ATE174690T1 - Drehmessfühler - Google Patents

Drehmessfühler

Info

Publication number: ATE174690T1
Authority: AT; Austria
Prior art keywords: base; mounting; mounting members; mounting member; silicon chip
Prior art date: 1991-08-29

Application number

AT92920052T

Other languages

English (en)

Inventor

Lawrence A Wan

Original Assignee

Bei Electronics

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1991-08-29

Filing date

1992-08-26

Publication date

1999-01-15

1992-08-26 Application filed by Bei Electronics filed Critical Bei Electronics

1999-01-15 Application granted granted Critical

1999-01-15 Publication of ATE174690T1 publication Critical patent/ATE174690T1/de

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure

Landscapes

Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
General Physics & Mathematics (AREA)
Radar, Positioning & Navigation (AREA)
Remote Sensing (AREA)
Gyroscopes (AREA)
Pressure Sensors (AREA)
Magnetic Resonance Imaging Apparatus (AREA)
Surgical Instruments (AREA)
Analysing Materials By The Use Of Radiation (AREA)

AT92920052T 1991-08-29 1992-08-26 Drehmessfühler ATE174690T1 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US75128091A	1991-08-29	1991-08-29

Publications (1)

Publication Number	Publication Date
ATE174690T1 true ATE174690T1 (de)	1999-01-15

Family

ID=25021298

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AT92920052T ATE174690T1 (de)	1991-08-29	1992-08-26	Drehmessfühler

Country Status (8)

Country	Link
US (1)	US5284059A (de)
EP (1)	EP0601120B1 (de)
JP (1)	JP2502937B2 (de)
KR (1)	KR100269730B1 (de)
AT (1)	ATE174690T1 (de)
CA (1)	CA2116572C (de)
DE (1)	DE69227910T2 (de)
WO (1)	WO1993005400A1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5313835A (en) *	1991-12-19	1994-05-24	Motorola, Inc.	Integrated monolithic gyroscopes/accelerometers with logic circuits
US6282956B1 (en) *	1994-12-29	2001-09-04	Kazuhiro Okada	Multi-axial angular velocity sensor
US6467345B1 (en)	1993-10-18	2002-10-22	Xros, Inc.	Method of operating micromachined members coupled for relative rotation
US5488862A (en) *	1993-10-18	1996-02-06	Armand P. Neukermans	Monolithic silicon rate-gyro with integrated sensors
DE19528961C2 (de)	1995-08-08	1998-10-29	Daimler Benz Ag	Mikromechanischer Drehratensensor (DRS) und Sensoranordnung
FR2741151B1 (fr) *	1995-11-13	1998-01-30	Sfim Ind	Gyrometre a resonateur mecanique
FR2741150B1 (fr) *	1995-11-13	1998-01-30	Sfim Ind	Gyrometre a oscillateur mecanique
US6367326B1 (en)	1996-07-10	2002-04-09	Wacoh Corporation	Angular velocity sensor
DE69634571D1 (de) *	1996-07-10	2005-05-12	Wako Kk	Drehgeschwindigkeitssensor
JP3999377B2 (ja) *	1997-11-04	2007-10-31	日本碍子株式会社	振動子、振動型ジャイロスコープ、直線加速度計および回転角速度の測定方法
JP4348759B2 (ja) *	1998-12-15	2009-10-21	ミツミ電機株式会社	回転振動型ジャイロ
AU7130800A (en)	1999-09-17	2001-04-17	Kionix, Inc.	Electrically decoupled micromachined gyroscope
GB0001294D0 (en) *	2000-01-20	2000-03-08	British Aerospace	Multi-axis sensing device
US6654629B2 (en)	2002-01-23	2003-11-25	Valentino Montegrande	Implantable biomarker and method of use
US7091451B2 (en)	2003-06-20	2006-08-15	Northrop Grumman Corporation	Heating element induction of time-varying thermal gradient in elongated beam to cause one or more elongated beam oscillations
US20050094159A1 (en) *	2003-10-29	2005-05-05	Wen-Wei Su	Angle detecting sensor and vehicular controlling system using the same
US20050189479A1 (en) *	2004-02-26	2005-09-01	Wen-Wei Su	Detecting device for detecting the rotation of a motor rotor
EP1959234A1 (de) *	2007-02-13	2008-08-20	STMicroelectronics S.r.l.	Mikroelektromechanischer Gyroskop mit Ausgleich der nichtharmonischer Nebenwellen der kapazitiven Kopplung und der Steuermethode eines mikroelektromechanisches Gyroskops
DE102009012268B4 (de) *	2008-03-11	2020-12-24	Continental Teves Ag & Co. Ohg	Sensoreinrichtung zum Erfassen wenigstens einer Drehrate einer Drehbewegung
WO2012025778A1 (en) *	2010-08-24	2012-03-01	Aktiebolaget Skf (Publ)	A method and a system for determining the angular position of a rotary element, and a bearing including such a system
FI126070B (en) *	2014-01-28	2016-06-15	Murata Manufacturing Co	Improved ring gyroscope design and gyroscope
FI127042B (en) *	2015-09-09	2017-10-13	Murata Manufacturing Co	An electrode for a microelectromechanical device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2154250A (en)	1938-03-08	1939-04-11	Hunter Illuminated Car Sign Co	Supporting means for signs
US2514250A (en) *	1943-01-13	1950-07-04	Smith & Sons Ltd S	Device for detecting or measuring rate of turn
US3842681A (en)	1973-07-19	1974-10-22	Sperry Rand Corp	Angular rate sensor
US4538461A (en)	1984-01-23	1985-09-03	Piezoelectric Technology Investors, Inc.	Vibratory angular rate sensing system
JPH02129513A (ja) *	1988-11-09	1990-05-17	Aisin Seiki Co Ltd	二軸回転検出装置

1992
- 1992-08-26 AT AT92920052T patent/ATE174690T1/de active
- 1992-08-26 DE DE69227910T patent/DE69227910T2/de not_active Expired - Fee Related
- 1992-08-26 KR KR1019940700595A patent/KR100269730B1/ko not_active Expired - Fee Related
- 1992-08-26 CA CA002116572A patent/CA2116572C/en not_active Expired - Fee Related
- 1992-08-26 EP EP92920052A patent/EP0601120B1/de not_active Expired - Lifetime
- 1992-08-26 WO PCT/US1992/007229 patent/WO1993005400A1/en active IP Right Grant
- 1992-08-26 JP JP5505273A patent/JP2502937B2/ja not_active Expired - Fee Related
1993
- 1993-06-02 US US08/071,866 patent/US5284059A/en not_active Expired - Fee Related

Also Published As

Publication number	Publication date
JP2502937B2 (ja)	1996-05-29
WO1993005400A1 (en)	1993-03-18
EP0601120B1 (de)	1998-12-16
CA2116572C (en)	1998-06-16
CA2116572A1 (en)	1993-03-18
EP0601120A4 (en)	1997-03-05
DE69227910T2 (de)	1999-05-12
KR100269730B1 (ko)	2000-10-16
JPH06510604A (ja)	1994-11-24
DE69227910D1 (de)	1999-01-28
EP0601120A1 (de)	1994-06-15
US5284059A (en)	1994-02-08
KR940702269A (ko)	1994-07-28

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