DE69332648D1 - Grossflächige aktive Matrix - Google Patents
Grossflächige aktive MatrixInfo
- Publication number
- DE69332648D1 DE69332648D1 DE69332648T DE69332648T DE69332648D1 DE 69332648 D1 DE69332648 D1 DE 69332648D1 DE 69332648 T DE69332648 T DE 69332648T DE 69332648 T DE69332648 T DE 69332648T DE 69332648 D1 DE69332648 D1 DE 69332648D1
- Authority
- DE
- Germany
- Prior art keywords
- active matrix
- large active
- matrix
- active
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000011159 matrix material Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
- H10F39/189—X-ray, gamma-ray or corpuscular radiation imagers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/13336—Combining plural substrates to produce large-area displays, e.g. tiled displays
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Thin Film Transistor (AREA)
- Measurement Of Radiation (AREA)
- Transforming Electric Information Into Light Information (AREA)
- Liquid Crystal (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB929202693A GB9202693D0 (en) | 1992-02-08 | 1992-02-08 | A method of manufacturing a large area active matrix array |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69332648D1 true DE69332648D1 (de) | 2003-02-20 |
DE69332648T2 DE69332648T2 (de) | 2003-08-14 |
Family
ID=10710058
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69323100T Expired - Fee Related DE69323100T2 (de) | 1992-02-08 | 1993-02-03 | Verfahren zur Herstellung einer grossflächigen aktiven Matrixanordnung |
DE69332648T Expired - Fee Related DE69332648T2 (de) | 1992-02-08 | 1993-02-03 | Grossflächige aktive Matrix |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69323100T Expired - Fee Related DE69323100T2 (de) | 1992-02-08 | 1993-02-03 | Verfahren zur Herstellung einer grossflächigen aktiven Matrixanordnung |
Country Status (5)
Country | Link |
---|---|
US (1) | US5315101A (de) |
EP (2) | EP0555907B1 (de) |
JP (1) | JP3607305B2 (de) |
DE (2) | DE69323100T2 (de) |
GB (1) | GB9202693D0 (de) |
Families Citing this family (76)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6975296B1 (en) * | 1991-06-14 | 2005-12-13 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical device and method of driving the same |
US5254480A (en) * | 1992-02-20 | 1993-10-19 | Minnesota Mining And Manufacturing Company | Process for producing a large area solid state radiation detector |
JP3066944B2 (ja) * | 1993-12-27 | 2000-07-17 | キヤノン株式会社 | 光電変換装置、その駆動方法及びそれを有するシステム |
US5381014B1 (en) * | 1993-12-29 | 1997-06-10 | Du Pont | Large area x-ray imager and method of fabrication |
GB9404115D0 (en) * | 1994-03-03 | 1994-04-20 | Philips Electronics Uk Ltd | An imaging device |
JPH07335906A (ja) * | 1994-06-14 | 1995-12-22 | Semiconductor Energy Lab Co Ltd | 薄膜状半導体装置およびその作製方法 |
US6337232B1 (en) | 1995-06-07 | 2002-01-08 | Semiconductor Energy Laboratory Co., Ltd. | Method of fabrication of a crystalline silicon thin film semiconductor with a thin channel region |
JP3135793B2 (ja) * | 1994-09-02 | 2001-02-19 | シャープ株式会社 | 液晶表示装置およびその製造方法 |
US5498880A (en) * | 1995-01-12 | 1996-03-12 | E. I. Du Pont De Nemours And Company | Image capture panel using a solid state device |
US5748277A (en) * | 1995-02-17 | 1998-05-05 | Kent State University | Dynamic drive method and apparatus for a bistable liquid crystal display |
US6154190A (en) * | 1995-02-17 | 2000-11-28 | Kent State University | Dynamic drive methods and apparatus for a bistable liquid crystal display |
JP3483670B2 (ja) | 1995-04-14 | 2004-01-06 | シャープ株式会社 | 表示装置 |
JP3183390B2 (ja) * | 1995-09-05 | 2001-07-09 | キヤノン株式会社 | 光電変換装置及びそれを用いた撮像装置 |
TW331667B (en) * | 1995-09-05 | 1998-05-11 | Canon Kk | Photoelectric converter |
JP4750878B2 (ja) * | 1995-09-05 | 2011-08-17 | キヤノン株式会社 | 光電変換装置及び放射線撮像装置 |
JP4557763B2 (ja) * | 1995-09-05 | 2010-10-06 | キヤノン株式会社 | 光電変換装置及び放射線撮像装置 |
EP0897597B1 (de) | 1996-05-08 | 2002-09-11 | iFire Technology Inc. | Hochauflösender flacher sensor für strahlungsabbildungssystem |
KR100218580B1 (ko) * | 1996-07-09 | 1999-09-01 | 구자홍 | 고 밀도 대형 액정 표시 장치 제조 방법 |
US5827757A (en) * | 1996-07-16 | 1998-10-27 | Direct Radiography Corp. | Fabrication of large area x-ray image capturing element |
US5973311A (en) * | 1997-02-12 | 1999-10-26 | Imation Corp | Pixel array with high and low resolution mode |
EP1008279A4 (de) | 1997-02-21 | 2002-04-17 | Direct Radiography Corp | Bilddatenbearbeitung für röntgenstrahlungsdetektoren |
US6268840B1 (en) | 1997-05-12 | 2001-07-31 | Kent Displays Incorporated | Unipolar waveform drive method and apparatus for a bistable liquid crystal display |
US6133895A (en) * | 1997-06-04 | 2000-10-17 | Kent Displays Incorporated | Cumulative drive scheme and method for a liquid crystal display |
JP4027465B2 (ja) * | 1997-07-01 | 2007-12-26 | 株式会社半導体エネルギー研究所 | アクティブマトリクス型表示装置およびその製造方法 |
JP3838393B2 (ja) * | 1997-09-02 | 2006-10-25 | 株式会社半導体エネルギー研究所 | イメージセンサを内蔵した表示装置 |
JP4271268B2 (ja) * | 1997-09-20 | 2009-06-03 | 株式会社半導体エネルギー研究所 | イメージセンサおよびイメージセンサ一体型アクティブマトリクス型表示装置 |
JP3847918B2 (ja) * | 1997-10-01 | 2006-11-22 | キヤノン株式会社 | 光電変換装置 |
JP4044187B2 (ja) * | 1997-10-20 | 2008-02-06 | 株式会社半導体エネルギー研究所 | アクティブマトリクス型表示装置およびその作製方法 |
US6025599A (en) * | 1997-12-09 | 2000-02-15 | Direct Radiography Corp. | Image capture element |
US6268839B1 (en) | 1998-05-12 | 2001-07-31 | Kent State University | Drive schemes for gray scale bistable cholesteric reflective displays |
US6204835B1 (en) | 1998-05-12 | 2001-03-20 | Kent State University | Cumulative two phase drive scheme for bistable cholesteric reflective displays |
JPH11326954A (ja) * | 1998-05-15 | 1999-11-26 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
US6180944B1 (en) | 1998-07-07 | 2001-01-30 | Direct Radiography, Corp. | Large area X-ray imager with vented seam and method of fabrication |
US6018187A (en) * | 1998-10-19 | 2000-01-25 | Hewlett-Packard Cmpany | Elevated pin diode active pixel sensor including a unique interconnection structure |
US6075248A (en) * | 1998-10-22 | 2000-06-13 | Direct Radiography Corp. | Direct radiographic imaging panel with shielding electrode |
JP2000131444A (ja) | 1998-10-28 | 2000-05-12 | Canon Inc | 放射線検出装置、放射線検出システム、及び放射線検出装置の製造方法 |
DE69923159T2 (de) * | 1998-10-30 | 2005-12-22 | Hamamatsu Photonics K.K., Hamamatsu | Festkörperbildmatrix |
US6486470B2 (en) | 1998-11-02 | 2002-11-26 | 1294339 Ontario, Inc. | Compensation circuit for use in a high resolution amplified flat panel for radiation imaging |
US6614873B1 (en) | 1998-11-20 | 2003-09-02 | Direct Radiography Corp. | Interactive ditigal radiographic system |
US6320563B1 (en) | 1999-01-21 | 2001-11-20 | Kent State University | Dual frequency cholesteric display and drive scheme |
US6350985B1 (en) | 1999-04-26 | 2002-02-26 | Direct Radiography Corp. | Method for calculating gain correction factors in a digital imaging system |
US6354737B1 (en) | 1999-11-12 | 2002-03-12 | Direct Radiography Corp. | Digital image orientation marker |
US6370265B1 (en) | 1999-11-24 | 2002-04-09 | Direct Radiography Corp. | Method for generating gray scale transfer functions for use in displaying a digital radiogram |
US6381351B1 (en) | 1999-11-24 | 2002-04-30 | Direct Radiography Corp. | Weighted inverse topography method for digital x-ray image data processing |
SE515884C2 (sv) * | 1999-12-29 | 2001-10-22 | Xcounter Ab | Förfarande och anordning för radiografi samt strålningsdetektor |
US6717151B2 (en) | 2000-07-10 | 2004-04-06 | Canon Kabushiki Kaisha | Image pickup apparatus |
EP1176808A3 (de) * | 2000-07-27 | 2003-01-02 | Canon Kabushiki Kaisha | Bildaufnahmevorrichtung |
US7023409B2 (en) | 2001-02-09 | 2006-04-04 | Kent Displays, Incorporated | Drive schemes for gray scale bistable cholesteric reflective displays utilizing variable frequency pulses |
US6855937B2 (en) * | 2001-05-18 | 2005-02-15 | Canon Kabushiki Kaisha | Image pickup apparatus |
JP4681774B2 (ja) * | 2001-08-30 | 2011-05-11 | キヤノン株式会社 | 撮像素子、その撮像素子を用いた撮像装置、及びその撮像装置を用いた撮像システム |
JP3950665B2 (ja) * | 2001-10-23 | 2007-08-01 | キヤノン株式会社 | 放射線撮像装置及び放射線撮像装置の撮像方法 |
TWI291729B (en) | 2001-11-22 | 2007-12-21 | Semiconductor Energy Lab | A semiconductor fabricating apparatus |
CN1248287C (zh) * | 2001-11-30 | 2006-03-29 | 株式会社半导体能源研究所 | 半导体设备的制造方法 |
US7133737B2 (en) | 2001-11-30 | 2006-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Program for controlling laser apparatus and recording medium for recording program for controlling laser apparatus and capable of being read out by computer |
US7214573B2 (en) * | 2001-12-11 | 2007-05-08 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device that includes patterning sub-islands |
JP3992976B2 (ja) * | 2001-12-21 | 2007-10-17 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
KR100527087B1 (ko) | 2001-12-22 | 2005-11-09 | 비오이 하이디스 테크놀로지 주식회사 | 엑스레이 디텍터의 제조방법 |
JP4030758B2 (ja) | 2001-12-28 | 2008-01-09 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
US6740884B2 (en) * | 2002-04-03 | 2004-05-25 | General Electric Company | Imaging array and methods for fabricating same |
GB0212001D0 (en) * | 2002-05-24 | 2002-07-03 | Koninkl Philips Electronics Nv | X-ray image detector |
FR2852147B1 (fr) | 2003-03-06 | 2005-09-30 | Commissariat Energie Atomique | Matrice de pixels detecteurs integree sur circuit de lecture de charges |
US20040246355A1 (en) * | 2003-06-06 | 2004-12-09 | Ji Ung Lee | Storage capacitor array for a solid state radiation imager |
US7084014B2 (en) * | 2003-10-07 | 2006-08-01 | Endicott Interconnect Technologies, Inc. | Method of making circuitized substrate |
KR101026802B1 (ko) * | 2003-11-18 | 2011-04-04 | 삼성전자주식회사 | 액정 표시 장치 및 그 구동 방법 |
DE102004004630B4 (de) * | 2004-01-29 | 2009-12-31 | Siemens Ag | Röntgeneinrichtung |
JP2006030889A (ja) * | 2004-07-21 | 2006-02-02 | Toshiba Matsushita Display Technology Co Ltd | 液晶表示装置 |
US8319307B1 (en) * | 2004-11-19 | 2012-11-27 | Voxtel, Inc. | Active pixel sensors with variable threshold reset |
US20080308585A1 (en) * | 2006-09-27 | 2008-12-18 | John Foley | Nozzle |
US8753917B2 (en) * | 2010-12-14 | 2014-06-17 | International Business Machines Corporation | Method of fabricating photoconductor-on-active pixel device |
FR2993097B1 (fr) * | 2012-07-05 | 2015-05-22 | Commissariat Energie Atomique | Dispositif imageur cmos a geometrie optimisee et procede de realisation d'un tel dispositif par photocomposition |
CN104620387B (zh) * | 2012-08-23 | 2018-10-26 | 皇家飞利浦有限公司 | 光子计数半导体探测器 |
JP5424371B1 (ja) | 2013-05-08 | 2014-02-26 | 誠 雫石 | 固体撮像素子及び撮像装置 |
EP3184975B1 (de) * | 2015-12-23 | 2023-08-30 | Spectricity | Spektrometermodul |
JP7336206B2 (ja) | 2019-02-27 | 2023-08-31 | キヤノン株式会社 | 光電変換装置の製造方法 |
WO2021006294A1 (ja) | 2019-07-09 | 2021-01-14 | 雫石 誠 | 医療車両、ct装置、及び駆動方法 |
JPWO2021149577A1 (de) * | 2020-01-24 | 2021-07-29 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63183420A (ja) * | 1987-01-26 | 1988-07-28 | Nec Home Electronics Ltd | 液晶表示装置 |
JPH0769530B2 (ja) * | 1987-02-16 | 1995-07-31 | 株式会社日立製作所 | 液晶表示パネル及びその製造方法 |
US4866291A (en) * | 1987-06-30 | 1989-09-12 | Canon Kabushiki Kaisha | Photosensor with charge storage unit and switch unit formed on a single-crystal semiconductor film |
JPS6438727A (en) * | 1987-08-04 | 1989-02-09 | Nec Corp | Transistor array substrate for display |
JPH03120868A (ja) * | 1989-10-04 | 1991-05-23 | Fuji Xerox Co Ltd | イメージセンサ |
DE4002431A1 (de) * | 1990-01-27 | 1991-08-01 | Philips Patentverwaltung | Sensormatrix |
CA2034118A1 (en) * | 1990-02-09 | 1991-08-10 | Nang Tri Tran | Solid state radiation detector |
GB9115259D0 (en) * | 1991-07-15 | 1991-08-28 | Philips Electronic Associated | An image detector |
-
1992
- 1992-02-08 GB GB929202693A patent/GB9202693D0/en active Pending
-
1993
- 1993-02-01 US US08/011,935 patent/US5315101A/en not_active Expired - Lifetime
- 1993-02-03 EP EP93200267A patent/EP0555907B1/de not_active Expired - Lifetime
- 1993-02-03 DE DE69323100T patent/DE69323100T2/de not_active Expired - Fee Related
- 1993-02-03 EP EP97202801A patent/EP0829905B1/de not_active Expired - Lifetime
- 1993-02-03 DE DE69332648T patent/DE69332648T2/de not_active Expired - Fee Related
- 1993-02-05 JP JP01854393A patent/JP3607305B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP3607305B2 (ja) | 2005-01-05 |
EP0829905A3 (de) | 1998-04-08 |
GB9202693D0 (en) | 1992-03-25 |
JPH05315581A (ja) | 1993-11-26 |
EP0829905B1 (de) | 2003-01-15 |
EP0555907A1 (de) | 1993-08-18 |
US5315101A (en) | 1994-05-24 |
EP0829905A2 (de) | 1998-03-18 |
DE69323100T2 (de) | 1999-07-15 |
DE69323100D1 (de) | 1999-03-04 |
DE69332648T2 (de) | 2003-08-14 |
EP0555907B1 (de) | 1999-01-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |