DE69001692D1 - Sensor mit freitragendem ausleger. - Google Patents

Sensor mit freitragendem ausleger.

Info

Publication number: DE69001692D1
Authority: DE; Germany
Prior art keywords: sensor; cantilever boom; boom; cantilever
Prior art date: 1989-03-17
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE9090105035T

Other languages

English (en)

Other versions

DE69001692T2 (de

Inventor

Tsugiko Takase

Hideo Adachi

Takao Okada

Hisanari Shimazu

Hideo Tomabechi

Hiroshi Kajimura

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Olympus Corp

Original Assignee

Olympus Optical Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1989-03-17

Filing date

1990-03-16

Publication date

1993-07-01

1989-03-17 Priority claimed from JP6556589A external-priority patent/JPH02245632A/ja

1990-03-16 Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd

1993-07-01 Application granted granted Critical

1993-07-01 Publication of DE69001692D1 publication Critical patent/DE69001692D1/de

1993-12-23 Publication of DE69001692T2 publication Critical patent/DE69001692T2/de

2010-03-17 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
- G01Q10/06—Circuits or algorithms therefor
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q20/00—Monitoring the movement or position of the probe
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q20/00—Monitoring the movement or position of the probe
- G01Q20/02—Monitoring the movement or position of the probe by optical means
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
- G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/852—Manufacture, treatment, or detection of nanostructure with scanning probe for detection of specific nanostructure sample or nanostructure-related property

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Health & Medical Sciences (AREA)
General Health & Medical Sciences (AREA)
Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
Radiology & Medical Imaging (AREA)
Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Nanotechnology (AREA)
Analytical Chemistry (AREA)
Crystallography & Structural Chemistry (AREA)
Length Measuring Devices With Unspecified Measuring Means (AREA)
Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

DE90105035T 1989-03-17 1990-03-16 Sensor mit freitragendem Ausleger. Expired - Fee Related DE69001692T2 (de)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP6556589A JPH02245632A (ja)	1989-03-17	1989-03-17	局部真空計
JP6556689		1989-03-17

Publications (2)

Publication Number	Publication Date
DE69001692D1 true DE69001692D1 (de)	1993-07-01
DE69001692T2 DE69001692T2 (de)	1993-12-23

Family

ID=26406708

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE90105035T Expired - Fee Related DE69001692T2 (de)	1989-03-17	1990-03-16	Sensor mit freitragendem Ausleger.

Country Status (3)

Country	Link
US (1)	US5079958A (de)
EP (1)	EP0387906B1 (de)
DE (1)	DE69001692T2 (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5260824A (en) *	1989-04-24	1993-11-09	Olympus Optical Co., Ltd.	Atomic force microscope
JP2741629B2 (ja) *	1990-10-09	1998-04-22	キヤノン株式会社	カンチレバー型プローブ、それを用いた走査型トンネル顕微鏡及び情報処理装置
JPH05196458A (ja) *	1991-01-04	1993-08-06	Univ Leland Stanford Jr	原子力顕微鏡用ピエゾ抵抗性片持ばり構造体
US5375087A (en) *	1991-02-04	1994-12-20	The United States Of America As Represented By The Secretary Of Commerce	Tunneling-stabilized magnetic reading and recording
JP3198355B2 (ja) *	1991-05-28	2001-08-13	キヤノン株式会社	微小変位素子及びこれを用いた走査型トンネル顕微鏡、情報処理装置
US5262643A (en) *	1992-06-12	1993-11-16	International Business Machines Corp.	Automatic tip approach method and apparatus for scanning probe microscope
US5424241A (en) *	1992-08-21	1995-06-13	Smiths Industries Aerospace & Defense Systems, Inc.	Method of making a force detecting sensor
US5526703A (en) *	1992-08-21	1996-06-18	Smiths Industries Aerospace & Defense Systems, Inc.	Force detecting sensor and method of making
JP2639308B2 (ja) *	1992-11-19	1997-08-13	富士電機株式会社	力センサ，温度センサおよび温度・力センサ装置
US5503018A (en) *	1992-12-08	1996-04-02	Alliedsignal Inc.	Tunnel current sensor with force relief protection
US5377545A (en) *	1992-12-08	1995-01-03	Alliedsignal Inc.	Servo accelerometer with tunnel current sensor and complementary electrostatic drive
US5420688A (en) *	1992-12-14	1995-05-30	Farah; John	Interferometric fiber optic displacement sensor
DE4310349C2 (de) *	1993-03-30	2000-11-16	Inst Mikrotechnik Mainz Gmbh	Sensorkopf und Verfahren zu seiner Herstellung
US5444244A (en) *	1993-06-03	1995-08-22	Park Scientific Instruments Corporation	Piezoresistive cantilever with integral tip for scanning probe microscope
US5454260A (en) *	1993-12-20	1995-10-03	General Motors Corporation	Non destructive adhesion testing
CN1119628C (zh) *	1997-09-08	2003-08-27	日本碍子株式会社	质量传感器和质量检测方法
US6455000B1 (en) *	1999-07-12	2002-09-24	Fantom Technologies Inc.	Method and apparatus for measuring the concentration of a gas
US20030144096A1 (en) *	2002-01-29	2003-07-31	Ming-Hsin Lee	Inflatable device
DE10235370A1 (de) *	2002-08-02	2004-02-12	Robert Bosch Gmbh	Mikromechanisches Bauelement
WO2004104516A2 (en) *	2003-05-21	2004-12-02	The Secretary Of State For Trade And Industry	Spring constant calibration device
US7309866B2 (en) *	2004-06-30	2007-12-18	Intel Corporation	Cosmic ray detectors for integrated circuit chips
US8800390B2 (en) *	2006-02-07	2014-08-12	Michelin Recherche Et Technique S.A.	Contact detector with piezoelectric sensor
JP5122775B2 (ja)	2006-08-23	2013-01-16	株式会社ミツトヨ	測定装置
KR100806960B1 (ko) *	2006-08-31	2008-02-22	한국표준과학연구원	발열판과 캔틸레버를 이용한 진공계
DE102007033441B4 (de) *	2007-07-18	2013-04-18	SIOS Meßtechnik GmbH	Vorrichtung zur gleichzeitigen Messung von Kräften
US8544324B2 (en) *	2007-08-24	2013-10-01	Pilsne Research Co., L.L.C.	Quantum tunnelling sensor device and method
JP5164743B2 (ja) *	2008-08-27	2013-03-21	エスアイアイ・ナノテクノロジー株式会社	カンチレバー、カンチレバーシステム及びプローブ顕微鏡並びに吸着質量センサ
WO2010034541A1 (de) *	2008-09-23	2010-04-01	Robert Bosch Gmbh	Haltebolzen
JP2011169748A (ja) *	2010-02-18	2011-09-01	Olympus Corp	光テコ方式カンチレバー変位検出機構
EP2773941A1 (de) *	2011-11-04	2014-09-10	Danmarks Tekniske Universitet	Sensor und verfahren auf resonanzfaserbasis für aerosolpartikel
JP5778619B2 (ja) *	2012-05-02	2015-09-16	セイコーインスツル株式会社	圧力センサ
US9267963B2 (en) *	2012-11-08	2016-02-23	The Board Of Trustees Of The Leland Stanford Junior University	Interferometric atomic-force microscopy device and method
EP3718960B1 (de) *	2014-12-10	2023-10-25	Paul D. Okulov	System zur überwachung der strukturellen integrität

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3561253A (en) *	1969-03-26	1971-02-09	Thermo Systems Inc	Apparatus and method of measurement of particulate mass
US3653253A (en) *	1970-01-05	1972-04-04	Thermo Systems Inc	Aerosol mass concentration spectrometer
US3723778A (en) *	1972-02-07	1973-03-27	Inficon Inc	Thickness sensor for sputtering systems utilizing magnetic deflection of electrons for thermal protection
US4157661A (en) *	1978-03-07	1979-06-12	Milltronics Limited	Flowmeters
DE3412724A1 (de) *	1984-04-04	1985-10-17	Siemens AG, 1000 Berlin und 8000 München	Verfahren und anordnung zum messen der schichtdicke und/oder der konzentration von auf substraten abgeschiedenen duennen schichten waehrend ihrer herstellung
US4638669A (en) *	1985-05-07	1987-01-27	Massachusetts Institute Of Technology	Quantum tunneling cantilever accelerometer
US4724318A (en) *	1985-11-26	1988-02-09	International Business Machines Corporation	Atomic force microscope and method for imaging surfaces with atomic resolution
EP0262253A1 (de) *	1986-10-03	1988-04-06	International Business Machines Corporation	Mikromechanische Fühlervorrichtung für atomare Kräfte
DE3789373T2 (de) *	1986-12-24	1994-06-23	Canon Kk	Aufnahmegerät und Wiedergabegerät.
DE3771711D1 (de) *	1987-05-12	1991-08-29	Ibm	Atomares kraeftemikroskop mit oscillierendem quarz.
DE3777402D1 (de) *	1987-05-12	1992-04-16	Ibm	Tastkopf fuer atomare kraefte zum untersuchen der topographie einer oberflaeche.
JP2756254B2 (ja) *	1988-03-25	1998-05-25	キヤノン株式会社	記録装置及び再生装置

1990
- 1990-03-12 US US07/492,811 patent/US5079958A/en not_active Expired - Fee Related
- 1990-03-16 DE DE90105035T patent/DE69001692T2/de not_active Expired - Fee Related
- 1990-03-16 EP EP90105035A patent/EP0387906B1/de not_active Expired - Lifetime

Also Published As

Publication number	Publication date
DE69001692T2 (de)	1993-12-23
US5079958A (en)	1992-01-14
EP0387906A2 (de)	1990-09-19
EP0387906B1 (de)	1993-05-26
EP0387906A3 (de)	1991-02-13

Publication	Publication Date	Title
DE69001692D1 (de)	1993-07-01	Sensor mit freitragendem ausleger.
DE69019485D1 (de)	1995-06-22	Magnetoresistiver Fühler.
DE58902396D1 (de)	1992-11-12	Positionsgeber.
DE69016346D1 (de)	1995-03-09	Messaufnehmer mit Selbsteichfunktion.
FI905859L (fi)	1991-05-29	Funktionella vaetskor.
DE68916010D1 (de)	1994-07-14	Optischer Messfühler.
DE68920009D1 (de)	1995-01-26	Nassbaggervorrichtung.
DE68903886D1 (de)	1993-01-28	Bikomponentenmaterial.
DE69007802D1 (de)	1994-05-11	Linearer Positionssensor.
DE69017213D1 (de)	1995-03-30	Beschleunigungsmesser mit feedback.
DE68906839D1 (de)	1993-07-08	Photoelektrischer fuehler.
DE68921003D1 (de)	1995-03-16	Sonden.
DE68918549D1 (de)	1994-11-03	Verschiebungsmessapparat.
DE68913418D1 (de)	1994-04-07	Stromsensor.
DE69016919D1 (de)	1995-03-23	Optischer Sensor.
DE68900533D1 (de)	1992-01-23	Optischer positionssensor.
DE69006406D1 (de)	1994-03-17	Brennerstein-Aufbau.
DE68905126D1 (de)	1993-04-08	Geschwindigkeitsmessaufnehmeranordnung mit mitteln gegen uebersprechen.
DE58907253D1 (de)	1994-04-21	Optoelektronische fühleinrichtung.
DE58902436D1 (de)	1992-11-12	Optoelektronische messanordnung.
FI894253A0 (fi)	1989-09-08	Tung plaotskaermaskin.
IT1236419B (it)	1993-03-01	Elevatore semovente con retroescavatore.
DE69005821D1 (de)	1994-02-17	Kran.
NO892999D0 (no)	1989-07-21	Sensor.
DE68909157D1 (de)	1993-10-21	Elektromagnetischer Kraftsensor.

Legal Events

Date	Code	Title
1994-06-30	8364	No opposition during term of opposition
1995-02-23	8320	Willingness to grant licences declared (paragraph 23)
2000-05-11	8339	Ceased/non-payment of the annual fee