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DE69602867D1 - Vorrichtung und Verfahren zum Herstellen von Drahtelektroden zum funkenerosiven Schneiden - Google Patents

Vorrichtung und Verfahren zum Herstellen von Drahtelektroden zum funkenerosiven Schneiden

Info

Publication number
DE69602867D1
DE69602867D1 DE69602867T DE69602867T DE69602867D1 DE 69602867 D1 DE69602867 D1 DE 69602867D1 DE 69602867 T DE69602867 T DE 69602867T DE 69602867 T DE69602867 T DE 69602867T DE 69602867 D1 DE69602867 D1 DE 69602867D1
Authority
DE
Germany
Prior art keywords
furnace
wire
airtight
degrees
passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69602867T
Other languages
English (en)
Other versions
DE69602867T2 (de
Inventor
Louis Lacourcelle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thermocompact SA
Original Assignee
Thermocompact SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thermocompact SA filed Critical Thermocompact SA
Application granted granted Critical
Publication of DE69602867D1 publication Critical patent/DE69602867D1/de
Publication of DE69602867T2 publication Critical patent/DE69602867T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • C23C14/5806Thermal treatment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23HWORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H7/00Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
    • B23H7/02Wire-cutting
    • B23H7/08Wire electrodes
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/16Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54Controlling or regulating the coating process
    • C23C14/541Heating or cooling of the substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • C23C14/5886Mechanical treatment
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • C23C14/5893Mixing of deposited material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Electrochemistry (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Coating With Molten Metal (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
DE69602867T 1995-03-27 1996-03-20 Vorrichtung und Verfahren zum Herstellen von Drahtelektroden zum funkenerosiven Schneiden Expired - Fee Related DE69602867T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9503756A FR2732251B1 (fr) 1995-03-27 1995-03-27 Procede et dispositif pour la fabrication de fil electrode pour etincelage erosif, et fil ainsi obtenu

Publications (2)

Publication Number Publication Date
DE69602867D1 true DE69602867D1 (de) 1999-07-22
DE69602867T2 DE69602867T2 (de) 2000-01-20

Family

ID=9477584

Family Applications (2)

Application Number Title Priority Date Filing Date
DE0734805T Pending DE734805T1 (de) 1995-03-27 1996-03-20 Vorrichtung und Verfahren zum Herstellen von Drahtelektroden zum funkenerosiven Schneiden sowie danach hergestellten Draht
DE69602867T Expired - Fee Related DE69602867T2 (de) 1995-03-27 1996-03-20 Vorrichtung und Verfahren zum Herstellen von Drahtelektroden zum funkenerosiven Schneiden

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE0734805T Pending DE734805T1 (de) 1995-03-27 1996-03-20 Vorrichtung und Verfahren zum Herstellen von Drahtelektroden zum funkenerosiven Schneiden sowie danach hergestellten Draht

Country Status (6)

Country Link
US (1) US5721414A (de)
EP (1) EP0734805B1 (de)
AT (1) ATE181267T1 (de)
DE (2) DE734805T1 (de)
ES (1) ES2135194T3 (de)
FR (1) FR2732251B1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH690440A5 (fr) * 1995-12-11 2000-09-15 Charmilles Technologies Procédé et dispositif de fabrication de fils ayant une surface en laiton, pour les besoins de l'électro-érosion à fil.
JP3248457B2 (ja) 1996-12-26 2002-01-21 住友電気工業株式会社 ワイヤ放電加工用電極線の製造方法
FR2778489B1 (fr) * 1998-05-07 2006-05-12 Thermocompact Sa Procede et dispositif pour la fabrication d'un fil electrode pour electroerosion
GB9911680D0 (en) * 1999-05-19 1999-07-21 Oxford Instr Uk Ltd Superconducting coils
FR2833875B1 (fr) * 2001-12-21 2004-07-02 Thermocompact Sa Fil pour electroerosion a grande vitesse d'usinage
PL2172295T3 (pl) * 2008-10-01 2012-11-30 Berkenhoff Gmbh Elektroda drutowa do cięcia metodą obróbki elektroerozyjnej
EP2193867B2 (de) 2008-12-03 2022-12-21 Berkenhoff GmbH Verfahren zur Herstellung einer Drahtelektrode zum funkenerosiven Schneiden.
CN104046963B (zh) * 2014-06-08 2016-08-24 电子科技大学 薄膜沉积制备装置和方法
TW201545828A (zh) * 2014-06-10 2015-12-16 Ya-Yang Yan 一種放電加工切割線及該放電加工切割線之製造方法
JP6905106B1 (ja) 2020-01-30 2021-07-21 株式会社ソディック 熱処理炉、加熱装置、ワイヤ電極の製造方法および熱拡散処理方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3313269A (en) * 1964-08-11 1967-04-11 Ralph L Hough Vapor plating apparatus
IT1041482B (it) * 1975-08-04 1980-01-10 Smi Metallurg Procedimento per la ricottura di leghe di rame in particolare di ottone
GB2015909B (en) * 1978-03-03 1982-12-01 Charmilles Sa Ateliers Electrode for spark erosion machining
JPS54141490A (en) * 1978-04-27 1979-11-02 Mitsubishi Electric Corp Wire-cut electric discharge machining method and device
US4977303A (en) * 1984-08-28 1990-12-11 Charmilles Technologie S.A. Zinc or cadmium coated, surface oxidized electrode wire for EDM cutting of a workpiece; and method for forming such a wire
US4595600A (en) * 1984-11-13 1986-06-17 Fl Industries, Inc. Metal cladding of wire by atomization spraying
US4686153A (en) * 1984-12-08 1987-08-11 Fujikura Ltd. Electrode wire for use in electric discharge machining and process for preparing same
JPS6318072A (ja) * 1986-07-08 1988-01-25 Furukawa Electric Co Ltd:The ワイヤ放電加工用黄銅電極線の製造方法
ES2033916T3 (es) * 1987-10-23 1993-04-01 Berkenhoff Gmbh Electrodo erosivo, esencialmente electrodo de alambre para la mecanizacion electrica-erosiva.
ATE70480T1 (de) * 1988-03-26 1992-01-15 Berkenhoff Gmbh Drahtelektrode zum funkenerosiven schneiden.
JPH0755407B2 (ja) * 1992-12-18 1995-06-14 株式会社フジクラ ワイヤ放電加工用電極線の製造方法
JPH07108488B2 (ja) * 1992-12-18 1995-11-22 株式会社フジクラ ワイヤ放電加工用電極線の製造方法

Also Published As

Publication number Publication date
FR2732251B1 (fr) 1997-05-30
US5721414A (en) 1998-02-24
ES2135194T3 (es) 1999-10-16
FR2732251A1 (fr) 1996-10-04
DE734805T1 (de) 1997-04-30
DE69602867T2 (de) 2000-01-20
EP0734805B1 (de) 1999-06-16
EP0734805A1 (de) 1996-10-02
ATE181267T1 (de) 1999-07-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee