DE68911093D1 - Verfahren zur Reinigung von gasförmigen Hydriden. - Google Patents

Verfahren zur Reinigung von gasförmigen Hydriden.

Info

Publication number: DE68911093D1
Authority: DE; Germany
Prior art keywords: purification; gaseous hydrides; hydrides; gaseous
Prior art date: 1988-09-26
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

DE89117740T

Other languages

English (en)

Other versions

DE68911093T2 (de

Inventor

Koichi Kitahara

Takashi Shimada

Keiichi Iwata

Noboru Akita

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Japan Pionics Ltd

Original Assignee

Japan Pionics Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1988-09-26

Filing date

1989-09-26

Publication date

1994-01-13

1988-09-26 Priority claimed from JP63238920A external-priority patent/JP2732262B2/ja

1988-10-31 Priority claimed from JP27326788A external-priority patent/JP2592312B2/ja

1988-11-02 Priority claimed from JP27617788A external-priority patent/JP2640517B2/ja

1988-11-10 Priority claimed from JP28236288A external-priority patent/JP2700396B2/ja

1988-11-16 Priority claimed from JP28776588A external-priority patent/JP2627324B2/ja

1989-01-13 Priority claimed from JP1004748A external-priority patent/JP2700398B2/ja

1989-01-13 Priority claimed from JP1004750A external-priority patent/JP2700400B2/ja

1989-01-13 Priority claimed from JP1004749A external-priority patent/JP2700399B2/ja

1989-02-02 Priority claimed from JP1022685A external-priority patent/JP2732277B2/ja

1989-02-02 Priority claimed from JP1022684A external-priority patent/JP2700401B2/ja

1989-09-26 Application filed by Japan Pionics Ltd filed Critical Japan Pionics Ltd

1994-01-13 Publication of DE68911093D1 publication Critical patent/DE68911093D1/de

1994-04-28 Publication of DE68911093T2 publication Critical patent/DE68911093T2/de

1994-04-28 Application granted granted Critical

2009-09-27 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Classifications

- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B35/00—Boron; Compounds thereof
- C01B35/02—Boron; Borides
- C01B35/04—Metal borides
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B19/00—Selenium; Tellurium; Compounds thereof
- C01B19/007—Tellurides or selenides of metals
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B19/00—Selenium; Tellurium; Compounds thereof
- C01B19/04—Binary compounds including binary selenium-tellurium compounds
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B25/00—Phosphorus; Compounds thereof
- C01B25/06—Hydrogen phosphides
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B25/00—Phosphorus; Compounds thereof
- C01B25/08—Other phosphides
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
- C01B33/046—Purification
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/06—Metal silicides
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B6/00—Hydrides of metals including fully or partially hydrided metals, alloys or intermetallic compounds ; Compounds containing at least one metal-hydrogen bond, e.g. (GeH3)2S, SiH GeH; Monoborane or diborane; Addition complexes thereof
- C01B6/34—Purification; Stabilisation

Landscapes

Chemical & Material Sciences (AREA)
Organic Chemistry (AREA)
Inorganic Chemistry (AREA)
Silicon Compounds (AREA)
Catalysts (AREA)
Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Inorganic Compounds Of Heavy Metals (AREA)

DE89117740T 1988-09-26 1989-09-26 Verfahren zur Reinigung von gasförmigen Hydriden. Expired - Fee Related DE68911093T2 (de)

Applications Claiming Priority (10)

Application Number	Priority Date	Filing Date	Title
JP63238920A JP2732262B2 (ja)	1988-09-26	1988-09-26	アルシンの精製方法
JP27326788A JP2592312B2 (ja)	1988-10-31	1988-10-31	ホスフィンの精製方法
JP27617788A JP2640517B2 (ja)	1988-11-02	1988-11-02	セレン化水素の精製方法
JP28236288A JP2700396B2 (ja)	1988-11-10	1988-11-10	ジボランの精製方法
JP28776588A JP2627324B2 (ja)	1988-11-16	1988-11-16	シランの精製方法
JP1004748A JP2700398B2 (ja)	1989-01-13	1989-01-13	水素化物ガスの精製方法
JP1004750A JP2700400B2 (ja)	1989-01-13	1989-01-13	水素化物ガスの精製方法
JP1004749A JP2700399B2 (ja)	1989-01-13	1989-01-13	水素化物ガスの精製方法
JP1022685A JP2732277B2 (ja)	1989-02-02	1989-02-02	水素化物ガスの精製方法
JP1022684A JP2700401B2 (ja)	1989-02-02	1989-02-02	水素化物ガスの精製方法

Publications (2)

Publication Number	Publication Date
DE68911093D1 true DE68911093D1 (de)	1994-01-13
DE68911093T2 DE68911093T2 (de)	1994-04-28

Family

ID=27579524

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE89117740T Expired - Fee Related DE68911093T2 (de)	1988-09-26	1989-09-26	Verfahren zur Reinigung von gasförmigen Hydriden.

Country Status (4)

Country	Link
US (1)	US4976942A (de)
EP (1)	EP0361386B1 (de)
KR (1)	KR960010082B1 (de)
DE (1)	DE68911093T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2732262B2 (ja) *	1988-09-26	1998-03-25	日本パイオニクス株式会社	アルシンの精製方法
JP3052317B2 (ja) *	1989-10-25	2000-06-12	三菱瓦斯化学株式会社	脱酸素剤
IT1246358B (it) *	1990-07-12	1994-11-17	Getters Spa	Processo per eliminare impurita' da un gas idruro
JPH04318920A (ja) *	1991-04-17	1992-11-10	Mitsubishi Electric Corp	気相結晶成長装置
EP0523525B1 (de) *	1991-07-17	1995-04-12	Japan Pionics Co., Ltd.	Verfahren zur Reinigung von gasförmigen organometallischen Verbindungen
CN1309619A (zh)	1998-04-09	2001-08-22	Uhp材料有限公司	乙硼烷的制备和纯化
US20030143129A1 (en) *	2001-10-31	2003-07-31	Rabellino Lawrence A.	Air purification system and method for maintaining nitrogen and oxygen ratios with regenerative purification units
US8268046B2 (en)	2008-05-16	2012-09-18	Matheson Tri-Gas	Removal of impurities from hydrogen-containing materials
DE102012004417A1 (de) *	2012-03-08	2013-09-12	Technische Universität Bergakademie Freiberg	Verfahren zur Herstellung von Aminboranen des Typs R3NBH3
CN105551810B (zh) *	2016-01-01	2018-03-27	三峡大学	一种原位电极的溶剂热制备方法
CN109759051B (zh) *	2019-01-15	2021-10-22	昆明理工大学	一种利用Zr-Nd-O改性白炭黑的催化剂制备方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2806767A (en) *	1953-08-27	1957-09-17	Universal Oil Prod Co	Method of removing oxygen from mixtures of hydrogen and nitrogen
US3019087A (en) *	1958-09-29	1962-01-30	Merck & Co Inc	Purification of silane
DE1667129C3 (de) *	1967-06-20	1978-06-29	Messer Griesheim Gmbh, 6000 Frankfurt	Verfahren zur Entfernung von homogen gelösten Beimengungen, insbesondere Sauerstoff, aus Gasen oder Flüssigkeiten
JPS54160577A (en) *	1978-06-09	1979-12-19	Teijin Ltd	Oxygen trapping composition
DD200422A1 (de) *	1981-09-30	1983-05-04	Rolf Kurze	Verfahren zur entfernung von diphosphan aus monophosphanhaltigen gasen
JPS58120511A (ja) *	1982-01-07	1983-07-18	Matsushita Electric Ind Co Ltd	シランの精製法
FR2527473A1 (fr) *	1982-05-25	1983-12-02	Inst Francais Du Petrole	Procede pour l'hydrodesulfuration d'un gaz contenant de l'oxygene et des composes organiques du soufre
JPS6016802A (ja) *	1983-07-01	1985-01-28	Olympus Optical Co Ltd	半導体用原料ガスの純化剤およびその使用方法
GB2152528A (en) *	1984-01-12	1985-08-07	Shell Int Research	Gas purification process
DD224229A1 (de) *	1984-04-27	1985-07-03	Leuna Werke Veb	Verfahren zur entfernung von sauerstoff aus inertgasen
JPS60260412A (ja) *	1984-06-08	1985-12-23	Nippon Chem Ind Co Ltd:The	高純度ホスフインの製造法
DE3618942A1 (de) *	1986-06-05	1987-12-10	Messer Griesheim Gmbh	Masse zur entfernung durch chemiesorption von homogen geloesten beimengungen, insbesondere sauerstoff, aus gasen oder fluessigkeiten

1989
- 1989-09-25 KR KR1019890013748A patent/KR960010082B1/ko not_active IP Right Cessation
- 1989-09-26 DE DE89117740T patent/DE68911093T2/de not_active Expired - Fee Related
- 1989-09-26 EP EP89117740A patent/EP0361386B1/de not_active Expired - Lifetime
- 1989-09-26 US US07/412,750 patent/US4976942A/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
EP0361386A3 (de)	1991-08-28
US4976942A (en)	1990-12-11
KR900004625A (ko)	1990-04-12
EP0361386A2 (de)	1990-04-04
EP0361386B1 (de)	1993-12-01
KR960010082B1 (ko)	1996-07-25
DE68911093T2 (de)	1994-04-28

Publication	Publication Date	Title
DE68922427D1 (de)	1995-06-08	Verfahren zur Zurückgewinnung von sauerstoffreichem Gas.
DE68926732D1 (de)	1996-08-01	Verfahren zur Reinigung von gasförmigem Stickstofftrifluorid
DE69124172D1 (de)	1997-02-27	Verfahren zur Reinigung von Edelgas
DE3854757D1 (de)	1996-01-18	Verfahren zur elektrokatalytischen Umsetzung von leichten Kohlenwasserstoffen in Synthesegas.
DE68922191D1 (de)	1995-05-18	Verfahren zur Produktion von Akrylat und von Akrylat enthaltendem Polymer.
DE68916988D1 (de)	1994-09-01	Verfahren zur Herstellung von gasförmigen Fluoriden.
DE69303074D1 (de)	1996-07-18	Verfahren zur Abtrennung von Stickstoff-Gas
DE69104461D1 (de)	1994-11-10	Verfahren zur Erzeugung von hochreinem Wasserstoff.
DE3888372D1 (de)	1994-04-21	Verfahren zur Reinigung von Hexamethyldisiloxan.
ATE82242T1 (de)	1992-11-15	Verfahren zur gasphasenfluorierung.
DE68909627D1 (de)	1993-11-11	Verfahren zur Herstellung von Aktivkohle.
DE68917143D1 (de)	1994-09-01	Verfahren zur Steigerung der Reinheit von Quarzglas.
DE68915664D1 (de)	1994-07-07	Verfahren zur Herstellung von Rohreinheiten.
DE68921870D1 (de)	1995-04-27	Verfahren zur Reduktion von Stickoxiden.
DE59002817D1 (de)	1993-10-28	Verfahren zur kontinuierlichen Reinigung von Caprolactam.
DE69004229D1 (de)	1993-12-02	Verfahren zur Reinigung von 1,1-Dichlor-1-fluorethan.
DE68914803D1 (de)	1994-05-26	Verfahren zur Reinigung von Abgasen.
DE3768610D1 (de)	1991-04-18	Verfahren zur gasverfluessigung.
DE69012896D1 (de)	1994-11-03	Verfahren zur Zersetzung von Chlorfluorkohlenstoffen.
DE68911093D1 (de)	1994-01-13	Verfahren zur Reinigung von gasförmigen Hydriden.
DE69016879D1 (de)	1995-03-23	Verfahren zur Reinigung von N-Phosphonmethylglyzin.
DE68927606D1 (de)	1997-02-13	Verfahren zur Produktion von Halbtondaten
DE68908576D1 (de)	1993-09-30	Verfahren zur Herstellung von Aktivkohle.
DE69111927D1 (de)	1995-09-14	Verfahren zur Entschwefelung von Abgasen.
DE68913283D1 (de)	1994-03-31	Verfahren zur Abtrennung von Kohlendioxid.

Legal Events

Date	Code	Title	Description
1995-01-05	8364	No opposition during term of opposition
2004-07-08	8339	Ceased/non-payment of the annual fee