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DE60224880D1 - Mikrobolometer und verfahren zu dessen herstellung - Google Patents

Mikrobolometer und verfahren zu dessen herstellung

Info

Publication number
DE60224880D1
DE60224880D1 DE60224880T DE60224880T DE60224880D1 DE 60224880 D1 DE60224880 D1 DE 60224880D1 DE 60224880 T DE60224880 T DE 60224880T DE 60224880 T DE60224880 T DE 60224880T DE 60224880 D1 DE60224880 D1 DE 60224880D1
Authority
DE
Germany
Prior art keywords
microbolometer
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60224880T
Other languages
English (en)
Other versions
DE60224880T2 (de
Inventor
Michel Vilain
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE60224880D1 publication Critical patent/DE60224880D1/de
Publication of DE60224880T2 publication Critical patent/DE60224880T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/023—Particular leg structure or construction or shape; Nanotubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/024—Special manufacturing steps or sacrificial layers or layer structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/0245—Shape of the cavity itself or of elements contained in or suspended over the cavity for performing thermal shunt
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/046—Materials; Selection of thermal materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Manufacturing & Machinery (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
DE60224880T 2001-06-28 2002-06-18 Mikrobolometer und verfahren zu dessen herstellung Expired - Lifetime DE60224880T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0108552A FR2826725B1 (fr) 2001-06-28 2001-06-28 Microbolometres resistants aux temperatures de scenes elevees.
FR0108552 2001-06-28
PCT/FR2002/002096 WO2003002963A1 (fr) 2001-06-28 2002-06-18 Microbolometres et son procede de fabrication

Publications (2)

Publication Number Publication Date
DE60224880D1 true DE60224880D1 (de) 2008-03-20
DE60224880T2 DE60224880T2 (de) 2009-01-22

Family

ID=8864881

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60224880T Expired - Lifetime DE60224880T2 (de) 2001-06-28 2002-06-18 Mikrobolometer und verfahren zu dessen herstellung

Country Status (6)

Country Link
US (1) US7241998B2 (de)
EP (1) EP1399722B1 (de)
JP (1) JP2004530909A (de)
DE (1) DE60224880T2 (de)
FR (1) FR2826725B1 (de)
WO (1) WO2003002963A1 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7554085B2 (en) * 2003-10-09 2009-06-30 Ocas Corp. Bolometric infrared sensor having two-layer structure and method for manufacturing the same
GB0424934D0 (en) 2004-11-12 2004-12-15 Qinetiq Ltd Infrared detector
JP4792980B2 (ja) * 2006-01-12 2011-10-12 日産自動車株式会社 赤外線検出素子
US7786440B2 (en) * 2007-09-13 2010-08-31 Honeywell International Inc. Nanowire multispectral imaging array
FR2930639B1 (fr) * 2008-04-29 2011-07-01 Ulis Detecteur thermique a haute isolation
US8171801B2 (en) * 2008-12-19 2012-05-08 Institut National D'optique Micro-thermistor gas pressure sensor
KR100983818B1 (ko) * 2009-09-02 2010-09-27 한국전자통신연구원 볼로미터용 저항재료, 이를 이용한 적외선 검출기용 볼로미터, 및 이의 제조방법
JP5708122B2 (ja) * 2011-03-25 2015-04-30 日本電気株式会社 熱型赤外線固体撮像素子及びその製造方法
JP2013057526A (ja) * 2011-09-07 2013-03-28 Seiko Epson Corp 赤外線検出素子、赤外線検出素子の製造方法及び電子機器
FR2981198B1 (fr) 2011-10-11 2014-04-04 Commissariat Energie Atomique Structure d'encapsulation de dispositif electronique et procede de realisation d'une telle structure
US8900906B2 (en) * 2012-03-08 2014-12-02 Robert Bosch Gmbh Atomic layer deposition strengthening members and method of manufacture
CN104823030A (zh) * 2012-11-26 2015-08-05 松下知识产权经营株式会社 红外线检测装置
US9130081B2 (en) 2012-12-21 2015-09-08 Robert Bosch Gmbh Bolometer having absorber with pillar structure for thermal shorting
US9199838B2 (en) 2013-10-25 2015-12-01 Robert Bosch Gmbh Thermally shorted bolometer
US10175113B2 (en) * 2017-04-12 2019-01-08 Raytheon Company Thermal protection mechanisms for uncooled microbolometers
FR3081989B1 (fr) * 2018-05-30 2020-08-21 Commissariat Energie Atomique Systeme de detection a pixel sensible comportant un detecteur thermique et un dispositif de compensation
FR3089290B1 (fr) * 2018-11-30 2020-11-06 Commissariat Energie Atomique Detecteur thermique a membrane suspendue comportant une partie deformable de court-circuit thermique
FR3097047B1 (fr) * 2019-06-05 2021-05-14 Lynred Microbolomètre muni d’une fonction de filtrage
JPWO2021241088A1 (de) * 2020-05-25 2021-12-02

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2674545B2 (ja) * 1995-01-20 1997-11-12 日本電気株式会社 赤外線検出器及びその駆動方法
US6080988A (en) * 1996-12-20 2000-06-27 Nikon Corporation Optically readable radiation-displacement-conversion devices and methods, and image-rendering apparatus and methods employing same
US6091050A (en) * 1997-11-17 2000-07-18 Roxburgh Limited Thermal microplatform
US6198098B1 (en) * 1998-05-26 2001-03-06 Philips Laou Microstructure for infrared detector and method of making same
WO2000040938A1 (en) 1999-01-08 2000-07-13 Sarnoff Corporation Optical detectors using nulling for high linearity and large dynamic range
US6469301B1 (en) * 1999-05-14 2002-10-22 Nikon Corporation Radiation detectors including thermal-type displaceable element with increased responsiveness
US6621083B2 (en) * 2000-12-29 2003-09-16 Honeywell International Inc. High-absorption wide-band pixel for bolometer arrays

Also Published As

Publication number Publication date
DE60224880T2 (de) 2009-01-22
FR2826725A1 (fr) 2003-01-03
US7241998B2 (en) 2007-07-10
EP1399722A1 (de) 2004-03-24
EP1399722B1 (de) 2008-01-30
US20040232337A1 (en) 2004-11-25
WO2003002963A1 (fr) 2003-01-09
FR2826725B1 (fr) 2004-02-27
JP2004530909A (ja) 2004-10-07

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