DE69226419D1 - Gerät zur Messung der Oberflächenbeschaffung - Google Patents
Gerät zur Messung der OberflächenbeschaffungInfo
- Publication number
- DE69226419D1 DE69226419D1 DE69226419T DE69226419T DE69226419D1 DE 69226419 D1 DE69226419 D1 DE 69226419D1 DE 69226419 T DE69226419 T DE 69226419T DE 69226419 T DE69226419 T DE 69226419T DE 69226419 D1 DE69226419 D1 DE 69226419D1
- Authority
- DE
- Germany
- Prior art keywords
- measuring
- procurement
- surface procurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/60—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J2005/0074—Radiation pyrometry, e.g. infrared or optical thermometry having separate detection of emissivity
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Radiation Pyrometers (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3330093A JPH05142052A (ja) | 1991-11-19 | 1991-11-19 | プロセス材料の物性値・表面温度測定装置 |
JP3330092A JPH05142051A (ja) | 1991-11-19 | 1991-11-19 | 2色多重式放射温度計 |
JP35009591A JPH05164616A (ja) | 1991-12-10 | 1991-12-10 | 多波長式放射温度計 |
JP4021068A JPH05215610A (ja) | 1992-02-06 | 1992-02-06 | 表面状態測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69226419D1 true DE69226419D1 (de) | 1998-09-03 |
DE69226419T2 DE69226419T2 (de) | 1998-12-03 |
Family
ID=27457502
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69226419T Expired - Fee Related DE69226419T2 (de) | 1991-11-19 | 1992-11-17 | Gerät zur Messung der Oberflächenbeschaffung |
Country Status (4)
Country | Link |
---|---|
US (1) | US5314249A (de) |
EP (1) | EP0543326B1 (de) |
CA (1) | CA2083124C (de) |
DE (1) | DE69226419T2 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2085143C (en) * | 1991-12-13 | 1997-03-04 | Tomohiro Marui | Method and apparatus for process control of material emitting radiation |
US6215269B1 (en) * | 1996-05-21 | 2001-04-10 | Kent Gregg | Method of exposing a path on a curved, or otherwise irregularly shaped, surface |
US7155363B1 (en) * | 1997-12-01 | 2006-12-26 | Mks Instruments, Inc. | Thermal imaging for semiconductor process monitoring |
US7147338B2 (en) | 2001-04-09 | 2006-12-12 | Kent Gregg | Circuit on a curved, or otherwise irregularly shaped, surface, such as on a helmet to be worn on the head, including a fiber optic conductive path |
DE10119599A1 (de) * | 2001-04-21 | 2002-10-31 | Bosch Gmbh Robert | Verfahren zur Bestimmung von Temperaturen an Halbleiterbauelementen |
DE10336097B3 (de) * | 2003-08-06 | 2005-03-10 | Testo Ag | Visiereinrichtung für ein Radiometer sowie Verfahren |
US7632012B2 (en) * | 2005-09-01 | 2009-12-15 | Siemens Energy, Inc. | Method of measuring in situ differential emissivity and temperature |
FR2903492B1 (fr) * | 2006-07-07 | 2009-02-20 | Centre Nat Rech Scient | Dispositif d'evaluation de l'etat de mouillage d'une surface, procede d'evaluation et dispositif d'indication associe |
CN101960489A (zh) * | 2007-12-31 | 2011-01-26 | 真实成像有限公司 | 用于分析热图像的方法、设备和系统 |
US10299686B2 (en) | 2008-03-28 | 2019-05-28 | Real Imaging Ltd. | Method apparatus and system for analyzing images |
US9976908B2 (en) * | 2013-07-02 | 2018-05-22 | Exergen Corporation | Device for temperature measurements of surfaces with a low unknown and/or variable emissivity |
EP3206017B1 (de) * | 2016-02-09 | 2018-09-12 | Elster GmbH | Sensor und verfahren zur bestimmung der luftzahl eines brenngas-luft-gemisches |
CN106768356A (zh) * | 2016-12-06 | 2017-05-31 | 清华大学 | 基于调频辐射光源的多传感器成像温度场测量方法及装置 |
EP3616802B1 (de) * | 2017-04-25 | 2021-12-29 | Nippon Steel Corporation | System zur bestimmung der kesselsteinzusammensetzung, verfahren zur bestimmung der kesselsteinzusammensetzung und programm |
CA3057054C (en) * | 2017-04-25 | 2021-11-16 | Nippon Steel Corporation | Scale composition determination system, scale composition determination method, and program |
JP2023124480A (ja) * | 2022-02-25 | 2023-09-06 | 株式会社Screenホールディングス | 温度測定方法および熱処理装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3539807A (en) * | 1968-04-04 | 1970-11-10 | Texas Instruments Inc | Temperature - emissivity separation and temperature independent radiometric analyzer |
US4465382A (en) * | 1980-03-04 | 1984-08-14 | Nippon Steel Corporation | Method of and an apparatus for measuring surface temperature and emmissivity of a heated material |
US4417822A (en) * | 1981-01-28 | 1983-11-29 | Exxon Research And Engineering Company | Laser radiometer |
US4579461A (en) * | 1983-02-14 | 1986-04-01 | United States Steel Corporation | Dual sensor radiation pyrometer |
DE3476584D1 (en) * | 1983-11-28 | 1989-03-09 | Deutsche Forsch Luft Raumfahrt | Method for the contactless, emissivity-independent radiation measurement of the temperature of an object |
US4561786A (en) * | 1984-03-15 | 1985-12-31 | Williamson Corporation | Temperature measuring apparatus |
US4659234A (en) * | 1984-06-18 | 1987-04-21 | Aluminum Company Of America | Emissivity error correcting method for radiation thermometer |
GB8416201D0 (en) * | 1984-06-26 | 1984-08-01 | Land Infrared Ltd | Temperature monitoring |
DD254114A3 (de) * | 1985-07-30 | 1988-02-17 | Univ Dresden Tech | Pyrometrisches messverfahren |
US4881823A (en) * | 1988-03-29 | 1989-11-21 | Purdue Research Foundation | Radiation thermometry |
US5011295A (en) * | 1989-10-17 | 1991-04-30 | Houston Advanced Research Center | Method and apparatus to simultaneously measure emissivities and thermodynamic temperatures of remote objects |
US5166080A (en) * | 1991-04-29 | 1992-11-24 | Luxtron Corporation | Techniques for measuring the thickness of a film formed on a substrate |
-
1992
- 1992-11-13 US US07/976,414 patent/US5314249A/en not_active Expired - Fee Related
- 1992-11-17 CA CA002083124A patent/CA2083124C/en not_active Expired - Fee Related
- 1992-11-17 EP EP92119607A patent/EP0543326B1/de not_active Expired - Lifetime
- 1992-11-17 DE DE69226419T patent/DE69226419T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69226419T2 (de) | 1998-12-03 |
US5314249A (en) | 1994-05-24 |
CA2083124C (en) | 1997-09-23 |
EP0543326A2 (de) | 1993-05-26 |
EP0543326A3 (en) | 1993-11-24 |
EP0543326B1 (de) | 1998-07-29 |
CA2083124A1 (en) | 1993-05-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |