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DE60045708D1 - Bipolarer transistor - Google Patents

Bipolarer transistor

Info

Publication number
DE60045708D1
DE60045708D1 DE60045708T DE60045708T DE60045708D1 DE 60045708 D1 DE60045708 D1 DE 60045708D1 DE 60045708 T DE60045708 T DE 60045708T DE 60045708 T DE60045708 T DE 60045708T DE 60045708 D1 DE60045708 D1 DE 60045708D1
Authority
DE
Germany
Prior art keywords
bipolar transistor
layer
sic
semi
energy gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60045708T
Other languages
English (en)
Inventor
Lennart Kruse
Mietek Bakowski
Ulf Gustafsson
Bo Breitholtz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wolfspeed Inc
Original Assignee
Cree Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cree Inc filed Critical Cree Inc
Application granted granted Critical
Publication of DE60045708D1 publication Critical patent/DE60045708D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/177Base regions of bipolar transistors, e.g. BJTs or IGBTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D10/00Bipolar junction transistors [BJT]
    • H10D10/80Heterojunction BJTs
    • H10D10/821Vertical heterojunction BJTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D12/00Bipolar devices controlled by the field effect, e.g. insulated-gate bipolar transistors [IGBT]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/82Heterojunctions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
    • H10D62/832Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge being Group IV materials comprising two or more elements, e.g. SiGe
    • H10D62/8325Silicon carbide
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/85Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs
    • H10D62/8503Nitride Group III-V materials, e.g. AlN or GaN

Landscapes

  • Bipolar Transistors (AREA)
  • Amplifiers (AREA)
  • Electronic Switches (AREA)
DE60045708T 1999-04-21 2000-04-12 Bipolarer transistor Expired - Lifetime DE60045708D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9901410A SE9901410D0 (sv) 1999-04-21 1999-04-21 Abipolar transistor
PCT/SE2000/000698 WO2000065636A2 (en) 1999-04-21 2000-04-12 A bipolar transistor

Publications (1)

Publication Number Publication Date
DE60045708D1 true DE60045708D1 (de) 2011-04-21

Family

ID=20415286

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60045708T Expired - Lifetime DE60045708D1 (de) 1999-04-21 2000-04-12 Bipolarer transistor

Country Status (7)

Country Link
US (1) US6313488B1 (de)
EP (1) EP1186049B1 (de)
JP (1) JP4959872B2 (de)
AT (1) ATE501526T1 (de)
DE (1) DE60045708D1 (de)
SE (1) SE9901410D0 (de)
WO (1) WO2000065636A2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001332565A (ja) * 2000-05-25 2001-11-30 Nec Corp 負性微分抵抗素子およびその製造方法
US7132701B1 (en) * 2001-07-27 2006-11-07 Fairchild Semiconductor Corporation Contact method for thin silicon carbide epitaxial layer and semiconductor devices formed by those methods
US6870204B2 (en) * 2001-11-21 2005-03-22 Astralux, Inc. Heterojunction bipolar transistor containing at least one silicon carbide layer
JP2004200391A (ja) * 2002-12-18 2004-07-15 Hitachi Ltd 半導体装置
US7804106B2 (en) * 2003-01-06 2010-09-28 Nippon Telegraph And Telephone Corporation P-type nitride semiconductor structure and bipolar transistor
JP2004247545A (ja) * 2003-02-14 2004-09-02 Nissan Motor Co Ltd 半導体装置及びその製造方法
JP4777699B2 (ja) * 2005-06-13 2011-09-21 本田技研工業株式会社 バイポーラ型半導体装置およびその製造方法
US7868335B1 (en) * 2008-08-18 2011-01-11 Hrl Laboratories, Llc Modulation doped super-lattice sub-collector for high-performance HBTs and BJTs
US9742385B2 (en) 2013-06-24 2017-08-22 Ideal Power, Inc. Bidirectional semiconductor switch with passive turnoff
US9799731B2 (en) 2013-06-24 2017-10-24 Ideal Power, Inc. Multi-level inverters using sequenced drive of double-base bidirectional bipolar transistors
KR102234175B1 (ko) 2013-06-24 2021-04-01 아이디얼 파워 인크. 양방향 양극성 트랜지스터를 갖는 시스템, 회로, 디바이스 및 방법
US9236458B2 (en) * 2013-07-11 2016-01-12 Infineon Technologies Ag Bipolar transistor and a method for manufacturing a bipolar transistor
US9355853B2 (en) 2013-12-11 2016-05-31 Ideal Power Inc. Systems and methods for bidirectional device fabrication
US11637016B2 (en) 2013-12-11 2023-04-25 Ideal Power Inc. Systems and methods for bidirectional device fabrication
US9444449B2 (en) 2014-11-06 2016-09-13 Ideal Power Inc. Circuits, methods, and systems with optimized operation of double-base bipolar junction transistors
CN105977287B (zh) * 2016-07-25 2018-11-09 电子科技大学 一种碳化硅双极结型晶体管
CN111081543A (zh) * 2019-12-26 2020-04-28 深圳第三代半导体研究院 一种基于二维材料/氮化镓的双极型三极管及其制备方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4945394A (en) * 1987-10-26 1990-07-31 North Carolina State University Bipolar junction transistor on silicon carbide
US5319220A (en) * 1988-01-20 1994-06-07 Sharp Kabushiki Kaisha Silicon carbide semiconductor device
US4985742A (en) * 1989-07-07 1991-01-15 University Of Colorado Foundation, Inc. High temperature semiconductor devices having at least one gallium nitride layer
CA2092215A1 (en) 1992-03-24 1993-09-25 Shinichi Shikata Semiconductor device
JP3339508B2 (ja) * 1992-03-24 2002-10-28 住友電気工業株式会社 半導体装置
US5847414A (en) * 1995-10-30 1998-12-08 Abb Research Limited Semiconductor device having a hetero-junction between SiC and a Group 3B-nitride
US5641975A (en) 1995-11-09 1997-06-24 Northrop Grumman Corporation Aluminum gallium nitride based heterojunction bipolar transistor
US5910665A (en) * 1995-12-29 1999-06-08 Texas Instruments Incorporated Low capacitance power VFET method and device
SE9600199D0 (sv) * 1996-01-19 1996-01-19 Abb Research Ltd A semiconductor device with a low resistance ohmic contact between a metal layer and a SiC-layer
SE9601176D0 (sv) * 1996-03-27 1996-03-27 Abb Research Ltd A method for producing a semiconductor device having semiconductor layers of SiC by the use of an implanting step and a device produced thereby
US6011279A (en) * 1997-04-30 2000-01-04 Cree Research, Inc. Silicon carbide field controlled bipolar switch

Also Published As

Publication number Publication date
EP1186049A2 (de) 2002-03-13
EP1186049B1 (de) 2011-03-09
JP2002543585A (ja) 2002-12-17
WO2000065636A8 (en) 2001-07-12
JP4959872B2 (ja) 2012-06-27
WO2000065636A3 (en) 2001-01-25
SE9901410D0 (sv) 1999-04-21
US6313488B1 (en) 2001-11-06
ATE501526T1 (de) 2011-03-15
WO2000065636A2 (en) 2000-11-02

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