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DE60119025T8 - Herstellungsverfahren für ein optisches Element - Google Patents

Herstellungsverfahren für ein optisches Element Download PDF

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Publication number
DE60119025T8
DE60119025T8 DE60119025T DE60119025T DE60119025T8 DE 60119025 T8 DE60119025 T8 DE 60119025T8 DE 60119025 T DE60119025 T DE 60119025T DE 60119025 T DE60119025 T DE 60119025T DE 60119025 T8 DE60119025 T8 DE 60119025T8
Authority
DE
Germany
Prior art keywords
image
partition walls
substrate
plasma
optical element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE60119025T
Other languages
English (en)
Other versions
DE60119025T2 (de
DE60119025D1 (de
Inventor
Takeshi Canon Kabushiki Kaisha Okada
Katsuhiko Canon Kabushiki Kaisha Takano
Junichi Canon Kabushiki Kaisha Sakamoto
Shoji Canon Kabushiki Kaisha Shiba
Kenichi Canon Kabushiki Kaisha Iwata
Hiroshi Canon Kabushiki Kaisha Taniuchi
Takehito Canon Kabushiki Kaisha Nishida
Yoshikatsu Canon Kabushiki Kaisha Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2000165584A external-priority patent/JP3854782B2/ja
Priority claimed from JP2000311411A external-priority patent/JP4677085B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE60119025D1 publication Critical patent/DE60119025D1/de
Publication of DE60119025T2 publication Critical patent/DE60119025T2/de
Application granted granted Critical
Publication of DE60119025T8 publication Critical patent/DE60119025T8/de
Active legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133512—Light shielding layers, e.g. black matrix

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Filters (AREA)
  • Electroluminescent Light Sources (AREA)
  • Glass Compositions (AREA)
  • Optical Integrated Circuits (AREA)
DE60119025T 2000-06-02 2001-05-31 Herstellungsverfahren für ein optisches Element Active DE60119025T8 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2000165584A JP3854782B2 (ja) 2000-06-02 2000-06-02 光学素子とその製造方法
JP2000165584 2000-06-02
JP2000311411 2000-10-12
JP2000311411A JP4677085B2 (ja) 2000-10-12 2000-10-12 光学素子の製造方法

Publications (3)

Publication Number Publication Date
DE60119025D1 DE60119025D1 (de) 2006-06-01
DE60119025T2 DE60119025T2 (de) 2006-12-07
DE60119025T8 true DE60119025T8 (de) 2007-04-12

Family

ID=26593204

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60119025T Active DE60119025T8 (de) 2000-06-02 2001-05-31 Herstellungsverfahren für ein optisches Element

Country Status (7)

Country Link
US (2) US6677243B2 (de)
EP (1) EP1160590B1 (de)
KR (1) KR100424030B1 (de)
CN (2) CN1205489C (de)
AT (1) ATE324603T1 (de)
DE (1) DE60119025T8 (de)
TW (1) TW514592B (de)

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Publication number Publication date
KR100424030B1 (ko) 2004-03-22
EP1160590A2 (de) 2001-12-05
CN1205489C (zh) 2005-06-08
ATE324603T1 (de) 2006-05-15
US20040058063A1 (en) 2004-03-25
CN1641447A (zh) 2005-07-20
DE60119025T2 (de) 2006-12-07
TW514592B (en) 2002-12-21
EP1160590B1 (de) 2006-04-26
KR20010110183A (ko) 2001-12-12
US20020014470A1 (en) 2002-02-07
DE60119025D1 (de) 2006-06-01
US7354520B2 (en) 2008-04-08
CN1336567A (zh) 2002-02-20
CN100406994C (zh) 2008-07-30
EP1160590A3 (de) 2004-06-09
US6677243B2 (en) 2004-01-13

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Inventor name: OKADA, TAKESHI, CANAN KABUSHIKI KAISHA, TOKYO, JP

Inventor name: TAKANO, KATSUHIKO, CANON KABUSHIKI KAISHA, TOKYO,

Inventor name: SAKAMOTO, JUNICHI, CANON KABUSHIKI KAISHA, TOKYO,

Inventor name: SHIBA, SHOJI, CANON KABUSHIKI KAISHA, TOKYO, JP

Inventor name: IWATA, KENICHI, CANON KABUSHIKI KAISHA, TOKYO, JP

Inventor name: TANIUCHI, HIROSHI, CANON KABUSHIKI KAISHA, TOKYO,

Inventor name: NISHIDA, TAKEHITO, CANON KABUSHIKI KAISHA, TOKYO,

Inventor name: OKADA, YOSHIKATSU, CANON KABUSHIKI KAISHA, TOKYO,

8381 Inventor (new situation)

Inventor name: OKADA, YOSHIKATSU, CANON KABUSHIKI KAISHA, TOK, JP

Inventor name: NISHIDA, TAKEHITO, CANON KABUSHIKI KAISHA, TOK, JP

Inventor name: TANIUCHI, HIROSHI, CANON KABUSHIKI KAISHA, TOK, JP

Inventor name: IWATA, KENICHI, CANON KABUSHIKI KAISHA, TOKYO, JP

Inventor name: SHIBA, SHOJI, CANON KABUSHIKI KAISHA, TOKYO, JP

Inventor name: SAKAMOTO, JUNICHI, CANON KABUSHIKI KAISHA, TOK, JP

Inventor name: TAKANO, KATSUHIKO, CANON KABUSHIKI KAISHA, TOK, JP

Inventor name: OKADA, TAKESHI, CANON KABUSHIKI KAISHA, TOKYO, JP

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