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DE69123461D1 - Verfahren zur Herstellung von Aluminiumnitrid mittels kontrollierter Nitridierungsverbrennung - Google Patents

Verfahren zur Herstellung von Aluminiumnitrid mittels kontrollierter Nitridierungsverbrennung

Info

Publication number
DE69123461D1
DE69123461D1 DE69123461T DE69123461T DE69123461D1 DE 69123461 D1 DE69123461 D1 DE 69123461D1 DE 69123461 T DE69123461 T DE 69123461T DE 69123461 T DE69123461 T DE 69123461T DE 69123461 D1 DE69123461 D1 DE 69123461D1
Authority
DE
Germany
Prior art keywords
aluminum nitride
combustion
production
nitridation
controlled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69123461T
Other languages
English (en)
Other versions
DE69123461T2 (de
Inventor
Alan Weimer
John Henley
Gene Cochran
Glenn Eisman
William Moore
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dow Chemical Co
Original Assignee
Dow Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Chemical Co filed Critical Dow Chemical Co
Publication of DE69123461D1 publication Critical patent/DE69123461D1/de
Application granted granted Critical
Publication of DE69123461T2 publication Critical patent/DE69123461T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
    • C01B21/0722—Preparation by direct nitridation of aluminium
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/01—Particle morphology depicted by an image
    • C01P2004/03—Particle morphology depicted by an image obtained by SEM
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/12—Surface area
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/80—Compositional purity

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Preventing Corrosion Or Incrustation Of Metals (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Fuel Cell (AREA)
  • Cookers (AREA)
DE69123461T 1991-05-03 1991-12-13 Verfahren zur Herstellung von Aluminiumnitrid mittels kontrollierter Nitridierungsverbrennung Expired - Fee Related DE69123461T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/695,376 US5126121A (en) 1991-05-03 1991-05-03 Process for preparing aluminum nitride powder via controlled combustion nitridation
PCT/US1991/009372 WO1992019534A1 (en) 1991-05-03 1991-12-13 Process for preparing aluminium nitride powder via controlled combustion nitridation

Publications (2)

Publication Number Publication Date
DE69123461D1 true DE69123461D1 (de) 1997-01-16
DE69123461T2 DE69123461T2 (de) 1997-03-27

Family

ID=24792735

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69123461T Expired - Fee Related DE69123461T2 (de) 1991-05-03 1991-12-13 Verfahren zur Herstellung von Aluminiumnitrid mittels kontrollierter Nitridierungsverbrennung

Country Status (14)

Country Link
US (1) US5126121A (de)
EP (1) EP0582571B1 (de)
JP (1) JPH06506905A (de)
CN (1) CN1066429A (de)
AT (1) ATE145886T1 (de)
AU (1) AU9120891A (de)
BR (1) BR9107305A (de)
CA (1) CA2106669A1 (de)
DE (1) DE69123461T2 (de)
ES (1) ES2094900T3 (de)
FI (1) FI934824L (de)
IL (1) IL100628A0 (de)
NO (1) NO933959L (de)
WO (1) WO1992019534A1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69218300T2 (de) * 1991-06-19 1997-10-09 Atochem Elf Sa Kontinuierliches Verfahren zur Herstellung von Aluminiumnitrid durch Karbonitrieren von Aluminium
US5219804A (en) * 1992-01-10 1993-06-15 The Dow Chemical Company Process for preparing ultrafine aluminum nitride powder
US5380688A (en) * 1993-08-09 1995-01-10 The Dow Chemical Company Method for making submicrometer carbides, submicrometer solid solution carbides, and the material resulting therefrom
US5525320A (en) * 1994-07-11 1996-06-11 University Of Cincinnati Process for aluminum nitride powder production
US5842417A (en) * 1995-04-25 1998-12-01 Heidelberger Druckmaschinen Ag Apparatus for preventing condensation in machines processing a web of material
CN1057063C (zh) * 1995-08-04 2000-10-04 中国科学院上海硅酸盐研究所 自蔓延高温合成氮化铝粉末的制备方法
JP3228924B2 (ja) * 2000-01-21 2001-11-12 イビデン株式会社 半導体製造・検査装置用セラミックヒータ
JP4729180B2 (ja) * 2001-02-02 2011-07-20 株式会社茨木研究所 窒化アルミニウムの製造方法
JP4545357B2 (ja) * 2001-07-23 2010-09-15 電気化学工業株式会社 窒化アルミニウム粉末の製造方法
CN100379679C (zh) * 2003-05-09 2008-04-09 株式会社茨木研究所 生产氮化铝的方法以及氮化铝
JP4939932B2 (ja) * 2004-03-29 2012-05-30 電気化学工業株式会社 窒化アルミニウム粉末及びその製造方法
US20080193363A1 (en) * 2004-08-20 2008-08-14 Mitsubishi Chemical Corporation Metal Nitrides and Process for Production Thereof
GB2445218B (en) * 2006-09-21 2011-05-25 Smith International Atomic layer deposition nanocoating on cutting tool powder materials
TWI401206B (zh) * 2010-02-12 2013-07-11 Univ Nat Cheng Kung 氮化鋁之製備方法
WO2014038676A1 (ja) * 2012-09-07 2014-03-13 株式会社トクヤマ 耐水性窒化アルミニウム粉末の製造方法
KR101766004B1 (ko) * 2015-03-20 2017-08-24 오씨아이 주식회사 질화알루미늄 분말의 제조장치, 제조방법 및 이로부터 제조된 질화알루미늄 분말
JP6546538B2 (ja) * 2016-01-29 2019-07-17 日本特殊陶業株式会社 窒化アルミニウム焼結体及びその製造方法
TWI629237B (zh) * 2016-11-28 2018-07-11 國立清華大學 氮化鋁製備方法
CN116239088B (zh) * 2021-12-07 2025-02-14 北京大学 一种用于降低氮化铝晶体中氧杂质含量的源粉预烧结方法
CN114772563B (zh) * 2022-04-28 2023-08-22 赵晓 一种高纯纳米氮化铝粉末的制备方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3307908A (en) * 1965-08-16 1967-03-07 Union Carbide Corp Preparation of aluminum nitride
JPS60175537A (ja) * 1984-02-22 1985-09-09 Toyota Motor Corp セラミツク超微粒子の製造方法
JPS6168311A (ja) * 1984-09-10 1986-04-08 Chugai Ro Kogyo Kaisha Ltd 窒化アルミニウム粉未の製造方法およびその装置
JPS61275472A (ja) * 1985-05-29 1986-12-05 三菱レイヨン株式会社 導電性繊維の製法
JPH0737664B2 (ja) * 1985-07-16 1995-04-26 東洋アルミニウム株式会社 窒化アルミニウムの製造方法
JPS63195102A (ja) * 1987-02-09 1988-08-12 Showa Alum Corp 窒化アルミニウム粉末の連続的製造方法及び装置
JPS63221842A (ja) * 1987-03-11 1988-09-14 Nippon Steel Corp 金属粉体、金属化合物粉体およびセラミツクス粉体の製造方法および装置
JPS63277503A (ja) * 1987-05-08 1988-11-15 Showa Alum Corp 高純度窒化アルミニウム粉末の連続的製造方法及び装置
JPS63297206A (ja) * 1987-05-28 1988-12-05 Toyo Alum Kk 窒化アルミニウムの製造方法
US4877759A (en) * 1987-05-29 1989-10-31 Regents Of The University Of California One step process for producing dense aluminum nitride and composites thereof
US5110565A (en) * 1988-02-05 1992-05-05 The Dow Chemical Company Apparatus for producing uniform, fine ceramic powder
JPH01226709A (ja) * 1988-03-08 1989-09-11 Showa Alum Corp 高純度窒化アルミニウム紛末の製造方法
JPH01308812A (ja) * 1988-06-06 1989-12-13 Showa Alum Corp 窒化アルミニウム粉末の連続的製造方法及び装置
JPH01308813A (ja) * 1988-06-06 1989-12-13 Showa Alum Corp 窒化アルミニウム粉末の製造方法及び装置
JPH0226812A (ja) * 1988-07-12 1990-01-29 Showa Alum Corp 高純度窒化アルミニウム粉末の製造方法
JPH0226811A (ja) * 1988-07-12 1990-01-29 Showa Alum Corp 高純度窒化アルミニウム粉末の製造方法
JPH02283605A (ja) * 1989-04-24 1990-11-21 Showa Alum Corp 窒化アルミニウム粉末の連続的製造方法及び装置
JPH02283604A (ja) * 1989-04-24 1990-11-21 Showa Alum Corp 窒化アルミニウム粉末の連続的製造方法及び装置

Also Published As

Publication number Publication date
NO933959D0 (no) 1993-11-02
NO933959L (no) 1993-11-02
CN1066429A (zh) 1992-11-25
AU9120891A (en) 1992-12-21
IL100628A0 (en) 1992-09-06
BR9107305A (pt) 1994-09-27
FI934824A0 (fi) 1993-11-01
EP0582571B1 (de) 1996-12-04
ES2094900T3 (es) 1997-02-01
CA2106669A1 (en) 1992-11-04
DE69123461T2 (de) 1997-03-27
EP0582571A1 (de) 1994-02-16
FI934824L (fi) 1993-11-01
WO1992019534A1 (en) 1992-11-12
US5126121A (en) 1992-06-30
JPH06506905A (ja) 1994-08-04
ATE145886T1 (de) 1996-12-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee