[go: up one dir, main page]

DE69410900D1 - Verfahren und Vorrichtung zur Überwachung von Oberflächen-Laserreinigung - Google Patents

Verfahren und Vorrichtung zur Überwachung von Oberflächen-Laserreinigung

Info

Publication number
DE69410900D1
DE69410900D1 DE69410900T DE69410900T DE69410900D1 DE 69410900 D1 DE69410900 D1 DE 69410900D1 DE 69410900 T DE69410900 T DE 69410900T DE 69410900 T DE69410900 T DE 69410900T DE 69410900 D1 DE69410900 D1 DE 69410900D1
Authority
DE
Germany
Prior art keywords
laser cleaning
surface laser
monitoring surface
monitoring
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69410900T
Other languages
English (en)
Other versions
DE69410900T2 (de
Inventor
Daniel Blin
Isabelle Peyrot
Wladimir Marine
Marc Sentis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Onet SA
Original Assignee
Onet SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Onet SA filed Critical Onet SA
Publication of DE69410900D1 publication Critical patent/DE69410900D1/de
Application granted granted Critical
Publication of DE69410900T2 publication Critical patent/DE69410900T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/123—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462—Nozzles; Features related to nozzles
    • B23K26/1464—Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
    • B23K26/1476—Features inside the nozzle for feeding the fluid stream through the nozzle
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21F—PROTECTION AGAINST X-RADIATION, GAMMA RADIATION, CORPUSCULAR RADIATION OR PARTICLE BOMBARDMENT; TREATING RADIOACTIVELY CONTAMINATED MATERIAL; DECONTAMINATION ARRANGEMENTS THEREFOR
    • G21F9/00—Treating radioactively contaminated material; Decontamination arrangements therefor
    • G21F9/001—Decontamination of contaminated objects, apparatus, clothes, food; Preventing contamination thereof
    • G21F9/005—Decontamination of the surface of objects by ablation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Food Science & Technology (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Cleaning In General (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Laser Beam Processing (AREA)
DE1994610900 1993-08-12 1994-08-12 Verfahren und Vorrichtung zur Überwachung von Oberflächen-Laserreinigung Expired - Fee Related DE69410900T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9310094A FR2708877B1 (fr) 1993-08-12 1993-08-12 Procédé et dispositif de décontamination autocontrôlé de surfaces par laser.

Publications (2)

Publication Number Publication Date
DE69410900D1 true DE69410900D1 (de) 1998-07-16
DE69410900T2 DE69410900T2 (de) 1999-02-11

Family

ID=9450291

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1994610900 Expired - Fee Related DE69410900T2 (de) 1993-08-12 1994-08-12 Verfahren und Vorrichtung zur Überwachung von Oberflächen-Laserreinigung

Country Status (4)

Country Link
EP (1) EP0642846B1 (de)
DE (1) DE69410900T2 (de)
ES (1) ES2117236T3 (de)
FR (1) FR2708877B1 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9412238D0 (en) * 1994-06-17 1994-08-10 British Nuclear Fuels Plc Removing contamination
US5780806A (en) * 1995-07-25 1998-07-14 Lockheed Idaho Technologies Company Laser ablation system, and method of decontaminating surfaces
JP3044188B2 (ja) * 1996-02-15 2000-05-22 核燃料サイクル開発機構 レーザー除染法
WO1997048536A1 (en) * 1996-06-19 1997-12-24 British Nuclear Fuels Plc Grout or mortar removal by laser
FR2752386B1 (fr) * 1996-08-14 1998-09-11 Commissariat Energie Atomique Procede de nettoyage ou de decontamination d'un objet au moyen d'un faisceau laser ultraviolet et dispositif pour sa mise en oeuvre
FR2772650B1 (fr) * 1997-12-23 2000-07-28 Roquefeuil Hugues De Procede de nettoyage photonique et dispositif convenant a sa mise en oeuvre.
DE19830072A1 (de) * 1998-07-04 2000-01-05 Laser & Med Tech Gmbh Verfahren und Vorrichtung zum photoablativen Reinigen von Kunststoffpreß- und spritzformen
DE10210518A1 (de) * 2002-03-09 2003-10-02 Mtu Aero Engines Gmbh Verfahren zur Entschichtung von Triebwerksbauteilen und Vorrichtung zur Durchführung des Verfahrens
GB0222341D0 (en) * 2002-09-26 2002-11-06 British Nuclear Fuels Plc Surface treatment of concrete
FR2879101B1 (fr) * 2004-12-14 2007-03-02 Cogema Decontamination laser de la surface d'une piece profilee.
FR2887161B1 (fr) * 2005-06-20 2007-09-07 Commissariat Energie Atomique Procede et dispositif d'ablation laser d'une couche superficielle d'une paroi, telle q'un revetement de peinture dans une installation nucleaire
FR2894711B1 (fr) 2005-12-09 2009-04-10 Cogema Dispositif et procede de decontamination automatisee d'un crayon de combustible nucleaire
DE102007020748A1 (de) 2007-05-03 2008-11-13 Clean-Lasersysteme Gmbh Vorrichtung und Verfahren zum Bearbeiten einer Oberfläche eines Werkstücks mittels Laserstrahlung
DE102007041408A1 (de) * 2007-08-31 2009-03-05 Westinghouse Electric Germany Gmbh Vorrichtung und Verfahren zur Behandlung und/oder Dekontamination von Oberflächen
JP2013163215A (ja) * 2012-02-13 2013-08-22 Disco Corp レーザー加工装置
ES2459242B2 (es) * 2014-03-21 2014-09-29 Wismok Esp Barcelona, S.L. Sistema de tratamiento de grasas
DE102014214427B4 (de) * 2014-07-23 2021-11-18 Technische Universität Dresden Verfahren und Vorrichtung zum Abtragen einer Beschichtung von einer Oberfläche eines Basiswerkstoffs
DE102016116659A1 (de) * 2016-09-06 2018-03-08 Laser On Demand Gmbh Laserschweiß-Vorrichtung und Laserschweiß-Verfahren zum Laserschweißen metallischer Werkstücke
FR3089520B1 (fr) 2018-12-07 2021-09-17 Commissariat Energie Atomique Pâte de decontamination et procede de decontamination d’un substrat en un materiau solide utilisant cette pâte
CN109675869B (zh) * 2018-12-29 2021-07-06 四川大学 激光等离子体有效清洗微纳颗粒的脉冲空间间隔选择方法
DE102019101095A1 (de) * 2019-01-16 2020-07-16 RWE Nuclear GmbH Verfahren und Vorrichtung zum Aufbereiten eines kontaminierten Werkstücks
FR3100002B1 (fr) * 2019-08-21 2021-11-19 Onet Tech Cn Procédé pour décontaminer par laser pulsé une pièce métallique comprenant à sa surface une couche d’oxydes de métaux
CN113182281B (zh) * 2021-05-13 2022-12-20 苏州思萃声光微纳技术研究所有限公司 一种板件激光清洗工艺及激光清洗设备
WO2024254678A1 (en) * 2023-06-16 2024-12-19 Candu Energy Inc. Laser ablation decontamination system and method of using same

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2366070A1 (fr) * 1976-09-29 1978-04-28 Texas Instruments Deutschland Appareil d'aspiration des poussieres sur des plaquettes semi-conductrices
JPS58112327A (ja) * 1981-12-26 1983-07-04 Fujitsu Ltd レ−ザアニ−ル装置
JPS5947086A (ja) * 1982-09-10 1984-03-16 Mitsubishi Electric Corp セラミツクスの加工方法
ATE60736T1 (de) * 1986-02-14 1991-02-15 Amoco Corp Behandlung von geformten oberflaechen mit ultraviolettlaser.
US5026964A (en) * 1986-02-28 1991-06-25 General Electric Company Optical breakthrough sensor for laser drill
US4789770A (en) * 1987-07-15 1988-12-06 Westinghouse Electric Corp. Controlled depth laser drilling system
FR2627409A1 (fr) * 1988-02-24 1989-08-25 Lectra Systemes Sa Appareil de coupe laser muni d'un dispositif d'evacuation des fumees
DE3824047A1 (de) * 1988-07-15 1990-01-18 Fraunhofer Ges Forschung Vorrichtung zum bearbeiten von werkstuecken mit strahlung
US4920994A (en) * 1989-09-12 1990-05-01 The United States Of America As Represented By The United States Department Of Energy Laser removal of sludge from steam generators
US5204517A (en) * 1991-12-24 1993-04-20 Maxwell Laboratories, Inc. Method and system for control of a material removal process using spectral emission discrimination

Also Published As

Publication number Publication date
FR2708877B1 (fr) 1995-11-03
FR2708877A1 (fr) 1995-02-17
EP0642846B1 (de) 1998-06-10
EP0642846A1 (de) 1995-03-15
ES2117236T3 (es) 1998-08-01
DE69410900T2 (de) 1999-02-11

Similar Documents

Publication Publication Date Title
DE69410900D1 (de) Verfahren und Vorrichtung zur Überwachung von Oberflächen-Laserreinigung
DE59505668D1 (de) Verfahren und vorrichtung zum feinstreinigen von oberflächen
DE69313597D1 (de) Verfahren und Vorrichtung zur Megaschallreinigung
DE69532091D1 (de) Verfahren und Vorrichtung zur Durchführung von Messungen
DE69102311D1 (de) Vorrichtung und Verfahren zur Oberflächenreinigung.
DE69417704D1 (de) Verfahren und Vorrichtung zur Sichtprüfung von Kontaktlinsen
DE69433500D1 (de) Verfahren und vorrichtung zur wiederherstellung der reihenfolge
DE69427826D1 (de) Verfahren und system zur reinigung von bohrlöchern
DE69322968D1 (de) Verfahren und Vorrichtung zur kontinuierlichen Überwachung eines Anolytpegels
DE69415484D1 (de) Vorrichtung und verfahren zum laserbearbeiten
DE59406282D1 (de) Verfahren und vorrichtung zum zerstäuben von flüssigkeiten
DE69528217D1 (de) Vorrichtung und Verfahren zur Bearbeitung von Substraten
DE69427860D1 (de) Verfahren und vorrichtung zur projektion von bildern
DE69515593D1 (de) Verfahren und Vorrichtung zur Oberflächenbehandlung
DE69705996D1 (de) Verfahren und Vorrichtung zur Überwachung der Oberfläche von Zigaretten
DE69824692D1 (de) Vorrichtung zur Reinigung von Böden und Verfahren zur Sanierung von kontaminierten Böden
DE69417485D1 (de) Vorrichtung und Verfahren zur Flüssigkeitsreinigung
DE69308204D1 (de) Verfahren zur Walzenreinigung und Vorrichtung dafür
ATE262368T1 (de) Verfahren und vorrichtung zum reinigen von filteroberflächen
DE69422821D1 (de) Verfahren und vorrichtung zur oberflächenbehandlung von teilen
DE69408440D1 (de) Verfahren und vorrichtung zur reinigung von festen körpern
DE69422056D1 (de) Verfahren und vorrichtung zum schneiden von teppichen
DE69521340D1 (de) Verfahren und vorrichtung zur überwachung von tieren
DE68926031D1 (de) Verfahren und Vorrichtung zur Entfernung von Unterfarben
DE69406911D1 (de) Verfahren und vorrichtung zur überwachung von tierenlebensfunktionen

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee