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DE60044782D1 - Elektrisch entkoppelter mikrogefertigter kreisel - Google Patents

Elektrisch entkoppelter mikrogefertigter kreisel

Info

Publication number
DE60044782D1
DE60044782D1 DE60044782T DE60044782T DE60044782D1 DE 60044782 D1 DE60044782 D1 DE 60044782D1 DE 60044782 T DE60044782 T DE 60044782T DE 60044782 T DE60044782 T DE 60044782T DE 60044782 D1 DE60044782 D1 DE 60044782D1
Authority
DE
Germany
Prior art keywords
gyroscope
micro
made circle
drive
sense
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60044782T
Other languages
English (en)
Inventor
Scott G Adams
James Groves
Donato Cardarelli
Raymond Carroll
Charles R Dauwalter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MILLISENSOR SYSTEMS AND ACTUAT
Kionix Inc
Original Assignee
MILLISENSOR SYSTEMS AND ACTUAT
Kionix Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MILLISENSOR SYSTEMS AND ACTUAT, Kionix Inc filed Critical MILLISENSOR SYSTEMS AND ACTUAT
Application granted granted Critical
Publication of DE60044782D1 publication Critical patent/DE60044782D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
  • Paints Or Removers (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Micromachines (AREA)
DE60044782T 1999-09-17 2000-09-13 Elektrisch entkoppelter mikrogefertigter kreisel Expired - Lifetime DE60044782D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15463199P 1999-09-17 1999-09-17
PCT/US2000/025029 WO2001020259A1 (en) 1999-09-17 2000-09-13 Electrically decoupled micromachined gyroscope

Publications (1)

Publication Number Publication Date
DE60044782D1 true DE60044782D1 (de) 2010-09-16

Family

ID=22552111

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60044782T Expired - Lifetime DE60044782D1 (de) 1999-09-17 2000-09-13 Elektrisch entkoppelter mikrogefertigter kreisel

Country Status (8)

Country Link
US (1) US6626039B1 (de)
EP (1) EP1212585B1 (de)
JP (1) JP2003509670A (de)
KR (1) KR20020085877A (de)
AT (1) ATE476638T1 (de)
AU (1) AU7130800A (de)
DE (1) DE60044782D1 (de)
WO (1) WO2001020259A1 (de)

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JP5630267B2 (ja) * 2008-12-09 2014-11-26 株式会社村田製作所 振動ジャイロ素子及びその製造方法
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US9097524B2 (en) 2009-09-11 2015-08-04 Invensense, Inc. MEMS device with improved spring system
US8534127B2 (en) 2009-09-11 2013-09-17 Invensense, Inc. Extension-mode angular velocity sensor
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KR101044453B1 (ko) * 2011-02-23 2011-06-27 주식회사 한서 용이한 체결 및 우수한 방열구조를 갖는 엘이디 천정 매입등
DE102011007168B4 (de) * 2011-04-11 2019-09-19 Hanking Electronics, Ltd. Mikro-elektro-mechanischer Sensor sowie Verfahren zur Justierung und zum Betrieb des Sensors
WO2013051060A1 (ja) * 2011-10-05 2013-04-11 パイオニア株式会社 回転振動ジャイロ
KR101303671B1 (ko) * 2012-03-28 2013-09-04 한국기초과학지원연구원 스핀 소자를 이용한 복조 장치
KR101331917B1 (ko) * 2012-11-22 2013-11-25 한국기초과학지원연구원 복조장치, 이를 이용한 복조 집적소자 및 변복조 집적소자
US9312814B2 (en) 2012-03-28 2016-04-12 Korea Basic Science Institute Demodulation device, and demodulation integrated device and modulation and demodulation integrated device using the same
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CN104296738B (zh) * 2014-10-31 2017-02-08 中国人民解放军国防科学技术大学 用于微机械陀螺的驱动稳定性提升方法及装置
EP3034997B1 (de) * 2014-12-18 2020-12-16 RISE Research Institutes of Sweden AB MEMS-Kreisel
US10371520B2 (en) 2014-12-18 2019-08-06 Rise Acreo Ab Quadrature compensation method for MEMS gyroscopes and a gyroscope sensor
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US10030976B2 (en) 2015-05-13 2018-07-24 Kionix, Inc. Phase-based measurement and control of a gyroscope
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Also Published As

Publication number Publication date
WO2001020259A1 (en) 2001-03-22
US6626039B1 (en) 2003-09-30
JP2003509670A (ja) 2003-03-11
EP1212585A1 (de) 2002-06-12
AU7130800A (en) 2001-04-17
ATE476638T1 (de) 2010-08-15
EP1212585B1 (de) 2010-08-04
KR20020085877A (ko) 2002-11-16

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