DE60314548D1 - Sonde zur prüfung der elektrischen leitfahigkeit - Google Patents

Sonde zur prüfung der elektrischen leitfahigkeit

Info

Publication number: DE60314548D1
Authority: DE; Germany
Prior art keywords: probe; check; electrical conductivity; conductivity; electrical
Prior art date: 2003-05-13
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

DE60314548T

Other languages

English (en)

Other versions

DE60314548T2 (de

Inventor

Kiyotoshi Miura

Yuji Miyagi

Akihisa Akahira

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

NIHON MICRONICS MUSASHINO KK

Micronics Japan Co Ltd

Original Assignee

NIHON MICRONICS MUSASHINO KK

Micronics Japan Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2003-05-13

Filing date

2003-08-29

Publication date

2007-08-02

2003-08-29 Application filed by NIHON MICRONICS MUSASHINO KK, Micronics Japan Co Ltd filed Critical NIHON MICRONICS MUSASHINO KK

2007-08-02 Publication of DE60314548D1 publication Critical patent/DE60314548D1/de

2008-02-28 Application granted granted Critical

2008-02-28 Publication of DE60314548T2 publication Critical patent/DE60314548T2/de

2023-08-30 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06727—Cantilever beams
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
Manufacturing & Machinery (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Power Engineering (AREA)
Measuring Leads Or Probes (AREA)
Testing Or Measuring Of Semiconductors Or The Like (AREA)
Testing Of Individual Semiconductor Devices (AREA)

DE60314548T 2003-05-13 2003-08-29 Sonde zur prüfung der elektrischen leitfähigkeit Expired - Lifetime DE60314548T2 (de)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
JP2003134753		2003-05-13
JP2003134753		2003-05-13
PCT/JP2003/011117 WO2004102207A1 (ja)	2003-05-13	2003-08-29	通電試験用プローブ

Publications (2)

Publication Number	Publication Date
DE60314548D1 true DE60314548D1 (de)	2007-08-02
DE60314548T2 DE60314548T2 (de)	2008-02-28

Family

ID=33447156

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
DE60314548T Expired - Lifetime DE60314548T2 (de)	2003-05-13	2003-08-29	Sonde zur prüfung der elektrischen leitfähigkeit

Country Status (10)

Country	Link
US (1)	US7449906B2 (de)
EP (1)	EP1624308B1 (de)
JP (1)	JP4421481B2 (de)
KR (1)	KR100664393B1 (de)
CN (1)	CN100343676C (de)
AU (1)	AU2003261854A1 (de)
CA (1)	CA2509956C (de)
DE (1)	DE60314548T2 (de)
TW (1)	TWI233490B (de)
WO (1)	WO2004102207A1 (de)

Families Citing this family (56)

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DE112005003667B4 (de) *	2005-08-09	2018-11-15	Kabushiki Kaisha Nihon Micronics	Elektrische Prüfsonde
JP2007147518A (ja) *	2005-11-29	2007-06-14	Japan Electronic Materials Corp	電極子装置
JP4974021B2 (ja) *	2006-02-19	2012-07-11	軍生木本	プローブ組立体
TWI397696B (zh) *	2006-02-19	2013-06-01	Gunsei Kimoto	Probe assembly
JP2007240235A (ja) *	2006-03-07	2007-09-20	Micronics Japan Co Ltd	通電試験用プローブおよびプローブ組立体
WO2007108110A1 (ja) *	2006-03-15	2007-09-27	Kabushiki Kaisha Nihon Micronics	通電試験用プローブおよびプローブ組立体
JP4841298B2 (ja) *	2006-04-14	2011-12-21	株式会社日本マイクロニクス	プローブシートの製造方法
JP5077735B2 (ja) *	2006-08-07	2012-11-21	軍生木本	複数梁合成型接触子組立
JP5123508B2 (ja) *	2006-09-26	2013-01-23	株式会社日本マイクロニクス	通電試験用プローブおよび通電試験用プローブ組立体
TW200815763A (en) *	2006-09-26	2008-04-01	Nihon Micronics Kabushiki Kaisha	Electrical test probe and electrical test probe assembly
JP5096737B2 (ja)	2006-12-14	2012-12-12	株式会社日本マイクロニクス	プローブおよびその製造方法
JP4916893B2 (ja)	2007-01-05	2012-04-18	株式会社日本マイクロニクス	プローブの製造方法
JP5113392B2 (ja)	2007-01-22	2013-01-09	株式会社日本マイクロニクス	プローブおよびそれを用いた電気的接続装置
JP4916903B2 (ja)	2007-02-06	2012-04-18	株式会社日本マイクロニクス	プローブの製造方法
JP2008224640A (ja) *	2007-03-08	2008-09-25	Isao Kimoto	先端回転型プローブ組立
KR100912088B1 (ko)	2007-06-27	2009-08-13	가부시키가이샤 니혼 마이크로닉스	통전 시험용 프로브
US20090079455A1 (en) *	2007-09-26	2009-03-26	Formfactor, Inc.	Reduced scrub contact element
KR100825294B1 (ko) *	2007-10-05	2008-04-25	주식회사 코디에스	탐침
WO2009075041A1 (ja)	2007-12-13	2009-06-18	Kabushiki Kaisha Nihon Micronics	電気的接続装置及びこの電気的接続装置に用いる接触子
JP5046909B2 (ja) *	2007-12-21	2012-10-10	株式会社日本マイクロニクス	電気試験用接触子、これを用いる電気的接続装置、及び接触子の製造方法
KR100815075B1 (ko) *	2007-12-28	2008-03-20	주식회사 파이컴	접속 소자
WO2009084770A1 (en)	2007-12-28	2009-07-09	Phicom Corporation	Contact tip structure of a connecting element
KR100819364B1 (ko) *	2007-12-28	2008-04-04	주식회사 파이컴	접촉 팁의 위치 결정 방법
KR100814640B1 (ko) *	2007-12-28	2008-03-18	주식회사 파이컴	경사 빔에 결합되는 접촉 팁 구조
KR100814325B1 (ko) *	2007-12-28	2008-03-18	주식회사 파이컴	접속 소자의 접촉 팁 구조
JP2009229410A (ja) *	2008-03-25	2009-10-08	Micronics Japan Co Ltd	電気試験用接触子及びその製造方法
JP5643476B2 (ja) *	2008-04-16	2014-12-17	日本電子材料株式会社	二重弾性機構プローブカード
KR100947862B1 (ko) *	2008-06-30	2010-03-18	한국기계연구원	힌지 구조를 갖는 캔틸레버형 미세 접촉 프로브
KR101033909B1 (ko) *	2008-12-09	2011-05-11	주식회사 유니멤스	프로브니들
WO2011030379A1 (ja) *	2009-09-10	2011-03-17	株式会社アドバンテスト	通電部材、接続部材、試験装置および接続部材を修繕する方法
JP5991823B2 (ja)	2012-02-14	2016-09-14	株式会社日本マイクロニクス	電気的接続装置及びその組立方法
CN103257255A (zh) *	2012-02-20	2013-08-21	木本军生	探针组装
JP5968158B2 (ja)	2012-08-10	2016-08-10	株式会社日本マイクロニクス	コンタクトプローブ及びプローブカード
JP5999192B2 (ja) *	2012-11-07	2016-09-28	オムロン株式会社	接続端子およびこれを用いた導通検査器具
JP6400446B2 (ja) *	2014-11-28	2018-10-03	Ｔｏｗａ株式会社	突起電極付き板状部材の製造方法、突起電極付き板状部材、電子部品の製造方法、及び電子部品
CN105158527B (zh) *	2015-09-02	2017-09-29	合肥通用机械研究院	一种电磁阀接电装置
JP6737002B2 (ja) *	2016-06-17	2020-08-05	オムロン株式会社	プローブピン
JP7471778B2 (ja) *	2019-03-29	2024-04-22	株式会社日本マイクロニクス	プローブカード
JP1646397S (de) *	2019-05-21	2019-11-25
JP2021028603A (ja)	2019-08-09	2021-02-25	株式会社日本マイクロニクス	電気的接触子及び電気的接続装置
JP7353859B2 (ja) *	2019-08-09	2023-10-02	株式会社日本マイクロニクス	電気的接触子及び電気的接続装置
JP7402652B2 (ja) *	2019-10-04	2023-12-21	株式会社日本マイクロニクス	光プローブ、光プローブアレイ、検査システムおよび検査方法
KR20220133355A (ko) *	2021-03-24	2022-10-05	삼성전자주식회사	반도체 소자 검사용 프로브 및 이를 포함하는 프로브 카드
JP2022187216A (ja) *	2021-06-07	2022-12-19	株式会社日本マイクロニクス	プローブ
JP2023141024A (ja) *	2022-03-23	2023-10-05	株式会社日本マイクロニクス	プローブ、プローブ保持装置およびプローブの製造方法
WO2024062562A1 (ja) *	2022-09-21	2024-03-28	日本電子材料株式会社	プローブカード用カンチレバー型プローブおよびプローブカード
TWI859864B (zh) *	2023-05-18	2024-10-21	中華精測科技股份有限公司	懸臂式探針卡裝置及吸光式探針
TWI843571B (zh) *	2023-05-18	2024-05-21	中華精測科技股份有限公司	具有散射式探針的懸臂式探針卡裝置
WO2025028283A1 (ja) *	2023-08-02	2025-02-06	三菱電機株式会社	パワー半導体測定装置およびプローブ治具

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2003
- 2003-08-29 KR KR1020047021434A patent/KR100664393B1/ko not_active Expired - Lifetime
- 2003-08-29 DE DE60314548T patent/DE60314548T2/de not_active Expired - Lifetime
- 2003-08-29 EP EP03816970A patent/EP1624308B1/de not_active Expired - Lifetime
- 2003-08-29 WO PCT/JP2003/011117 patent/WO2004102207A1/ja active IP Right Grant
- 2003-08-29 JP JP2004571872A patent/JP4421481B2/ja not_active Expired - Lifetime
- 2003-08-29 AU AU2003261854A patent/AU2003261854A1/en not_active Abandoned
- 2003-08-29 CN CNB038175428A patent/CN100343676C/zh not_active Expired - Lifetime
- 2003-08-29 CA CA002509956A patent/CA2509956C/en not_active Expired - Fee Related
- 2003-08-29 US US10/556,436 patent/US7449906B2/en not_active Expired - Lifetime
2004
- 2004-03-30 TW TW093108588A patent/TWI233490B/zh not_active IP Right Cessation

Also Published As

Publication number	Publication date
US20070216433A1 (en)	2007-09-20
JPWO2004102207A1 (ja)	2006-07-13
CA2509956C (en)	2009-08-25
WO2004102207A1 (ja)	2004-11-25
EP1624308A1 (de)	2006-02-08
TWI233490B (en)	2005-06-01
DE60314548T2 (de)	2008-02-28
KR20050012849A (ko)	2005-02-02
CN100343676C (zh)	2007-10-17
AU2003261854A1 (en)	2004-12-03
JP4421481B2 (ja)	2010-02-24
KR100664393B1 (ko)	2007-01-04
CA2509956A1 (en)	2004-11-25
EP1624308B1 (de)	2007-06-20
EP1624308A4 (de)	2006-06-28
TW200426375A (en)	2004-12-01
US7449906B2 (en)	2008-11-11
CN1672056A (zh)	2005-09-21

Publication	Publication Date	Title
DE60314548D1 (de)	2007-08-02	Sonde zur prüfung der elektrischen leitfahigkeit
DE602004013538D1 (de)	2008-06-19	Verbesserte messanordnung
FI20060660L (fi)	2006-07-06	Sähköliitin
DE602006004167D1 (de)	2009-01-22	Verbesserungen an röhrenförmigen elektrischen generatoren
DE60315135D1 (de)	2007-09-06	Therapiesonde
DE602004006951D1 (de)	2007-07-26	Leitfähige paste
DE60314100D1 (de)	2007-07-12	Monatageverfahren eines elektrischen Verbinders
FI20031677A0 (fi)	2003-11-18	Elektrodirakenne sähköisten vasteiden mittaamiseksi ihmiskehosta
DE112006003058A5 (de)	2008-10-09	Elektrisch leitende Kupplung
DE502005001198D1 (de)	2007-09-20	Elektrische Steckverbindung
EP1604994A4 (de)	2009-03-25	Fluoreszente sonden
FR2842908B1 (fr)	2005-07-08	Sonde de contact
DE602004005799D1 (de)	2007-05-24	Verbinder mit verbesserter Zuverlässigkeit
ATA2792002A (de)	2003-07-15	Temperaturfühler
ITTO20030709A1 (it)	2005-03-17	Connettore elettrico
UA12199S (uk)	2006-06-15	Електричний з`єднувач
EP1623953A4 (de)	2011-10-26	Sonde
DE602005003447D1 (de)	2008-01-03	Elektrische Verbindervorrichtung
EP1625828A4 (de)	2009-05-06	Ultraschallsonde
NO20033139D0 (no)	2003-07-09	Elektrisk ledende strengorgan
DE60324268D1 (de)	2008-12-04	Elektrisches Verbindungsgehäuse
DE502005003315D1 (de)	2008-04-30	Wiederlösbare elektrische Steckverbindung
DE602005006960D1 (de)	2008-07-03	Elektrische Verbinderanordnung
DE602005008745D1 (de)	2008-09-18	System zur Messung des Erdwiderstandes durch eine elektrisch leitende Bohrlochverrohrung
ITTO20040784A1 (it)	2005-02-10	Connettore elettrico

Legal Events

Date	Code	Title	Description
2008-07-10	8364	No opposition during term of opposition