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DE69530716D1 - Beschleunigungssensor und Verfahren zu seiner Herstellung - Google Patents

Beschleunigungssensor und Verfahren zu seiner Herstellung

Info

Publication number
DE69530716D1
DE69530716D1 DE69530716T DE69530716T DE69530716D1 DE 69530716 D1 DE69530716 D1 DE 69530716D1 DE 69530716 T DE69530716 T DE 69530716T DE 69530716 T DE69530716 T DE 69530716T DE 69530716 D1 DE69530716 D1 DE 69530716D1
Authority
DE
Germany
Prior art keywords
accelerometer
making
same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69530716T
Other languages
English (en)
Other versions
DE69530716T2 (de
Inventor
Hirofumi Uenoyama
Kenichi Ao
Masakazu Kanosue
Yasutoshi Suzuki
Yukihiro Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Application granted granted Critical
Publication of DE69530716D1 publication Critical patent/DE69530716D1/de
Publication of DE69530716T2 publication Critical patent/DE69530716T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S73/00—Measuring and testing
    • Y10S73/01—Vibration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
DE69530716T 1994-03-07 1995-03-07 Beschleunigungssensor und Verfahren zu seiner Herstellung Expired - Lifetime DE69530716T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP3614094 1994-03-07
JP3614094 1994-03-07
JP24439794A JP3435844B2 (ja) 1994-03-07 1994-10-07 半導体加速度センサ及びその製造方法
JP24439794 1994-10-07

Publications (2)

Publication Number Publication Date
DE69530716D1 true DE69530716D1 (de) 2003-06-18
DE69530716T2 DE69530716T2 (de) 2004-03-18

Family

ID=26375187

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69530716T Expired - Lifetime DE69530716T2 (de) 1994-03-07 1995-03-07 Beschleunigungssensor und Verfahren zu seiner Herstellung

Country Status (4)

Country Link
US (1) US5619050A (de)
EP (1) EP0671629B1 (de)
JP (1) JP3435844B2 (de)
DE (1) DE69530716T2 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3435850B2 (ja) * 1994-10-28 2003-08-11 株式会社デンソー 半導体力学量センサ及びその製造方法
US5578224A (en) * 1995-06-07 1996-11-26 Analog Devices, Inc. Method of making micromachined device with ground plane under sensor
US5922212A (en) * 1995-06-08 1999-07-13 Nippondenso Co., Ltd Semiconductor sensor having suspended thin-film structure and method for fabricating thin-film structure body
US5808331A (en) * 1995-09-05 1998-09-15 Motorola, Inc. Monolithic semiconductor device having a microstructure and a transistor
US5818093A (en) * 1996-01-25 1998-10-06 Motorola, Inc. Semiconductor device having a movable gate
KR100573709B1 (ko) * 1996-04-26 2006-09-11 더 니뽄 시그널 컴파니, 리미티드 전자엑츄에이터및그제조방법
JP3198922B2 (ja) * 1996-07-03 2001-08-13 株式会社村田製作所 静電容量型センサの製造方法
US6448624B1 (en) * 1996-08-09 2002-09-10 Denso Corporation Semiconductor acceleration sensor
US6220096B1 (en) * 1997-03-20 2001-04-24 Interscience, Inc. Differential wideband vibration
US5929472A (en) * 1997-04-07 1999-07-27 Motorola, Inc. Semiconductor floating gate sensor device
JP3555388B2 (ja) * 1997-06-30 2004-08-18 株式会社デンソー 半導体ヨーレートセンサ
US5903038A (en) * 1997-06-30 1999-05-11 Motorola, Inc. Semiconductor sensing device and method for fabricating the same
JPH1194863A (ja) * 1997-09-12 1999-04-09 Nikon Corp カンチレバー及びその製造方法
US6720634B2 (en) * 2002-01-07 2004-04-13 Honeywell International Inc. Contactless acceleration switch
CN100371718C (zh) * 2003-07-10 2008-02-27 友达光电股份有限公司 电容式加速传感器
JP2008132583A (ja) * 2006-10-24 2008-06-12 Seiko Epson Corp Ｍｅｍｓデバイス
JP2009145321A (ja) * 2007-11-19 2009-07-02 Hitachi Ltd 慣性センサ
JP5417737B2 (ja) * 2008-04-23 2014-02-19 パナソニック株式会社 慣性力センサ
JP2011047732A (ja) * 2009-08-26 2011-03-10 Seiko Epson Corp Ｍｅｍｓセンサー、ｍｅｍｓセンサーの製造方法および電子機器
JP2011075543A (ja) * 2009-09-07 2011-04-14 Seiko Epson Corp 物理量センサー、物理量センサーの製造方法、および電子機器
JP2011128132A (ja) * 2009-11-19 2011-06-30 Seiko Epson Corp 物理量センサー、物理量センサーの製造方法、および電子機器
JPWO2011065250A1 (ja) * 2009-11-25 2013-04-11 アルプス電気株式会社 フォースセンサ
DE102010012607B4 (de) * 2010-03-24 2012-01-26 Eads Deutschland Gmbh HF-MEMS-Schalter
US20120146452A1 (en) * 2010-12-10 2012-06-14 Miradia, Inc. Microelectromechanical system device and semi-manufacture and manufacturing method thereof

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6055655A (ja) * 1983-09-07 1985-03-30 Nissan Motor Co Ltd 梁構造体を有する半導体装置
FR2578323B1 (fr) * 1985-03-01 1987-11-20 Metravib Sa Capteur integre de grandeurs mecaniques a effet capacitif et procede de fabrication.
JPS61212052A (ja) * 1985-03-18 1986-09-20 Nissan Motor Co Ltd 梁構造体を有する半導体装置
US4674319A (en) * 1985-03-20 1987-06-23 The Regents Of The University Of California Integrated circuit sensor
US5343064A (en) * 1988-03-18 1994-08-30 Spangler Leland J Fully integrated single-crystal silicon-on-insulator process, sensors and circuits
DE3814952A1 (de) * 1988-05-03 1989-11-23 Bosch Gmbh Robert Sensor
US5101669A (en) * 1988-07-14 1992-04-07 University Of Hawaii Multidimensional force sensor
US4930043A (en) * 1989-02-28 1990-05-29 United Technologies Closed-loop capacitive accelerometer with spring constraint
US5126812A (en) * 1990-02-14 1992-06-30 The Charles Stark Draper Laboratory, Inc. Monolithic micromechanical accelerometer
JPH0425764A (ja) * 1990-05-21 1992-01-29 Nec Corp 半導体加速度センサ
US5326726A (en) * 1990-08-17 1994-07-05 Analog Devices, Inc. Method for fabricating monolithic chip containing integrated circuitry and suspended microstructure
DE69113632T2 (de) * 1990-08-17 1996-03-21 Analog Devices Inc Monolithischer beschleunigungsmesser.
US5075641A (en) * 1990-12-04 1991-12-24 Iowa State University Research Foundation, Inc. High frequency oscillator comprising cointegrated thin film resonator and active device
FR2687778B1 (fr) * 1992-02-20 1994-05-20 Sextant Avionique Micro-capteur capacitif a capacite parasite reduite et procede de fabrication.
ATE150873T1 (de) * 1992-06-17 1997-04-15 Analog Devices Inc Verfahren zur herstellung eines eine integrierte halbleiterschaltung und eine selbsttragende mikrostruktur enthaltenden monolithischen chip

Also Published As

Publication number Publication date
JP3435844B2 (ja) 2003-08-11
EP0671629B1 (de) 2003-05-14
DE69530716T2 (de) 2004-03-18
JPH07301640A (ja) 1995-11-14
EP0671629A2 (de) 1995-09-13
US5619050A (en) 1997-04-08
EP0671629A3 (de) 1999-06-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition