DE69605614D1 - Durchflussregler - Google Patents

Durchflussregler

Info

Publication number: DE69605614D1
Authority: DE; Germany
Prior art keywords: flow controller; controller; flow
Prior art date: 1995-07-24
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE69605614T

Other languages

English (en)

Other versions

DE69605614T2 (de

Inventor

Tsutomu Shinohara

Nobukazu Ikeda

Kazuhiro Yoshikawa

Tetsuya Kojima

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Fujikin Inc

Original Assignee

Fujikin Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1995-07-24

Filing date

1996-07-17

Publication date

2000-01-20

1996-07-17 Application filed by Fujikin Inc filed Critical Fujikin Inc

2000-01-20 Application granted granted Critical

2000-01-20 Publication of DE69605614D1 publication Critical patent/DE69605614D1/de

2000-06-08 Publication of DE69605614T2 publication Critical patent/DE69605614T2/de

2016-07-18 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K25/00—Details relating to contact between valve members and seats
- F16K25/005—Particular materials for seats or closure elements
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K41/00—Spindle sealings
- F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K41/00—Spindle sealings
- F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
- F16K41/12—Spindle sealings with diaphragm, e.g. shaped as bellows or tube with approximately flat diaphragm

Landscapes

Engineering & Computer Science (AREA)
General Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Physics & Mathematics (AREA)
Fluid Mechanics (AREA)
Lift Valve (AREA)
Sliding Valves (AREA)

DE69605614T 1995-07-24 1996-07-17 Durchflussregler Expired - Fee Related DE69605614T2 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP18738295A JP3472650B2 (ja)	1995-07-24	1995-07-24	流体制御器

Publications (2)

Publication Number	Publication Date
DE69605614D1 true DE69605614D1 (de)	2000-01-20
DE69605614T2 DE69605614T2 (de)	2000-06-08

Family

ID=16205040

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE69605614T Expired - Fee Related DE69605614T2 (de)	1995-07-24	1996-07-17	Durchflussregler

Country Status (8)

Country	Link
US (1)	US5678803A (de)
EP (1)	EP0756117B1 (de)
JP (1)	JP3472650B2 (de)
KR (1)	KR0173536B1 (de)
CA (1)	CA2181532C (de)
DE (1)	DE69605614T2 (de)
IL (1)	IL118931A (de)
TW (1)	TW349155B (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH08334280A (ja) *	1995-04-07	1996-12-17	Fuji Koki Seisakusho:Kk	膨張弁及び冷凍システム
JP3343313B2 (ja) *	1995-06-30	2002-11-11	株式会社フジキン	ダイヤフラム弁
FR2759760B1 (fr) *	1997-02-17	1999-05-21	Asm France Sa	Vanne a membrane
US7013916B1 (en)	1997-11-14	2006-03-21	Air Products And Chemicals, Inc.	Sub-atmospheric gas delivery method and apparatus
JP4389186B2 (ja) *	1998-02-23	2009-12-24	忠弘大見	ガスケットおよび管継手
JP3924386B2 (ja) *	1998-12-28	2007-06-06	日本エム・ケー・エス株式会社	流量制御システム
KR100448701B1 (ko) *	2001-04-12	2004-09-16	삼성전자주식회사	에어밸브
DE10153362B4 (de) *	2001-10-29	2005-04-28	Gaida Gregor	Membranventil
JP2004092824A (ja) *	2002-09-02	2004-03-25	Fujikin Inc	流体制御器
JP2006523810A (ja) *	2003-04-14	2006-10-19	スワゲロックカンパニー	ダイヤフラムバルブシート
US7150299B2 (en)	2003-09-12	2006-12-19	Air Products And Chemicals, Inc.	Assembly and method for containing, receiving and storing fluids and for dispensing gas from a fluid control and gas delivery assembly having an integrated fluid flow restrictor
US20060011883A1 (en) *	2004-07-16	2006-01-19	Martin Richard L	Threaded polymer valve seat and valve employing same
US7617955B2 (en) *	2004-10-28	2009-11-17	Nordson Corporation	Method and system for dispensing liquid from a module having a flexible bellows seal
US9046192B2 (en) *	2007-01-31	2015-06-02	The Charles Stark Draper Laboratory, Inc.	Membrane-based fluid control in microfluidic devices
WO2009012479A1 (en) *	2007-07-19	2009-01-22	Swagelok Company	Coated seals
US8708308B2 (en) *	2009-08-05	2014-04-29	Itt Manufacturing Enterprises, Inc.	Sealing arrangement for a diaphragm valve
US8333307B2 (en) *	2009-10-06	2012-12-18	Nordson Corporation	Liquid dispensing module
DK201070264A (en) *	2010-06-15	2011-12-16	Alfa Laval Corp Ab	Self sealing bonnet
JP5753352B2 (ja) *	2010-07-20	2015-07-22	株式会社Ｓｃｒｅｅｎホールディングス	ダイヤフラムバルブおよびこれを備えた基板処理装置
EP2466076A1 (de) *	2010-12-20	2012-06-20	Alstom Technology Ltd	Hochtemperaturdampfventil
US9377114B2 (en) *	2012-04-25	2016-06-28	Nordson Corporation	Pressure control valve for reactive adhesives
US9454158B2 (en)	2013-03-15	2016-09-27	Bhushan Somani	Real time diagnostics for flow controller systems and methods
WO2015002855A1 (en) *	2013-07-03	2015-01-08	Swagelok Company	Heated fluid delivery with thermal management
JP5891536B2 (ja)	2013-11-11	2016-03-23	Smc株式会社	弁装置
KR20170064222A (ko) *	2015-12-01	2017-06-09	티에스케이 주식회사	벨로우즈형 스팀 트랩
US10983538B2 (en)	2017-02-27	2021-04-20	Flow Devices And Systems Inc.	Systems and methods for flow sensor back pressure adjustment for mass flow controller
DE102020120439A1 (de) *	2020-08-03	2022-02-03	Focke & Co. (Gmbh & Co. Kg)	Ventil für fließfähige Medien
US11655912B2 (en) *	2021-01-14	2023-05-23	Hitachi Metals, Ltd.	Bellows diaphragm assembly
CN115451147B (zh) *	2022-09-07	2024-11-12	扬州荣晟安阀门有限公司	一种密封性好的阀门

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB670249A (en) *	1948-09-22	1952-04-16	Electro Hydraulics Ltd	Improvements in or relating to valves
DE1080312B (de) *	1956-02-21	1960-04-21	Thompson Prod Inc	Verwendung einer Nickel-Chrom-Legierung als Werkstoff fuer gegossene Ventilsitzringe
US4754950A (en) *	1984-10-30	1988-07-05	Kabushiki Kaisha Toshiba	Valve
JPS62150014A (ja) *	1985-12-25	1987-07-04	Toyota Motor Corp	アルミニウム合金製バルブシ−トレスシリンダヘツド
JPS63115970A (ja) *	1986-10-31	1988-05-20	Motoyama Seisakusho:Kk	ダイヤフラム弁
JPS63285373A (ja) *	1988-04-13	1988-11-22	Hitachi Metals Ltd	ダイヤフラムシール弁
JPH03158445A (ja) *	1989-11-16	1991-07-08	Mitsubishi Materials Corp	耐摩耗性に優れたＦｅ基焼結合金製バルブシート
US4995589A (en) *	1990-01-29	1991-02-26	Sequioa Controls Company, Ltd.	Bellows valve
JP3106366B2 (ja) *	1991-02-26	2000-11-06	清原まさ子	流体制御器
US5295662A (en) *	1991-08-26	1994-03-22	Masako Kiyohara	Fluid flow-controller with improved diaphragm

1995
- 1995-07-24 JP JP18738295A patent/JP3472650B2/ja not_active Expired - Lifetime
1996
- 1996-07-17 EP EP96305251A patent/EP0756117B1/de not_active Expired - Lifetime
- 1996-07-17 DE DE69605614T patent/DE69605614T2/de not_active Expired - Fee Related
- 1996-07-18 CA CA002181532A patent/CA2181532C/en not_active Expired - Fee Related
- 1996-07-20 TW TW085108866A patent/TW349155B/zh not_active IP Right Cessation
- 1996-07-22 US US08/684,695 patent/US5678803A/en not_active Expired - Lifetime
- 1996-07-23 KR KR1019960029725A patent/KR0173536B1/ko not_active IP Right Cessation
- 1996-07-24 IL IL11893196A patent/IL118931A/xx not_active IP Right Cessation

Also Published As

Publication number	Publication date
CA2181532A1 (en)	1997-01-25
TW349155B (en)	1999-01-01
EP0756117B1 (de)	1999-12-15
JP3472650B2 (ja)	2003-12-02
KR0173536B1 (ko)	1999-04-01
DE69605614T2 (de)	2000-06-08
KR970007025A (ko)	1997-02-21
IL118931A0 (en)	1996-10-31
IL118931A (en)	1999-08-17
US5678803A (en)	1997-10-21
JPH0942491A (ja)	1997-02-14
CA2181532C (en)	2000-01-11
EP0756117A1 (de)	1997-01-29

Publication	Publication Date	Title
DE69517447D1 (de)	2000-07-13	Durchflussregler
DE69605614D1 (de)	2000-01-20	Durchflussregler
DE69621192D1 (de)	2002-06-20	Durchflussregler
DE69614585D1 (de)	2001-09-27	Durchflussregelvorrichtung
DE69635808D1 (de)	2006-04-20	Durchflusssteuervorrichtung
DE69629092D1 (de)	2003-08-21	Beatmungsgerät
DE69823271D1 (de)	2004-05-27	Verbesserter adaptiver Durchflussregler
DK0807036T3 (da)	2002-09-23	Ventilkonnektor
DE59602156D1 (de)	1999-07-15	Bediengerät
DE59608475D1 (de)	2002-01-31	Fluidisches Steuerelement
DE69609017D1 (de)	2000-08-03	Fluid-Regeleinrichtung
BR9601163A (pt)	1998-01-06	Válvula
DE69606558D1 (de)	2000-03-09	Am umfang angetriebene durchflusszentrifuge
DE69504250D1 (de)	1998-10-01	Kältemittelströmungsregler
DE69819099D1 (de)	2003-11-27	Durchflussregler
EP0729699A3 (de)	1996-12-11	Pulsationssteuerung
DE59601303D1 (de)	1999-03-25	Steuergerät
FI970878L (fi)	1997-03-03	Virtauksenohjauslaite
BR9601068A (pt)	1998-01-06	Válvula
DE69615099D1 (de)	2001-10-18	Durchfluss-Regeleinrichtung
DE69604130D1 (de)	1999-10-14	Hydraulik-Durchflussregler
IT1314685B1 (it)	2002-12-31	Controllore di flusso
DE69607403D1 (de)	2000-05-04	Durchflussregelvorrichtung
BR9408615A (pt)	1997-09-16	Controlador de fluxo de poténcia
FI980835A0 (fi)	1998-04-14	Venttiili

Legal Events

Date	Code	Title	Description
2001-01-04	8364	No opposition during term of opposition
2010-05-20	8339	Ceased/non-payment of the annual fee