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DE60316955D1 - Verfahren zur bildung von atomkraftmikroskopspitzen - Google Patents

Verfahren zur bildung von atomkraftmikroskopspitzen

Info

Publication number
DE60316955D1
DE60316955D1 DE60316955T DE60316955T DE60316955D1 DE 60316955 D1 DE60316955 D1 DE 60316955D1 DE 60316955 T DE60316955 T DE 60316955T DE 60316955 T DE60316955 T DE 60316955T DE 60316955 D1 DE60316955 D1 DE 60316955D1
Authority
DE
Germany
Prior art keywords
forming atomic
microscopes
atomic microscopes
forming
atomic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60316955T
Other languages
English (en)
Inventor
Kim Pong Daniel Chir
Sooriakumar Kathirgamasundaram
Keith Bryan Patmon
Lay Har Angeline Tee
Kitt Wai Kok
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sensfab Pte Ltd
Original Assignee
Sensfab Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sensfab Pte Ltd filed Critical Sensfab Pte Ltd
Application granted granted Critical
Publication of DE60316955D1 publication Critical patent/DE60316955D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/06—Probe tip arrays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Weting (AREA)
  • Micromachines (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE60316955T 2002-06-03 2003-05-20 Verfahren zur bildung von atomkraftmikroskopspitzen Expired - Lifetime DE60316955D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SG200203275A SG101537A1 (en) 2002-06-03 2002-06-03 Method of forming atomic force microscope tips
PCT/SG2003/000119 WO2003102966A2 (en) 2002-06-03 2003-05-20 Method of forming atomic force microscope tips

Publications (1)

Publication Number Publication Date
DE60316955D1 true DE60316955D1 (de) 2007-11-29

Family

ID=29708002

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60316955T Expired - Lifetime DE60316955D1 (de) 2002-06-03 2003-05-20 Verfahren zur bildung von atomkraftmikroskopspitzen

Country Status (9)

Country Link
US (1) US7247248B2 (de)
EP (1) EP1532637B1 (de)
JP (1) JP2005528626A (de)
KR (1) KR20050012777A (de)
AU (1) AU2003273508A1 (de)
DE (1) DE60316955D1 (de)
SG (1) SG101537A1 (de)
TW (1) TWI231517B (de)
WO (1) WO2003102966A2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7843695B2 (en) * 2007-07-20 2010-11-30 Honeywell International Inc. Apparatus and method for thermal management using vapor chamber
CN102642805B (zh) * 2012-04-09 2015-01-07 北京大学 一种制备碳化硅微纳米针尖的方法
US8689361B1 (en) 2012-10-29 2014-04-01 Oicmicro, LLC Method of making thin film probe tip for atomic force microscopy
CN103086321B (zh) * 2013-01-25 2015-08-05 中国科学院上海微系统与信息技术研究所 一种在(111)型硅片上制作单晶硅纳米长针尖的方法
CN113504394B (zh) * 2021-07-12 2024-01-23 中国科学院半导体研究所 镀膜探针的圆片级制备方法及镀膜探针

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4307507A (en) * 1980-09-10 1981-12-29 The United States Of America As Represented By The Secretary Of The Navy Method of manufacturing a field-emission cathode structure
DE3572030D1 (en) * 1985-03-07 1989-09-07 Ibm Scanning tunneling microscope
US4685996A (en) * 1986-10-14 1987-08-11 Busta Heinz H Method of making micromachined refractory metal field emitters
US5066358A (en) * 1988-10-27 1991-11-19 Board Of Trustees Of The Leland Stanford Juninor University Nitride cantilevers with single crystal silicon tips
US4943719A (en) * 1989-01-17 1990-07-24 The Board Of Trustees Of The Leland Stanford University Microminiature cantilever stylus
EP0413041B1 (de) * 1989-08-16 1992-07-15 International Business Machines Corporation Verfahren für die Herstellung mikromechanischer Messfühler für AFM/STM-Profilometrie und mikromechanischer Messfühlerkopf
JP2624873B2 (ja) * 1990-05-16 1997-06-25 松下電器産業株式会社 原子間力顕微鏡用探針およびその製造方法
US5367165A (en) * 1992-01-17 1994-11-22 Olympus Optical Co., Ltd. Cantilever chip for scanning probe microscope
US5499938A (en) * 1992-07-14 1996-03-19 Kabushiki Kaisha Toshiba Field emission cathode structure, method for production thereof, and flat panel display device using same
JPH0792173A (ja) * 1993-09-24 1995-04-07 Agency Of Ind Science & Technol 原子間力顕微鏡用カンチレバーとその製造方法
US5883387A (en) * 1994-11-15 1999-03-16 Olympus Optical Co., Ltd. SPM cantilever and a method for manufacturing the same
JP3576655B2 (ja) * 1995-09-14 2004-10-13 キヤノン株式会社 微小探針の製造方法及びその製造用雌型基板、並びにその微小探針を有するプローブの製造方法
FR2739494B1 (fr) * 1995-09-29 1997-11-14 Suisse Electronique Microtech Procede de fabrication de pieces de micromecanique ayant une partie en diamant constituee au moins d'une pointe, et pieces de micromecanique comportant au moins une pointe en diamant
US5965218A (en) * 1997-03-18 1999-10-12 Vlsi Technology, Inc. Process for manufacturing ultra-sharp atomic force microscope (AFM) and scanning tunneling microscope (STM) tips
US6156216A (en) * 1998-03-25 2000-12-05 The Board Of Trustees Of The Leland Stanford Junior University Method for making nitride cantilevers devices
JP2002524295A (ja) * 1998-09-12 2002-08-06 ユニバーズィテート ゲゼームトクシューレ カッセル 半導体材料における開口及びその製造方法並びにその使用
DE69938511T2 (de) * 1999-02-04 2009-05-07 Institute Of Microelectronics Mikro-relais
US6680900B1 (en) * 1999-06-04 2004-01-20 Ricoh Company, Ltd. Optical-pickup slider, manufacturing method thereof, probe and manufacturing method thereof, and probe array and manufacturing method thereof
JP2001021478A (ja) 1999-07-05 2001-01-26 Hitachi Ltd 走査プローブ顕微鏡用探針、その製造法および描画装置
JP2004500548A (ja) * 1999-07-15 2004-01-08 エフイーアイ　カンパニー マイクロマシーン化されたマイクロプローブチップ
EP1202047A1 (de) * 2000-10-27 2002-05-02 Interuniversitair Micro-Elektronica Centrum Herstellungsverfahren für Spitzen und Probenköpfen von STM's oder AFM's
KR100499125B1 (ko) * 2002-04-25 2005-07-04 삼성전자주식회사 커패시턴스 변화를 이용하는 정보 재생 장치 및 방법
US6886395B2 (en) * 2003-01-16 2005-05-03 Veeco Instruments Inc. Method of fabricating a surface probing device and probing device produced thereby

Also Published As

Publication number Publication date
JP2005528626A (ja) 2005-09-22
WO2003102966A2 (en) 2003-12-11
AU2003273508A1 (en) 2003-12-19
TWI231517B (en) 2005-04-21
US20050161430A1 (en) 2005-07-28
TW200307969A (en) 2003-12-16
US7247248B2 (en) 2007-07-24
EP1532637B1 (de) 2007-10-17
EP1532637A2 (de) 2005-05-25
WO2003102966A8 (en) 2005-04-07
KR20050012777A (ko) 2005-02-02
SG101537A1 (en) 2004-01-30
WO2003102966A3 (en) 2004-04-29

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Legal Events

Date Code Title Description
8332 No legal effect for de