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DE59508237D1 - Positionsmessvorrichtung - Google Patents

Positionsmessvorrichtung

Info

Publication number
DE59508237D1
DE59508237D1 DE59508237T DE59508237T DE59508237D1 DE 59508237 D1 DE59508237 D1 DE 59508237D1 DE 59508237 T DE59508237 T DE 59508237T DE 59508237 T DE59508237 T DE 59508237T DE 59508237 D1 DE59508237 D1 DE 59508237D1
Authority
DE
Germany
Prior art keywords
measuring device
position measuring
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59508237T
Other languages
English (en)
Inventor
Dr Holzapfel
Walter Huber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Application granted granted Critical
Publication of DE59508237D1 publication Critical patent/DE59508237D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G02B5/1871—Transmissive phase gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE59508237T 1994-02-23 1995-02-20 Positionsmessvorrichtung Expired - Lifetime DE59508237D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4405843 1994-02-23
DE4431899A DE4431899A1 (de) 1994-02-23 1994-09-07 Meßvorrichtung

Publications (1)

Publication Number Publication Date
DE59508237D1 true DE59508237D1 (de) 2000-06-08

Family

ID=6511006

Family Applications (3)

Application Number Title Priority Date Filing Date
DE4431899A Withdrawn DE4431899A1 (de) 1994-02-23 1994-09-07 Meßvorrichtung
DE59508237T Expired - Lifetime DE59508237D1 (de) 1994-02-23 1995-02-20 Positionsmessvorrichtung
DE59507626T Expired - Lifetime DE59507626D1 (de) 1994-02-23 1995-02-20 Vorrichtung zum Erzeugen von positionsabhängigen Signalen

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE4431899A Withdrawn DE4431899A1 (de) 1994-02-23 1994-09-07 Meßvorrichtung

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE59507626T Expired - Lifetime DE59507626D1 (de) 1994-02-23 1995-02-20 Vorrichtung zum Erzeugen von positionsabhängigen Signalen

Country Status (1)

Country Link
DE (3) DE4431899A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19521295C2 (de) * 1995-06-10 2000-07-13 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmeßeinrichtung
DE19748802B4 (de) * 1996-11-20 2010-09-09 Dr. Johannes Heidenhain Gmbh Optische Positionsmeßeinrichtung

Also Published As

Publication number Publication date
DE4431899A1 (de) 1995-08-24
DE59507626D1 (de) 2000-02-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition