-10-24 Publication of DE69623700D1 publication Critical patent/DE69623700D1/de

2003-07-31 Application granted granted Critical

2003-07-31 Publication of DE69623700T2 publication Critical patent/DE69623700T2/de

2016-06-25 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)

DE69623700T 1995-06-30 1996-06-24 Turbomolekularpumpe Expired - Lifetime DE69623700T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
FR9507922A FR2736103B1 (fr)	1995-06-30	1995-06-30	Pompe turbomoleculaire

Publications (2)

Publication Number	Publication Date
DE69623700D1 true DE69623700D1 (de)	2002-10-24
DE69623700T2 DE69623700T2 (de)	2003-07-31

Family

ID=9480585

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69623700T Expired - Lifetime DE69623700T2 (de)	1995-06-30	1996-06-24	Turbomolekularpumpe

Country Status (5)

Country	Link
US (1)	US5722819A (de)
EP (1)	EP0751297B1 (de)
JP (1)	JP3766138B2 (de)
DE (1)	DE69623700T2 (de)
FR (1)	FR2736103B1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE19901340B4 (de) *	1998-05-26	2016-03-24	Leybold Vakuum Gmbh	Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art
JP4520636B2 (ja) *	1998-05-26	2010-08-11	ライボルトヴァークウムゲゼルシャフトミットベシュレンクテルハフツング	シャシ、ロータ及びケーシングを有する摩擦真空ポンプ並びにこの形式の摩擦真空ポンプを備えた装置
JP3013083B2 (ja)	1998-06-23	2000-02-28	セイコー精機株式会社	ターボ分子ポンプ
DE19951954A1 (de) *	1999-10-28	2001-05-03	Pfeiffer Vacuum Gmbh	Turbomolekularpumpe
DE19956015A1 (de) *	1999-11-22	2001-05-23	Pfeiffer Vacuum Gmbh	Turbomolekularpumpe
DE102006020710A1 (de)	2006-05-04	2007-11-08	Pfeiffer Vacuum Gmbh	Vakuumpumpe mit Gehäuse
DE102007027354A1 (de) *	2007-06-11	2008-12-18	Oerlikon Leybold Vacuum Gmbh	Turbomolekularpumpe
GB2568066A (en) *	2017-11-02	2019-05-08	Edwards Ltd	Stator blade unit for a turbomolecular pump

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE2218615A1 (de) *	1972-04-18	1973-10-31	Leybold Heraeus Gmbh & Co Kg	Turbomolekularpumpe mit rotor und stator
FR2224009A5 (de) *	1973-03-30	1974-10-25	Cit Alcatel
EP0129709A3 (de) *	1983-04-26	1985-03-06	Anelva Corporation	Kombinierte, leicht zu reinigende Molekularpumpe
FR2611819B1 (fr) *	1987-02-25	1989-05-05	Cit Alcatel	Pompe a vide, rotative
JPH01190990A (ja) *	1988-01-26	1989-08-01	Osaka Shinku Kiki Seisakusho:Kk	真空ポンプ
CH674785A5 (en) *	1988-03-07	1990-07-13	Dino Systems Limited	Pumping unit for atomic or molecular beams - uses stacked hexagonal blocks with transverse walls between and molecular pumps set in transverse holes in block walls
US5501583A (en) *	1992-08-19	1996-03-26	Hitachi, Ltd.	Turbo vacuum pump
EP0603694A1 (de) *	1992-12-24	1994-06-29	BALZERS-PFEIFFER GmbH	Vakuumpumpsystem
JPH0783189A (ja) *	1993-09-17	1995-03-28	Hitachi Ltd	ターボ真空ポンプ
JPH0886298A (ja) *	1994-09-19	1996-04-02	Hitachi Ltd	ドライターボ真空ポンプ

1995
- 1995-06-30 FR FR9507922A patent/FR2736103B1/fr not_active Expired - Fee Related
1996
- 1996-06-24 EP EP96401388A patent/EP0751297B1/de not_active Expired - Lifetime
- 1996-06-24 DE DE69623700T patent/DE69623700T2/de not_active Expired - Lifetime
- 1996-06-27 US US08/671,555 patent/US5722819A/en not_active Expired - Lifetime
- 1996-06-28 JP JP16961196A patent/JP3766138B2/ja not_active Expired - Fee Related

Also Published As

Publication number	Publication date
DE69623700T2 (de)	2003-07-31
FR2736103B1 (fr)	1997-08-08
EP0751297B1 (de)	2002-09-18
EP0751297A1 (de)	1997-01-02
FR2736103A1 (fr)	1997-01-03
JPH0914185A (ja)	1997-01-14
US5722819A (en)	1998-03-03
JP3766138B2 (ja)	2006-04-12

Publication	Publication Date	Title
DE69827553D1 (de)	2004-12-23	Turbomolekularpumpe
DE69736213D1 (de)	2006-08-03	Turboblutpumpe
EP0967394A4 (de)	2003-01-29	Turbomolekularpumpe
DE69928866D1 (de)	2006-01-19	Turbomolekularpumpe
DE69625401D1 (de)	2003-01-30	Vakuumpumpe
DE69600306D1 (de)	1998-06-25	Turbomolekularpumpe
DE69609666D1 (de)	2000-09-14	Kreiselpumpe
DE59707441D1 (de)	2002-07-11	Förderpumpe
DE69628517D1 (de)	2003-07-10	Kraftstoffpumpe
DE19681677T1 (de)	1998-10-29	Kreiselpumpe
BR9602890A (pt)	1998-04-28	Compressor de voluta
FR2735535B1 (fr)	1997-07-11	Pompe turbomoleculaire
DE69822730D1 (de)	2004-05-06	Turbomolekularpumpe
DE69624240D1 (de)	2002-11-14	Brennstoffpumpe
DE69409555D1 (de)	1998-05-20	Turbomolekularpumpe
DE59508322D1 (de)	2000-06-15	Pumpenlaufrad
DE69823933D1 (de)	2004-06-24	Turbomolekularpumpe
DE69623700D1 (de)	2002-10-24	Turbomolekularpumpe
DE69910475D1 (de)	2003-09-25	Turbomolekularpumpe
DE69823932D1 (de)	2004-06-24	Turbomolekularpumpe
DE19681665T1 (de)	1998-12-17	Flügelpumpe
DE59604148D1 (de)	2000-02-17	Kreiselpumpe
DE59608719D1 (de)	2002-03-21	Vakuumpumpe
EP0913577A4 (de)	1999-10-20	Pumpe-turbine system
KR970041760U (ko)	1997-07-29	베인펌프

Legal Events

Date	Code	Title	Description
2003-10-16	8364	No opposition during term of opposition
2007-06-06	8327	Change in the person/name/address of the patent owner	Owner name: ALCATEL LUCENT, PARIS, FR