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DE69208421D1 - Optisches Messsystem zur Ermittlung des Profils eines Gegenstandes - Google Patents

Optisches Messsystem zur Ermittlung des Profils eines Gegenstandes

Info

Publication number
DE69208421D1
DE69208421D1 DE69208421T DE69208421T DE69208421D1 DE 69208421 D1 DE69208421 D1 DE 69208421D1 DE 69208421 T DE69208421 T DE 69208421T DE 69208421 T DE69208421 T DE 69208421T DE 69208421 D1 DE69208421 D1 DE 69208421D1
Authority
DE
Germany
Prior art keywords
profile
determining
measuring system
optical measuring
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69208421T
Other languages
English (en)
Other versions
DE69208421T2 (de
Inventor
Yuji Takada
Hiroshi Matsuda
Toshiki Yamane
Yoshihiko Sugimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP3313533A external-priority patent/JP2567767B2/ja
Priority claimed from JP3313532A external-priority patent/JP2571485B2/ja
Priority claimed from JP3339041A external-priority patent/JP2997826B2/ja
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Publication of DE69208421D1 publication Critical patent/DE69208421D1/de
Application granted granted Critical
Publication of DE69208421T2 publication Critical patent/DE69208421T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE69208421T 1991-10-31 1992-10-30 Optisches Messsystem zur Ermittlung des Profils eines Gegenstandes Expired - Fee Related DE69208421T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP3313533A JP2567767B2 (ja) 1991-10-31 1991-10-31 光学式変位測定方法およびこの方法を用いた光学式変位計
JP3313532A JP2571485B2 (ja) 1991-10-31 1991-10-31 光学式変位測定方法およびこの方法を用いた光学式変位計
JP3339041A JP2997826B2 (ja) 1991-12-20 1991-12-20 マルチヘッド型光学式変位計

Publications (2)

Publication Number Publication Date
DE69208421D1 true DE69208421D1 (de) 1996-03-28
DE69208421T2 DE69208421T2 (de) 1996-09-12

Family

ID=27339335

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69208421T Expired - Fee Related DE69208421T2 (de) 1991-10-31 1992-10-30 Optisches Messsystem zur Ermittlung des Profils eines Gegenstandes

Country Status (3)

Country Link
US (1) US5351126A (de)
EP (1) EP0540343B1 (de)
DE (1) DE69208421T2 (de)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
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CA2067400A1 (en) * 1992-04-28 1993-10-29 Robert E. Bredberg Laser thickness gauge
US5659396A (en) * 1995-06-07 1997-08-19 Electrocom Automation L.P. Dichotomous scan system for detection of edges of objects and overlapped objects having relatively uniform surfaces
US5838447A (en) * 1995-07-20 1998-11-17 Ebara Corporation Polishing apparatus including thickness or flatness detector
US5814808A (en) * 1995-08-28 1998-09-29 Matsushita Electric Works, Ltd. Optical displacement measuring system using a triangulation including a processing of position signals in a time sharing manner
US5877860A (en) * 1996-05-13 1999-03-02 Boxer Cross, Inc. System and method for measuring the microroughness of a surface of a substrate
US5757498A (en) * 1996-05-30 1998-05-26 Klein, Ii; Richard J. Optical spray coating monitoring system and method
US5859924A (en) * 1996-07-12 1999-01-12 Robotic Vision Systems, Inc. Method and system for measuring object features
US5792290A (en) * 1996-09-04 1998-08-11 Robert Burkle Gmbh & Co. Method for exactly separating a material connected in a web-like manner along its contours
US5757502A (en) * 1996-10-02 1998-05-26 Vlsi Technology, Inc. Method and a system for film thickness sample assisted surface profilometry
US6075883A (en) * 1996-11-12 2000-06-13 Robotic Vision Systems, Inc. Method and system for imaging an object or pattern
JP3799708B2 (ja) * 1996-12-24 2006-07-19 松下電工株式会社 光学式変位測定システム
US5868840A (en) * 1996-12-30 1999-02-09 The University Of Northern Iowa Foundation Paint gun incorporating a laser device
DE19737919A1 (de) * 1997-08-26 1999-03-11 Joachim Buerger Meßgerät zur Messung der Profiltiefe eines Kraftfahrzeugreifens
JP4016526B2 (ja) * 1998-09-08 2007-12-05 富士ゼロックス株式会社 ３次元物体識別装置
DE10059156A1 (de) 2000-11-29 2002-06-06 Sick Ag Abstandsbestimmung
US6757069B2 (en) * 2001-03-05 2004-06-29 Northrop Grumman Corporation Laser non-contact thickness measurement system
JP3565178B2 (ja) * 2001-03-23 2004-09-15 オムロン株式会社 変位センサ
JP2003075117A (ja) * 2001-06-19 2003-03-12 Omron Corp 光学式センサ装置および光学式センサの信号処理装置ならびに光学式センサ用の分岐コネクタ
US6937350B2 (en) * 2001-06-29 2005-08-30 Massachusetts Institute Of Technology Apparatus and methods for optically monitoring thickness
US7310431B2 (en) * 2002-04-10 2007-12-18 Canesta, Inc. Optical methods for remotely measuring objects
US20040061873A1 (en) * 2002-09-26 2004-04-01 Davis Brett L. Method and apparatus for detecting media thickness
US7417738B2 (en) * 2004-01-27 2008-08-26 Tradewind Scientific Ltd. Determining surface properties of a roadway or runway from a moving vehicle
EP1566658A1 (de) * 2004-02-19 2005-08-24 Leica Geosystems AG Handgehaltene Vorrichtung zum Messen von Distanzen
US7283256B2 (en) * 2004-09-21 2007-10-16 Chapman Instruments, Inc. Method and apparatus for measuring wafer thickness
US7280232B2 (en) * 2004-09-21 2007-10-09 Chapman Instruments, Inc. Method and apparatus for measuring wafer thickness
US7841529B2 (en) * 2004-10-19 2010-11-30 Applied Materials Israel, Ltd. Multiple optical head inspection system and a method for imaging an article
DE102005042902A1 (de) 2004-12-16 2007-03-22 Benteler Automobiltechnik Gmbh Vorrichtung zum Vermessen von Bauteilen und Auswerteeinheit
US7383152B1 (en) * 2006-01-10 2008-06-03 Alliant Techsystems Inc. Non-contact deviation measurement system
DE102006013584B4 (de) 2006-03-22 2014-07-10 Benteler Automobiltechnik Gmbh Vorrichtung zum Vermessen von Bauteilen
KR20080043047A (ko) 2006-11-13 2008-05-16 주식회사 고영테크놀러지 새도우 모아레를 이용한 3차원형상 측정장치
US20080158572A1 (en) * 2006-12-27 2008-07-03 Honeywell, Inc. System and method for measurement of thickness of thin films
US20100073476A1 (en) * 2008-09-24 2010-03-25 Industrial Technology Research Institute Systems and methods for measuring three-dimensional profile
DE102009026618A1 (de) * 2009-05-29 2010-12-02 Hilti Aktiengesellschaft Lasergerät zur elektrooptischen Distanzmessung
US8641942B2 (en) 2010-05-12 2014-02-04 Corning Incorporated Laser scanning systems and methods for measuring extruded ceramic logs
ES2377372B1 (es) * 2010-07-19 2013-01-29 Universidad Carlos Iii De Madrid Dispositivo para la medida del estado de la calzada.
EP3249348B1 (de) * 2016-05-26 2019-07-03 Baumer Electric AG Sensorvorrichtung zur vermessung einer oberfläche
CN109341606A (zh) * 2018-11-22 2019-02-15 武汉华星光电技术有限公司 一种表面平坦度测量装置及方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3612890A (en) * 1969-10-13 1971-10-12 Trw Inc Radiation sensitive optical gaging system
US4375921A (en) * 1980-03-13 1983-03-08 Selective Electronic Co. Ab Dimension measuring apparatus
US4298286A (en) * 1980-06-02 1981-11-03 The Carl Maxey Company Measuring apparatus
FR2615279B1 (fr) * 1987-05-11 1990-11-02 Commissariat Energie Atomique Capteur de deplacement a fibres optiques decalees
JPH0674968B2 (ja) * 1988-03-15 1994-09-21 三菱電機株式会社 光学式測定装置
US5028799A (en) * 1988-08-01 1991-07-02 Robotic Vision System, Inc. Method and apparatus for three dimensional object surface determination using co-planar data from multiple sensors

Also Published As

Publication number Publication date
US5351126A (en) 1994-09-27
EP0540343A1 (de) 1993-05-05
DE69208421T2 (de) 1996-09-12
EP0540343B1 (de) 1996-02-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee