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DE69025746D1 - Verfahren zum Auftragen keramischer Schichten - Google Patents

Verfahren zum Auftragen keramischer Schichten

Info

Publication number
DE69025746D1
DE69025746D1 DE69025746T DE69025746T DE69025746D1 DE 69025746 D1 DE69025746 D1 DE 69025746D1 DE 69025746 T DE69025746 T DE 69025746T DE 69025746 T DE69025746 T DE 69025746T DE 69025746 D1 DE69025746 D1 DE 69025746D1
Authority
DE
Germany
Prior art keywords
ceramic layers
applying ceramic
applying
layers
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69025746T
Other languages
English (en)
Other versions
DE69025746T2 (de
Inventor
Charles Stanley Giggins
Richard Scott Mullin
Nicholas Eugene Ulion
Neal Paul Anderson
Leo Albert Riendeau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RTX Corp
Original Assignee
United Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Technologies Corp filed Critical United Technologies Corp
Publication of DE69025746D1 publication Critical patent/DE69025746D1/de
Application granted granted Critical
Publication of DE69025746T2 publication Critical patent/DE69025746T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • C23C28/3455—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Physical Vapour Deposition (AREA)
DE69025746T 1990-02-05 1990-11-20 Verfahren zum Auftragen keramischer Schichten Expired - Fee Related DE69025746T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/474,918 US5087477A (en) 1990-02-05 1990-02-05 Eb-pvd method for applying ceramic coatings

Publications (2)

Publication Number Publication Date
DE69025746D1 true DE69025746D1 (de) 1996-04-11
DE69025746T2 DE69025746T2 (de) 1996-07-18

Family

ID=23885498

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69025746T Expired - Fee Related DE69025746T2 (de) 1990-02-05 1990-11-20 Verfahren zum Auftragen keramischer Schichten

Country Status (4)

Country Link
US (1) US5087477A (de)
EP (1) EP0441095B1 (de)
JP (1) JP3197569B2 (de)
DE (1) DE69025746T2 (de)

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US5824423A (en) * 1996-02-07 1998-10-20 N.V. Interturbine Thermal barrier coating system and methods
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US6054184A (en) * 1996-06-04 2000-04-25 General Electric Company Method for forming a multilayer thermal barrier coating
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US6177200B1 (en) 1996-12-12 2001-01-23 United Technologies Corporation Thermal barrier coating systems and materials
DE19715791C2 (de) * 1997-04-16 2003-02-20 Deutsch Zentr Luft & Raumfahrt Verfahren zur Herstellung keramischer Wärmedämmschichten mit Keulenstruktur und Verwendung des Verfahrens
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US5876860A (en) * 1997-12-09 1999-03-02 N.V. Interturbine Thermal barrier coating ceramic structure
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US6060177A (en) * 1998-02-19 2000-05-09 United Technologies Corporation Method of applying an overcoat to a thermal barrier coating and coated article
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EP1123455B1 (de) 1998-10-22 2003-09-17 Siemens Aktiengesellschaft Erzeugnis mit wärmedämmschicht sowie verfahren zur herstellung einer wärmedämmschicht
US6319569B1 (en) 1998-11-30 2001-11-20 Howmet Research Corporation Method of controlling vapor deposition substrate temperature
US6196889B1 (en) 1998-12-11 2001-03-06 United Technologies Corporation Method and apparatus for use an electron gun employing a thermionic source of electrons
US6455990B1 (en) 1998-12-11 2002-09-24 United Technologies Corporation Apparatus for an electron gun employing a thermionic electron source
US6365236B1 (en) 1999-12-20 2002-04-02 United Technologies Corporation Method for producing ceramic coatings containing layered porosity
US6635362B2 (en) 2001-02-16 2003-10-21 Xiaoci Maggie Zheng High temperature coatings for gas turbines
DE50202696D1 (de) 2001-08-14 2005-05-12 Alstom Technology Ltd Baden Verfahren zur Bearbeitung einer beschichteten Gasturbinenschaufel
US7556695B2 (en) * 2002-05-06 2009-07-07 Honeywell International, Inc. Apparatus to make nanolaminate thermal barrier coatings
DE10337019A1 (de) * 2003-08-12 2005-03-10 Alstom Technology Ltd Baden Verfahren zur Bearbeitung einer beschichteten Gasturbinenschaufel
US7413808B2 (en) * 2004-10-18 2008-08-19 United Technologies Corporation Thermal barrier coating
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US7422771B2 (en) 2005-09-01 2008-09-09 United Technologies Corporation Methods for applying a hybrid thermal barrier coating
DE102005053531A1 (de) 2005-11-08 2007-05-10 Man Turbo Ag Wärmedämmende Schutzschicht für ein Bauteil innerhalb des Heißgasbereiches einer Gasturbine
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US8025730B2 (en) * 2007-07-09 2011-09-27 United Technologies Corporation Apparatus and method for coating internal surfaces of a turbine engine component
US8323409B2 (en) * 2008-05-08 2012-12-04 United Technologies Corporation Systems and methods for forming components with thermal barrier coatings
US8366386B2 (en) * 2009-01-27 2013-02-05 United Technologies Corporation Method and assembly for gas turbine engine airfoils with protective coating
US8419857B2 (en) * 2009-03-31 2013-04-16 United Technologies Corporation Electron beam vapor deposition apparatus and method of coating
US20100247952A1 (en) * 2009-03-31 2010-09-30 Latour Robert F Controlled oxidation of bond coat
CN101708849B (zh) * 2009-11-19 2012-08-01 大连理工大学 局部蒸发去除多晶硅中硼的方法及装置
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US9315905B2 (en) * 2010-03-04 2016-04-19 United Technologies Corporation Coated article and coating process therefor
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US8350180B2 (en) * 2010-03-12 2013-01-08 United Technologies Corporation High pressure pre-oxidation for deposition of thermal barrier coating with hood
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Also Published As

Publication number Publication date
EP0441095A2 (de) 1991-08-14
US5087477A (en) 1992-02-11
EP0441095A3 (en) 1991-11-06
JPH04218666A (ja) 1992-08-10
JP3197569B2 (ja) 2001-08-13
EP0441095B1 (de) 1996-03-06
DE69025746T2 (de) 1996-07-18

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Legal Events

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8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee